JP2010223955A - Light focusing member and lighting unit, and optical inspection apparatus using them - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a light focusing member and a lighting unit, and an optical inspection apparatus using them. <P>SOLUTION: The optical inspection apparatus is collected light irradiated on the inspection object using the light focusing member. Thus, loss of the light irradiated on the inspection object (printed circuit board) can be minimized to obtain clear image data of a pattern slope formed on the substrate. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a condensing member, an illumination unit, and an optical inspection apparatus using the condensing member. More specifically, the condensing member that condenses light and an inspection object (printed circuit board) using the condensing member. An illumination unit that emits light, and a pattern formed on an inspection object (printed circuit board) is imaged using light emitted from the illumination unit, and the image information that has been imaged is processed to form an inspection object. The present invention relates to an optical inspection apparatus for inspecting the presence or absence of defects in a pattern.

  Recently, a printed circuit board, which is one of the main materials used in liquid crystal display device driving integrated circuits (LCD Driver IC), various semiconductor integrated circuits such as memories and LSIs, and ultra-small products, such as films and tapes. Manufactured in a form.

  Among such printed circuit boards, a printed circuit board generally called a TAB (Tape Automatic Bonding) or COF (Chip On Film) board is widely used. Printed circuit boards in the form of films and tapes are patterned by manufacturing processes such as exposure, phenomenon, and etching, and such patterns become extremely fine as semiconductor devices are gradually miniaturized. In reality, it is becoming increasingly impossible to inspect pattern defects through the eyes of workers. Therefore, accurate detection of a printed circuit board pattern defect is an important factor for improving inspection reliability, which is the core of an automatic optical inspection apparatus.

  In addition, in the inspection of TAB and COF substrates, where the pattern width is extremely fine among printed circuit boards in the form of films and tapes, the brightness limit generated by existing lighting devices and the uniformity of light within the inspection area are as follows: Is very important. However, in existing lighting devices, a large amount of light loss occurs before the light from the light source reaches the surface of the object to be inspected. Eventually, only the amount of light remaining after the light loss is transmitted to the image sensor through the lens. Therefore, it is difficult to obtain a stable image.

Korean Patent Registration No. 10-246268

  The present invention has been made in view of the above-described problems, and its purpose is to minimize the loss of light applied to the inspection object (printed circuit board) and to obtain an overall more uniform brightness on the pattern surface. It is another object of the present invention to provide a condensing member, an illumination unit, and an optical inspection apparatus using the light collecting member, which can improve inspection reliability.

  The problem to be solved by the present invention is not limited here, and other problems not mentioned should be clearly understood by those skilled in the art from the following description.

  In order to achieve the above object, an illumination unit according to the present invention includes a light source that emits light, a light separation member that reflects or transmits light along a direction of incident light, and the light emitted from the light source. And a light collecting member that refracts the light reflected by the separation member and focuses the light on the illumination target, and guides the light reflected from the illumination target to the light separation member.

  In the illumination unit according to the present invention having the above-described configuration, the light collecting member is spaced apart from the light separating member in a direction in which the light separating member reflects light, and a central portion of the light collecting member includes: A hole through which light passes is formed, and one of the first surface of the light collecting member facing the light separating member and the second surface opposite to the first surface is centered on the hole. A number of inclined surfaces can be provided so as to be symmetrical.

  The inclination angle of the inclined surface may become smaller toward the inside toward the hole.

  The inclined surface may be provided so as to be inclined inward toward the hole.

  The inclined surface may be provided so as to be inclined outwardly with respect to the hole.

  The condensing member has a length corresponding to the length of the light separating member, and the inclined surface is extended long along the length direction of the condensing member.

  The inclined surface may be a flat surface or a curved surface.

  The light collecting member is spaced apart from the light separating member in a direction in which the light separating member reflects light, and the light separating member is a second surface that is the opposite surface of the first surface of the light collecting member that faces the light separating member. May be a curved surface with a downwardly convex pattern.

  The condensing member is spaced apart from the light separating member in a direction in which the light separating member reflects light, and is formed on a second surface that is opposite to the first surface of the condensing member facing the light separating member. The central portion may be a flat surface, and the peripheral portion of the second surface may be a curved surface having a downwardly convex pattern.

  The first surface of the light collecting member may be a flat surface.

  It may further include a parallel light conversion member that is positioned between the light source and the light separation member and converts light emitted from the light source into parallel light.

  The surface of the parallel light conversion member facing the light source may be a curved surface having a convex pattern, and the surface of the parallel light conversion member facing the light separation member may be a flat surface.

  A diffusion member that is interposed between the light separation member and the parallel light conversion member and diffuses the parallel light so as to improve the light uniformity of the parallel light transmitted through the parallel light conversion member; be able to.

