JP2017102078A - Visual inspection device and visual inspection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a visual inspection device capable of preventing such a situation in which abnormality of a principal plane of an electronic device cannot be easily detected due to halation, and capable of performing by one camera, visual inspection of the principal plane and a side surface, without changing a focus or changing a physical relationship of respective optical systems after a physical relationship of respective mirrors is adjusted.SOLUTION: A visual inspection device 100 performs visual inspection by switching visual inspection of a principal plane and visual inspection of a side surface, and comprises: a diffusion ring illumination device 110; a low angle illumination device 120; a first mirror 130; a second mirror 140; a half mirror 150; a camera 160; a filter 170 having a prescribed refraction index; and a mirror interval adjustment mechanism 180 for adjusting at least one of an interval between the first mirror 130 and the half mirror 150 and an interval between the second mirror 140 and the half mirror 150.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an appearance inspection apparatus and an appearance inspection method.

  Conventionally, one main surface (back surface) of an electronic device is imaged with a camera to detect an abnormality on the back surface of the electronic device, and one side surface of the electronic device is imaged with a camera. There is known an appearance inspection apparatus that can perform switching between a side appearance inspection for detecting an abnormality (see, for example, Patent Document 1).

  As shown in FIG. 5, the conventional appearance inspection apparatus 700 is arranged on one side and the other side of the electronic device A (disposed at positions facing each other across the electronic device A). Mirrors 742 and 740 and a camera 760 located on the back side of the electronic device A are provided. In the conventional appearance inspection apparatus 700, the positional relationship of the optical system parts is set so that the optical path length in the back surface appearance inspection and the optical path length in the side surface appearance inspection are the same.

  In the conventional appearance inspection apparatus 700, the electronic device A is disposed above the height positions of the two left and right mirrors 742 and 740, and light from the back surface of the electronic device A is directly guided to the camera 760, thereby back surface inspection. (See FIG. 5A). Thereafter, the electronic device A is lowered to a position intermediate between the two mirrors 742 and 740 on the left and right sides, and light from the side surface of the electronic device A is guided to the camera 760 via one of the two mirrors 742 and 740 on the left and right sides. An appearance inspection is performed (see FIG. 5B).

  According to the conventional appearance inspection apparatus 700, the back surface appearance inspection for detecting the abnormality of the back surface of the electronic device A and the side surface appearance inspection for detecting the abnormality of the side surface of the electronic device A can be switched. In addition, it is not necessary to separately prepare a camera for back surface appearance inspection and a camera for side surface appearance inspection, and the equipment does not become large.

  In addition, conventionally, a first illumination device that irradiates light at a predetermined elevation angle on one main surface of an electronic device, and an illumination angle that is smaller than the elevation angle of the first illumination device on one principal surface of the electronic device. A visual inspection apparatus (another conventional visual inspection apparatus 800) including a second lighting device is also known (see, for example, Patent Document 2).

  As shown in FIG. 6, another conventional appearance inspection apparatus 800 includes a first illumination device 810 that irradiates light at a predetermined elevation angle on one main surface of the electronic device A, and a first surface on the main surface of the electronic device A. The second illumination device 820 that emits light at an elevation angle smaller than the elevation angle of the first illumination device 810, the half mirror 850 that guides the light from the first illumination device 810 to the camera 860, and the position of the electronic device A And a camera 860 positioned behind the half mirror 850.

  According to another conventional visual inspection apparatus 800, the first illumination device 810 that irradiates light on one main surface of the electronic device A at a predetermined elevation angle, and the first illumination on one main surface of the electronic device A. Since the second illumination device 820 that emits light at an elevation angle smaller than the elevation angle of the device 810 is provided, light is emitted from a different angle with respect to a crack that may occur on one main surface of the electronic device A. be able to. Therefore, the crack is easily contrasted, and the crack is easily found.

  Therefore, when the above-described conventional appearance inspection apparatus 700 and another conventional appearance inspection apparatus 800 are combined, an appearance inspection apparatus that does not require a large facility and easily detects abnormalities such as cracks can be considered ( Appearance inspection apparatus 900 according to the background art, see FIG.

  As shown in FIG. 7, the appearance inspection apparatus 900 according to the background art has a diffusion ring illumination device 910 that irradiates light at a predetermined elevation angle on one main surface of the electronic device A, and one main surface of the electronic device A. Low-angle illuminating device 920 that irradiates light at an elevation angle smaller than that of diffusing ring illumination device 910, first mirror 930 disposed on one main surface side of electronic device A, and one side surface side of electronic device A A second mirror 940 disposed on the first mirror 930, a half mirror 950 that guides the light reflected by the first mirror 930 and the light reflected by the second mirror 940 to the camera 960, and an optically rear stage of the half mirror 950. A camera 960 is provided, and a silhouette illumination 990 provided on the other side surface of the electronic device A. In the appearance inspection apparatus 900 according to the background art, by making the elevation angle of light irradiated from the low-angle illumination apparatus 920 to one main surface of the electronic device A relatively small, a fine crack is easily found.

  In the appearance inspection apparatus 900 according to the background art, the optical path length from the electronic device A to the camera 960 in the main surface appearance inspection is the same as the optical path length from the electronic device A to the camera 960 in the side appearance inspection. In addition, between the half mirror 950 and the camera 960, the positional relationship of the optical system components is such that the optical axes of the light reflected by the first mirror 930 and the light reflected by the second mirror 940 are the same axis. Is set.

  In the appearance inspection apparatus 900 according to the background art, with the silhouette illumination 990 turned off, the diffusion ring illumination apparatus 910 and the low-angle illumination apparatus 920 are turned on, and light from one main surface of the electronic device A is transmitted to the first mirror. The main surface of the electronic device A is imaged by the camera 960 by guiding it to the camera 960 through 930 and the half mirror 950, and the main surface appearance inspection is performed, and the diffusion ring illumination device 910 and the low-angle illumination device 920 are turned off. In this state, the silhouette illumination 990 is turned on, and the silhouette of the side surface of the electronic device A is guided to the camera via the second mirror 940 and the half mirror 950 so that the side surface of the electronic device A is imaged by the camera 960 and the side appearance inspection is performed. Do.

