JP2017048819A5 - - Google Patents
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- Publication number
- JP2017048819A5 JP2017048819A5 JP2015170851A JP2015170851A JP2017048819A5 JP 2017048819 A5 JP2017048819 A5 JP 2017048819A5 JP 2015170851 A JP2015170851 A JP 2015170851A JP 2015170851 A JP2015170851 A JP 2015170851A JP 2017048819 A5 JP2017048819 A5 JP 2017048819A5
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- seal
- housing
- structure according
- seal structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims description 5
- 230000002093 peripheral Effects 0.000 claims description 3
- 210000000088 Lip Anatomy 0.000 claims 5
- 230000001808 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015170851A JP6772440B2 (ja) | 2015-08-31 | 2015-08-31 | シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015170851A JP6772440B2 (ja) | 2015-08-31 | 2015-08-31 | シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017048819A JP2017048819A (ja) | 2017-03-09 |
| JP2017048819A5 true JP2017048819A5 (de) | 2018-10-11 |
| JP6772440B2 JP6772440B2 (ja) | 2020-10-21 |
Family
ID=58278195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015170851A Active JP6772440B2 (ja) | 2015-08-31 | 2015-08-31 | シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6772440B2 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6565499B2 (ja) * | 2015-08-31 | 2019-08-28 | 日本精工株式会社 | シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置 |
| JP7441728B2 (ja) | 2020-05-29 | 2024-03-01 | 株式会社安川電機 | 搬送ロボットおよび搬送システム |
-
2015
- 2015-08-31 JP JP2015170851A patent/JP6772440B2/ja active Active
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