  The light separating member may be a beam splitter.

  The light separating member may be a half mirror.

  The light separating member and the diffusing member may have the same length in a direction perpendicular to the parallel light.

  The light source, the parallel light converting member, the diffusing member, and the light separating member are arranged in a line so that an optical axis is directed in a horizontal direction, and the light collecting member is a direction in which the light separating member reflects light. The light separating member may be spaced apart from the light separating member.

  In order to achieve the above object, a lighting unit according to the present invention includes a plurality of light sources arranged in a row horizontally along a first direction and stacked vertically along a second direction perpendicular to the first direction. The length direction is directed to the first direction, the light source is spaced apart from the light source in a third direction perpendicular to the first and second directions, and reflects or transmits light along the direction of incident light. A light separating member to be moved, and a length direction thereof is directed to the first direction, and is spaced below the light separating member along the second direction, emitted from the light source, and reflected by the light separating member. And a light collecting member that refracts light, collects the light on the illumination target, and guides the light reflected from the illumination target to the light separation member.

  In the illumination unit according to the present invention having the configuration as described above, a length direction is directed to the first direction between the light source and the light separating member, and is stacked vertically along the second direction, A parallel light conversion member that converts light emitted from the light source into parallel light can be further included.

  A length direction is interposed between the light separating member and the parallel light converting member so as to be directed to the first direction, so that the light uniformity of the parallel light transmitted through the parallel light converting member is improved. A diffusion member that diffuses the parallel light can be further included.

  The light source, the parallel light converting member, the diffusing member, the light separating member, and the light collecting member may be housed in a housing and provided in one module form.

  The light collecting member is provided in a plate shape having a length corresponding to the light separating member, and a hole through which light passes is formed through the central portion of the light collecting member along the first direction. The upper surface of the light collecting member facing the light separating member is provided with a plurality of inclined surfaces that are symmetrical about the hole and are inclined inward toward the hole, and the inclination angle of the inclined surface May become smaller as it goes inward toward the hole.

  The light collecting member is provided in a plate shape having a length corresponding to the light separating member, and a hole through which light passes is formed through the central portion of the light collecting member along the first direction. The upper surface of the light collecting member facing the light separating member is provided with a plurality of inclined surfaces that are symmetrical about the hole and inclined outward with respect to the hole, and the inclination angle of the inclined surface May become smaller as it goes inward toward the hole.

  The light collecting member is provided in a plate shape having a length corresponding to the light separating member, and a hole through which light passes is formed through the central portion of the light collecting member along the first direction. The lower surface of the light collecting member is provided with a large number of inclined surfaces that are symmetrical about the hole and inclined inward toward the hole, and the inclined angle of the inclined surface is inward toward the hole. It can get smaller as you go.

  The light collecting member is provided in a plate shape having a length corresponding to the light separating member, and a hole through which light passes is formed through the central portion of the light collecting member along the first direction. The lower surface of the light collecting member is provided with a large number of inclined surfaces that are symmetrical about the hole and inclined outward with respect to the hole, and the inclination angle of the inclined surface is directed toward the hole. The smaller it goes inward, the smaller it can be.

  The condensing member has a length corresponding to the light separating member, and the first surface of the condensing member facing the light separating member is a flat surface and is a surface opposite to the first surface. The two surfaces may be curved surfaces that project downward.

  The condensing member has a length corresponding to the light separating member, and the first surface of the condensing member facing the light separating member is a flat surface and is a surface opposite to the first surface. The central portion of the two surfaces may be a flat surface, and the peripheral portion of the second surface may be a curved surface having a downwardly convex pattern.

  To achieve the above object, an optical inspection apparatus according to the present invention includes a moving unit that moves an inspection object in one direction, and an inspection object that is provided above the movement path of the inspection object and is moved by the moving unit. An illumination unit that emits light to an object; and an imaging unit that photographs the object to be inspected that is irradiated with light from the illumination unit, wherein the illumination unit emits light and incident light A light separating member that reflects or transmits light along the direction of the light, and refracts the light emitted from the light source and reflected by the light separating member, condenses it on the illumination object, and is reflected from the illumination object It includes a light collecting member for guiding light to the light separating member.

  In the optical inspection apparatus according to the present invention having the above-described configuration, the light collecting member is spaced apart from the light separating member in a direction in which the light separating member reflects light, and the light collecting member is disposed at the center of the light collecting member. A hole through which light passes is formed, and the hole is centered on one surface of the first surface of the light collecting member facing the light separating member and the second surface opposite to the first surface. A large number of inclined surfaces can be provided so as to be symmetrical.

  The inclination angle of the inclined surface may become smaller toward the inside toward the hole.