  According to the appearance inspection apparatus 900 according to the background art, the optical path length from the electronic device A to the camera 960 in the main surface appearance inspection is the same as the optical path length from the electronic device A to the camera 960 in the side appearance inspection. Since the positional relationship of the optical system parts is set, the focus is changed when switching between the main surface appearance inspection and the side appearance inspection after setting the positional relationship of the optical system parts, and the electronic device A and each optical system. The main surface appearance inspection and the side surface appearance inspection can be performed with one camera 960 without changing the positional relationship of the components.

JP 2012-171628 A JP 2014-122863 A

  However, in the appearance inspection apparatus 900 according to the background art described above, when the main surface appearance inspection is performed, the light from the low-angle illumination device 920 may enter the camera 960 via the second mirror 940 and the half mirror 950. When the image H of the light of the low-angle illumination device 920 overlaps the image A1 on one main surface of the electronic device A, halation occurs and it becomes difficult to detect an abnormality (such as a crack) on the main surface of the electronic device A. There is a problem (see FIG. 8A).

  Therefore, the present invention has been made to solve the above-described problem, and provides an appearance inspection apparatus capable of preventing a problem that it is difficult to detect an abnormality on one main surface of an electronic device due to halation. Objective.

[1] An appearance inspection apparatus according to the present invention includes a main surface appearance inspection for detecting an abnormality of the one main surface of the electronic device by imaging one main surface of the electronic device with a camera; An appearance inspection apparatus capable of switching between a side appearance inspection for capturing an image of one side surface with the camera and detecting an abnormality of at least the one side surface of the electronic device, wherein the one of the electronic devices A diffusing ring illuminating device that irradiates light at a predetermined elevation angle on the principal surface of the electronic device, and a low angle illuminating device that irradiates light at an elevation angle smaller than the elevation angle of the diffusing ring illumination device on the one principal surface of the electronic device; A first mirror disposed on the one principal surface side of the electronic device; a second mirror disposed on the one side surface of the electronic device; and light reflected by the first mirror; A half mirror that guides the light reflected by the second mirror to the camera, the camera that is optically positioned after the half mirror, between the first mirror and the half mirror, and A filter disposed at at least one of the second mirror and the half mirror and having a predetermined refractive index; a first distance that is a distance between the first mirror and the half mirror; and A mirror interval adjusting mechanism that adjusts at least one of the second intervals, which is an interval between the second mirror and the half mirror, is provided.

[2] In the appearance inspection apparatus of the present invention, in the captured image in the side surface appearance inspection, the mirror interval adjustment mechanism includes a region of the image of the side surface of the electronic device imaged in the side surface appearance inspection, and the main surface. It is preferable to adjust at least one of the first interval and the second interval so that the region of the image of the main surface of the electronic device imaged in the appearance inspection is separated.

[3] In the appearance inspection apparatus according to the present invention, the mirror interval adjustment mechanism moves the first mirror or the second mirror to the half mirror side or the opposite side by moving at least one of the first mirror and the second mirror. It is preferable to adjust at least one of the interval and the second interval.

[4] In the appearance inspection apparatus of the present invention, the mirror interval adjustment mechanism includes an air-converted length of an optical path from the one main surface of the electronic device to the camera in the main surface appearance inspection, and the side surface appearance inspection. It is preferable to adjust the first interval and the second interval so that the air conversion length of the optical path from the one side surface of the electronic device to the camera becomes equal.

  In this specification, the "air equivalent length" is the length converted to how long (thickness) the light appears to have passed through the air wall if the light is in the air. This is a value corresponding to a so-called “apparent depth” (for example, an apparent depth when the bottom surface looks shallow when the water surface is viewed from directly above the water surface).

[5] The visual inspection apparatus of the present invention further includes a focus adjustment mechanism that adjusts the focus by moving the position of the camera, and the mirror interval adjustment mechanism moves the second mirror to move the second mirror. When the second interval is adjusted and the filter is disposed only between the first mirror and the half mirror, the main device of the electronic device imaged in the main surface appearance inspection without the filter is disposed. The position of the first mirror, the second mirror, and the camera when the image of the surface and the image of the side surface of the electronic device captured by the side surface appearance inspection are all in focus When the reference position is set, the length of the second mirror moved from the reference position is d1, the length of the camera moved from the reference position is d2, and the length Other thickness is D, the refractive index of the filter is n, it is preferable to satisfy a relation of d1 = d2 = D (1-1 / n).

[6] The visual inspection apparatus of the present invention further includes a focus adjustment mechanism that adjusts the focus by moving the position of the camera, and the mirror interval adjustment mechanism moves the second mirror to move the second mirror. When the second interval is adjusted and the filter is disposed only between the second mirror and the half mirror, the main device of the electronic device imaged in the main surface appearance inspection without the filter is disposed. The position of the first mirror, the second mirror, and the camera when the image of the surface and the image of the side surface of the electronic device captured by the side surface appearance inspection are all in focus When the reference position is set, the focus adjustment mechanism does not move the camera from the reference position, and d1 is a length of moving the second mirror from the reference position. The thickness of the serial filter is D, the refractive index of the filter is n, it is preferable to satisfy a relation of d1 = D (1-1 / n).

[7] In the appearance inspection apparatus of the present invention, an optical axis of light that is located behind the first mirror when viewed from the electronic device and is guided from the one surface of the electronic device to the camera in the main surface appearance inspection. It is preferable to further include a coaxial mirror illuminating device that irradiates light onto the one main surface of the electronic device along the same axis.

