JP2017108048A - Efem - Google Patents
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- JP2017108048A JP2017108048A JP2015242036A JP2015242036A JP2017108048A JP 2017108048 A JP2017108048 A JP 2017108048A JP 2015242036 A JP2015242036 A JP 2015242036A JP 2015242036 A JP2015242036 A JP 2015242036A JP 2017108048 A JP2017108048 A JP 2017108048A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02046—Dry cleaning only
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67353—Closed carriers specially adapted for a single substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
処理室に搬送されるウエハが通過するウエハ搬送室を有するウエハ搬送部と、
前記ウエハを収容する容器に形成された主開口を前記ウエハ搬送室に気密に接続するロードポート部と、を有するEFEMであって、
前記ウエハ搬送部は、前記ウエハ搬送室に下降気流を形成する下降気流形成手段と、前記ウエハ搬送室に設けられており、前記下降気流の一部が前記ウエハ搬送室に接続された前記容器に、前記主開口を介して流入するように誘導する整流板と、を有しており、
前記ロードポート部は、前記容器を載置する載置台と、前記容器の底面のうち底面中央に比べて前記主開口から離間する位置に形成された底孔に連通可能なボトムノズルと、前記ボトムノズルを介して前記容器の内部の気体を前記容器の外部へ排出可能な気体排出流路と、を有することを特徴とする。
前記気体排出流路は、前記循環流路に接続されていてもよい。
また、例えば、前記容器内ノズルは、上下方向に断続的又は連続的に形成されている前記流路開口で構成される開口列を、複数有していてもよい。
図1に示すように、本発明の一実施形態に係るEFEM50は、半導体処理装置のフロントエンドモジュールであり、ロードポート部10と、ウエハ搬送部51とを有する。EFEM50のウエハ搬送室52は、ウエハ1を搬送する容器としてのフープ(FOUP)2と処理室(不図示)とを連結する空間であり、ウエハ搬送室52内に配置された搬送ロボット54は、フープ2内のウエハ1を、処理室に搬送する。したがって、処理室において所定の処理がなされるウエハ1は、フープ2内から、ウエハ搬送室52を通過して、処理室に搬送される。
2… フープ
2f… 底面
4… 蓋
5… 第1の底孔
6… 第2の底孔
10、100…ロードポート部
11…壁部材
14…載置台
17…フロントガス導入部
17a…放出ノズル
18…開閉部
18a…ドア
20…気体排出部
21…第1のボトムノズル
22…第1配管部
24…強制排出手段
30…ボトムガス導入部
31…第2のボトムノズル
32…第2配管部
55…整流板
50、150…EFEM
51、151…ウエハ搬送部
52、152…ウエハ搬送室
57…循環流路
59…搬送室ファン
80…下降気流
C…底面中央
Claims (9)
- 処理室に搬送されるウエハが通過するウエハ搬送室を有するウエハ搬送部と、
前記ウエハを収容する容器に形成された主開口を前記ウエハ搬送室に気密に接続するロードポート部と、を有するEFEMであって、
前記ウエハ搬送部は、前記ウエハ搬送室に下降気流を形成する下降気流形成手段と、前記ウエハ搬送室に設けられており、前記下降気流の一部が前記ウエハ搬送室に接続された前記容器に、前記主開口を介して流入するように導く整流板と、を有しており、
前記ロードポート部は、前記容器を載置する載置台と、前記容器の底面のうち底面中央に比べて前記主開口から離間する位置に形成された底孔に連通可能なボトムノズルと、前記ボトムノズルを介して前記容器の内部の気体を前記容器の外部へ排出可能な気体排出流路と、を有することを特徴とするEFEM。 - 前記ロードポート部は、前記気体排出流路に設けられ、前記容器の内部の気体を強制的に排出する強制排出手段を有することを特徴とする請求項1に記載のEFEM。
- 前記ウエハ搬送部は、前記ウエハ搬送室内の気体が、前記ウエハ搬送室を迂回して上昇し、再度前記下降気流を形成するための循環流路と、前記ウエハ搬送室と前記循環流路を循環する気体を清浄化する循環気体清浄化手段と、を有することを特徴とする請求項1又は請求項2に記載のEFEM。
- 前記ウエハ搬送室に設けられており、前記ウエハ搬送室から前記主開口へ向って気体を放出する気体放出手段をさらに有することを特徴とする請求項1から請求項3までのいずれかに記載のEFEM。
- 前記気体排出流路は、前記ウエハ搬送室に接続していることを特徴とする請求項1から請求項4までのいずれかに記載のEFEM。
- 前記ロードポート部は、前記気体排出流路を流れる気体を清浄化する排出気体清浄化手段を備えていることを特徴とする請求項1から請求項5までのいずれかに記載のEFEM。
- 前記ウエハ搬送部は、前記ウエハ搬送室内の気体が、前記ウエハ搬送室を迂回して上昇し、再度前記下降気流を形成するための循環流路を有しており、
前記気体排出流路は、前記循環流路に接続されていることを特徴とする請求項1から請求項6までのいずれかに記載のEFEM。 - 前記容器内部に直立しており、前記底孔を介して前記ボトムノズルに連通する容器内流路が内部に形成されており、前記容器内流路に通じる流路開口が上下方向に断続的又は連続的に形成されている容器内ノズルを、さらに備えることを特徴とする請求項1から請求項7までのいずれかに記載のEFEM。
- 前記容器内ノズルは、上下方向に断続的又は連続的に形成されている前記流路開口で構成される開口列を、複数有することを特徴とする請求項8に記載のEFEM。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015242036A JP6679906B2 (ja) | 2015-12-11 | 2015-12-11 | Efem |
US15/372,756 US10304702B2 (en) | 2015-12-11 | 2016-12-08 | Efem |
CN201611129317.0A CN106876309B (zh) | 2015-12-11 | 2016-12-09 | 设备前端模块 |
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JP2015242036A JP6679906B2 (ja) | 2015-12-11 | 2015-12-11 | Efem |
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JP2017108048A true JP2017108048A (ja) | 2017-06-15 |