  The inclined surface may be provided so as to be inclined inward toward the hole.

  The inclined surface may be provided so as to be inclined outward with respect to the hole.

  The light collecting member may have a length corresponding to the length of the light separating member, and the inclined surface may be extended along the length direction of the light collecting member.

  The inclined surface may be a flat surface.

  The inclined surface may be a curved surface.

  The light collecting member is spaced apart from the light separating member in a direction in which the light separating member reflects light, and a second surface that is the opposite surface of the first surface of the light collecting member facing the light separating member is The curved surface may be a downwardly convex pattern.

  The light collecting member is spaced apart from the light separating member in a direction in which the light separating member reflects light, and is formed on a second surface that is opposite to the first surface of the light collecting member facing the light separating member. The central portion may be a flat surface, and the peripheral portion of the second surface may be a curved surface having a downwardly convex pattern.

  The first surface of the light collecting member may be a flat surface.

  It may further include a parallel light conversion member that is positioned between the light source and the light separation member and converts light emitted from the light source into parallel light.

  The surface of the parallel light conversion member facing the light source may be a curved surface having a convex pattern, and the surface of the parallel light conversion member facing the light separation member may be a flat surface.

  A diffusion member that is interposed between the light separation member and the parallel light conversion member and diffuses the parallel light so as to increase a light uniformity of the parallel light transmitted through the parallel light conversion member; be able to.

  The light separating member may be a beam splitter.

  The light separating member may be a half mirror.

  The light separating member and the diffusing member may have the same length in a direction perpendicular to the parallel light.

  The light source, the parallel light converting member, the diffusing member, the light separating member, and the light collecting member may be housed in a housing and provided in one module form.

  The light source, the parallel light converting member, the diffusing member, and the light separating member are arranged in a row so that the optical axis is in the horizontal direction, and the light collecting member is a direction in which the light separating member reflects light. The light separating member may be spaced apart from the light separating member.

  The photographing unit may be a line scan camera.

  In order to achieve the above object, the light collecting member according to the present invention is provided in a plate shape in which a hole through which light passes is formed in the center along the length direction, and is provided on one of the upper surface and the lower surface. A large number of inclined surfaces are formed to be symmetric about the hole.

  In the light condensing member according to the present invention having the above-described configuration, the inclination angle of the inclined surface may become smaller toward the inside toward the hole.

  The inclined surface may be provided so as to be inclined inward toward the hole.

  The inclined surface may be provided so as to be inclined outwardly with respect to the hole.

  The inclined surface may be extended long along the length direction of the light collecting member.

  The inclined surface may be a flat surface.

  According to the present invention, it is possible to minimize the loss of light applied to the inspection object (printed circuit board). Furthermore, according to the present invention, it is possible to acquire clear image data of the inclined surface of the pattern.

The drawings described below are for illustrative purposes only and do not limit the scope of the invention.
1 schematically shows an optical inspection apparatus according to the present invention. FIG. It is a top view of the "A" part of FIG. It is a sectional side view which shows the structure of the illumination unit of FIG.1 and FIG.2. FIG. 4 is a perspective view of a light separating member and a light collecting member in FIG. 3. It is a figure which expands and shows the condensing member of FIG. It is a figure which shows the operation state of the illumination unit by this invention. It is a figure which shows the operation state of the illumination unit by this invention. It is a figure which shows other embodiment of a condensing member. It is a figure which shows other embodiment of a condensing member. It is a figure which shows other embodiment of a condensing member. It is a figure which shows other embodiment of a condensing member. It is a figure which shows other embodiment of a condensing member. It is a sectional side view which shows other embodiment of an illumination unit. It is a figure which shows other embodiment of an illumination unit.

  Hereinafter, a light collecting member and an illumination unit according to a preferred embodiment of the present invention and an optical inspection apparatus using the same will be described in detail with reference to the accompanying drawings. First, by adding reference numerals to the components of each drawing, it is noted that the same components are given the same reference numerals as much as possible even if they are displayed on other drawings. Must. In the description of the present invention, if it is determined that a specific description of a related known configuration or function will obscure the gist of the present invention, a detailed description thereof will be omitted.

  FIG. 1 is a schematic view of an optical inspection apparatus according to the present invention, and FIG. 2 is a plan view of a portion “A” of FIG.

  Referring to FIGS. 1 and 2, the optical inspection apparatus 1 according to the present invention includes a moving unit 100, an illumination unit 200, and an imaging unit 300. The inspection object 10 of the optical inspection apparatus 1 is a film or tape type flexible printed circuit board, and the optical inspection apparatus 1 inspects whether or not a pattern formed on the flexible printed circuit board is defective. To do.

