JP2017031892A5 - - Google Patents
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- JP2017031892A5 JP2017031892A5 JP2015153179A JP2015153179A JP2017031892A5 JP 2017031892 A5 JP2017031892 A5 JP 2017031892A5 JP 2015153179 A JP2015153179 A JP 2015153179A JP 2015153179 A JP2015153179 A JP 2015153179A JP 2017031892 A5 JP2017031892 A5 JP 2017031892A5
- Authority
- JP
- Japan
- Prior art keywords
- auxiliary pump
- gas
- pump device
- exhaust
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000007789 gas Substances 0.000 claims 13
- 238000007906 compression Methods 0.000 claims 7
- 239000012495 reaction gas Substances 0.000 claims 3
- 239000012530 fluid Substances 0.000 claims 2
- 238000007711 solidification Methods 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 1
- 238000011084 recovery Methods 0.000 claims 1
Claims (12)
前記メインポンプの中段又は最終段の圧縮空間に接続され、吸気口と排気口とを有する補助ポンプ装置と、
前記メインポンプ又は前記補助ポンプ装置に接続され、前記メインポンプ又は前記補助ポンプ装置にバラストガスを導入するバラストガス導入ラインと、
前記メインポンプの排気口に接続された第１の流路に設けられ、前記メインポンプ側から大気側への方向を順方向とする逆止弁と
を具備する
真空排気装置。 A multi-stage volumetric transfer main pump having an intake port, an exhaust port, and a plurality of stages of compression spaces provided between the intake port and the exhaust port;
An auxiliary pump device connected to the compression space of the middle stage or the last stage of the main pump, and having an intake port and an exhaust port;
A ballast gas introduction line connected to the main pump or the auxiliary pump device, for introducing ballast gas into the main pump or the auxiliary pump device;
A vacuum exhaust apparatus, comprising: a check valve provided in a first flow path connected to the exhaust port of the main pump and having a forward direction from the main pump side to the atmosphere side.
前記バラストガス導入ラインは、前記メインポンプの中段又は最終段の圧縮空間に接続される
真空排気装置。 The evacuation apparatus according to claim 1,
The ballast gas introduction line is connected to a compression space of a middle stage or a final stage of the main pump.
前記補助ポンプ装置は、前記補助ポンプ装置の吸気口と前記中段又は最終段の圧縮空間とを接続する第２の流路を含み、
前記バラストガス導入ラインは、前記第２の流路に接続される
真空排気装置。 The evacuation apparatus according to claim 1,
The auxiliary pump device includes a second flow path connecting the intake port of the auxiliary pump device and the compression space of the middle stage or the final stage,
The ballast gas introduction line is connected to the second flow path.
前記補助ポンプ装置は、
前記メインポンプに接続された第１の補助ポンプと、
第２の補助ポンプと、
前記第１の補助ポンプと前記第２の補助ポンプとを互いに接続する第３の流路と、を含み、
前記バラストガス導入ラインは、前記第３の流路に接続される
真空排気装置。 The evacuation apparatus according to claim 1,
The auxiliary pump device is
A first auxiliary pump connected to the main pump;
A second auxiliary pump;
A third flow path connecting the first auxiliary pump and the second auxiliary pump to each other;
The ballast gas introduction line is connected to the third flow path.
前記補助ポンプ装置は、
第３の補助ポンプと、
前記第２の補助ポンプと前記第３の補助ポンプとを互いに接続する第４の流路と、をさらに含み、
前記バラストガス導入ラインは、前記第４の流路に接続される
真空排気装置。 The evacuation apparatus according to claim 4,
Before Symbol auxiliary pump device,
A third auxiliary pump;
A fourth flow path connecting the second auxiliary pump and the third auxiliary pump to each other; and
The ballast gas introduction line is connected to the fourth flow path.
前記補助ポンプ装置は、前記補助ポンプ装置の排気口に取り付けられるフィルターを含む
真空排気装置。 The evacuation device according to any one of claims 1 to 5,
The auxiliary pump device includes a filter attached to an exhaust port of the auxiliary pump device.
