KR101208573B1 - Optical condensing member and illumination unit, and optical inspection apparatus using the same - Google Patents

Abstract

The present invention discloses a light collecting member, an illumination unit, and an optical inspection apparatus using the same, and is characterized by condensing light irradiated onto an inspection object using the light collecting member.

According to this feature, it is possible to minimize the loss of light irradiated onto the inspection object (printed circuit board) and to obtain clear image data of the patterned inclined surface formed on the substrate.

Optical inspection, substrate pattern, lighting unit, light collecting member

Description

Condensing member, lighting unit, and optical inspection device using the same {OPTICAL CONDENSING MEMBER AND ILLUMINATION UNIT, AND OPTICAL INSPECTION APPARATUS USING THE SAME}

The present invention relates to a light collecting member and an illumination unit, and an optical inspection apparatus using the same, and more particularly, a light collecting member for collecting light, an illumination unit for irradiating light to an inspection object (printed circuit board) using the light collecting member, The present invention relates to an optical inspection apparatus for imaging a pattern formed on an inspection object (printed circuit board) by using light irradiated by an illumination unit, and processing the captured image information to inspect the presence or absence of a defect in the pattern formed on the inspection object.

In recent years, printed circuit boards, which are one of the main materials used in various semiconductor integrated circuits such as LCD driver ICs, memory and LSIs, and micro products, have been manufactured in the form of films and tapes. .

Among such printed circuit boards, printed circuit boards commonly referred to as tape automatic bonding (TAB) or chip on film (COF) substrates are used. The printed circuit board in the form of a film / tape is formed through a manufacturing process such as exposure, development, etching, etc., and the pattern is extremely miniaturized as the semiconductor device is increasingly miniaturized, thereby inspecting pattern defects through the eyes of an operator. Is becoming increasingly impossible. Therefore, accurate detection of pattern defects on a printed circuit board is an important factor in improving inspection reliability, which is the core of an automatic optical inspection device.

Furthermore, in the inspection of TAB and COF substrates in which the pattern width is extremely miniaturized among printed circuit boards in the form of films and tapes, the limitation of the brightness generated in the existing lighting device and the uniformity of light in the inspection area are very important. However, it is difficult to obtain a stabilized image in the conventional lighting device because light loss is largely generated before the light of the light source reaches the surface of the object to be inspected, so that only the amount of light remaining after the light loss is transmitted to the image sensor through the lens.

The present invention provides a light collecting member, an illumination unit, and an optical inspection apparatus using the same, which minimizes the loss of light irradiated onto an inspection object (printed circuit board), thereby obtaining more uniform luminance on the entire surface of the pattern, thereby improving inspection reliability. It is for.

The objects of the present invention are not limited thereto, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, the lighting unit according to the present invention includes a light source for emitting light; A light separation member for reflecting or transmitting light according to the direction of incident light; And a light collecting member that refracts the light emitted from the light source and reflected by the light separation member to focus the illumination object, and guides the light reflected from the illumination object to the light separation member.

In the illumination unit according to the present invention having the configuration as described above, the light collecting member is disposed away from the light separating member in a direction in which the light separating member reflects light, and the light passes through the central portion of the light collecting member. A hole is formed, and a plurality of inclined surfaces may be provided on one of the first surface of the light collecting member facing the optical separation member and the second surface opposite to the first surface to be symmetrical about the hole. have.

The inclination angle of the inclined surfaces may be smaller toward the inside toward the hole.

The inclined surfaces may be provided to be inclined inward toward the hole.

The inclined surfaces may be provided to be inclined outward with respect to the hole.

The light collecting member may have a length corresponding to the length of the light separating member, and the inclined surfaces may extend in the length direction of the light collecting member.

The inclined surfaces may be flat, and the inclined surfaces may be curved.

The light collecting member is spaced apart from the light separating member in a direction in which the light separating member reflects light, and a second surface that is opposite to the first surface of the light collecting member facing the light separating member is convex downward. It may be curved.

The light collecting member may be spaced apart from the light separating member in a direction in which the light separating member reflects light, and a central portion of the second surface, which is an opposite surface to the first surface of the light collecting member facing the light separating member, may be flat. The periphery of the second surface may be a curved surface convex downward.

