JP2017024128A - Cutting tool lathe-turning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently recognize the existence of a height difference of two cutting tools.SOLUTION: A cutting tool lathe-turning device 1 comprises a first cutting tool 740 and a second cutting tool 750 symmetrically arranged by sandwiching a rotary shaft 70, and includes detection means 8 for detecting the cutting tool tip, and the detection means 8 comprises an optical sensor 80 having a floodlight part 804 and a light receiving part 805, a detection part 84 for detecting that the cutting tool shields the light received by the light receiving part 805 and a calculation part 85 for calculating a period for detecting the revolving cutting tool tip by the optical sensor 80, and the first cutting tool 740 and the second cutting tool 750 are rotated at a constant speed, and lifting means 2 lowers lathe-turning means 7 at a constant speed, and the calculation part 85 calculates a difference between a first height of the lathe-turning means 7 measured by a height measurement part 4 when the optical sensor 80 detects the cutting tool tip in the first place and a second height measured by the height measurement part 4 when a period of continuously calculating a descent by the lifting means 2 becomes 1/2 time of time required for one rotation of rotation means 72.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a tool turning device including a tool for turning a workpiece.

  A tool turning device provided with a tool for turning (for example, refer to Patent Document 1) is used for turning and flattening a front surface or a back surface of a workpiece such as a semiconductor wafer. In some cases, the workpiece is turned by attaching two tools to a tool wheel provided in the tool turning device. In this case, when attaching the cutting tool to the cutting tool wheel, by matching the height position of the two cutting tools (tip position of the cutting tool), processing such as flatness on the turning surface of the workpiece The quality can be further improved and the processing speed can be increased.

  Here, when grasping the height position of the tool, for example, the tool is brought into contact with a contact sensor that reacts when the tool tip comes into contact with the tool, and the tip is detected, or the reflection type or the transmission type The tip of the cutting tool is detected in a non-contact manner when the cutting tool blocks the light projected and received in the optical sensor. In any case, the height position of the tip of the cutting tool is calculated from the position of the turning means provided with the cutting tool at the time when the tip of the cutting tool is detected and the amount of lowering of the turning tool by the lifting / lowering means. That is, in any case, in order for the tip of the cutting tool to be detected by the sensor, it is necessary to position the tip of the cutting tool at the detection position, and there is a processing apparatus having a structure for that purpose (for example, see Patent Document 2) ).

JP 2012-024879 A JP2013-6251A

  When turning a workpiece with a tool turning device with two tool bits attached to the tool wheel, each tool is detected one by one in order to match the height position of the two tools (the tip position of the tool). The position is detected at the position, and the tip positions of the two cutting tools are grasped. That is, it is necessary to move the tip of the cutting tool twice to the detection position of the sensor, which is one of the factors that reduce work efficiency. In addition, for example, when an operator attaches two cutting tools to the cutting tool wheel, it is difficult to completely match the height positions of the two cutting tools (tip positions of the cutting tools). In addition, when turning is performed in a state where the height positions of the two cutting tools are different, there is a problem that the height of the surface to be turned is not uniform.

  Therefore, when turning a workpiece with a tool turning device with two tool bits mounted on the tool wheel, if the height positions of the two tools are different, it is recognized efficiently and the height of the two tools is recognized. There is a problem that the positions can be matched.

