JP2017050307A - 量子カスケードレーザ - Google Patents
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Abstract
【解決手段】 半導体基板10と、基板の第1面10a上に設けられ、発光層及び注入層からなる単位積層体が多段に積層された活性層15とを備えて、量子カスケードレーザ2Aを構成する。活性層15は、周波数ω1の第1ポンプ光及び周波数ω2の第2ポンプ光を生成可能であって、差周波発生によって差周波数ωの出力光を生成するように構成されている。活性層15を含む素子構造部11の外部には、第1ポンプ光を生成する外部共振器を構成し、周波数ω1を変更可能に構成された外部回折格子25が設けられている。また、基板の第2面10bにおいて、共振方向と交差する方向にそれぞれ形成された複数の溝12が設けられている。
【選択図】 図1
Description
θc=cos−1(nMIR/nTHz)〜20°
で表される。すなわち、InP基板10上に活性層15を含む半導体積層構造を成長したDFG−THz−QCLでは、図2に示すように、差周波発生によって生成されるテラヘルツ光は、約20°の放射角度で活性層15から下方へと伝搬する。
n1sinθ1=n2sinθ2
により、テラヘルツ光は溝12の側面から下方に出射角度θout=40°で屈折して出力される。これにより、結果的に、複数の溝12を介した半導体基板10の面方向へのテラヘルツ光の出力が可能となる。
θc=cos−1(nMIR/nTHz)
によって求められる。基板81を半絶縁InP基板とした場合、nMIRについては、差周波発生に関わる波長範囲内ではnMIR=3.37で一定として良い(非特許文献10:J. Opt Vol.16 (2014) 094002 pp.1-9参照)。また、非特許文献10によれば、周波数1THzに対してnTHz=3.5、6THzに対してnTHz=3.8である。また、周波数3THzでは、上記したようにnTHz=3.6である。
Lc=h/tanθc+w/2
で与えられる。ここで、hは溝の深さ、wは溝の幅、θcは上記した差周波発生による出力光のチェレンコフ放射角度である。この条件において、基板10内部を伝搬するテラヘルツ光は、溝12の側面において半導体と空気との界面で屈折される。ただし、溝側面の傾斜角度θgによっても、溝側面から出力されたテラヘルツ光の空気中での伝搬波面の状況が変化する。したがって、溝12の間隔Lの設定においては、このような波面条件等も考慮する必要がある。
50…InP基板、51…InGaAs下部コンタクト層、52…InP下部クラッド層、53…InGaAs下部ガイド層、54…InGaAs上部ガイド層、55…回折格子構造、57…InP上部クラッド層、58…InP上部コンタクト層、
60…素子構造部、61…支持構造部、62、63…SiN絶縁層、65…InP支持層、66…Au上部電極、67…Au下部電極、70…サブマウント、71…溝、72…超半球レンズ、73…シリンドリカルレンズアレイ。
Claims (10)
- 半導体基板と、
前記半導体基板の第1面上に設けられ、量子井戸発光層及び注入層からなる単位積層体が多段に積層されることで前記量子井戸発光層と前記注入層とが交互に積層されたカスケード構造が形成された活性層とを備え、
前記活性層は、電子のサブバンド間発光遷移によって第1周波数ω1の第1ポンプ光、及び第2周波数ω2の第2ポンプ光を生成可能であって、前記第1ポンプ光及び前記第2ポンプ光による差周波発生によって、前記第1周波数ω1及び前記第2周波数ω2の差周波数ωの出力光を生成するように構成され、
前記半導体基板の前記第1面上に設けられた前記活性層を含む素子構造部の外部に、前記第1周波数ω1の光を前記素子構造部へと帰還させることで前記第1ポンプ光を生成するための外部共振器を構成するとともに、前記第1周波数ω1を変更可能に構成された外部回折格子が設けられ、
前記半導体基板の前記第1面とは反対側の第2面において、レーザ共振器構造での共振方向と交差する方向にそれぞれ形成された複数の溝が設けられていることを特徴とする量子カスケードレーザ。 - 前記複数の溝のそれぞれは、溝内部の幅が前記第2面側から深さ方向に単調減少するとともに、その側面の前記第2面に垂直な方向に対する傾斜角度θgが変化していく曲面形状に形成されていることを特徴とする請求項1記載の量子カスケードレーザ。
- 前記半導体基板の前記第1面上に設けられた前記素子構造部の内部に、前記第2周波数ω2の前記第2ポンプ光を生成するための分布帰還共振器を構成する内部回折格子が設けられていることを特徴とする請求項1または2記載の量子カスケードレーザ。
- 前記半導体基板の前記第2面上に、前記複数の溝から外部へと出力される前記出力光が通過するレンズ素子が設けられていることを特徴とする請求項1〜3のいずれか一項記載の量子カスケードレーザ。
- 前記複数の溝は、前記第2面において、前記共振方向と直交する方向にそれぞれ形成されていることを特徴とする請求項1〜4のいずれか一項記載の量子カスケードレーザ。
- 前記半導体基板は、その厚さtが50μm以上200μm以下であることを特徴とする請求項1〜5のいずれか一項記載の量子カスケードレーザ。
- 前記複数の溝のそれぞれは、溝の深さをhとして、その幅wがh/10以上2h以下となるように形成されていることを特徴とする請求項1〜6のいずれか一項記載の量子カスケードレーザ。
- 前記複数の溝のそれぞれは、前記半導体基板の厚さをtとして、その深さhが30μm以上t−20μm以下となるように形成されていることを特徴とする請求項1〜7のいずれか一項記載の量子カスケードレーザ。
- 前記複数の溝は、溝の深さをh、溝の幅をw、差周波発生による前記出力光の放射角度をθcとして、溝の間隔Lがh/2以上2h/tanθc+w以下となるように形成されていることを特徴とする請求項1〜8のいずれか一項記載の量子カスケードレーザ。
- 前記複数の溝は、溝の深さをh、溝の幅をw、差周波発生による前記出力光の放射角度をθcとして、溝の間隔Lがh/tanθc+w/2以上となるように形成されていることを特徴とする請求項1〜9のいずれか一項記載の量子カスケードレーザ。
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Cited By (4)
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JP2019047065A (ja) * | 2017-09-06 | 2019-03-22 | 浜松ホトニクス株式会社 | 量子カスケードレーザ光源の製造方法 |
CN110998999A (zh) * | 2017-07-31 | 2020-04-10 | 精工爱普生株式会社 | 发光装置以及投影仪 |
WO2021125240A1 (ja) * | 2019-12-20 | 2021-06-24 | 浜松ホトニクス株式会社 | レーザモジュール |
WO2021200583A1 (ja) * | 2020-04-02 | 2021-10-07 | 浜松ホトニクス株式会社 | 量子カスケードレーザ素子及び量子カスケードレーザ装置 |
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JP6371332B2 (ja) * | 2016-05-20 | 2018-08-08 | シャープ株式会社 | 量子カスケードレーザ |
US10355449B2 (en) * | 2016-08-15 | 2019-07-16 | University Of Central Florida Research Foundation, Inc. | Quantum cascade laser with angled active region and related methods |
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