The first surface of the light collecting member may be flat.

The light source may further include a parallel light converting member positioned between the light separating member and converting light emitted from the light source into parallel light.

The surface facing the light source of the parallel light conversion member may be a convex curved surface, and the surface facing the light separation member of the parallel light conversion member may be a plane.

The light emitting device may further include a diffusion member interposed between the light separation member and the parallel light conversion member to diffuse the parallel light so that the light uniformity of the parallel light transmitted through the parallel light conversion member is increased.

The light splitting member may be a beam splitter.

The light separating member may be a half mirror.

The length of the light separation member and the direction perpendicular to the parallel light of the diffusion member may be the same.

The light source, the parallel light conversion member, the diffusion member, and the light separation member are arranged in a line so that an optical axis faces a horizontal direction, and the light collecting member is arranged in the direction in which the light separation member reflects light. Can be spaced apart from.

In order to achieve the above object, the lighting unit according to the present invention includes a plurality of light sources arranged in a horizontal line in a first direction and stacked vertically in a second direction perpendicular to the first direction; A light separation member having a longitudinal direction toward the first direction, spaced apart from the light sources in a third direction perpendicular to the first and second directions, and reflecting or transmitting light according to the direction of incident light; And a longitudinal direction facing the first direction and spaced apart below the light separation member along the second direction, and refracting the light emitted from the light sources and reflected by the light separation member to focus the illumination object. And a light collecting member for guiding the light reflected from the illumination object to the light separating member.

In the lighting unit according to the present invention having the configuration as described above, the longitudinal direction between the light source and the light separating member is stacked up and down along the second direction toward the first direction, the light source is The apparatus may further include parallel light converting members for converting the emitted light into parallel light.

A diffusion member interposed between the light separation member and the parallel light conversion members such that a longitudinal direction thereof faces the first direction, and diffusing the parallel light so that the light uniformity of the parallel light passing through the parallel light conversion members is increased; It may further include.

The light source, the parallel light conversion members, the diffusion member, the light separation member, and the light collection member may be accommodated in a housing and provided in a module form.

The light collecting member may be provided in a plate shape having a length corresponding to the light separating member, and a hole through which light passes may be formed through the first direction in a central portion of the light collecting member to face the light separating member. The upper surface of the light collecting member may be provided with a plurality of inclined surfaces symmetrical with respect to the hole and inclined inward toward the hole, and the inclination angle of the inclined surfaces may become smaller toward the inside toward the hole.

The light collecting member may be provided in a plate shape having a length corresponding to the light separating member, and a hole through which light passes may be formed through the first direction in a central portion of the light collecting member to face the light separating member. The upper surface of the light collecting member may be provided with a plurality of inclined surfaces symmetrical with respect to the hole and inclined outwardly with respect to the hole, and the inclination angle of the inclined surfaces may be smaller toward the inside toward the hole.

The light collecting member is provided in a plate shape having a length corresponding to the light separating member, and a hole through which light passes is formed in a central portion of the light collecting member along the first direction, and the hole is formed on a bottom surface of the light collecting member. A plurality of inclined surfaces symmetrically with respect to and inclined inwardly toward the hole are provided, and the inclination angle of the inclined surfaces may be smaller toward the inward toward the hole.

The light collecting member is provided in a plate shape having a length corresponding to the light separating member, and a hole through which light passes is formed in a central portion of the light collecting member along the first direction, and the hole is formed on a bottom surface of the light collecting member. A plurality of inclined surfaces symmetrically with respect to the hole and inclined outwardly with respect to the hole may be provided, and the inclination angle of the inclined surfaces may be smaller toward the inside toward the hole.

The condensing lens has a length corresponding to the light separating member, and the first surface of the light collecting member facing the light separating member is a flat surface, and a second surface that is opposite to the first surface is convex downward. Can be.

The condensing lens has a length corresponding to the light separating member, the first surface of the light collecting member facing the light separating member is flat, the central portion of the second surface opposite to the first surface is flat, and The perimeter of the second surface may be a curved surface convex downward.

