JP2017098224A - ウェハキャビティ内のプラズマを検出するための測定学的方法ならびにステーション毎およびツール毎のマッチングのための測定学の使用 - Google Patents
ウェハキャビティ内のプラズマを検出するための測定学的方法ならびにステーション毎およびツール毎のマッチングのための測定学の使用 Download PDFInfo
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Abstract
Description
Claims (23)
- 半導体ウェハの処理中にプラズマの生成を検出するためのプロセスチャンバであって、
上側電極であって、プロセスチャンバにガス化学物質を供給するための複数の入口を含み、プラズマを発生させるためにRF電力を提供するためにマッチングネットワークを介して高周波(RF)電源に接続された上側電極と、
前記半導体ウェハを支持するための下側電極であって、前記上側電極の表面と前記下側電極の上面との間にウェハキャビティを画定するように前記プロセスチャンバの内部に配設され、電気的に接地された下側電極と、
前記プロセスチャンバの外部に延びる前記下側電極の底部に配設されたコイルセンサであって、前記下側電極の前記底部を実質的に取り囲むように配設され、前記コイルセンサが、前記ウェハキャビティを通って流れるRF電流の特性を測定し、寄生プラズマおよび接地への寄生容量結合による電流を排除するように構成され、前記RF電流の特性が、前記ウェハキャビティ内部での前記プラズマの発生を確認するために使用されるコイルセンサと、
を備えるプロセスチャンバ。 - 請求項1に記載のプロセスチャンバであって、更に、
前記プロセスチャンバに供給される前記RF電力の特性を測定するために、前記プロセスチャンバの外部で前記RF電源と前記上側電極との間に配設された電圧−電流プローブを含むプロセスチャンバ。 - 請求項1に記載のプロセスチャンバであって、更に、
前記上側電極の表面の外周縁に配設されたリングを含み、前記リングが、前記プラズマを実質的に閉じ込めるために前記ウェハキャビティ内にポケットを画定する、プロセスチャンバ。 - 請求項3に記載のプロセスチャンバであって、
前記リングがセラミック材料から形成されている、プロセスチャンバ。 - 請求項1に記載のプロセスチャンバであって、
前記上側電極がシャワーヘッドとして機能する、プロセスチャンバ。 - 請求項1に記載のプロセスチャンバであって、
前記コイルセンサの一端が、入出力制御装置に結合され、前記入出力制御装置が、前記コイルセンサによって測定された前記RF電流の特性に関連付けられる情報をレンダリングするために計算デバイスのユーザインターフェースに通信可能に接続される、プロセスチャンバ。 - 請求項1に記載のプロセスチャンバであって、更に、
存在するときには前記ウェハに隣接して配設されて前記ウェハを取り囲むように構成されたエッジリングを含み、前記エッジリングがセラミック材料から形成されている、プロセスチャンバ。 - 請求項1に記載のプロセスチャンバであって、
前記コイルセンサが、誘導コイルベースのセンサである、プロセスチャンバ。 - プロセスチャンバであって、
高周波(RF)電源に結合された上側電極と、
接地に結合された下側電極であって、前記上側電極と前記下側電極との間にウェハキャビティが画定される下側電極と、
前記下側電極に結合された底部であって、前記プロセスチャンバの下から前記プロセスチャンバ内に延びるように構成されることにより、前記プロセスチャンバ内部の内側部分と、前記プロセスチャンバ外部の外側部分とを有する底部と、
前記底部の前記外側部分の周りに画定された円形チャネルと、
前記底部の前記外側部分を実質的に取り囲むように前記円形チャネル内に配設されたコイルセンサであって、前記コイルセンサの第1端部が入出力制御装置に接続され、前記コイルセンサが前記円形チャネル内に配設されたときに前記コイルセンサの第2端部が前記第1端部に近接するコイルセンサと、
を備えるプロセスチャンバ。 - 請求項9に記載のプロセスチャンバであって、
前記コイルセンサが、前記底部の前記外側部分の周りにループを形成する、プロセスチャンバ。 - 請求項9に記載のプロセスチャンバであって、