[8] An appearance inspection method of the present invention is an appearance inspection method using the appearance inspection apparatus according to any one of [1] to [7], and between the first mirror and the half mirror; The filter having a predetermined refractive index is disposed in at least one of the second mirror and the half mirror, and between the first mirror and the half mirror by the mirror interval adjustment mechanism. An optical system component adjustment step of adjusting at least one of the first interval that is an interval between the second mirror and the second interval that is an interval between the second mirror and the half mirror; and an appearance of the electronic device In this order, the visual inspection step irradiates the one main surface of the electronic device with light from the diffusion ring illumination device at a predetermined elevation angle, and In a state in which light is irradiated from an illumination device at an elevation angle smaller than the elevation angle of the diffusion ring illumination device, the main surface of the electronic device is imaged by the camera to detect an abnormality in the one main surface of the electronic device. A main surface appearance inspection step for detecting an abnormality of the side surface of the electronic device by imaging the side surface of the electronic device with the camera in a state where the diffusion ring illumination device and the low-angle illumination device are turned off. A side appearance inspection step in this order or in the reverse order, and the position of the electronic device and the first mirror in the step performed earlier in the main surface appearance inspection step and the side appearance inspection step, The position of the optical system component composed of the second mirror, the half mirror, the camera, and the filter is determined according to the principal surface appearance inspection step and the side surface appearance inspection. Characterized in that it does not change in a step carried out after one of the steps.

  According to the appearance inspection apparatus and the appearance inspection method of the present invention, the first interval that is the interval between the first mirror and the half mirror, and the second interval that is the interval between the second mirror and the half mirror. Since the mirror interval adjustment mechanism for adjusting at least one of them is provided, the low-angle illumination device can be used even when light from the low-angle illumination device enters the camera via the second mirror and the half mirror when the main surface appearance inspection is performed. The positional relationship between the mirrors can be adjusted so that halation does not occur because the image of the light beam overlaps the image of the main surface of the electronic device. As a result, it is possible to prevent a problem that an abnormality on one main surface of the electronic device is difficult to detect due to halation.

  Moreover, according to the appearance inspection apparatus and the appearance inspection method of the present invention, it is disposed at least one of between the first mirror and the half mirror and between the second mirror and the half mirror, and has a predetermined refractive index. Even when the positional relationship between the mirrors is adjusted as described above, the image of the main surface of the electronic device imaged in the main surface appearance inspection and the side surface of the electronic device imaged in the side surface appearance inspection are adjusted. All images can be brought into focus. As a result, even when the positional relationship of each mirror is adjusted as described above, after adjusting the positional relationship of each optical system component, the focus is changed when the main surface appearance inspection and the side surface inspection are switched. The main surface appearance inspection and the side surface appearance inspection can be performed with one camera without changing the positional relationship between the device and each optical system component.

It is a figure shown in order to demonstrate the external appearance inspection apparatus 100 which concerns on Embodiment 1. FIG. Note that reference numeral 162 denotes an imaging surface (also referred to as a film surface or an inspection surface). It is a figure which shows the captured image of the electronic device A imaged with the external appearance inspection apparatus 100 which concerns on Embodiment 1. FIG. 2A is a captured image of the main surface of the electronic device A in the main surface appearance inspection, and FIG. 2B is a captured image of the side surface of the electronic device A in the side surface appearance inspection. In FIG. 2, the symbol (H) indicates an image of the light when the light of the low-angle illumination device 120 is reflected on the camera. Moreover, the broken line in FIG.2 (b) shows the area | region of the image of the back surface of the electronic device A imaged by the main surface external appearance test | inspection. It is a figure shown in order to demonstrate the external appearance inspection apparatus 102 which concerns on Embodiment 2. FIG. It is a figure shown in order to demonstrate the external appearance inspection apparatus 104 which concerns on Embodiment 3. FIG. It is a figure shown in order to demonstrate the conventional external appearance inspection apparatus 700. FIG. FIG. 5A is a diagram showing a state of the back surface appearance inspection in the conventional appearance inspection apparatus 700, and FIG. 5B is a diagram showing a state of the side surface appearance inspection in the conventional appearance inspection apparatus 700. It is a figure shown in order to demonstrate other conventional appearance inspection apparatuses 800. It is a figure shown in order to demonstrate the external appearance inspection apparatus 900 which concerns on background art. It is a figure which shows the picked-up image of the electronic device A imaged with the external appearance inspection apparatus 900 which concerns on background art. 8A is a captured image of the electronic device A in the back surface appearance inspection, and FIG. 8B is a captured image of the electronic device A in the side surface appearance inspection. In FIG. 8, symbol H indicates an image of the light when the light from the low-angle illumination device 120 is reflected on the camera 160. Moreover, the broken line in FIG.8 (b) shows the imaging area of the electronic device A in a back surface external appearance test | inspection.

  Hereinafter, an appearance inspection apparatus and an appearance inspection method of the present invention will be described based on embodiments shown in the drawings. In addition, each drawing is a schematic diagram and does not necessarily reflect an actual dimension exactly.

  In the following description, the image of the main surface of the electronic device imaged in the main surface appearance inspection and the image of the side surface of the electronic device imaged in the side surface appearance inspection are not focused without arranging the filter. The positions of the first mirror, the second mirror, and the camera in the combined state (that is, the positions of the first mirror, the second mirror, and the camera in the appearance inspection apparatus 900 according to the background art) are referred to as “reference position”. To do.

[Embodiment 1]
1. Configuration of Appearance Inspection Apparatus 100 According to Embodiment 1 The appearance inspection apparatus 100 according to Embodiment 1 captures the main surface of the electronic device A with the camera 160 and detects a main surface abnormality of the electronic device A. This is an appearance inspection apparatus capable of switching between an appearance inspection and a side appearance inspection for detecting an abnormality of the side surface of the electronic device A by imaging the side surface of the electronic device A with the camera 160. In the first embodiment, an abnormality is detected using the back surface of the electronic device A as the main surface of the electronic device A.

  The electronic device A used for appearance inspection is a semiconductor device that is resin-sealed in a substantially rectangular shape in plan view. In the electronic device A, terminals are formed at both ends on the short side on the back side (see FIG. 2).

