GB0914697D0 - Vacuum pump or vacuum apparatus having a vacuum pump - Google Patents
Vacuum pump or vacuum apparatus having a vacuum pumpInfo
- Publication number
- GB0914697D0 GB0914697D0 GBGB0914697.8A GB0914697A GB0914697D0 GB 0914697 D0 GB0914697 D0 GB 0914697D0 GB 0914697 A GB0914697 A GB 0914697A GB 0914697 D0 GB0914697 D0 GB 0914697D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- vacuum
- vacuum pump
- pressure
- suction inlet
- volumes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
The vacuum pump (12) or vacuum device has two suction inlets (13,15) with multiple pressure stages. An outer suction inlet for one pressure stage spatially encompasses an inner suction inlet for another pressure stage such that the inner suction inlet seals only against pressure within the outer suction inlet and not against external pressure. Two volumes are provided different pressures and the two suction inlets of the vacuum pump are connected to the volumes of different pressures. An independent claim is also included for evacuating a vacuum chamber with multiple volumes and pressure stages.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007010068A DE102007010068A1 (en) | 2007-02-28 | 2007-02-28 | Vacuum pump or vacuum device for evacuation of multiple volumes, has two suction inlets with multiple pressure stages and outer suction inlet for one pressure stage spatially encompasses inner suction inlet for another pressure stage |
PCT/EP2008/001347 WO2008104314A1 (en) | 2007-02-28 | 2008-02-21 | Vacuum pump or vacuum apparatus having a vacuum pump |
Publications (3)
Publication Number | Publication Date |
---|---|
GB0914697D0 true GB0914697D0 (en) | 2009-09-30 |
GB2459233A GB2459233A (en) | 2009-10-21 |
GB2459233B GB2459233B (en) | 2011-09-28 |
Family
ID=39432853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0914697A Active GB2459233B (en) | 2007-02-28 | 2008-02-21 | Vacuum pump or vacuum apparatus having a vacuum pump |
Country Status (4)
Country | Link |
---|---|
US (2) | US8529218B2 (en) |
DE (2) | DE102007010068A1 (en) |
GB (1) | GB2459233B (en) |
WO (1) | WO2008104314A1 (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2466156B8 (en) * | 2007-09-07 | 2015-10-14 | Ionics Mass Spectrometry Group | Multi-pressure stage mass spectrometer and methods |
GB2473839B (en) | 2009-09-24 | 2016-06-01 | Edwards Ltd | Mass spectrometer |
GB2504329A (en) * | 2012-07-26 | 2014-01-29 | Edwards Ltd | Ultra high vacuum pump seal arrangement |
DE102013103650A1 (en) | 2013-04-11 | 2014-10-16 | Pfeiffer Vacuum Gmbh | vacuum system |
DE202013003855U1 (en) * | 2013-04-25 | 2014-07-28 | Oerlikon Leybold Vacuum Gmbh | Examination device and multi-inlet vacuum pump |
GB201314841D0 (en) | 2013-08-20 | 2013-10-02 | Thermo Fisher Scient Bremen | Multiple port vacuum pump system |
DE102014110078A1 (en) * | 2014-07-17 | 2016-01-21 | Pfeiffer Vacuum Gmbh | vacuum system |
GB2533153B (en) * | 2014-12-12 | 2017-09-20 | Thermo Fisher Scient (Bremen) Gmbh | Vacuum system |
EP3112688B2 (en) * | 2015-07-01 | 2022-05-11 | Pfeiffer Vacuum GmbH | Split flow vacuum pump and vacuum system with a split flow vacuum pump |
EP3327293B1 (en) * | 2016-11-23 | 2019-11-06 | Pfeiffer Vacuum Gmbh | Vacuum pump having multiple inlets |
CN107084822B (en) * | 2017-06-14 | 2018-04-27 | 合肥中科离子医学技术装备有限公司 | A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer |
