JP4961168B2 - Processing equipment - Google Patents

Processing equipment Download PDF

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JP4961168B2
JP4961168B2 JP2006164494A JP2006164494A JP4961168B2 JP 4961168 B2 JP4961168 B2 JP 4961168B2 JP 2006164494 A JP2006164494 A JP 2006164494A JP 2006164494 A JP2006164494 A JP 2006164494A JP 4961168 B2 JP4961168 B2 JP 4961168B2
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cover
skeleton
engaged portion
resin
engaging claw
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JP2007331050A (en
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一馬 関家
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Disco Corp
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Disco Corp
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本発明は、輸送時の損傷を防止する加工装置に関するものである。   The present invention relates to a processing apparatus for preventing damage during transportation.

各種の加工を行う加工装置には、装置の外形を形作る骨格があり、また、骨格の内部に設けられた駆動部、制御部等を保護したり、装置の外観性を確保したりするために、骨格の外側には、カバーが装着されている（例えば特許文献１参照）。そして、骨格とカバーとは、金属部品によって強固に固定される構成となっている。   A processing device that performs various types of processing has a skeleton that forms the outer shape of the device. In addition, to protect the drive unit and control unit provided inside the skeleton, and to ensure the appearance of the device A cover is attached to the outside of the skeleton (see, for example, Patent Document 1). The skeleton and the cover are firmly fixed by metal parts.

特開平１０−１１６８０２号公報JP-A-10-116802

しかし、加工装置をトラック等で輸送する際には、振動によって金属部品がカバーや骨格に衝突して損傷したり塗装がはげたりするおそれがあるため、現状の輸送時においては、加工装置からカバーを取り外し、クッション材等で個々のカバーの梱包を行っている。したがって、梱包を行う送り側、開梱を行う受け入れ側の両方において手間がかかるという問題がある。また、搬送すべき部品の点数が増えることから、トラック等の荷台を有効に活用できなくなるという問題もある。   However, when transporting the processing equipment on a truck, etc., the metal parts may collide with the cover or the skeleton due to vibration, which may cause damage or peeling of the paint. And the individual covers are packed with cushioning materials. Therefore, there is a problem that both the sending side for packing and the receiving side for unpacking take time. In addition, since the number of parts to be transported increases, there is also a problem that it is impossible to effectively use a loading platform such as a truck.

そこで、本発明が解決しようとする課題は、骨格とカバーとを有する加工装置を輸送する場合において、カバーと骨格とを分けずに、これらを損傷させることなく輸送できるようにすることにある。   Therefore, a problem to be solved by the present invention is to enable transportation of a processing apparatus having a skeleton and a cover without damaging them without separating the cover and the skeleton.

本発明は、外形を形作る基礎となる骨格がカバーによって覆われて構成される加工装置に関するもので、骨格には、カバーが係合する被係合部が形成され、カバーは、カバー本体と、カバー本体に形成され被係合部に係合する係合爪とを備え、被係合部または係合爪の少なくとも一方が樹脂で形成され、骨格には、カバーの係合爪を起点とする動きを規制する規制部が設けられ、規制部が磁性樹脂で形成されることを特徴とする。 The present invention relates to a processing apparatus configured by covering a skeleton serving as a basis for forming an outer shape with a cover, and the skeleton is formed with an engaged portion with which the cover is engaged. An engaging claw that is formed on the cover main body and engages with the engaged portion. At least one of the engaged portion or the engaging claw is formed of resin, and the skeleton starts with the engaging claw of the cover. A restriction part for restricting movement is provided, and the restriction part is formed of a magnetic resin .

被係合部または係合爪を構成する樹脂は、導電性を有するタイプのものであることが望ましい。   It is desirable that the resin constituting the engaged portion or the engaging claw be of a conductive type.

本発明では、骨格に形成される被係合部またはカバー本体に形成される係合爪の少なくとも一方を樹脂で形成したことにより、輸送時の振動を樹脂が吸収するため、骨格またはカバーが損傷するのを防止することができる。   In the present invention, since at least one of the engaged portion formed on the skeleton or the engaging claw formed on the cover main body is made of resin, the resin absorbs vibration during transportation, so that the skeleton or the cover is damaged. Can be prevented.

また、カバーの係合爪を起点する動きを規制する規制部が骨格に設けられ、規制部が磁性樹脂で形成されているため、カバーの損傷をより確実に防止することができる。In addition, since the restricting portion that restricts the movement of the cover starting from the engaging claw is provided on the skeleton and the restricting portion is formed of a magnetic resin, damage to the cover can be prevented more reliably.

被係合部または係合爪に導電性の樹脂を使用すると、骨格との間での導通性が良好となり、確実にアースを確保することができ、カバーの帯電を防止することができる。When a conductive resin is used for the engaged portion or the engaging claw, the electrical conductivity between the frame and the skeleton is improved, the grounding can be reliably ensured, and charging of the cover can be prevented.

