JP2017092265A - プラズマ処理方法及びプラズマ処理装置 - Google Patents
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Abstract
Description
基板の表面上に成膜された膜の複数の領域に対し、前記複数種類の希ガスの流量比を異ならせた複数種類の混合ガスを供給する混合ガス供給工程と、
該複数種類の混合ガスを各々プラズマ化し、該プラズマ化した前記混合ガスを用いて前記膜のプラズマ処理を行うプラズマ処理工程と、を有する。
該処理容器内に設けられ、前記基板を回転方向に沿って載置可能な回転テーブルと、
該回転テーブルの回転方向に沿った所定領域に設けられ、前記回転テーブルより上方で天井面と側面とにより区画されたプラズマ処理領域と、
該プラズマ処理領域内の複数の領域に、希ガスの種類及び/又は流量比が異なる複数種類の混合ガスを供給することが可能な複数のガスノズルと、
該複数のガスノズルの各々に、前記複数種類の混合ガスを調整して供給する流量制御器と、
前記複数種類の混合ガスの各々をプラズマ化するプラズマ発生手段と、を有する。
図1に、本発明の実施形態に係るプラズマ処理装置の一例の概略縦断面図を示す。また、図2に、本実施形態に係るプラズマ処理装置の一例の概略平面図を示す。なお、図2では、説明の便宜上、天板11の描画を省略している。
次に、本発明の実施形態に係るプラズマ処理方法について説明する。本実施形態に係るプラズマ処理用法は、上述のALD法によるプラズマ処理装置のみならず、エッチング装置や他の種類の成膜装置にも適用可能であるが、説明の容易のため、上述のプラズマ処理装置を用いて本実施形態に係るプラズマ処理方法を実施する例について説明する。
次に、本発明の実施形態に係るプラズマ処理方法及びプラズマ処理装置をシミュレーションしたシミュレーション結果について説明する。
2 回転テーブル
24 凹部
31、32 処理ガスノズル
33〜35 プラズマ処理用ガスノズル
36 ガス吐出孔
41、42 分離ガスノズル
81 プラズマ発生部
120〜122 ガス供給源
130〜132 流量制御器
P1 第1の処理領域(原料ガス供給領域)
P2 第2の処理領域(反応ガス供給領域)
P3 第3の処理領域(プラズマ処理領域)
W ウエハ
Claims (16)
- 複数種類の希ガスを用いたプラズマ処理方法であって、
基板の表面上に成膜された膜の複数の領域に対し、前記複数種類の希ガスの流量比を異ならせた複数種類の混合ガスを供給する混合ガス供給工程と、
該複数種類の混合ガスを各々プラズマ化し、該プラズマ化した前記混合ガスを用いて前記膜のプラズマ処理を行うプラズマ処理工程と、を有するプラズマ処理方法。 - 前記プラズマ処理は、前記膜の品質を向上させる改質処理であり、
前記複数種類の希ガスは、第1の希ガスと、該第1の希ガスよりもイオン化エネルギーが高い第2の希ガスとを少なくとも含み、
前記複数種類の混合ガスは、前記1の希ガスを含み前記第2の希ガスを含まない第1の混合ガス、前記第1の希ガス及び前記第2の希ガスを含む第2の混合ガス、及び前記第1の希ガスを含まず前記第2の希ガスを含む第3の混合ガス、のうち少なくとも2つを含み、
前記複数の領域のうち、前記第1の混合ガスのみを用いて前記改質処理を行ったときに、前記改質処理後に得られる前記膜の密度が低い順に、前記第2の希ガスの混合比率が高い前記第3の混合ガス又は前記第2の混合ガスを用いる請求項1に記載のプラズマ処理方法。 - 前記プラズマ処理は処理室内で行われ、
該処理室内では、前記膜を成膜する成膜処理が行われる請求項2に記載のプラズマ処理方法。 - 前記基板は、前記処理室内に設けられた回転テーブル上に載置され、
前記複数の領域は、前記回転テーブルの中心からの距離に応じて設けられている請求項3に記載のプラズマ処理方法。 - 前記基板は、前記回転テーブルの周方向に沿って前記回転テーブルの半径内に複数個載置され、
前記複数の領域は、前記回転テーブルの中心側の中心側領域と、前記回転テーブルの外周側の外周側領域と、前記回転テーブルの半径方向に沿って前記外周側から前記中心側に延びる主領域と、を含む請求項4に記載のプラズマ処理方法。 - 前記中心側領域、前記外周側領域及び前記主領域の各々には、局所的なガス供給手段が設けられ、該ガス供給手段を介して前記混合ガスが供給される請求項5に記載のプラズマ処理方法。