  The moving unit 100 moves the inspection object 10 in one direction. The illumination unit 200 is provided on the upper part of the movement path of the inspection object 10 and irradiates the inspection object 10 moved by the movement unit 100 with light. The imaging unit 300 images the inspection object 10 irradiated with light from the illumination unit 200 and acquires image data of a pattern formed on the inspection object 10.

  The moving unit 100 includes an unwinding unit (Feed Roller) 110, a guide roller 120, and a winding unit (Winding Roller) 130. The inspection object 10 is wound around the reel around the unwinding section 110, and the inspection object 10 sent from the unwinding section 110 is wound around the reel of the winding section 130 via the guide roller 120.

  The moving unit 100 can move the inspection object 10 in a step-by-step (Step by Step) method in which the inspection object 10 is moved by a certain distance and then stopped. While the inspection object 10 is temporarily stopped, the illumination unit 200 can irradiate the inspection object 10 with light while moving in a direction perpendicular to the transfer direction of the inspection object 10. Furthermore, the imaging unit 300 can move together with the illumination unit 200 in a direction perpendicular to the transfer direction of the object 10, and a pattern formed on the inspection object 10 using light emitted by the illumination unit 200. Image. The moving unit 100 can continuously move the inspection object 10 without temporarily stopping it. At that time, a plurality of lighting units 200 and photographing units 300 are provided.

  The photographing unit 300 is a CCD camera having the same image sensor (not shown) and a lens (not shown) as the CCD line sensor, and photographs the surface (pattern, etc.) of the inspection object 10 to inspect the inspection object 10. Get image data for. The acquired image data is provided to an image processing unit (not shown). The optical inspection apparatus 1 (not shown) naturally has an image processing unit (not shown) to which an image photographed by the photographing unit 300 is provided, and the image processing unit (not shown) is typical. As a typical computer system (microcomputer), it controls and processes various operations according to automatic optical inspection. For example, a line scan camera is used as the photographing unit 300.

  FIG. 3 is a side sectional view showing the configuration of the lighting unit 200 of FIGS. 1 and 2. 4 is a perspective view of the light separating member and the light collecting member in FIG. 3, and FIG. 5 is an enlarged view of the light collecting member in FIG.

  3 to 5, the lighting unit 200 includes a housing 210, a light source 220, a light separation member 230, a parallel light conversion member 240, a diffusion member 250, and a light collection member 260. The light source 220, the light separating member 230, the parallel light converting member 240, the diffusing member 250, and the light collecting member 260 are accommodated in the housing 210 and provided in the form of one module.

  The housing 210 is provided in a generally hexahedral shape. The housing 210 includes a rectangular upper wall 214 and a lower wall 216, and an edge of the upper wall 214 and an edge of the lower wall 216 are connected by a side wall 212. The light source 220, the parallel light converting member 240, the diffusing member 250, and the light separating member 230 are arranged in a row in the housing 210 so that the optical axis is in the horizontal direction, and the light collecting member 260 is the light separating member 230. The light separation member 230 may be spaced apart in a direction that reflects light. A hole 215 is formed in the upper wall 214 of the housing 210 so that the light transmitted through the light separating member 230 can pass therethrough, and the light transmitted through the light collecting member 260 can pass through the lower wall 216 of the housing 210. An opening 217 is formed.

  The light source 220 emits light. As the light source 220, a large number of light emitting diodes (LEDs) arranged in a linear shape can be used. In addition, a linear tube fluorescent lamp, a halogen lamp, or a metal halide lamp can be used as the light source 220.

  The light separating member 230 can reflect or transmit light along the direction of incident light. That is, the light separating member 230 reflects the light incident from the light source 220 in the direction toward the light collecting member 260 and transmits the light incident from the light collecting member 260 in the direction toward the hole 215 in the upper wall 214. It is possible to make it. As the light separation member 230, a beam splitter provided with a mirror 232 in a diagonal direction can be used.

  The parallel light conversion member 240 is located between the light source 220 and the light separation member 230 and converts the light emitted from the light source 220 into parallel light. A surface of the parallel light conversion member 240 facing the light source 220 may be provided as a curved surface having a convex pattern, and a surface of the parallel light conversion member 240 facing the light separation member 230 may be provided as a flat surface.

  The diffusion member 250 is located between the light separation member 230 and the parallel light conversion member 240 and diffuses the parallel light so that the light uniformity of the parallel light that has passed through the parallel light conversion member 240 is increased. The length of the diffusing member 250 following the direction perpendicular to the parallel light on the plane of FIG. 3 can be the same as the length of the light separating member 230.

  The condensing member 260 refracts the light emitted from the light source 220 and reflected by the light separating member 230, condenses the light on the inspection target (irradiation target), and reflects the light reflected from the inspection target (irradiation target). Guide to the light separating member 230.