図１に示す加工装置１は、半導体ウェーハ等の被加工物を切削して個片化する装置であり、その外形の基礎を形作る骨格９の内部には、被加工物の切削の際に駆動される駆動系や駆動系の制御を行う制御系を有している。具体的には、被加工物を保持するチャックテーブル２と、チャックテーブル２をＸ軸方向に駆動するチャックテーブル駆動部３と、高速回転可能な切削ブレード４０を有してＹ軸方向及びＺ軸方向に移動可能な第一の切削手段４ａ及び第二の切削手段４ｂと、第一の切削手段４ａをＹ軸方向に駆動する第一の切削駆動部５ａと、第二の切削手段４ｂをＹ軸方向に駆動する第二の切削駆動部５ｂと、第一の切削手段４ａをＺ軸方向に駆動する第一の切り込み駆動部６ａと、第二の切削手段４ｂをＺ軸方向に駆動する第二の切り込み駆動部６ｂと、被加工物が収容されるカセット７と、カセット７をＺ軸方向に駆動するカセット駆動部８等を備えている。   A processing apparatus 1 shown in FIG. 1 is an apparatus that cuts a workpiece such as a semiconductor wafer into pieces, and is driven when cutting the workpiece inside a skeleton 9 that forms the basis of the outer shape. And a control system for controlling the drive system. Specifically, the chuck table 2 that holds the workpiece, the chuck table driving unit 3 that drives the chuck table 2 in the X-axis direction, and the cutting blade 40 that can be rotated at high speed have a Y-axis direction and a Z-axis direction. First cutting means 4a and second cutting means 4b movable in the direction, first cutting drive unit 5a for driving the first cutting means 4a in the Y-axis direction, and second cutting means 4b for Y A second cutting drive unit 5b that drives in the axial direction, a first cutting drive unit 6a that drives the first cutting means 4a in the Z-axis direction, and a second drive unit that drives the second cutting means 4b in the Z-axis direction. A second notch driving unit 6b, a cassette 7 in which a workpiece is accommodated, a cassette driving unit 8 for driving the cassette 7 in the Z-axis direction, and the like are provided.

図２に示すように、図１に示した加工装置において、骨格９の周囲には、例えば金属で形成された固定式のカバー１０、開閉式のカバー１１等が取り付けられる。また、表示装置１２や操作パネル１３等も取り付けられている。   As shown in FIG. 2, in the processing apparatus shown in FIG. 1, around the skeleton 9, for example, a fixed cover 10 made of metal, an openable cover 11, and the like are attached. A display device 12 and an operation panel 13 are also attached.

図３に示すように、骨格９には、樹脂で形成されたくの字型の被係合部１４が固定されていると共に、磁性樹脂で形成された規制部１５も固定されている。一方、カバー１０は、図４に示すように、カバー本体１６と、その内側に固定された金属製でくの字型の係合爪１７とを備えている。また、カバー本体１６には、図３に示す取り外し用のレバー１８も形成されている。係合爪１７は、被係合部１４にかみ合う形状に形成されており、係合爪１７を被係合部１４に係合させることにより、カバー１０を骨格９に固定することができる。   As shown in FIG. 3, a frame-shaped engaged portion 14 made of resin is fixed to the skeleton 9, and a restriction portion 15 made of magnetic resin is also fixed. On the other hand, as shown in FIG. 4, the cover 10 includes a cover main body 16 and a metal bar-shaped engagement claw 17 fixed to the inside thereof. The cover body 16 is also formed with a detaching lever 18 shown in FIG. The engaging claw 17 is formed in a shape that meshes with the engaged portion 14, and the cover 10 can be fixed to the skeleton 9 by engaging the engaging claw 17 with the engaged portion 14.

被係合部１４は、金属より柔軟性のある樹脂によって形成されている。したがって、被係合部１４に係合爪１７を係合させることによりカバー１０を骨格９に固定して輸送した場合において、装置全体に振動が加わっても、被係合部１４が振動を吸収することができるため、骨格９やカバー１０が損傷することがない。   The engaged portion 14 is made of a resin that is more flexible than metal. Therefore, when the cover 10 is fixed to the skeleton 9 by carrying the engagement claw 17 with the engaged portion 14 and transported, the engaged portion 14 absorbs vibration even if vibration is applied to the entire apparatus. Therefore, the skeleton 9 and the cover 10 are not damaged.

また、図４に示すように、骨格９において被係合部１４の上方に位置する規制部１５は、係合爪１７を起点とするカバー１０のバタツキ等の動きを防止する役割を果たす。特に、規制部１５が磁性樹脂で形成されていると、金属製のカバー１０を磁力によって固定することができると共に、樹脂の柔軟性によりカバー１０が傷付くのを防止することもできる。   As shown in FIG. 4, the restricting portion 15 positioned above the engaged portion 14 in the skeleton 9 plays a role of preventing movement of the cover 10 such as flickering with the engaging claw 17 as a starting point. In particular, when the restricting portion 15 is formed of a magnetic resin, the metal cover 10 can be fixed by a magnetic force, and the cover 10 can be prevented from being damaged by the flexibility of the resin.