  In order to solve the above-mentioned problems, the present invention provides a turning means including a turning means for rotating a tool for turning a work around an axis of rotation, a holding means for holding the work, and the holding means for holding the turning means. A tool turning device comprising lifting means for moving up and down relative to the means, and a height measuring unit for measuring the height position of the turning means lifted and lowered by the lifting means, the tool sandwiching the rotating shaft And detecting means for detecting the tips of the first byte and the second byte, the detecting means including two first and second bytes arranged at symmetrical positions, An optical sensor including a light projecting unit for projecting measurement light and a light receiving unit for receiving the measurement light, a detection unit for detecting that the tool has shielded the measurement light, and a tool for rotating the rotating means A calculation unit that calculates a period in which the optical sensor detects the tip of the optical sensor. The rotating means is used to rotate the first tool and the second tool at a constant speed, and the lifting means lowers the turning means at a constant speed. The first height position of the turning means measured by the height measuring unit when the tip of the cutting tool is first detected and the period calculated by continuing the descent by the lifting means are required for one rotation of the rotating means. The difference between the second height position measured by the height measurement unit when the time becomes ½ times the time is calculated, and the first byte and the second byte are calculated by the calculation unit. It is a tool turning device characterized by recognizing the difference in height position of the tool.

  In the cutting tool according to the present invention, the cutting tool includes two of a first cutting tool and a second cutting tool that are arranged symmetrically with respect to the rotation axis, and includes a first cutting tool and a second cutting tool. Detecting means for detecting the tip of the optical sensor, wherein the detecting means detects a light sensor including a light projecting unit for projecting measurement light and a light receiving unit for receiving the measurement light, and detecting that the measuring light is shielded by the cutting tool And a calculation unit that calculates a period in which the optical sensor detects the tip of the bite rotated by the rotating means. Then, the rotating means is used to rotate the first tool and the second tool at a constant speed, and the lifting / lowering means lowers the turning means at a constant speed. The first height position of the turning means measured by the height measuring unit when the tip is detected and the cycle calculated by continuing the descent by the elevating means are ½ times the time required for one rotation of the rotating means. By calculating the difference between the second height position measured by the height measurement unit and recognizing the difference in height position between the first byte and the second byte by the calculation unit, It is possible to recognize whether or not the height positions of the two cutting tools coincide with each other by the descent operation of the turning means. Based on this recognition, when the height positions of the two bytes are different, the height positions can be adjusted to match.

It is a perspective view which shows an example of a bite turning apparatus. It is a perspective view which shows an example of a bite unit. It is a perspective view which shows an example of a detection means. It is the schematic diagram which looked at the state which is calculating and recognizing the difference of the height position of a 1st byte and a 2nd byte by the detection means from the front side. It is a graph which shows typically an example of a signal outputted from a transmission type optical sensor.

  A tool turning device 1 shown in FIG. 1 is a device for turning a workpiece W such as a semiconductor wafer held by a holding means 3 with a turning means 7. The cutting tool 1 holds a workpiece W and a turning means 7 including a rotating means 72 for rotating a first tool 740 and a second tool 750 for turning the work W around the rotating shaft 70. The holding means 3, the raising / lowering means 2 for raising and lowering the turning means 7 with respect to the holding means 3, and the height measuring unit 4 for measuring the height position of the turning means 7 raised and lowered by the raising and lowering means 2.

  The front (−Y direction side) on the base 10 of the cutting tool 1 is an attachment / detachment area A that is an area where the workpiece W is attached / detached to / from the holding means 3. The + Y direction side) is a turning area B in which turning of the workpiece W held on the holding means 3 by the turning means 7 is performed.

  An input unit 100 is provided on the front side (−Y direction side) of the base 10. Behind the input means 100, in order from the + X direction side, a first cassette 101 in which the workpiece W before processing is accommodated, a robot 102 that carries the workpiece W in and out, and a workpiece after processing. A second cassette 103 that accommodates the object W is disposed. A temporary placement area 104 is provided behind the first cassette 101, and positioning means 105 is disposed in the temporary placement area 104. The workpiece W carried out from the first cassette 101 by the robot 102 and placed in the temporary placement area 104 is aligned at a predetermined position by the alignment means 105.

  A loading arm 106 that turns while holding the workpiece W is disposed at a position adjacent to the alignment means 105. The loading arm 106 holds the workpiece W aligned by the alignment unit 105 and conveys it to the holding unit 3. Next to the loading arm 106, an unloading arm 107 that turns while holding the processed workpiece W is provided. At a position close to the unloading arm 107, a cleaning means 108 for cleaning the processed workpiece W conveyed by the unloading arm 107 is disposed. The workpiece W cleaned by the cleaning means 108 is carried into the second cassette 103 by the robot 102.