  The light collecting member 260 is provided in a plate shape having a length corresponding to the light separating member 230. A hole 264 through which light passes is formed through the central portion of the light collecting member 260 along the length direction. A plurality of inclined surfaces 262 may be provided on the first surface (upper surface) of the light collecting member facing the light separating member 230 so as to be symmetric about the hole 264. The inclined surface 262 can be extended long along the length direction of the light collecting member 260, and the inclined surface 262 can be formed as a flat surface or a curved surface.

  The inclined surface 262 is formed so as to be inclined inward toward the hole 264, and the inclination angle of the inclined surface 262 can be decreased toward the inner side toward the hole 264 (θ1> θ2> θ3> θ4). When the inclination angle of the inclined surface 262 becomes smaller toward the inside toward the hole 264, the depth of the portion where the light is incident becomes smaller, and the refractive index of the light can be changed. That is, the light refraction angle φ1 at the outer inclined surface having the large inclination angle θ1 in the inclined surface 262 can be larger than the light refraction angle φ4 at the inner inclined surface having the small inclination angle θ4. When the light refraction angle becomes smaller as it goes from the outside to the inside of the light collecting member 260 (φ1> φ2> φ3> φ4), the light incident on the first surface (upper surface) of the light collecting member 260 is condensed. After passing through member 260, it can be collected in one place.

  6 and 7 are views illustrating an operation state of the lighting unit according to the present invention. 6 shows a case where the illumination unit irradiates light on the plane of the pattern P, and FIG. 7 shows a case where the illumination unit irradiates light on the edge inclined surface of the pattern P.

  Referring to FIGS. 6 and 7, the light emitted from the light source 220 passes through the parallel light conversion member 240 and is converted into parallel light. The parallel light passes through the diffusion member 250 and is diffused so that the light uniformity is improved, and is incident on the light separation member 230. The mirror 232 of the light separating member 230 reflects the incident light in a direction toward the light collecting member 260, and the reflected light is incident from the light collecting member 260. The light incident on the central region of the light collecting member 260 is applied to the pattern P formed on the inspection object 10 through the hole 264. The light incident on the peripheral region of the condensing member 260 is refracted by the inclined surface 262 and condensed on the pattern P formed on the inspection object 10. The light irradiated on the pattern P of the inspection object 10 is reflected by the pattern P, and then enters the light separating member 230 through the hole 264 of the light collecting member 260. The light incident on the light separation member 230 passes through the mirror 232 and enters the photographing unit 300.

  As described above, when the light collecting member 260 is provided under the light separating member 230 and the light reflected by the light separating member 230 is collected and irradiated on the inspection target 10, the conventional light collecting member 260 is not provided. Unlike lighting units, it is possible to minimize light loss. Further, when light is irradiated onto the inspection object in a state where the loss is minimized, it is possible to acquire image data with a clearer pattern.

  In the case of FIG. 7, the illumination unit irradiates the edge inclined surface of the pattern P with light. In the case of a conventional lighting unit that does not include the light collecting member 260, the light of the lighting unit is irradiated vertically downward toward the edge inclined surface, and after the light is reflected by the edge inclined surface, the light does not go to the light separating member. Therefore, a clear image of the inclined surface of the pattern cannot be obtained. However, the illumination unit of the present invention irradiates light from the direction inclined to the edge inclined surface of the pattern P, and the light reflected by the edge inclined surface is not dispersed outside but is incident on the light separating member 230. A clear image of the edge slope of the pattern can be obtained.

  8 to 12 are views showing another embodiment of the light collecting member.

  As shown in FIG. 8, the inclined surface 262_1 provided on the first surface (upper surface) of the light collecting member 260 may be provided so as to incline outward with the hole as a center, and the inclination angle of the inclined surface 262 is determined as the hole. As it goes inward, it can become smaller (θ1> θ2> θ3> θ4).

  As illustrated in FIGS. 9 and 10, the inclined surfaces 262_2 and 262_3 may be provided on the second surface (lower surface) of the light collecting member 260. The inclined surface 262_2 can be provided so as to incline inward toward the hole (FIG. 9), and the inclined surface 262_3 can be provided so as to be inclined outwardly about the hole (FIG. 10). In addition, the inclined surfaces 262_2 and 262_3 can become smaller toward the inside toward the hole (θ1> θ2> θ3> θ4).

  As shown in FIG. 11, the condensing member 260 ′ has a curved surface in which the first surface P1 facing the light separating member is a flat surface, and the second surface S1 opposite to the first surface P1 is convex downward. Can be provided.