In order to achieve the above object, the optical inspection device according to the present invention comprises a moving unit for moving the inspection object in one direction; An illumination unit provided above the movement path of the inspection object and irradiating light to the inspection object moved by the moving unit; And a photographing unit which photographs the inspection object to which the light of the illumination unit is irradiated, wherein the illumination unit includes a light source emitting light; A light separation member for reflecting or transmitting light according to the direction of incident light; And a light collecting member that refracts the light emitted from the light source and reflected by the light separation member to focus the illumination object, and guides the light reflected from the illumination object to the light separation member.

In the optical inspection apparatus according to the present invention having the configuration as described above, the light collecting member is disposed away from the light separating member in a direction in which the light separating member reflects light, and light passes through a central portion of the light collecting member. A hole is formed, and a plurality of inclined surfaces may be provided on one of the first surface of the light collecting member facing the light separation member and a second surface opposite to the first surface to be symmetrical about the hole. Can be.

The inclination angle of the inclined surfaces may be smaller toward the inside toward the hole.

The inclined surfaces may be provided to be inclined inward toward the hole.

The inclined surfaces may be provided to be inclined outward with respect to the hole.

The light collecting member may have a length corresponding to the length of the light separating member, and the inclined surfaces may extend in the length direction of the light collecting member.

The inclined surfaces may be flat.

The inclined surfaces may be curved.

The light collecting member is spaced apart from the light separating member in a direction in which the light separating member reflects light, and a second surface that is opposite to the first surface of the light collecting member facing the light separating member is convex downward. It may be a curved surface of.

The light collecting member may be spaced apart from the light separating member in a direction in which the light separating member reflects light, and a central portion of the second surface, which is an opposite surface to the first surface of the light collecting member facing the light separating member, may be flat. The periphery of the second surface may be a curved surface convex downward.

The first surface of the light collecting member may be flat.

The light source may further include a parallel light converting member positioned between the light separating member and converting light emitted from the light source into parallel light.

The surface facing the light source of the parallel light conversion member may be a convex curved surface, and the surface facing the light separation member of the parallel light conversion member may be a plane.

The light emitting device may further include a diffusion member interposed between the light separation member and the parallel light conversion member to diffuse the parallel light so that the light uniformity of the parallel light transmitted through the parallel light conversion member is increased.

The light splitting member may be a beam splitter.

The light separating member may be a half mirror.

The length of the light separation member and the direction perpendicular to the parallel light of the diffusion member may be the same.

The light source, the parallel light conversion member, the diffusion member, the light separation member, and the light collecting member may be accommodated in a housing and provided in a module form.

The light source, the parallel light conversion member, the diffusion member, and the light separation member are arranged in a line so that an optical axis faces a horizontal direction, and the light collecting member is arranged in the direction in which the light separation member reflects light. Can be spaced apart from.

The photographing unit may be a line scan camera.

In order to achieve the above object, the light collecting member according to the present invention may be provided in a plate shape in which a hole through which light passes is formed in a central portion along a longitudinal direction, and a plurality of upper and lower surfaces may be symmetrical about the hole. It is characterized in that the inclined surfaces are formed.

In the light collecting member according to the present invention having the configuration as described above, the inclination angle of the inclined surfaces may be smaller toward the inside toward the hole.

The inclined surfaces may be provided to be inclined inward toward the hole.

The inclined surfaces may be provided to be inclined outward with respect to the hole.

The inclined surfaces may extend in the longitudinal direction of the light collecting member.

The inclined surfaces may be flat.

According to the present invention, it is possible to minimize the loss of light irradiated to the inspection object (printed circuit board).

According to the present invention, clear image data of the inclined surface of the pattern can be obtained.

Hereinafter, a light collecting member, an illumination unit, and an optical inspection apparatus using the same according to exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used to designate the same or similar components throughout the drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

(Example)

1 is a view schematically showing an optical inspection apparatus according to the present invention, and FIG. 2 is a plan view of a portion “A” of FIG. 1.

1 and 2, the optical inspection apparatus 1 according to the present invention includes a moving unit 100, an illumination unit 200, and an imaging unit 300. The inspection target 10 of the optical inspection device 1 may be a film or tape type flexible printed circuit board, and the optical inspection device 1 may check whether a pattern formed on the flexible printed circuit board is defective. Check it.