  In the present embodiment, the “main surface appearance inspection” irradiates light on the main surface (back surface) of the electronic device A, guides the reflected light to the camera 160 and images it, and then images the main surface (back surface) of the electronic device A. This is an inspection to detect abnormalities (cracks, adhesion of foreign matter, voids, etc.). In addition, the “side appearance inspection” is caused by light emitted from the other side of the electronic device A (left side in FIG. 1) and received on one side (right side in FIG. 1) to the camera 160, and is floated by the light. This is an inspection in which the silhouette of the rising electronic device A is imaged to detect abnormalities on the side surface of the electronic device A (terminal distortion, foreign matter adhesion, etc.).

  In the appearance inspection apparatus 100 according to the first embodiment, the appearance inspection is performed by arranging the electronic device A with the back side down on a transparent and sufficiently thin stage provided on the low-angle illumination apparatus 120 described later. . The stage is made of an appropriate material and an appropriate size.

  As shown in FIG. 1, the appearance inspection apparatus 100 according to the first embodiment includes a diffusing ring illumination device 110, a low-angle illumination device 120, a first mirror 130, a second mirror 140, a half mirror 150, and a camera. 160, a focus adjustment mechanism 164, a filter 170, a mirror interval adjustment mechanism 180, and a silhouette illumination device 190.

  The diffusing ring illumination device 110 irradiates the back surface of the electronic device A with light at a predetermined elevation angle (for example, 45 ° to 60 °). The diffusion ring illumination device 110 includes a pedestal part 111, a plurality of illuminations 112 placed in a ring shape on the pedestal part 111, and a diffusion disposed between the plurality of illuminations 112 and the electronic device A. Plate 113. The plurality of illuminations 112 are composed of appropriate illuminations (for example, LEDs), and irradiate the back surface of the electronic device A with a predetermined elevation angle (for example, 45 ° to 60 °). The diffusion plate 113 is a translucent plate. The diffusion plate 113 diffuses light from the plurality of illuminations 112 in order to prevent halation from being generated by locally irradiating light with high illuminance.

  The low-angle illumination device 120 includes a plurality of illuminations 122 arranged in a ring shape, and an elevation angle (for example, 10 to 10) smaller than the elevation angle (45 ° to 60 °) of the diffusion ring illumination device 110 on the back surface of the electronic device A. 30 °). The outer diameter of the ring shape constituted by the plurality of illuminations 122 in the low-angle illumination device 120 is larger than the outer diameter of the ring shape constituted by the plurality of illuminations 112 in the diffusion ring illumination device 110.

  In addition, when light is irradiated to the back surface of the electronic device A by the diffusing ring illumination device 110 alone, the shadow of the terminal of the electronic device A by the diffusion ring illumination device 110 is reflected in the image of the back surface of the electronic device A, and the inspection accuracy is high. In some cases, the low-angle illuminating device 120 is provided, and the shadow is canceled by the light of the low-angle illuminating device 120, thereby preventing a decrease in inspection accuracy.

  The first mirror 130 is disposed on the back side of the electronic device A. The first mirror 130 is a prism having a reflective surface with an inclined surface of approximately 45 °, and is configured to reflect light from the back surface of the electronic device A and guide it to the camera 160 via the half mirror 150. The position of the first mirror 130 is arranged at the same position as the reference position.

  The second mirror 140 is disposed on one side of the electronic device A (on the right side of the electronic device A in FIG. 1). The second mirror 140 is a prism having a reflective surface with an inclined surface of approximately 45 °, and is configured to reflect light from the side surface side of the electronic device A and guide it to the camera 160 via the half mirror 150.

  The second mirror 140 is arranged at a position moved by d1 from the reference position toward the half mirror 150 side (lower side) by a mirror interval adjusting mechanism 180 described later. The arrangement position of the second mirror 140 is such that the height position of the bottom end of the second mirror 140 is lower than the height position of the back surface of the electronic device A, and the height position of the top end of the second mirror 140 is the same. It is a position higher than the height position of the surface (upper surface) of the electronic device A.

  The half mirror 150 guides the light reflected by the first mirror 130 and the light reflected by the second mirror 140 to the camera 160. That is, the half mirror 150 linearly transmits the light reflected by the first mirror 130 and guides it to the camera 160, and reflects the light reflected by the second mirror 140 and guides it to the camera 160.

  The camera 160 is optically positioned behind the half mirror 150 and captures an image of the back surface or side surface of the electronic device A. As the camera 160, a camera having an appropriate magnification and an appropriate aperture can be used. The camera 160 is optically arranged behind the reference position by d2 (the direction in which the optical path length extends, on the side opposite to the half mirror 150 side). The length d2 of moving the camera 160 from the reference position is equal to the length d1 of moving the second mirror from the reference position. Therefore, the optical path length in the side surface appearance inspection is equal to the optical path length in the side surface appearance inspection in the case of the reference position.

  The focus adjustment mechanism 164 has a function of adjusting the focus in accordance with the first distance between the first mirror 130 and the half mirror 150 by moving the position of the camera 160.

  The filter 170 is disposed between the first mirror 130 and the half mirror 150. The filter 170 is a filter having a predetermined refractive index. The material of the filter 170 is glass (for example, so-called BK7), and a coating for preventing reflection of the surface (for example, AR coating) is applied. The refractive index of the filter 170 is larger than that of air.

  The mirror interval adjusting mechanism 180 has a function of adjusting the second interval S2 by moving the second mirror 140 to the half mirror 150 side or the opposite side thereof (that is, in the vertical direction).

  In the captured image in the side surface appearance inspection, the mirror interval adjusting mechanism 180 includes the region of the side image A2 of the electronic device A imaged in the side surface appearance inspection and the back surface image A1 of the electronic device A imaged in the main surface appearance inspection. The second interval S <b> 2 is adjusted so as to be in a state of being separated from the region (see FIG. 2). That is, the mirror interval adjusting mechanism 180 adjusts the second interval S2 so that the optical axis in the side surface appearance inspection and the optical axis in the back surface inspection are shifted.

