JP2017031892A5 - - Google Patents

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Publication number
JP2017031892A5
JP2017031892A5 JP2015153179A JP2015153179A JP2017031892A5 JP 2017031892 A5 JP2017031892 A5 JP 2017031892A5 JP 2015153179 A JP2015153179 A JP 2015153179A JP 2015153179 A JP2015153179 A JP 2015153179A JP 2017031892 A5 JP2017031892 A5 JP 2017031892A5
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JP
Japan
Prior art keywords
auxiliary pump
gas
pump device
exhaust
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015153179A
Other languages
English (en)
Japanese (ja)
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JP2017031892A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2015153179A priority Critical patent/JP2017031892A/ja
Priority claimed from JP2015153179A external-priority patent/JP2017031892A/ja
Publication of JP2017031892A publication Critical patent/JP2017031892A/ja
Publication of JP2017031892A5 publication Critical patent/JP2017031892A5/ja
Pending legal-status Critical Current

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JP2015153179A 2015-08-03 2015-08-03 真空排気装置及びその運転方法 Pending JP2017031892A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015153179A JP2017031892A (ja) 2015-08-03 2015-08-03 真空排気装置及びその運転方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015153179A JP2017031892A (ja) 2015-08-03 2015-08-03 真空排気装置及びその運転方法

Publications (2)

Publication Number Publication Date
JP2017031892A JP2017031892A (ja) 2017-02-09
JP2017031892A5 true JP2017031892A5 (enExample) 2018-09-06

Family

ID=57988206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015153179A Pending JP2017031892A (ja) 2015-08-03 2015-08-03 真空排気装置及びその運転方法

Country Status (1)

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JP (1) JP2017031892A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
CN115387981B (zh) * 2022-09-19 2025-08-29 东莞瑞柯电子科技股份有限公司 高效真空泵
JP7777167B2 (ja) * 2024-03-28 2025-11-27 本田技研工業株式会社 二酸化炭素回収装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2767127B2 (ja) * 1989-03-23 1998-06-18 株式会社大阪真空機器製作所 真空ポンプシステム
JP4000611B2 (ja) * 1996-12-26 2007-10-31 松下電器産業株式会社 真空排気システム
JP2001140784A (ja) * 1999-11-17 2001-05-22 Teijin Seiki Co Ltd 真空ポンプ
JP4045362B2 (ja) * 2001-09-06 2008-02-13 株式会社アルバック 多段式容積移送型ドライ真空ポンプ
JP4232505B2 (ja) * 2003-03-27 2009-03-04 アイシン精機株式会社 真空ポンプ
JP2005264851A (ja) * 2004-03-19 2005-09-29 Ebara Corp トラップ装置及びその再生方法
JP5102068B2 (ja) * 2008-02-29 2012-12-19 株式会社荏原製作所 多段真空ポンプ
GB2501735B (en) * 2012-05-02 2015-07-22 Edwards Ltd Method and apparatus for warming up a vacuum pump arrangement
FR2993614B1 (fr) * 2012-07-19 2018-06-15 Pfeiffer Vacuum Procede et dispositif de pompage d'une chambre de procedes

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