前記補助ポンプ装置は、排気ガスと直接接触する領域である接ガス領域を有し、
前記補助ポンプ装置は、前記接ガス領域を前記排気ガス中の凝縮性反応ガスの固化温度よりも高い温度に加熱する加熱器を含む
真空排気装置。 The evacuation device according to any one of claims 1 to 6,
The auxiliary pump device has a gas contact region that is a region in direct contact with exhaust gas,
The auxiliary pump device includes a heater that heats the gas contact region to a temperature higher than a solidification temperature of the condensable reaction gas in the exhaust gas.
前記補助ポンプ装置は、ダイアフラムポンプである
真空排気装置。 The evacuation apparatus according to any one of claims 1 to 7,
The auxiliary pump device is a diaphragm pump.
前記バラストガス導入ラインは、前記バラストガスを排気ガス中の凝縮性反応ガスの固化温度よりも高い温度に加熱する加熱器を含む
真空排気装置。 The vacuum exhaust device according to any one of claims 1 to 8,
The ballast gas introduction line includes a heater that heats the ballast gas to a temperature higher than a solidification temperature of the condensable reaction gas in the exhaust gas.
前記バラストガスは、不活性ガスである
真空排気装置。 A vacuum exhaust apparatus according to any one of claims 1 to 9,
The ballast gas is an inert gas.
前記補助ポンプ装置の排気口に接続され、排気ガス中の凝縮性反応ガスを固体化する回収装置をさらに具備する
真空排気装置。 The evacuation apparatus according to any one of claims 1 to 10,
A vacuum exhaust device further comprising a recovery device connected to the exhaust port of the auxiliary pump device and solidifying the condensable reaction gas in the exhaust gas.
前記メインポンプの中段又は最終段の圧縮空間に接続された補助ポンプ装置により前記圧縮空間を減圧し、
前記メインポンプ又は前記補助ポンプ装置に接続されたバラストガス導入ラインにより前記メインポンプ又は前記補助ポンプ装置にバラストガスを導入する
真空排気装置の運転方法。 Transfer the fluid introduced from the intake port of the multistage volume transfer type main pump while compressing the fluid to the final stage compression space on the exhaust port side,
Depressurizing the compression space by an auxiliary pump device connected to the compression space of the middle stage or the final stage of the main pump,
A method of operating a vacuum exhaust device, wherein ballast gas is introduced into the main pump or the auxiliary pump device by a ballast gas introduction line connected to the main pump or the auxiliary pump device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015153179A JP2017031892A (en) | 2015-08-03 | 2015-08-03 | Vacuum evacuation device and its operation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015153179A JP2017031892A (en) | 2015-08-03 | 2015-08-03 | Vacuum evacuation device and its operation method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017031892A JP2017031892A (en) | 2017-02-09 |
| JP2017031892A5 true JP2017031892A5 (en) | 2018-09-06 |
Family
ID=57988206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015153179A Pending JP2017031892A (en) | 2015-08-03 | 2015-08-03 | Vacuum evacuation device and its operation method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2017031892A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3065040B1 (en) * | 2017-04-07 | 2019-06-21 | Pfeiffer Vacuum | PUMPING GROUP AND USE |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2767127B2 (en) * | 1989-03-23 | 1998-06-18 | 株式会社大阪真空機器製作所 | Vacuum pump system |
| JP4000611B2 (en) * | 1996-12-26 | 2007-10-31 | 松下電器産業株式会社 | Vacuum exhaust system |
| JP2001140784A (en) * | 1999-11-17 | 2001-05-22 | Teijin Seiki Co Ltd | Vacuum pump |
| JP4045362B2 (en) * | 2001-09-06 | 2008-02-13 | 株式会社アルバック | Multistage positive displacement vacuum pump |
| JP4232505B2 (en) * | 2003-03-27 | 2009-03-04 | アイシン精機株式会社 | Vacuum pump |
| JP2005264851A (en) * | 2004-03-19 | 2005-09-29 | Ebara Corp | Trap device and its regenerating method |
| JP5102068B2 (en) * | 2008-02-29 | 2012-12-19 | 株式会社荏原製作所 | Multistage vacuum pump |
| GB2501735B (en) * | 2012-05-02 | 2015-07-22 | Edwards Ltd | Method and apparatus for warming up a vacuum pump arrangement |
| FR2993614B1 (en) * | 2012-07-19 | 2018-06-15 | Pfeiffer Vacuum | METHOD AND APPARATUS FOR PUMPING A CHAMBER OF PROCESSES |
-
2015
- 2015-08-03 JP JP2015153179A patent/JP2017031892A/en active Pending
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