  The mirror interval adjusting mechanism 180 is an air equivalent length of the optical path from the back surface of the electronic device A to the camera 160 in the main surface appearance inspection, and an air equivalent length of the optical path from one side surface of the electronic device A to the camera 160 in the side appearance inspection. The second interval S2 is adjusted so that becomes equal.

  At this time, the length of the second mirror moved from the reference position is d1, the length of the camera 160 moved from the reference position is d2, the thickness of the filter 170 is D, and the refractive index of the filter 170 is n. The relationship d1 = d2 = D (1-1 / n) is satisfied.

  Further, in the captured image in the side appearance inspection, the side image of the electronic device A in the side appearance inspection is a length obtained by moving the second mirror from the reference position from the side image of the electronic device A in the side appearance inspection at the reference position. It has moved upward by the same length as the length d1.

  The silhouette lighting device 190 is disposed on the other side surface of the electronic device A (on the side opposite to the side on which the second mirror 140 is disposed, on the left side of the electronic device A in FIG. 1). The silhouette lighting device 190 irradiates light toward the electronic device A from the other side surface during the side surface appearance inspection.

2. Appearance Inspection Method According to Embodiment 1 Next, an appearance inspection method (appearance inspection method according to Embodiment 1) using the appearance inspection apparatus 100 according to Embodiment 1 will be described. The appearance inspection method according to the first embodiment includes an optical system component adjustment step S10 and an appearance inspection step S20 in this order.

(1) Optical system component adjustment step S10
The optical system component adjustment step S <b> 10 is a step of arranging the filter 170 having a predetermined refractive index between the first mirror 130 and the half mirror 150 and adjusting the second interval by the mirror interval adjustment mechanism 180. .

Specifically, first, the first mirror 130, the second mirror 140, and the camera 160 are arranged at the reference position without arranging the filter 170. Next, a filter 170 having a predetermined refractive index is disposed between the first mirror 130 and the half mirror 150.
Next, the position of the camera 160 is adjusted by moving the position of the camera 160 by the focus adjustment mechanism 164 so that the image A1 on the back surface of the electronic device A imaged in the main surface appearance inspection is in focus. Next, the mirror interval adjusting mechanism 180 adjusts the interval between the second mirror 140 and the half mirror 150 by moving the second mirror 140 in the vertical direction, and the side surface of the electronic device A imaged in the side surface appearance inspection. The image A2 is focused.

  Thereby, in the appearance inspection apparatus 100, in the captured image in the side surface appearance inspection, the region of the image A2 on the side surface of the electronic device A is the region of the image A1 on the back surface of the electronic device A captured in the main surface appearance inspection. Both the image of the electronic device A in the main surface appearance inspection and the image of the electronic device A in the side surface appearance inspection are in focus.

(2) Appearance inspection step S20 is a step of inspecting the appearance of the electronic device A. The appearance inspection step S20 includes a main surface appearance inspection step S21 and a side surface appearance inspection step S22 in this order or vice versa. Note that the position of the electronic device A and the first mirror 130, the second mirror 140, the half mirror 150, the camera 160, and the filter 170 in the process performed earlier in the main surface appearance inspection step S21 and the side surface appearance inspection step S22. The position of the optical system component constituted by is not changed in the process performed after the main surface appearance inspection step S21 and the side surface appearance inspection step S22.

(2-1) Main surface appearance inspection step S21
First, the back surface of the electronic device A is irradiated with light from the diffusion ring illumination device 110 at a predetermined elevation angle, and the low angle illumination device 120 is irradiated with light at an elevation angle smaller than the elevation angle of the diffusion ring illumination device 110, In addition, with the silhouette lighting device 190 turned off, the rear surface of the electronic device A is imaged by the camera 160 to detect an abnormality (such as a crack) on the rear surface of the electronic device A.

(2-2) Side surface appearance inspection step S22
Next, the diffuse ring illumination device 110 and the low angle illumination device 120 are turned off and the silhouette illumination device 190 is turned on without changing the positional relationship between the electronic device A and the optical system components in the main surface appearance inspection process. Then, the silhouette of the electronic device A floating by the light from the silhouette lighting device 190 is guided to the camera 160 and imaged to detect abnormalities on the side of the electronic device A (side terminal distortion, adhesion of foreign matter, etc.).

3. Effects of Appearance Inspection Device 100 and Appearance Inspection Method According to Embodiment 1 According to the appearance inspection device 100 and the appearance inspection method according to Embodiment 1, the main surface appearance is provided with the mirror interval adjustment mechanism 180 that adjusts the second interval. Even when light from the low-angle illuminating device 120 enters the camera 160 via the second mirror 140 and the half mirror 150 at the time of inspection, the light image H of the low-angle illuminating device 120 is on the back surface of the electronic device A. The positional relationship between the mirrors can be adjusted so that halation does not occur overlapping the image A1. As a result, it is not difficult to detect abnormality on the back surface of the electronic device A due to halation.

  Moreover, according to the appearance inspection apparatus 100 and the appearance inspection method according to the first embodiment, the filter 170 is disposed between the second mirror 140 and the half mirror 150 and has a predetermined refractive index. Even when the positional relationship between the mirrors is adjusted, both the back image of the electronic device A imaged in the main surface appearance inspection and the side image of the electronic device A imaged in the side surface appearance inspection are in focus. can do. As a result, even when the positional relationship of each mirror is adjusted as described above, after adjusting the positional relationship of each optical system component, the focus is changed when the main surface appearance inspection and the side surface inspection are switched. The main surface appearance inspection and the side surface appearance inspection can be performed with one camera 160 without changing the positional relationship between the device A and each optical system component.