The moving unit 100 moves the inspection object 10 in one direction. The illumination unit 200 is provided on the moving path of the inspection object 10 and irradiates light to the inspection object 10 moved by the movement unit 100. The photographing unit 300 captures the inspection object 10 to which the light of the illumination unit 200 is irradiated to acquire image data of a pattern formed on the inspection object 10.

The moving unit 100 includes a feed roller 110, guide rollers 120, and a winding roller 130. The test object 10 is wound around the reel to the unwinding unit 110, and the test object 10 sent out from the unwinding unit 110 is wound around the reel of the winding unit 130 through the guide rollers 120.

The moving unit 100 may move the inspection object 10 in a step-by-step manner in which the inspection object 10 is moved by a predetermined distance and then stopped. During the time when the inspection object 10 is temporarily stopped, the illumination unit 200 may irradiate light to the inspection object 10 while moving in a direction perpendicular to the conveying direction of the inspection object 10. The photographing unit 300 may also move in a direction perpendicular to the transport direction of the object 10 together with the illumination unit 200, and capture a pattern formed on the inspection object 10 by using the light irradiated by the illumination unit 200. do. The moving unit 100 may continuously move the inspection object 10 without temporarily stopping the inspection object 10. In this case, the lighting unit 200 and the imaging unit 300 may be provided in plural numbers.

The photographing unit 300 is a CCD camera having an image sensor (not shown) and a lens (not shown) such as a CCD line sensor. The photographing unit 300 photographs a surface (pattern, etc.) of the inspection object 10 to the inspection object 10. Acquire image data for The acquired image data is provided to an image processor (not shown). Although not shown, the optical inspection apparatus 1 naturally has an image processing unit (not shown) that receives an image captured by the photographing unit 300, and the image processing unit (not shown) is a typical computer system (aka, microcomputer). It is provided with, to control and process the overall operation according to the automatic optical inspection. For example, a line scan camera may be used as the imaging unit 300.

3 is a side cross-sectional view illustrating a configuration of the lighting unit 200 of FIGS. 1 and 2. 4 is a perspective view of the light separating member and the light collecting member of FIG. 3, and FIG. 5 is an enlarged view of the light collecting member of FIG. 3.

3 to 5, the lighting unit 200 includes a housing 210, a light source 220, a light separation member 230, a parallel light conversion member 240, a diffusion member 250, and a light collecting member ( 260). The light source 220, the light separating member 230, the parallel light converting member 240, the diffusing member 250, and the light collecting member 260 may be accommodated in the housing 210 and provided in a module form.

The housing 210 may be provided in a generally hexahedral shape. The housing 210 has a rectangular top wall 214 and a bottom wall 216, and the edge of the top wall 214 and the edge of the bottom wall 216 are connected by side walls 212. The light source 220, the parallel light conversion member 240, the diffusion member 250, and the light separation member 230 are disposed in a line in the housing 210 so that the optical axis faces the horizontal direction. The light separating member 230 may be spaced apart from the light separating member 230 in a direction in which light is reflected. A hole 215 is formed in the upper wall 214 of the housing 210 so that light transmitted by the light separating member 230 passes, and a light collecting member 260 is transmitted through the lower wall 216 of the housing 210. The opening 217 is formed to allow light to pass through.

The light source 220 emits light. As the light source 220, a plurality of linearly arranged light emitting diodes (LEDs) may be used. In addition, a linear tube fluorescent lamp, a halogen lamp, or a metal halide lamp may be used as the light source 220.

The light separation member 230 may reflect or transmit light according to the direction of incident light. That is, the light separating member 230 reflects the light incident from the light source 220 in the direction toward the light collecting member 260, and the light incident from the light collecting member 260 is the hole 215 of the upper wall 214. It can be transmitted in the direction facing. As the light splitting member 230, a beam splitter provided with a mirror 232 in a diagonal direction may be used.

The parallel light conversion member 240 is positioned between the light source 220 and the light separation member 230 and converts the light emitted by the light source 220 into parallel light. The surface facing the light source 220 of the parallel light conversion member 240 may be provided as a convex curved surface, and the surface facing the light separation member 230 of the parallel light conversion member 2400 may be provided as a plane.

The diffusion member 250 is positioned between the light separation member 230 and the parallel light conversion member 240 and diffuses parallel light so that the light uniformity of the parallel light passing through the parallel light conversion member 240 is increased. The length of the diffusion member 250 along the direction perpendicular to the parallel light on the plane of FIG. 3 may be the same as the length of the light separation member 230.

