JP2017092462A5 - Liquid supply apparatus, imprint apparatus and article manufacturing method - Google Patents
Liquid supply apparatus, imprint apparatus and article manufacturing method Download PDFInfo
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- JP2017092462A5 JP2017092462A5 JP2016208037A JP2016208037A JP2017092462A5 JP 2017092462 A5 JP2017092462 A5 JP 2017092462A5 JP 2016208037 A JP2016208037 A JP 2016208037A JP 2016208037 A JP2016208037 A JP 2016208037A JP 2017092462 A5 JP2017092462 A5 JP 2017092462A5
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- 239000007788 liquid Substances 0.000 title claims description 51
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 238000007599 discharging Methods 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims 8
- 238000000034 method Methods 0.000 claims 5
- 238000003384 imaging method Methods 0.000 claims 4
- 239000000463 material Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 230000005484 gravity Effects 0.000 claims 1
Description
本発明は、液体供給装置、該液体供給装置を含むインプリント装置、および、該インプリント装置を用いて物品を製造する物品製造方法に関する。 The present invention relates to a liquid supply apparatus, an imprint apparatus including the liquid supply apparatus, and an article manufacturing method for manufacturing an article using the imprint apparatus.
本発明の第１の側面は、物体に液体を供給する液体供給装置に係り、前記液体供給装置は、液体を吐出する吐出部と、前記吐出部を第１位置および第２位置を含む複数の位置に配置するための駆動機構と、前記第１位置に配置された前記吐出部に対向するように配置され、前記第１位置に配置された前記吐出部から気体を吸引することによって前記吐出部が発生する熱を排出する第１排出口と、前記第２位置に配置された前記吐出部に対向するように配置され、前記第２位置に配置された前記吐出部から気体を吸引することによって前記吐出部が発生する熱を排出する第２排出口と、を備える。 A first aspect of the present invention relates to a liquid supply device that supplies a liquid to an object. The liquid supply device includes a discharge unit that discharges a liquid, and a plurality of discharge units including a first position and a second position A drive mechanism for disposing at the position; and the discharge unit disposed so as to face the discharge unit disposed at the first position, and sucking gas from the discharge unit disposed at the first position By sucking gas from the first discharge port for discharging the heat generated and the discharge unit arranged at the second position, and facing the discharge unit arranged at the second position . A second discharge port for discharging heat generated by the discharge unit .
Claims (15)
液体を吐出する吐出部と、
前記吐出部を第１位置および第２位置を含む複数の位置に配置するための駆動機構と、
前記第１位置に配置された前記吐出部に対向するように配置され、前記第１位置に配置された前記吐出部から気体を吸引することによって前記吐出部が発生する熱を排出する第１排出口と、
前記第２位置に配置された前記吐出部に対向するように配置され、前記第２位置に配置された前記吐出部から気体を吸引することによって前記吐出部が発生する熱を排出する第２排出口と、を備える
ことを特徴とする液体供給装置。 A liquid supply apparatus for supplying a liquid to an object,
A discharge section for discharging liquid;
A drive mechanism for disposing the discharge unit at a plurality of positions including a first position and a second position;
A first exhaust that exhausts heat generated by the discharge unit by suctioning a gas from the discharge unit that is disposed at the first position and is opposed to the discharge unit that is disposed at the first position. Exit,
A second exhaust configured to exhaust the heat generated by the discharge unit by suctioning a gas from the discharge unit disposed at the second position, the discharge unit being disposed to face the discharge unit disposed at the second position; And an outlet. A liquid supply apparatus comprising: an outlet;
前記容器は、複数の開口を有し、
前記吐出部が前記第１位置に配置されたときは、前記複数の開口の少なくとも１つを通して前記容器の中に入った気体は、前記複数の開口の他の少なくとも１つを通して前記容器から出て、前記第１排出口に吸引され、
前記吐出部が前記第２位置に配置されたときは、前記複数の開口の少なくとも１つを通して前記容器の中に入った気体は、前記複数の開口の他の少なくとも１つを通して前記容器から出て、前記第２排出口に吸引される、
ことを特徴とする請求項１に記載の液体供給装置。 The ejection unit includes an ejection head having an ejection port for ejecting liquid, an electrical component that controls ejection of liquid from the ejection port, and a container that houses the electrical component,
The container has a plurality of openings;
When the discharge portion is disposed at the first position, the gas that has entered the container through at least one of the plurality of openings exits the container through at least one of the plurality of openings. , Sucked into the first outlet,
When the discharge unit is disposed at the second position, the gas that has entered the container through at least one of the plurality of openings exits the container through at least one of the plurality of openings. , Sucked into the second outlet,
The liquid supply apparatus according to claim 1.
前記吐出部が前記第１位置に配置されたときは、前記第１開口を通して前記容器の中に入った気体は、前記第２開口を通して前記容器から出て、前記第１排出口に吸引され、
前記吐出部が前記第２位置に配置されたときは、前記第１開口を通して前記容器の中に入った気体は、前記第２開口を通して前記容器から出て、前記第２排出口に吸引される、
ことを特徴とする請求項２に記載の液体供給装置。 The plurality of openings includes a first opening and a second opening;
When the discharge unit is disposed at the first position, the gas that has entered the container through the first opening exits the container through the second opening, and is sucked into the first discharge port.