  As shown in FIG. 12, the condensing member 260 ″ has a flat surface in which the first surface P1 facing the light separating member and the center portion P2 of the second surface opposite to the first surface P1 are flat. The peripheral part S1 of the surface may be provided so as to form a curved surface having a downwardly convex pattern.

  FIG. 13 is a side sectional view showing another embodiment of the lighting unit. Since the lighting unit shown in FIG. 13 performs the same function as the lighting unit shown in FIG. 3, a detailed description thereof will be omitted, and the following will mainly explain the structural differences in the arrangement of components. Explained.

  Referring to FIG. 13, the lighting unit includes a housing 210, light sources 220-1, 220-2 and 220-3, a light separation member 230, parallel light conversion members 240-1, 240-2 and 240-3, and a diffusion member 250. And a light collecting member 260. The light sources 220-1, 220-2 and 220-3, the light separation member 230, the parallel light conversion members 240-1, 240-2 and 240-3, the diffusion member 250, and the light collecting member 260 are accommodated in the housing 210. And can be provided in one module form.

  The housing 210 may be provided in a generally hexahedral shape. The housing 210 has a rectangular upper wall 214 and a lower wall 216, and the edge of the upper wall 214 and the edge of the lower wall 216 are connected by a side wall 212. A hole 215 is formed in the upper wall 214 of the housing 210 so that the light transmitted through the light separating member 230 can pass therethrough, and the light transmitted through the light collecting member 260 can pass through the lower wall 216 of the housing 210. An opening 217 is formed.

  A plurality of light sources 220-1, 220-2, and 220-3 are horizontally arranged in a row along a first direction perpendicular to the plane of FIG. 13, and along a second direction perpendicular to the first direction. Can be stacked one above the other. The light separating member 230 may be disposed such that the length direction is in the first direction and the light separating member 230 is separated from the light sources 220-1, 220-2, and 220-3 in a third direction perpendicular to the first and second directions. . The light collecting member 260 may be spaced apart from the light separating member 230 along the second direction in the length direction in the first direction. The parallel light conversion members 240-1, 240-2 and 240-3 have a length direction in the first direction between the light sources 220-1, 220-2 and 220-3 and the light separation member 230, and the second It can be stacked up and down along the direction. The diffusing member 250 may be interposed between the light separating member 230 and the parallel light converting members 240-1, 240-2, 240-3 such that the length direction is directed to the first direction.

  The case where a beam splitter is used as the light separating member 230 has been described above as an example. However, as the light separation member, a half mirror (Half Mirror) 230 'can be used as shown in FIG. 14 in addition to the beam splitter.

  The description of the present invention is merely illustrative of the technical idea of the present invention, and any person having ordinary knowledge in the technical field to which the present invention belongs will depart from the essential characteristics of the present invention. Various modifications and variations are possible without departing from the scope. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to explain it, and the scope of the technical idea of the present invention is not limited by such an embodiment. Absent. The protection scope of the present invention shall be construed by the following claims, and all technical ideas within the equivalent scope should be construed as being included in the scope of the right of the present invention.

DESCRIPTION OF SYMBOLS 1 Optical inspection apparatus 100 Moving unit 200 Illumination unit 210 Housing 220 Light source 230 Light separation member 240 Parallel light conversion member 250 Diffusing member 260 Condensing member 262 Inclined surface 264 Hall 300 Imaging unit

Claims (54)