The light collecting member 260 refracts the light emitted from the light source 220 and reflected by the light separating member 230 to condense the light onto the inspection object (irradiation object), and optically separates the light reflected from the inspection object (irradiation object) Guide to member 230.

The light collecting member 260 may be provided in a plate shape having a length corresponding to the light separating member 230. A hole 264 through which light passes is formed in the center of the light collecting member 260 along the length direction. A plurality of inclined surfaces 262 may be provided on the first surface (upper surface) of the light collecting member facing the light separating member 230 to be symmetrical about the hole 264. The inclined surfaces 262 may extend in the longitudinal direction of the light collecting member 260, and the inclined surfaces 262 may be formed in a flat or curved surface.

The inclined surfaces 262 may be formed to be inclined inwardly toward the hole 264, and the inclination angle of the inclined surfaces 262 may be smaller toward the inward toward the hole 264. (Θ ₁ > θ ₂ > θ ₃ > θ ₄ ) When the inclination angles of the inclined surfaces 262 become smaller toward the hole 264 inwardly, the thickness of the portion where the light is incident may be reduced, thereby changing the refractive index of the light. That is, the refraction angle φ ₁ of the light at the outer inclined surface having the larger inclination angle θ ₁ among the inclined surfaces 262 may be larger than the refraction angle φ ₄ of the light at the inner inclined surface having the small inclination angle θ ₄ . In this way, when the angle of refraction of light decreases from the outside of the light collecting member 260 to the inside (φ ₁ > φ ₂ > φ ₃ > φ ₄ ), the light incident on the first surface (upper surface) of the light collecting member 260 is collected. After passing through the member 260 may be gathered in one place.

6 and 7 are views showing an operating state of the lighting unit according to the present invention. FIG. 6 shows a case where the illumination unit irradiates light onto the plane of the pattern P, and FIG. 7 shows a case where the illumination unit irradiates light onto the edge inclined plane of the pattern P. FIG.

6 and 7, the light emitted from the light source 220 is converted into parallel light while passing through the parallel light converting member 240. The parallel light is diffused to increase the light uniformity while passing through the diffusion member 250 and is incident to the light separation member 230. The mirror 232 of the light separation member 230 reflects the incident light in a direction toward the light collecting member 260, and the reflected light is incident to the light collecting member 260. Light incident on the central region of the light collecting member 260 passes through the hole 264 and is irradiated onto the pattern P formed in the inspection object 10. Light incident on the peripheral area of the light collecting member 260 is refracted by the inclined surfaces 262 to be focused on the pattern P formed on the inspection object 10. The light irradiated onto the pattern P of the inspection object 10 is reflected by the pattern P, and then passes through the hole 264 of the light collecting member 260 and enters the light separation member 230. Light incident on the light separation member 230 passes through the mirror 232 and flows into the imaging unit 300.

As such, when the light collecting member 260 is provided under the light separating member 230, the light reflected by the light separating member 230 is collected and irradiated to the inspection object 10, the light collecting member 260 is Unlike conventional lighting units that are not equipped, the loss of light can be minimized. In addition, when light is irradiated to the inspection object with the loss minimized, it is possible to obtain a clearer image data.

In the case of FIG. 7, the illumination unit irradiates light to the edge inclined surface of the pattern P. FIG. In the conventional lighting unit without the light collecting member 260, the light of the lighting unit is irradiated vertically downwardly toward the edge inclined plane, so that after the light is reflected by the edge inclined plane, the light is not directed to the light separation member, Since it is dispersed outward, a clear image of the edge inclined surface of the pattern could not be obtained. However, the illumination unit of the present invention irradiates light in the inclined direction to the edge inclined surface of the pattern P, so that the light reflected by the edge inclined surface is incident to the light separation member 230 without being dispersed outward, the edge of the pattern A clear image of the inclined surface can be obtained.

8 to 12 are views showing another example of the light collecting member.

As illustrated in FIG. 8, the inclined surfaces 262_1 provided on the first surface (upper surface) of the light collecting member 260 may be provided to be inclined outward with respect to the hole, and the inclination angles of the inclined surfaces 262 may be Can be made smaller toward the inner side (θ ₁ > θ ₂ > θ ₃ > θ ₄ ).