When the discharge portion is disposed at the second position, the gas that has entered the container through the first opening exits the container through the second opening and is sucked into the second discharge port. ,
The liquid supply apparatus according to claim 2.
前記吐出部が前記第１位置に配置されたときは、前記第１開口を通して前記容器の中に入った気体は、前記第２開口を通して前記容器から出て、前記第１排出口に吸引され、
前記吐出部が前記第２位置に配置されたときは、前記第２開口を通して前記容器の中に入った気体は、前記第１開口を通して前記容器から出て、前記第２排出口に吸引される、
ことを特徴とする請求項２に記載の液体供給装置。 The plurality of openings includes a first opening and a second opening;
When the discharge unit is disposed at the first position, the gas that has entered the container through the first opening exits the container through the second opening, and is sucked into the first discharge port.
When the discharge part is disposed at the second position, the gas that has entered the container through the second opening exits the container through the first opening and is sucked into the second discharge port. ,
The liquid supply apparatus according to claim 2.
ことを特徴とする請求項３又は４に記載の液体供給装置。 The first opening and the second opening are arranged such that a virtual plane passing through the center of gravity of the container is located between the first opening and the second opening.
The liquid supply device according to claim 3, wherein the liquid supply device is a liquid supply device.
前記容器は、上面、下面および側面を有し、前記吐出ヘッドは、前記容器の下面の下方に配置され、前記複数の開口は、前記側面に配置されている、
ことを特徴とする請求項２に記載の液体供給装置。 The discharge unit is configured to supply the liquid to the object by discharging the liquid downward when the object is disposed below the discharge unit,
The container has an upper surface, a lower surface and a side surface, the discharge head is disposed below the lower surface of the container, and the plurality of openings are disposed on the side surface.
The liquid supply apparatus according to claim 2.
前記第２排出口は、前記吐出部が前記第２位置に配置されたとき、および、前記吐出部が前記第３位置に配置されたとき、のいずれにおいても前記吐出部に対向する大きさを有し、
前記吐出部が前記第２位置に配置されたとき、および、前記吐出部が前記第３位置に配置されたとき、のいずれにおいても前記吐出部が発生する熱が前記第２排出口を通して排出される、
ことを特徴とする請求項１乃至６のいずれか１項に記載の液体供給装置。 The plurality of positions includes a third position;
The second discharge port has a size facing the discharge unit when the discharge unit is disposed at the second position and when the discharge unit is disposed at the third position. Have
The heat generated by the discharge unit is discharged through the second discharge port both when the discharge unit is disposed at the second position and when the discharge unit is disposed at the third position. The
The liquid supply device according to claim 1, wherein the liquid supply device is a liquid supply device.
前記第１位置は、前記吐出部により前記物体に液体を供給する処理を行う位置であり、前記第２位置は、前記クリーニング機構によって前記吐出部のクリーニングを行う位置である、
ことを特徴とする請求項１乃至７のいずれか１項に記載の液体供給装置。 A cleaning mechanism for cleaning the discharge unit;
The first position is a position for performing a process of supplying a liquid to the object by the ejection unit, and the second position is a position for cleaning the ejection unit by the cleaning mechanism.
The liquid supply apparatus according to claim 1, wherein the liquid supply apparatus is a liquid supply apparatus.
前記第１位置は、前記吐出部により前記物体に液体を供給する処理を行う位置であり、前記第２位置は、前記撮像装置によって前記吐出部から吐出される液体の状態を撮像する位置である、
ことを特徴とする請求項１乃至８のいずれか１項に記載の液体供給装置。 An imaging device for imaging the liquid ejected from the ejection unit;
The first position is a position for performing a process of supplying a liquid to the object by the ejection unit, and the second position is a position for imaging the state of the liquid ejected from the ejection unit by the imaging device. ,
The liquid supply device according to claim 1, wherein the liquid supply device is a liquid supply device.
前記吐出部の部品と新たな部品とを交換する交換機構と、を更に備え、
前記第１位置は、前記吐出部により前記物体に液体を供給する処理を行う位置であり、前記第２位置は、前記クリーニング機構によって前記吐出部のクリーニングを行う位置であり、前記第３位置は、前記交換機構によって前記部品と新たな部品との交換を行う位置である、
ことを特徴とする請求項７に記載の液体供給装置。 A cleaning mechanism for cleaning the discharge unit;
An exchange mechanism for exchanging the parts of the discharge unit and new parts, and
The first position is a position where a process of supplying a liquid to the object by the ejection unit is performed, the second position is a position where the ejection unit is cleaned by the cleaning mechanism, and the third position is , A position for exchanging the part and a new part by the exchange mechanism,
The liquid supply apparatus according to claim 7.