  In addition, according to the appearance inspection apparatus 100 according to the first embodiment, in the captured image in the side appearance inspection, the mirror interval adjustment mechanism 180 has the side surface of the electronic device A imaged in the side appearance inspection. In order to adjust the second interval, that is, the mirror interval adjusting mechanism 180 so that the region of the image A2 is separated from the region of the image A1 on the back surface of the electronic device A imaged in the main surface appearance inspection. Since the second interval is adjusted so that the optical axis in the side surface appearance inspection and the optical axis in the back surface appearance inspection are shifted, the light of the low-angle illumination device 120 is second when the back surface inspection is performed. Even when the light enters the camera 160 via the mirror 140 and the half mirror 150, the light image H of the low-angle illumination device 120 is an image of the back surface of the electronic device A. Since 1 do not overlap, it is possible to surely prevent malfunction due to the halation occurs (see Fig. 2.).

  Further, according to the appearance inspection apparatus 100 according to the first embodiment, the mirror interval adjustment mechanism 180 moves the second mirror 140 to the half mirror 150 side or the opposite side (moves it in the vertical direction), thereby causing the second. Since the interval S2 is adjusted, the second interval S2 can be easily adjusted without moving the positions of the other mirror components (the first mirror 130 and the half mirror 150).

  Further, according to the appearance inspection apparatus 100 according to the first embodiment, the mirror interval adjustment mechanism 180 includes the air equivalent length of the optical path from the back surface of the electronic device A to the camera 160 in the main surface appearance inspection, and the electronic device in the side appearance inspection. In order to adjust the second distance so that the air conversion length of the optical path from one side surface of A to the camera 160 becomes equal, the focal plane (focus point) of the back surface image A1 of the electronic device A imaged in the main surface appearance inspection The distance to the position) is equal to the distance to the focus surface (focal position) of the side image A2 of the electronic device A imaged in the side appearance inspection. Therefore, both the back surface image A1 of the electronic device A imaged in the main surface appearance inspection and the side image A2 of the electronic device A imaged in the side surface appearance inspection are in focus. As a result, it is not necessary to change the focus when switching between the main surface appearance inspection and the side surface appearance inspection.

  Further, according to the visual inspection apparatus 100 according to the first embodiment, the visual inspection apparatus 100 further includes the focus adjustment mechanism 164 that adjusts the focus by moving the position of the camera 160, and the mirror interval adjustment mechanism 180 moves the second mirror 140. Thus, when the second interval S2 is adjusted and the filter 170 is disposed only between the first mirror 130 and the half mirror 150, the positions of the first mirror 130, the second mirror 140, and the camera 160 are set as the reference position. In this case, the length of the second mirror 140 moved from the reference position is d1, the length of the camera 160 moved from the reference position is d2, the thickness of the filter 170 is D, and the refractive index of the filter 170 is n. In order to satisfy the relationship of d1 = d2 = D (1-1 / n), the back surface of the electronic device A imaged in the main surface appearance inspection Both A1 and side appearance inspection electronic device A image A2 side of the imaged at can be when focus has been.

[Embodiment 2]
The appearance inspection apparatus 102 according to the second embodiment basically has the same configuration as the appearance inspection apparatus 100 according to the first embodiment, but the position of the filter is different from that of the appearance inspection apparatus 100 according to the first embodiment. . That is, in the appearance inspection apparatus 102 according to the second embodiment, the filter 170 is disposed not between the first mirror 130 and the half mirror 150 but only between the second mirror 140 and the half mirror 150 (see FIG. 3).

  In the appearance inspection apparatus 102 according to the second embodiment, the mirror interval adjusting mechanism 180 moves the second mirror 140 from the reference position to the side (upper side) opposite to the half mirror 150 side. The focus adjustment mechanism 164 does not move the camera 160 from the reference position. When the length of the second mirror 140 moved from the reference position is d1, the filter thickness is D, and the refractive index of the filter is n, the relationship d1 = D (1-1 / n) is satisfied. .

  As described above, the appearance inspection apparatus 102 according to the second embodiment differs from the appearance inspection apparatus 100 according to the first embodiment in the position of the filter, but as in the case of the appearance inspection apparatus 100 according to the first embodiment, Since the mirror interval adjusting mechanism 180 that adjusts the interval between the second mirror 140 and the half mirror 150 is provided, the light of the low-angle illumination device 120 is emitted from the second mirror 140 and the half mirror 150 when the main surface appearance inspection is performed. Even when the light enters the camera 160 via the lens, the positional relationship between the mirrors can be adjusted so that the light image H of the low-angle illumination device 120 overlaps with the image A1 on the back surface of the electronic device A and no halation occurs. . As a result, it is possible to prevent a problem that an abnormality on the back surface of the electronic device A is difficult to detect due to halation.

  In addition, the appearance inspection apparatus 102 according to the second embodiment includes a focus adjustment mechanism 164 that adjusts the focus by moving the position of the camera 160. The mirror interval adjusting mechanism 180 adjusts the second interval S2 by moving the second mirror 140. Further, when the filter 170 is disposed only between the second mirror 140 and the half mirror 150, when the positions of the first mirror 130, the second mirror 140, and the camera 160 are set as the reference position, the focus adjustment mechanism 164 The camera 160 is not moved from the reference position. Furthermore, when the length of the second mirror 140 moved from the reference position is d1, the width of the filter 170 is D, and the refractive index of the filter 170 is n, d1 = D (1-1 / n) Satisfy the relationship. With such a configuration, both the back surface image A1 of the electronic device A imaged in the main surface appearance inspection and the side image A2 of the electronic device A imaged in the side surface appearance inspection are in focus. can do.

  In addition, according to the visual inspection apparatus 102 according to the second embodiment, the focus adjustment mechanism 164 does not move the camera 160 from the reference position, so it is only necessary to move the second mirror 140, and adjustment is easy.

  Note that the appearance inspection apparatus 102 according to the second embodiment has the same configuration as that of the appearance inspection apparatus 100 according to the first embodiment except for the position of the filter, and thus the effects of the appearance inspection apparatus 100 according to the first embodiment. Have the corresponding effect.