9 and 10, the inclined surfaces 262_2 and 262_3 may be provided on the second surface (lower surface) of the light collecting member 260. The inclined surfaces 262_2 may be provided to be inclined inwardly toward the hole (FIG. 9), and the inclined surfaces 262_3 may be provided to be inclined outwardly about the hole (FIG. 10). 262_3) may become smaller toward the hole toward the inside (θ ₁ > θ ₂ > θ ₃ > θ ₄ ).

As shown in FIG. 11, in the light collecting member 260 ′, the first surface P1 facing the light separation member forms a plane, and the second surface S1 opposite to the first surface P1 faces downward. It may be provided to form a convex shape curved surface.

As shown in FIG. 12, the light collecting member 260 ″ has a planar surface at the center P2 of the first surface P1 facing the light separation member and the second surface opposite to the first surface P1. The peripheral portion S1 of the second surface may be provided to form a curved surface having a convex shape downward.

13 is a side sectional view showing another example of a lighting unit. Since the lighting unit shown in FIG. 13 performs the same function as the lighting unit shown in FIG. 3, a detailed description thereof will be omitted, and only the differences in the arrangement structure of the components will be described below.

Referring to FIG. 13, the lighting unit includes a housing 210, light sources 220-1, 220-2, 220-3, a light splitting member 230, parallel light converting members 240-1, 240-2, 240-3, and a diffusion member 250. And a light collecting member 260. The light sources 220-1, 220-2, 220-3, the light separating member 230, the parallel light converting members 240-1, 240-2, 240-3, the diffusing member 250, and the light collecting member 260 are disposed in the housing 210. It can be accommodated and provided in one module form.

The housing 210 may be provided in a generally hexahedral shape. The housing 210 has a rectangular upper wall 214 and a lower wall 216, and the edge of the upper wall 214 and the edge of the lower wall 216 are connected by the side wall 212. A hole 215 is formed in the upper wall 214 of the housing 210 so that light transmitted by the light separating member 230 passes, and a light collecting member 260 is transmitted through the lower wall 216 of the housing 210. The opening 217 is formed to allow light to pass through.

The plurality of light sources 220-1, 220-2, and 220-3 may be arranged in a row in a horizontal line along a first direction perpendicular to the plane of FIG. 13, and may be stacked vertically along a second direction perpendicular to the first direction. . The light separation member 230 may be disposed in a length direction toward the first direction and spaced apart from the light sources 220-1, 220-2, and 220-3 in the third direction perpendicular to the first and second directions. The light collecting member 260 may face the first direction, and may be spaced apart from the light separation member 230 along the second direction. The parallel light converting members 240-1, 240-2, and 240-3 have a longitudinal direction between the light sources 220-1, 220-2, 220-3 and the light separation member 230 in the first direction and up and down along the second direction. Can be stacked. The diffusion member 250 may be interposed between the light separation member 230 and the parallel light conversion members 240-1, 240-2, and 240-3 so that the length direction thereof faces the first direction.

In the above, the case where the beam splitter is used as the light separation member 230 has been described as an example. However, in addition to the beam splitter, a half mirror 230 'may also be used as the light splitting member.

While the present invention has been particularly shown and described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

The drawings described below are for illustrative purposes only and are not intended to limit the scope of the invention.

1 is a view schematically showing an optical inspection device according to the present invention.

FIG. 2 is a plan view of portion “A” of FIG. 1.

3 is a side cross-sectional view showing the configuration of the lighting unit of FIGS. 1 and 2.

4 is a perspective view of the light separating member and the light collecting member of FIG. 3.

5 is an enlarged view illustrating the light collecting member of FIG. 3.

6 and 7 are views showing an operating state of the lighting unit according to the present invention.

8 to 12 are views showing another example of the light collecting member.

13 is a side sectional view showing another example of a lighting unit.

14 is a view showing another example of a lighting unit.