EP3296571B1 (en) * | 2017-07-21 | 2021-11-03 | Pfeiffer Vacuum Gmbh | Vacuum pump |
DE102018119747B3 (en) | 2018-08-14 | 2020-02-13 | Bruker Daltonik Gmbh | TURBOMOLECULAR PUMP FOR MASS SPECTROMETERS |
GB2598762B (en) | 2020-09-11 | 2024-01-31 | Thermo Fisher Scient Bremen Gmbh | Coupling for connecting analytical systems with vibrational isolation |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3144035A (en) * | 1963-02-01 | 1964-08-11 | Nat Res Corp | High vacuum system |
DE2817665A1 (en) * | 1978-04-19 | 1979-10-31 | Hahn Meitner Kernforsch | Vacuum flange seal - bounded by metal wire and elastomer ring elements |
US4584479A (en) * | 1982-10-19 | 1986-04-22 | Varian Associates, Inc. | Envelope apparatus for localized vacuum processing |
US4792688A (en) | 1987-06-15 | 1988-12-20 | The Perkin-Elmer Corporation | Differentially pumped seal apparatus |
US5733104A (en) | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
EP0603694A1 (en) | 1992-12-24 | 1994-06-29 | BALZERS-PFEIFFER GmbH | Vacuum system |
DE9304435U1 (en) * | 1993-03-24 | 1993-06-09 | Leybold Ag, 6450 Hanau, De | |
US6140638A (en) * | 1997-06-04 | 2000-10-31 | Mds Inc. | Bandpass reactive collision cell |
US6457954B1 (en) | 1998-05-26 | 2002-10-01 | Leybold Vakuum Gmbh | Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump |
DE19901340B4 (en) | 1998-05-26 | 2016-03-24 | Leybold Vakuum Gmbh | Friction vacuum pump with chassis, rotor and housing and device equipped with a friction vacuum pump of this type |
US6193461B1 (en) * | 1999-02-02 | 2001-02-27 | Varian Inc. | Dual inlet vacuum pumps |
DE19942410A1 (en) | 1999-09-06 | 2001-03-08 | Pfeiffer Vacuum Gmbh | Vacuum pump |
GB9921983D0 (en) | 1999-09-16 | 1999-11-17 | Boc Group Plc | Improvements in vacuum pumps |
GB0322889D0 (en) | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
GB0409139D0 (en) * | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
GB0411426D0 (en) * | 2004-05-21 | 2004-06-23 | Boc Group Plc | Pumping arrangement |
JP2005344610A (en) * | 2004-06-03 | 2005-12-15 | Boc Edwards Kk | Evacuation device |
GB0414316D0 (en) * | 2004-06-25 | 2004-07-28 | Boc Group Plc | Vacuum pump |
GB0503946D0 (en) * | 2005-02-25 | 2005-04-06 | Boc Group Plc | Vacuum pump |
DE102006020710A1 (en) * | 2006-05-04 | 2007-11-08 | Pfeiffer Vacuum Gmbh | Vacuum pump with housing |
DE102007027352A1 (en) * | 2007-06-11 | 2008-12-18 | Oerlikon Leybold Vacuum Gmbh | Mass Spectrometer arrangement |
-
2007
- 2007-02-28 DE DE102007010068A patent/DE102007010068A1/en active Granted
-
2008
- 2008-02-21 US US12/527,834 patent/US8529218B2/en active Active
- 2008-02-21 WO PCT/EP2008/001347 patent/WO2008104314A1/en active Application Filing
- 2008-02-21 GB GB0914697A patent/GB2459233B/en active Active
- 2008-02-21 DE DE202008017530U patent/DE202008017530U1/en not_active Expired - Lifetime
-
2013
- 2013-09-05 US US14/019,035 patent/US8858188B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
DE102007010068A1 (en) | 2008-09-04 |
US20140010676A1 (en) | 2014-01-09 |
GB2459233A (en) | 2009-10-21 |
US8529218B2 (en) | 2013-09-10 |
WO2008104314A1 (en) | 2008-09-04 |
US20100098558A1 (en) | 2010-04-22 |
DE202008017530U1 (en) | 2009-12-17 |
GB2459233B (en) | 2011-09-28 |
US8858188B2 (en) | 2014-10-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
789A | Request for publication of translation (sect. 89(a)/1977) |
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