前記コイルセンサが、前記第1端部から前記第2端部に延びる内側導体と、前記第2端部から前記第1端部に戻る巻付き導体とを有することにより、前記内側導体と前記巻付き導体とがどちらも前記第1端部で終端する、プロセスチャンバ。 - 請求項9に記載のプロセスチャンバであって、
前記コイルセンサが可撓性であり、それにより、前記第2端部が前記円形チャネルの内側に巻き付くように前記コイルセンサを前記円形チャネル内に挿入することができる、プロセスチャンバ。 - 請求項9に記載のプロセスチャンバであって、
前記コイルセンサの前記第1端部が、前記入出力制御装置とインターフェースする同軸コネクタに接続される、プロセスチャンバ。 - 請求項9に記載のプロセスチャンバであって、
前記円形チャネルが、前記底部の前記外側部分の一部を取り囲むベローの上方に配設される、プロセスチャンバ。 - 請求項9に記載のプロセスチャンバであって、
前記円形チャネルが誘電体Oリングを取り囲む、プロセスチャンバ。 - 請求項9に記載のプロセスチャンバであって、
前記円形チャネルが、前記チャンバの外部で前記チャンバの底部の下方に位置する、プロセスチャンバ。 - 請求項9に記載のプロセスチャンバであって、
前記コイルセンサが、前記底部を通って流れる電流を測定するように構成される、プロセスチャンバ。 - 請求項17に記載のプロセスチャンバであって、
前記ウェハキャビティ内部でプラズマが点火されている時を判断するために、前記コイルセンサによって測定される前記底部を通って流れる前記電流が、保存されている電流測定値と比較される、プロセスチャンバ。 - プロセスチャンバの動作パラメータを測定するための方法であって、
前記プロセスチャンバのウェハキャビティ内でプラズマを点火するのに必要とされる電力よりも低い第1電力レベルを使用してプロセスチャンバを動作させるステップと、
前記第1電力レベルを用いた動作中に、前記プロセスチャンバ内で検出された第1電圧に対して前記プロセスチャンバの下側電極の底部を通って流れる第1電流値を測定するステップと、
前記ウェハキャビティ内で前記プラズマを点火するために必要とされる前記電力よりも低い第2電力レベルを使用して前記プロセスチャンバを動作させるステップであって、前記第2電力レベルが前記第1電力レベルよりも高いステップと、
前記第2電力レベルを用いた動作中に、前記プロセスチャンバ内で検出された第2電圧に対して前記プロセスチャンバの前記下側電極の前記底部を通って流れる第2電流値を測定するステップと、
前記第1電圧および前記第2電圧と、前記第1電流値および前記第2電流値とを使用して、前記第1電力レベルよりも高いプロセス電力レベルを使用して実行されるプラズマプロセス動作中に前記ウェハキャビティ内でプラズマが点火されている時を判断するステップと
を含み、
前記プロセスチャンバ内で検出されるプロセス電圧に対して前記下側電極の前記底部を通って流れるプロセス電流値が前記プラズマプロセス動作中に測定され、前記プロセス電圧およびプロセス電流値と前記第1電圧および前記第2電圧ならびに前記第1電流値および前記第2電流値との比較に基づいて、プラズマプロセス動作中に前記ウェハキャビティ内で前記プラズマが点火されている時の判断が下される、
方法。 - 請求項19に記載の方法であって、
前記第1電流値、前記第2電流値、および、前記プロセス電流値が、前記プロセスチャンバの外部で前記下側電極の前記底部に配設されたコイルセンサを使用して測定され、
前記第1電圧および前記第2電圧が、前記プロセスチャンバの外部に延びる上側電極のRF電力投入部に配設されたVIプローブを使用して測定され、
前記プロセス電圧および前記プロセス電流値が前記第1電圧および前記第2電圧ならびに前記第1電流値および前記第2電流値よりも上であるときに前記プラズマの前記点火が確認される、方法。 - 請求項19に記載の方法であって、
前記プロセス電圧と前記プロセス電流との位相差の測定値を検証することによって前記プラズマの点火が確認される、方法。 - 請求項21に記載の方法であって、
前記位相差が約−90度よりも大きいときに、前記プロセスチャンバの前記ウェハキャビティ内部で前記プラズマが点火されていることが確認される、方法。 - 請求項21に記載の方法であって、
前記位相差が−90度により近いときに、前記プロセスチャンバの前記ウェハキャビティ内部で前記プラズマが点火されていないことが確認される、方法。
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