更に、被係合部１４に導電性の樹脂を用いると、骨格８とカバー９とが被係合部１４を介して導通するため、アースを確実に確保することができ、カバー９が帯電するのを防止することができる。   Further, when a conductive resin is used for the engaged portion 14, the skeleton 8 and the cover 9 are conducted through the engaged portion 14, so that the ground can be reliably ensured and the cover 9 is charged. Can be prevented.

なお、上記の例では、被係合部１４が樹脂で形成されている例について説明したが、係合爪１７が樹脂で形成されていてもよく、この場合は、必ずしも被係合部１４が樹脂で形成されている必要はない。   In the above example, the engaged portion 14 is formed of resin. However, the engaging claw 17 may be formed of resin, and in this case, the engaged portion 14 is not necessarily formed. It is not necessary to be formed with resin.

加工装置の内部構造の一例を示す斜視図である。It is a perspective view which shows an example of the internal structure of a processing apparatus. 加工装置の外観の一例を示す斜視図である。It is a perspective view which shows an example of the external appearance of a processing apparatus. 加工装置を構成する骨格及びカバーを示す分解斜視図である。It is a disassembled perspective view which shows the frame | skeleton and cover which comprise a processing apparatus. 骨格及びカバーを略示的に示す断面図である。It is sectional drawing which shows a frame | skeleton and a cover schematically.

符号の説明Explanation of symbols

１：加工装置
２：チャックテーブル ３：チャックテーブル駆動部
４ａ：第一の切削手段 ４ｂ：第二の切削手段
５ａ：第一の切削駆動部 ５ｂ：第二の切削駆動部
６ａ：第一の切り込み駆動部 ６ｂ：第二の切り込み駆動部
７：カセット ８：カセット駆動部 ９：骨格 １０、１１：カバー
１２：表示装置 １３：操作パネル
１４：被係合部 １５：規制部 １６：カバー本体 １７：係合爪 １８：レバー 1: Processing device 2: Chuck table 3: Chuck table driving unit 4a: First cutting means 4b: Second cutting means 5a: First cutting driving unit 5b: Second cutting driving unit 6a: First cutting Drive unit 6b: second notch drive unit 7: cassette 8: cassette drive unit 9: skeleton 10, 11: cover 12: display device 13: operation panel 14: engaged portion 15: restricting unit 16: cover main body 17: Engaging claw 18: Lever

Claims (2)

外形を形作る基礎となる骨格がカバーによって覆われて構成される加工装置であって、
該骨格には、該カバーが係合する被係合部が形成され、
該カバーは、カバー本体と、該カバー本体に形成され該被係合部に係合する係合爪とを備え、
該被係合部または該係合爪の少なくとも一方が樹脂で形成され、
該骨格には、該係合爪を起点とする該カバーの動きを規制する規制部が設けられ、該規制部は磁性樹脂で形成される加工装置。 A processing device in which a basic skeleton that forms an outer shape is covered with a cover,
The skeleton is formed with an engaged portion with which the cover is engaged,
The cover includes a cover main body and an engaging claw that is formed on the cover main body and engages with the engaged portion;
At least one of the engaged portion or the engaging claw is formed of resin ,
A processing device in which the restricting portion for restricting the movement of the cover starting from the engaging claw is provided on the skeleton, and the restricting portion is formed of a magnetic resin . 前記樹脂は導電性を有する請求項１に記載の加工装置。   The processing apparatus according to claim 1, wherein the resin has conductivity.
JP2006164494A 2006-06-14 2006-06-14 Processing equipment Active JP4961168B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5467879B2 (en) * 2010-01-22 2014-04-09 株式会社ディスコ Exterior cover mounting structure
JP2011189468A (en) * 2010-03-16 2011-09-29 Disco Corp Flapping preventive mechanism
JP5410361B2 (en) * 2010-04-22 2014-02-05 株式会社ディスコ Lock member
JP2014151408A (en) * 2013-02-12 2014-08-25 Disco Abrasive Syst Ltd Processing device
JP2015036182A (en) 2013-08-16 2015-02-23 ファナック株式会社 Machine tool with protective cover
JP6695625B2 (en) 2016-02-23 2020-05-20 株式会社ディスコ Equipment with maintenance area

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* Cited by examiner, † Cited by third party
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JPS6199427A (en) * 1984-10-19 1986-05-17 Nec Corp Tone detector of mobile radio repeater station
JP3779001B2 (en) * 1996-09-19 2006-05-24 株式会社 神崎高級工機製作所 Tractor front cover attachment / detachment structure
JP2000190161A (en) * 1998-12-28 2000-07-11 Mori Seiki Co Ltd Cover of machine tool
JP3908706B2 (en) * 2003-09-05 2007-04-25 アルプス電気株式会社 Manufacturing method of magnetic head device

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