A light source that emits light;
A light separating member that reflects or transmits light along the direction of incident light;
A light collecting member that refracts the light emitted from the light source and is reflected by the light separating member and focuses the light on the illumination target, and guides the light reflected from the illumination target to the light separating member;
A lighting unit comprising: The condensing member is spaced from the light separating member in a direction in which the light separating member reflects light,
A hole through which light passes is formed at the center of the light collecting member,
Among the first surface of the light collecting member facing the light separating member and the second surface that is the opposite surface of the first surface, any one of the surfaces is symmetric with respect to the hole. The lighting unit according to claim 1, wherein an inclined surface is provided.   The lighting unit according to claim 2, wherein an inclination angle of the inclined surface decreases toward an inner side toward the hole.   The lighting unit according to claim 3, wherein the inclined surface is provided to be inclined inward toward the hole.   The lighting unit according to claim 3, wherein the inclined surface is provided to be inclined outward with respect to the hole. The light collecting member has a length corresponding to the length of the light separating member;
The lighting unit according to claim 4, wherein the inclined surface is extended long along a length direction of the light collecting member.   The lighting unit according to claim 6, wherein the inclined surface is a flat surface.   The lighting unit according to claim 6, wherein the inclined surface is a curved surface. The condensing member is spaced from the light separating member in a direction in which the light separating member reflects light,
The illumination unit according to claim 1, wherein the light separation member is a curved surface having a downwardly convex pattern on a second surface that is an opposite surface of the first surface of the condensing member that faces the light separation member. The condensing member is spaced from the light separating member in a direction in which the light separating member reflects light,
The central portion of the second surface, which is the opposite surface of the first surface of the light collecting member facing the light separating member, is a flat surface, and the peripheral portion of the second surface is a curved surface having a downwardly convex pattern. The lighting unit according to claim 1.   The lighting unit according to claim 9, wherein the first surface of the light collecting member is a flat surface.   The illumination unit according to claim 2, further comprising a parallel light conversion member that is positioned between the light source and the light separation member and converts light emitted from the light source into parallel light.   13. The illumination according to claim 12, wherein a surface of the parallel light conversion member facing the light source is a curved surface having a convex pattern, and a surface of the parallel light conversion member facing the light separation member is a flat surface. unit.   A diffusion member that is interposed between the light separation member and the parallel light conversion member and diffuses the parallel light so as to improve the light uniformity of the parallel light transmitted through the parallel light conversion member; The lighting unit according to claim 12.   The illumination unit according to claim 14, wherein the light separation member is a beam splitter.   The lighting unit according to claim 14, wherein the light separating member is a half mirror.   The illumination unit according to claim 15 or 16, wherein lengths of the light separating member and the diffusing member in a direction perpendicular to the parallel light are the same. The light source, the parallel light converting member, the diffusing member, and the light separating member are arranged in a line so that the optical axis is in the horizontal direction,
The illumination unit according to claim 14, wherein the light collecting member is spaced apart from the light separating member in a direction in which the light separating member reflects light. A plurality of light sources arranged in a row horizontally along a first direction and stacked vertically along a second direction perpendicular to the first direction;
Light having a length direction toward the first direction and spaced apart from the light source in a third direction perpendicular to the first and second directions and reflecting or transmitting light along the direction of incident light A separating member;
A length direction is directed to the first direction, and is spaced below the light separation member along the second direction, refracting light emitted from the light source and reflected by the light separation member, A light condensing member for condensing and guiding light reflected from the illumination object to the light separating member.   A parallel light converting member that converts the light emitted from the light source into parallel light that is stacked between the light source and the light separating member in a length direction in the first direction and vertically stacked along the second direction. The lighting unit according to claim 19, further comprising:   A length direction is interposed between the light separation member and the parallel light conversion member so as to be directed to the first direction, so that the light uniformity of the parallel light transmitted through the parallel light conversion member is improved. The illumination unit according to claim 20, further comprising a diffusing member for diffusing the parallel light.   The lighting unit according to claim 21, wherein the light source, the parallel light converting member, the diffusing member, the light separating member, and the light collecting member are housed in a housing and provided in one module form. . The light collecting member is provided in a plate shape having a length corresponding to the light separating member, and a hole through which light passes is formed through the central portion of the light collecting member along the first direction.
The upper surface of the light collecting member facing the light separating member is provided with a plurality of inclined surfaces that are symmetrical about the hole and are inclined inward toward the hole, and the inclination angle of the inclined surface The lighting unit according to claim 19, wherein the lighting unit becomes smaller toward an inner side toward the hole. The light collecting member is provided in a plate shape having a length corresponding to the light separating member, and a hole through which light passes is formed through the central portion of the light collecting member along the first direction.
The upper surface of the light collecting member facing the light separating member is provided with a plurality of inclined surfaces that are symmetrical about the hole and inclined outward with respect to the hole, and the inclination angle of the inclined surface The lighting unit according to claim 19, wherein the lighting unit becomes smaller toward an inner side toward the hole. The light collecting member is provided in a plate shape having a length corresponding to the light separating member, and a hole through which light passes is formed through the central portion of the light collecting member along the first direction.