- 前記中心側領域には、前記第1の混合ガスが供給され、
前記主領域及び前記外周側領域には、前記第2の混合ガスが供給される請求項5又は6に記載のプラズマ処理方法。 - 前記中心側領域には、前記第1の混合ガスが供給され、
前記主領域には、前記第2の混合ガスが供給され、
前記外周側領域には、前記第3の混合ガスが供給される請求項5又は6に記載のプラズマ処理方法。 - 前記成膜処理は、原料ガスを前記基板に供給する原料ガス供給工程と、
該原料ガスと反応して反応生成物を生成可能な反応ガスを前記基板に供給する反応ガス供給工程と、を含む請求項5乃至7のいずれか一項に記載のプラズマ処理方法。 - 前記回転テーブルの上方には、前記周方向に沿って、前記原料ガスを前記基板に供給する原料ガス供給領域と、前記反応ガスを前記基板に供給する反応ガス供給領域と、前記膜の前記プラズマ処理を行うプラズマ処理領域とが設けられ、
前記原料ガス供給工程、前記反応ガス供給工程及び前記プラズマ処理工程は、前記回転テーブルを複数回回転させ、前記基板が前記原料ガス供給領域、前記反応ガス供給領域及び前記プラズマ処理領域を順に複数回通過することにより行われる請求項9に記載のプラズマ処理方法。 - 前記回転テーブルの上方の前記原料ガス供給領域と前記反応ガス供給領域との間、及び前記プラズマ処理領域と前記原料ガス供給領域との間には、前記基板にパージガスを供給するパージガス供給領域が設けられ、
前記原料ガス供給工程と前記反応ガス供給工程との間、及び前記プラズマ処理領域と前記原料ガス供給領域との間には、パージガス供給工程が更に設けられた請求項10に記載のプラズマ処理方法。 - 前記第1の希ガスはアルゴンガスであり、
前記第2の希ガスはヘリウムガスであり、
前記混合ガスは、酸化ガスを含む請求項2乃至10のいずれか一項に記載のプラズマ処理方法。 - 前記原料ガスは、シリコン含有ガスであり、
前記反応ガスは、酸化ガスである請求項9乃至11のいずれか一項に記載のプラズマ処理方法。 - 基板を収容してプラズマ処理するための処理容器と、
該処理容器内に設けられ、前記基板を回転方向に沿って載置可能な回転テーブルと、
該回転テーブルの回転方向に沿った所定領域に設けられ、前記回転テーブルより上方で天井面と側面とにより区画されたプラズマ処理領域と、
該プラズマ処理領域内の複数の領域に、希ガスの種類及び/又は流量比が異なる複数種類の混合ガスを供給することが可能な複数のガスノズルと、
該複数のガスノズルの各々に、前記複数種類の混合ガスを調整して供給する流量制御器と、
前記複数種類の混合ガスの各々をプラズマ化するプラズマ発生手段と、を有するプラズマ処理装置。 - 前記複数のガスノズルは、前記基板の全体領域に前記混合ガスを供給可能な第1のガスノズルと、前記基板の前記回転テーブルの中心軸側の領域に前記混合ガスを供給可能な第2のガスノズルと、前記基板の前記回転テーブルの外周側の領域に前記混合ガスを供給可能な第3のガスノズルと、を含む請求項14に記載のプラズマ処理装置。
- 前記第1のガスノズルのガス吐出孔は、前記プラズマ処理領域の前記側面に対向しており、
前記第2及び第3のガスノズルのガス吐出孔は、前記プラズマ処理領域の前記天井面に対向している請求項15に記載のプラズマ処理装置。
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JP2020191340A (ja) * | 2019-05-20 | 2020-11-26 | 東京エレクトロン株式会社 | 成膜方法 |
JP2020191341A (ja) * | 2019-05-20 | 2020-11-26 | 東京エレクトロン株式会社 | 成膜方法 |
KR20210055103A (ko) * | 2018-10-04 | 2021-05-14 | 어플라이드 머티어리얼스, 인코포레이티드 | 박막 처리 프로세스 |
KR102668678B1 (ko) | 2019-05-20 | 2024-05-24 | 도쿄엘렉트론가부시키가이샤 | 성막 방법 |
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