[Embodiment 3]
The appearance inspection apparatus 104 according to the third embodiment basically has the same configuration as that of the appearance inspection apparatus 100 according to the first embodiment. However, the appearance inspection apparatus 100 according to the first embodiment is provided with a coaxial mirror illumination device. Not the case. That is, the appearance inspection apparatus 104 according to the third embodiment is positioned behind the first mirror 130 when viewed from the electronic device A, and the optical axis of the light guided from one surface of the electronic device A to the camera 160 in the main surface appearance inspection. A coaxial mirror illumination device 132 that irradiates light on the back surface of the electronic device A along the same axis is provided (see FIG. 4).

  The coaxial mirror illumination device 132 includes an illumination unit 134 and a diffusion plate 136. The illumination unit 134 irradiates the back surface of the electronic device A with light at an elevation angle of about 90 ° (within 90 ° ± 5 degrees) with respect to the back surface of the electronic device A. The diffusion plate 136 diffuses the light from the illumination unit 134 and prevents halation from being generated by light that is locally high in illuminance.

  In the appearance inspection apparatus 104 according to the third embodiment, the main surface appearance inspection is performed in the following procedure. First, the diffusion ring illumination device 110 and the low-angle illumination device 120 are turned on, and the coaxial mirror illumination device 132 is turned off to obtain a captured image (first back-surface captured image) of the back surface of the electronic device A. Next, the diffusion ring illumination device 110 and the low-angle illumination device 120 are turned off, and the coaxial mirror illumination device 132 is turned on to obtain a captured image of the back surface of the electronic device A (second back surface captured image). And the process which emphasizes a crack etc. is performed by calculating and superimposing a 2nd back surface captured image and a 1st back surface captured image, and the abnormality of the back surface of the electronic device A is detected.

  As described above, the appearance inspection apparatus 104 according to the third embodiment is different from the appearance inspection apparatus 100 according to the first embodiment in that it includes a coaxial mirror illumination device, but the appearance inspection apparatus 100 according to the first embodiment. Since the mirror interval adjustment mechanism 180 that adjusts the second interval is provided, the light of the low-angle illumination device 120 enters the camera 160 via the second mirror 140 and the half mirror 150 when performing the back surface appearance inspection. Even in this case, the positional relationship between the mirrors can be adjusted so that the light image H of the low-angle illumination device 120 overlaps the image A1 on the back surface of the electronic device A and no halation occurs. As a result, it is possible to prevent a problem that an abnormality on the back surface of the electronic device A is difficult to detect due to halation.

  Further, according to the appearance inspection apparatus 104 according to the third embodiment, the light beam that is located behind the first mirror 130 when viewed from the electronic device A and is guided to the camera 160 from one surface of the electronic device A in the main surface appearance inspection. Since the coaxial mirror illumination device 132 that irradiates the back surface of the electronic device A along the same axis as the axis is provided, the second back-side captured image obtained by lighting the coaxial mirror illumination device 132 is the diffusion ring illumination device. Unlike the 1st back surface captured image obtained by lighting 110 and the low angle illuminating device 120, the unevenness | corrugation of the surface is not emphasized. Therefore, the first back-surface captured image and the second back-surface captured image are subjected to arithmetic processing and are superimposed, so that cracks and the like can be further emphasized and cracks can be detected with high accuracy.

  The appearance inspection apparatus 104 according to the third embodiment has the same configuration as that of the appearance inspection apparatus 100 according to the first embodiment except that the appearance inspection apparatus 104 includes a coaxial mirror illumination device, and thus the appearance inspection apparatus according to the first embodiment. 100 has a corresponding effect among the effects of 100.

  As mentioned above, although this invention was demonstrated based on said embodiment, this invention is not limited to said embodiment. The present invention can be implemented in various modes without departing from the spirit thereof, and for example, the following modifications are possible.

(1) The number, material, shape, position, size, and the like of the constituent elements described in the above embodiments are exemplifications, and can be changed within a range not impairing the effects of the present invention.

(2) In the first embodiment, the filter 170 is disposed only between the first mirror 130 and the half mirror 150. In the second embodiment, the filter is disposed only between the second mirror 140 and the half mirror 150. Although 170 is disposed, the present invention is not limited to this. Filters may be disposed both between the first mirror 130 and the half mirror 150 and between the second mirror 140 and the half mirror 150.

(3) In each of the above embodiments, the mirror interval adjusting mechanism 180 adjusts the second interval S2 by moving the second mirror 140, but the present invention is not limited to this. The second interval S2 may be adjusted by moving the half mirror 150.

(4) In each of the above embodiments, the second interval S2 is adjusted in the mirror interval adjusting mechanism 180, but the present invention is not limited to this. The first interval S1 may be adjusted.

(5) In each of the embodiments described above, the focus adjustment mechanism 164 adjusts the focus by moving the position of the camera 160, but the present invention is not limited to this. The focus adjustment mechanism may adjust the focus by adjusting the position and aperture of the lens of the camera.

(6) In the above embodiments, the filter 170 is made of transparent glass, but the present invention is not limited to this. The material of the filter may be colored glass, or may be a material other than glass as long as it transmits light.

(7) In each of the above embodiments, the electronic device A is arranged on a transparent stage and the appearance inspection is performed. However, the present invention is not limited to this. The electronic device A may be stationary while sucked from the surface and the appearance inspection may be performed.

(8) In each of the above embodiments, the main surface appearance inspection is performed using the back surface of the electronic device A as the main surface of the electronic device A, but the present invention is not limited to this. The main surface appearance inspection may be performed using the surface of the electronic device A as the main surface of the electronic device A.

(9) In each of the above embodiments, a resin-encapsulated semiconductor device is used as the electronic device, but the present invention is not limited to this. As the electronic device, an appropriate electronic component such as a capacitor or an inductor may be used.