Description of the Related Art

1: optical inspection device 100: moving unit

200: lighting unit 210: housing

220: light source 230: light separation member

240: parallel light conversion member 250: diffusion member

260: light collecting member 262: inclined surface

264: hall 300: shooting unit

Claims (54)

delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete In the optical inspection device: A moving unit which moves the inspection object in one direction; An illumination unit provided above the movement path of the inspection object and irradiating light to the inspection object moved by the moving unit; And It includes a photographing unit for photographing the inspection object to which the light of the illumination unit is irradiated, The illumination unit includes: A light source emitting light; A light separation member for reflecting or transmitting light according to the direction of incident light; And And a light collecting member that refracts the light emitted from the light source and reflected by the light separation member to focus the illumination object, and guides the light reflected from the illumination object to the light separation member. The light collecting member is spaced apart from the light separating member in a direction in which the light separating member reflects light. A hole through which light passes is formed in the center of the light collecting member. Optical inspection, characterized in that a plurality of inclined surfaces are provided on any one of the first surface of the light collecting member facing the light separation member and the second surface opposite to the first surface to be symmetrical about the hole. Device. 31. The method of claim 30, And an inclination angle of the inclined surfaces decreases inwardly toward the hole. 32. The method of claim 31, And the inclined surfaces are inclined inwardly toward the hole. 32. The method of claim 31, And the inclined surfaces are inclined outwardly with respect to the hole. 34. The method of claim 32 or 33, The light collecting member has a length corresponding to the length of the light separating member, The inclined surfaces extend in the longitudinal direction of the light collecting member. 35. The method of claim 34, And the inclined surfaces are planar. 35. The method of claim 34, And the inclined surfaces are curved surfaces. In the optical inspection device: A moving unit which moves the inspection object in one direction; An illumination unit provided above the movement path of the inspection object and irradiating light to the inspection object moved by the moving unit; And It includes a photographing unit for photographing the inspection object to which the light of the illumination unit is irradiated, The illumination unit includes: A light source emitting light; A light separation member for reflecting or transmitting light according to the direction of incident light; And And a light collecting member that refracts the light emitted from the light source and reflected by the light separation member to focus the illumination object, and guides the light reflected from the illumination object to the light separation member. The light collecting member is spaced apart from the light separating member in a direction in which the light separating member reflects light. And a second surface opposite to the first surface of the light collecting member facing the light separating member is a curved surface convex downward. In the optical inspection device: A moving unit which moves the inspection object in one direction; An illumination unit provided above the movement path of the inspection object and irradiating light to the inspection object moved by the moving unit; And It includes a photographing unit for photographing the inspection object to which the light of the illumination unit is irradiated, The illumination unit includes: A light source emitting light; A light separation member for reflecting or transmitting light according to the direction of incident light; And And a light collecting member that refracts the light emitted from the light source and reflected by the light separation member to focus the illumination object, and guides the light reflected from the illumination object to the light separation member. The light collecting member is spaced apart from the light separating member in a direction in which the light separating member reflects light. And a center of a second surface opposite to the first surface of the light collecting member facing the light separating member is a flat surface, and a periphery of the second surface is a curved surface convex downward. The method of claim 37 or 38, And the first surface of the light collecting member is a plane. 31. The method of claim 30, And a parallel light converting member positioned between the light source and the light separating member, the parallel light converting member converting light emitted by the light source into parallel light. 41. The method of claim 40, The surface facing the light source of the parallel light conversion member is a convex curved surface, and the surface facing the light separation member of the parallel light conversion member is a plane. 41. The method of claim 40, And a diffusion member interposed between the light separation member and the parallel light conversion member and diffusing the parallel light such that the light uniformity of the parallel light transmitted through the parallel light conversion member is increased. Device. 43. The method of claim 42, And the light splitting member is a beam splitter. 43. The method of claim 42, And the light separation member is a half mirror. The method of claim 43 or 44, And a length in a direction perpendicular to the parallel light of the light separating member and the diffusing member is the same. 43. The method of claim 42, And the light source, the parallel light conversion member, the diffusion member, the light separation member, and the light collecting member are housed in a housing and provided in a module form. The method of claim 46, The light source, the parallel light conversion member, the diffusion member, and the light separation member are arranged in a line such that an optical axis faces a horizontal direction. And the light collecting member is spaced apart from the light separating member in a direction in which the light separating member reflects light. 31. The method of claim 30, And the photographing unit is a line scan camera. delete delete delete delete delete delete

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