JP2017103345A5 - - Google Patents

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Publication number
JP2017103345A5
JP2017103345A5 JP2015235358A JP2015235358A JP2017103345A5 JP 2017103345 A5 JP2017103345 A5 JP 2017103345A5 JP 2015235358 A JP2015235358 A JP 2015235358A JP 2015235358 A JP2015235358 A JP 2015235358A JP 2017103345 A5 JP2017103345 A5 JP 2017103345A5
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JP
Japan
Prior art keywords
film
plasma processing
processing method
gas
deposited film
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JP2015235358A
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English (en)
Japanese (ja)
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JP2017103345A (ja
JP6557585B2 (ja
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Publication of JP2017103345A5 publication Critical patent/JP2017103345A5/ja
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JP2015235358A 2015-12-02 2015-12-02 プラズマ処理方法 Active JP6557585B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015235358A JP6557585B2 (ja) 2015-12-02 2015-12-02 プラズマ処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015235358A JP6557585B2 (ja) 2015-12-02 2015-12-02 プラズマ処理方法

Publications (3)

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JP2017103345A JP2017103345A (ja) 2017-06-08
JP2017103345A5 true JP2017103345A5 (https=) 2018-06-21
JP6557585B2 JP6557585B2 (ja) 2019-08-07

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JP2015235358A Active JP6557585B2 (ja) 2015-12-02 2015-12-02 プラズマ処理方法

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JP (1) JP6557585B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6799550B2 (ja) * 2018-01-16 2020-12-16 東京エレクトロン株式会社 プラズマ処理装置の部品をクリーニングする方法
JP6799549B2 (ja) * 2018-01-16 2020-12-16 東京エレクトロン株式会社 プラズマ処理装置の部品をクリーニングする方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100198678B1 (ko) * 1996-02-28 1999-06-15 구본준 금속 배선 구조 및 형성방법
JP2009158504A (ja) * 2007-12-25 2009-07-16 Panasonic Corp 半導体製造装置および半導体装置の製造方法
JP4792097B2 (ja) * 2009-03-25 2011-10-12 株式会社東芝 不揮発性記憶装置及びその製造方法
JP2013214584A (ja) * 2012-04-02 2013-10-17 Hitachi High-Technologies Corp プラズマ処理装置及びプラズマ処理方法
WO2014042192A1 (ja) * 2012-09-13 2014-03-20 東京エレクトロン株式会社 被処理基体を処理する方法、及びプラズマ処理装置
CN104766890B (zh) * 2014-01-06 2018-04-27 上海和辉光电有限公司 薄膜晶体管及其制造方法和应用

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