  DESCRIPTION OF SYMBOLS 100,102,104 ... Appearance inspection apparatus, 110 ... Diffusion ring illumination apparatus, 111 ... Pedestal part, 112 ... Multiple illumination, 113 ... Diffusion plate (of diffusion ring illumination apparatus), 120 ... Low angle illumination apparatus, 130 ... No. DESCRIPTION OF SYMBOLS 1 mirror, 132 ... Coaxial mirror illuminating device, 134 ... Illumination part, 136 ... (Coaxial mirror illuminating device) diffuser plate 140 ... 2nd mirror, 150 ... Half mirror, 160 ... Camera, 162 ... Imaging surface, 164 ... Focus adjustment Mechanism: 170 ... Filter, 180 ... Mirror interval adjustment mechanism, 190 ... Silhouette illumination device, A ... Electronic device, A1: Image of main surface of electronic device A imaged in main surface appearance inspection, A2: Imaged in side surface inspection Image of the side surface of the electronic device A, H: image of light of the low-angle illumination device

Claims (8)

A main surface appearance inspection for detecting an abnormality of the one main surface of the electronic device by imaging one main surface of the electronic device with a camera, and at least an image of one side surface of the electronic device with the camera An appearance inspection apparatus capable of switching and performing a side appearance inspection for detecting an abnormality of the one side of the electronic device,
A diffusing ring illumination device that irradiates light at a predetermined elevation angle on the one principal surface of the electronic device;
A low-angle illumination device that irradiates light at an elevation angle smaller than the elevation angle of the diffusion ring illumination device on the one main surface of the electronic device;
A first mirror disposed on the one main surface side of the electronic device;
A second mirror disposed on the one side surface of the electronic device;
A half mirror for guiding the light reflected by the first mirror and the light reflected by the second mirror to the camera;
The camera positioned optically after the half mirror;
A filter disposed at least one of between the first mirror and the half mirror and between the second mirror and the half mirror and having a predetermined refractive index;
Mirror interval adjustment that adjusts at least one of a first interval that is an interval between the first mirror and the half mirror and a second interval that is an interval between the second mirror and the half mirror. A visual inspection apparatus comprising a mechanism.   In the captured image in the side surface appearance inspection, the mirror interval adjusting mechanism includes a region of an image of a side surface of the electronic device imaged in the side surface appearance inspection, and a main surface of the electronic device imaged in the main surface appearance inspection. 2. The appearance inspection apparatus according to claim 1, wherein at least one of the first interval and the second interval is adjusted so as to be in a state of being separated from the image region.   The mirror interval adjusting mechanism moves at least one of the first mirror and the second mirror to the half mirror side or the opposite side, thereby moving at least one of the first interval and the second interval. The visual inspection apparatus according to claim 1, wherein the visual inspection apparatus is adjusted.   The mirror distance adjusting mechanism includes an air-converted length of an optical path from the one main surface of the electronic device to the camera in the main surface appearance inspection, and the camera from the one side surface of the electronic device in the side surface appearance inspection. The appearance inspection apparatus according to claim 1, wherein the first interval and the second interval are adjusted so that the air-converted length of the optical path is equal. A focus adjustment mechanism for adjusting the focus by moving the position of the camera;
The mirror interval adjustment mechanism adjusts the second interval by moving the second mirror,
When the filter is disposed only between the first mirror and the half mirror,
Without placing the filter, the image of the main surface of the electronic device imaged in the main surface appearance inspection and the image of the side surface of the electronic device imaged in the side surface appearance inspection were both in focus. When the position of the first mirror, the second mirror and the camera when in a state is a reference position,
The length of moving the second mirror from the reference position is d1, the length of moving the camera from the reference position is d2, the thickness of the filter is D, and the refractive index of the filter is n. The external appearance inspection apparatus according to claim 1, wherein a relationship of d1 = d2 = D (1-1 / n) is satisfied. A focus adjustment mechanism for adjusting the focus by moving the position of the camera;
The mirror interval adjustment mechanism adjusts the second interval by moving the second mirror,
When the filter is disposed only between the second mirror and the half mirror,
Without placing the filter, the image of the main surface of the electronic device imaged in the main surface appearance inspection and the image of the side surface of the electronic device imaged in the side surface appearance inspection were both in focus. When the position of the first mirror, the second mirror and the camera when in a state is a reference position,
The focus adjustment mechanism does not move the camera from the reference position,
When the length of the second mirror moved from the reference position is d1, the filter thickness is D, and the refractive index of the filter is n, the relationship d1 = D (1-1 / n) is established. The visual inspection apparatus according to claim 1, wherein the visual inspection apparatus is satisfied.   The electronic device is located behind the first mirror as viewed from the electronic device, and along the same axis as the optical axis of light guided from the one surface of the electronic device to the camera in the main surface appearance inspection. The visual inspection apparatus according to claim 1, further comprising a coaxial mirror illuminating device that irradiates light on one main surface. An appearance inspection method using the appearance inspection apparatus according to claim 1,
The filter having a predetermined refractive index is disposed between at least one of the first mirror and the half mirror and between the second mirror and the half mirror, and the mirror interval adjusting mechanism. To adjust at least one of the first distance, which is the distance between the first mirror and the half mirror, and the second distance, which is the distance between the second mirror and the half mirror. The optical system component adjustment process,
Including an appearance inspection process for performing an appearance inspection of the electronic device in this order,
The appearance inspection step
The one main surface of the electronic device is irradiated with light from the diffusion ring illumination device at a predetermined elevation angle, and light is irradiated from the low angle illumination device at an elevation angle smaller than the elevation angle of the diffusion ring illumination device. In the state, the main surface appearance inspection step for detecting the abnormality of the one main surface of the electronic device by imaging the main surface of the electronic device with the camera,
A side appearance inspection process for detecting an abnormality of the side surface of the electronic device by imaging the side surface of the electronic device with the camera in a state where the diffusion ring illumination device and the low-angle illumination device are turned off. Including in reverse order,
The position of the electronic device and the first mirror, the second mirror, the half mirror, the camera, and the filter in the step performed earlier in the main surface appearance inspection step and the side surface appearance inspection step. An appearance inspection method characterized by not changing the position of the optical system component in a step performed after the main surface appearance inspection step and the side surface appearance inspection step.

Images