前記吐出部が前記第１位置に配置され、前記吐出部が前記物体に液体を供給する前記処理を行っている状態で、前記吐出部が発生する熱が前記第１排出口を通して排出される、 In a state where the discharge unit is disposed at the first position and the discharge unit performs the process of supplying liquid to the object, heat generated by the discharge unit is discharged through the first discharge port.
ことを特徴とする請求項１乃至７のいずれか１項に記載の液体供給装置。 The liquid supply apparatus according to claim 1, wherein the liquid supply apparatus is a liquid supply apparatus.
前記吐出部は、液体を吐出する吐出口を有する吐出ヘッドと、前記吐出口からの液体の吐出を制御する電気部品と、前記電気部品を収容する容器とを含み、 The ejection unit includes an ejection head having an ejection port for ejecting liquid, an electrical component that controls ejection of the liquid from the ejection port, and a container that houses the electrical component,
前記容器は、前記線に平行な面を有し、前記面は開口を有し、前記第１位置に前記吐出部が配置された状態において、前記第１排出口が前記開口に対向する、 The container has a surface parallel to the line, the surface has an opening, and the first discharge port faces the opening in a state where the discharge unit is disposed at the first position.
ことを特徴とする請求項１に記載の液体供給装置。 The liquid supply apparatus according to claim 1.
ことを特徴とする請求項１乃至１２のいずれか１項に記載の液体供給装置。 The liquid supply apparatus according to claim 1, wherein the liquid supply apparatus is a liquid supply apparatus.
前記液体としての前記インプリント材を前記物体としての前記基板に供給するように構成された請求項１乃至１３のいずれか１項に記載の液体供給装置を備える、
ことを特徴とするインプリント装置。 An imprint apparatus for supplying an imprint material on a substrate, bringing a mold into contact with the imprint material, and curing the imprint material,
The liquid supply device according to any one of claims 1 to 13 , wherein the liquid supply device is configured to supply the imprint material as the liquid to the substrate as the object.
An imprint apparatus characterized by that.
前記パターンが形成された前記基板を処理する工程と、
を含むことを特徴とする物品製造方法。 Forming a pattern on a substrate using the imprint apparatus according to claim 14 ;
Processing the substrate on which the pattern is formed;
An article manufacturing method comprising:
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020160146428A KR102030888B1 (en) | 2015-11-06 | 2016-11-04 | Liquid discharge apparatus, imprint apparatus, and method of manufacturing article |
| US15/343,611 US10350631B2 (en) | 2015-11-06 | 2016-11-04 | Liquid discharge apparatus, imprint apparatus, and method of manufacturing article |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2015218794 | 2015-11-06 | ||
| JP2015218794 | 2015-11-06 |
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| JP2017092462A JP2017092462A (en) | 2017-05-25 |
| JP2017092462A5 true JP2017092462A5 (en) | 2019-11-14 |
| JP6723139B2 JP6723139B2 (en) | 2020-07-15 |
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| JP2016208037A Active JP6723139B2 (en) | 2015-11-06 | 2016-10-24 | Liquid supply apparatus, imprint apparatus, and article manufacturing method |
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| KR (1) | KR102030888B1 (en) |
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| KR102519925B1 (en) * | 2018-07-31 | 2023-04-11 | 캐논 가부시끼가이샤 | Maintenance solution for imprint discharging device and maintenance method |
| JP7362462B2 (en) | 2019-12-11 | 2023-10-17 | キヤノン株式会社 | Liquid ejection device, imprint device, and inspection method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US6631966B2 (en) * | 2000-11-13 | 2003-10-14 | Canon Kabushiki Kaisha | Recording head and recording apparatus with temperature control |
| JP3787499B2 (en) * | 2001-02-23 | 2006-06-21 | キヤノン株式会社 | Recording head and recording apparatus |
| JP4617670B2 (en) * | 2003-12-25 | 2011-01-26 | コニカミノルタエムジー株式会社 | Image recording device |
| JP4924822B2 (en) * | 2007-05-14 | 2012-04-25 | ブラザー工業株式会社 | Droplet discharge device |
| KR101099608B1 (en) * | 2009-07-09 | 2011-12-29 | 세메스 주식회사 | Cleaning unit, chemical coating apparatus having the same and cleaning method using the same |
| JP5335717B2 (en) * | 2010-03-16 | 2013-11-06 | 富士フイルム株式会社 | Resist composition arranging apparatus and pattern forming body manufacturing method |
| JP5828626B2 (en) * | 2010-10-04 | 2015-12-09 | キヤノン株式会社 | Imprint method |
| JP5791012B2 (en) * | 2011-03-01 | 2015-10-07 | 株式会社セイコーアイ・インフォテック | inkjet printer |
| DE102012207206A1 (en) * | 2012-04-30 | 2013-10-31 | Winkler + Dünnebier Gmbh | Device for applying adhesive to a material |
| WO2016011296A1 (en) * | 2014-07-18 | 2016-01-21 | Kateeva, Inc. | Gas enclosure systems and methods utilizing cross-flow gas circulation and filtration |
| JP6506979B2 (en) * | 2015-01-29 | 2019-04-24 | 理想科学工業株式会社 | Ink jet printer |
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