JP6679906B2 JP6679906B2 (ja) | 2020-04-15 |
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JP2015242036A Active JP6679906B2 (ja) | 2015-12-11 | 2015-12-11 | Efem |
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JP (1) | JP6679906B2 (ja) |
CN (1) | CN106876309B (ja) |
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WO2019059531A1 (ko) * | 2017-09-20 | 2019-03-28 | 김성래 | 반도체 제조 장치 |
KR20190122161A (ko) | 2018-04-19 | 2019-10-29 | 신포니아 테크놀로지 가부시끼가이샤 | 배기 노즐 유닛, 로드 포트 및 efem |
WO2022187534A1 (en) * | 2021-03-04 | 2022-09-09 | Applied Materials, Inc. | Shortened load port for factory interface |
WO2023059736A1 (en) * | 2021-10-06 | 2023-04-13 | Applied Materials, Inc. | Equipment front end modules with induced gas mixing, and methods of use thereof |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
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US10388547B2 (en) * | 2017-06-23 | 2019-08-20 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for processing substrates |
KR102007803B1 (ko) * | 2017-07-10 | 2019-08-06 | 우범제 | 이에프이엠 |
WO2019013506A1 (ko) * | 2017-07-10 | 2019-01-17 | 우범제 | 이에프이엠 및 이에프이엠 시스템 |
JP7137047B2 (ja) * | 2018-03-15 | 2022-09-14 | シンフォニアテクノロジー株式会社 | Efem、及び、efemにおけるガス置換方法 |
JP7140960B2 (ja) * | 2018-03-15 | 2022-09-22 | シンフォニアテクノロジー株式会社 | Efem |
JP6963179B2 (ja) * | 2018-03-15 | 2021-11-05 | シンフォニアテクノロジー株式会社 | Efem |
JP7206678B2 (ja) * | 2018-07-30 | 2023-01-18 | Tdk株式会社 | ロードポート装置、半導体製造装置及びポッド内雰囲気の制御方法 |
US11194259B2 (en) * | 2018-08-30 | 2021-12-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Equipment module with enhanced protection from airborne contaminants, and method of operation |
US11373891B2 (en) | 2018-10-26 | 2022-06-28 | Applied Materials, Inc. | Front-ducted equipment front end modules, side storage pods, and methods of operating the same |
US11244844B2 (en) * | 2018-10-26 | 2022-02-08 | Applied Materials, Inc. | High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods |
US11610794B2 (en) * | 2018-10-26 | 2023-03-21 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for operating the same |
US11189511B2 (en) | 2018-10-26 | 2021-11-30 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for operating EFEMs |
TWI706525B (zh) * | 2019-08-22 | 2020-10-01 | 南韓商責市特馬股份有限公司 | 裝載埠模組的前開式晶圓傳送盒的降低濕度裝置及具備其的半導體製程裝置 |
CN110556322B (zh) * | 2019-09-16 | 2022-02-15 | 中电九天智能科技有限公司 | 一种激光剥离前玻璃自动风干系统及方法 |
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- 2015-12-11 JP JP2015242036A patent/JP6679906B2/ja active Active
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2016
- 2016-12-08 US US15/372,756 patent/US10304702B2/en active Active
- 2016-12-09 CN CN201611129317.0A patent/CN106876309B/zh active Active
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JP2003092345A (ja) * | 2001-07-13 | 2003-03-28 | Semiconductor Leading Edge Technologies Inc | 基板収納容器、基板搬送システム、保管装置及びガス置換方法 |
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US20170170042A1 (en) | 2017-06-15 |
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US10304702B2 (en) | 2019-05-28 |
CN106876309B (zh) | 2020-12-01 |
JP6679906B2 (ja) | 2020-04-15 |
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