The lower surface of the light collecting member is provided with a large number of inclined surfaces that are symmetrical about the hole and inclined inward toward the hole, and the inclined angle of the inclined surface is inward toward the hole. The lighting unit according to claim 19, wherein the lighting unit becomes smaller as it goes. The light collecting member is provided in a plate shape having a length corresponding to the light separating member, and a hole through which light passes is formed through the central portion of the light collecting member along the first direction.
The lower surface of the light collecting member is provided with a large number of inclined surfaces that are symmetrical about the hole and inclined outward with respect to the hole, and the inclination angle of the inclined surface is directed toward the hole. The lighting unit according to claim 19, wherein the lighting unit becomes smaller toward an inner side. The light collecting member has a length corresponding to the light separating member;
The first surface of the condensing member facing the light separating member is a flat surface,
The lighting unit according to claim 19, wherein the second surface, which is the opposite surface of the first surface, is a curved surface having a downwardly projecting pattern. The light collecting member has a length corresponding to the light separating member;
The first surface of the condensing member facing the light separating member is a flat surface,
20. The illumination according to claim 19, wherein a central portion of the second surface, which is the opposite surface of the first surface, is a flat surface, and a peripheral flange portion of the second surface is a curved surface having a downward projecting pattern. unit. In optical inspection equipment,
A moving unit for moving the inspection object in one direction;
An illumination unit that is provided on an upper part of a movement path of the inspection object and irradiates light to the inspection object moved by the movement unit;
An imaging unit that images the inspection object irradiated with light from the illumination unit, and
The lighting unit includes a light source that emits light;
A light separating member that reflects or transmits light along the direction of incident light;
A light collecting member that refracts the light emitted from the light source and reflected by the light separating member, condenses the light on the illumination target, and guides the light reflected from the illumination target to the light separating member. An optical inspection device. The condensing member is spaced from the light separating member in a direction in which the light separating member reflects light,
A hole through which light passes is formed at the center of the light collecting member,
Any one of the first surface of the light collecting member facing the light separating member and the second surface opposite to the first surface has a large number of inclinations so as to be symmetrical about the hole. 30. The optical inspection apparatus of claim 29, wherein a surface is provided.   31. The optical inspection apparatus according to claim 30, wherein an inclination angle of the inclined surface decreases as it goes inward toward the hole.   32. The optical inspection apparatus according to claim 31, wherein the inclined surface is provided so as to be inclined inward toward the hole.   32. The optical inspection apparatus according to claim 31, wherein the inclined surface is provided to be inclined outward with respect to the hole. The light collecting member has a length corresponding to the length of the light separating member;
34. The optical inspection apparatus according to claim 32, wherein the inclined surface extends long along a length direction of the light collecting member.   The optical inspection apparatus according to claim 34, wherein the inclined surface is a flat surface.   The optical inspection apparatus according to claim 34, wherein the inclined surface is a curved surface. The condensing member is spaced from the light separating member in a direction in which the light separating member reflects light,
30. The optical inspection apparatus according to claim 29, wherein a second surface opposite to the first surface of the light condensing member facing the light separating member is a curved surface having a convex pattern. The condensing member is spaced from the light separating member in a direction in which the light separating member reflects light,
The central portion of the second surface, which is the opposite surface of the first surface of the light condensing member, facing the light separating member is a flat surface, and the peripheral portion of the second surface is a curved surface with a downward projecting pattern. 30. The optical inspection apparatus according to claim 29.   39. The optical inspection apparatus according to claim 37, wherein the first surface of the light collecting member is a flat surface.   31. The optical inspection apparatus according to claim 30, further comprising a parallel light conversion member that is located between the light source and the light separation member and converts light emitted from the light source into parallel light.   41. The optical device according to claim 40, wherein a surface of the parallel light conversion member facing the light source is a convex curved surface, and a surface of the parallel light conversion member facing the light separation member is a flat surface. Inspection device.   A diffusion member that is interposed between the light separation member and the parallel light conversion member and diffuses the parallel light so as to increase a light uniformity of the parallel light transmitted through the parallel light conversion member; 41. The optical inspection apparatus according to claim 40.   43. The optical inspection apparatus according to claim 42, wherein the light separation member is a beam splitter.   43. The optical inspection apparatus according to claim 42, wherein the light separation member is a half mirror.   45. The optical inspection apparatus according to claim 43, wherein lengths of the light separating member and the diffusing member in a direction perpendicular to the parallel light are the same.   The optical inspection according to claim 42, wherein the light source, the parallel light converting member, the diffusing member, the light separating member, and the light collecting member are housed in a housing and provided in one module form. apparatus. The light source, the parallel light converting member, the diffusing member, and the light separating member are arranged in a row so that the optical axis is directed in the horizontal direction,
47. The optical inspection apparatus according to claim 46, wherein the light collecting member is spaced apart from the light separating member in a direction in which the light separating member reflects light.   The optical inspection apparatus according to claim 30, wherein the photographing unit is a line scan camera.   A hole through which light passes is provided in a plate shape formed in the center along the length direction, and a large number of inclined surfaces are symmetrical about the hole on one of the upper surface and the lower surface. A condensing member formed.   50. The condensing member according to claim 49, wherein an inclination angle of the inclined surface becomes smaller toward an inner side toward the hole.   51. The light collecting member according to claim 50, wherein the inclined surface is provided to be inclined inward toward the hole.   51. The light collecting member according to claim 50, wherein the inclined surface is provided to be inclined outwardly with respect to the hole.   53. The light collecting member according to claim 51 or 52, wherein the inclined surface extends long along a length direction of the light collecting member.   54. The light collecting member according to claim 53, wherein the inclined surface is a flat surface.

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