  A column 11 is erected on the rear side (+ Y direction side) of the turning region B on the base 10, and an elevating means 2 is disposed on the side surface of the column 11 on the −Y direction side. The elevating means 2 includes a ball screw 20 having a vertical (Z-axis direction) axis, a pair of guide rails 21 arranged in parallel to the ball screw 20, and a motor 22 that is connected to the ball screw 20 and rotates the ball screw 20. And an elevating plate 23 in which an internal nut is screwed to the ball screw 20 and a side portion is in sliding contact with the guide rail 21, and when the motor 22 rotates the ball screw 20, the elevating plate 23 moves along with the guide rail 21. The turning means 7 disposed on the lifting plate 23 is moved up and down in the Z-axis direction.

  A height measuring unit 4 is disposed on the side surface of the column 11 on the −Y direction side. The height measuring unit 4 is, for example, a scale 40 that is fixed to the column 11 and extends along the moving direction (Z-axis direction) of the turning means 7, and reading that reads position information (scale) displayed on the surface of the scale 40. The configuration includes a portion 41. The reading unit 41 is fixed to the lifting plate 23 and moves up and down together with the lifting plate 23.

  The holding means 3 shown in FIG. 1 is, for example, a chuck table whose outer shape is circular, and includes a suction portion 30 that is made of a porous member or the like and sucks the workpiece W, and a frame body 31 that supports the suction portion 30. Is provided. The suction unit 30 communicates with a suction source (not shown), and the suction force generated by the suction of the suction source is transmitted to the holding surface 300 which is the exposed surface of the suction unit 30, so that the holding unit 3 holds the holding surface. The workpiece W is sucked and held on 300. The holding means 3 is movable in the Y-axis direction, and a cleaning means 12 for cleaning the holding surface 300 of the holding means 3 is disposed above the movement path of the holding means 3.

  The turning means 7 is connected to a rotary shaft 70 whose axial direction is the vertical direction (Z-axis direction), a housing 71 that rotatably supports the rotary shaft 70, and an upper end side of the rotary shaft 70, and rotationally drives the rotary shaft 70. Rotating means 72, a bite wheel 73 connected to the lower end side of the rotary shaft 70, and a first bite 740 and a second bite 750 that are detachably attached to the bottom surface 73 b of the bite wheel 73. Yes. As the rotary shaft 70 is driven to rotate by the rotating means 72, the bite wheel 73 rotates, and the first bite 740 and the second bite 750 go around the rotary shaft 70. The turning means 7 is disposed on the lifting plate 23 while being held by a holder 76 attached to the lifting plate 23.

  The first cutting tool 740 and the second cutting tool 750 are arranged on the bottom surface 73 b of the cutting tool wheel 73 at symmetrical positions with the rotating shaft 70 interposed therebetween. That is, the first cutting tool 740 and the second cutting tool 750 are spaced 180 degrees apart from each other on the circumference of one circle around the rotation shaft 70 on the bottom surface 73b of the bite wheel 73 with the rotation shaft 70 interposed therebetween. Has been placed.

  As shown in FIG. 2, the first byte 740 (second byte 750) is, for example, a state in which a first byte unit 74 (second byte unit 75) is configured, and the bite wheel 73 shown in FIG. It is arranged on the bottom surface 73b of. The first bite unit 74 (second bite unit 75) includes a shank 741 (751) formed in a prismatic shape, and a first bite 740 (second bit) detachably attached to the shank 741 (751). And a fixing screw 742 for fixing the first bit 740 (second bit 750) to the shank 741 (751). The side surface of the shank 741 (751) is provided with a recess 741b (751b) for fitting the first cutting tool 740 (second cutting tool 750), and a screw for screwing the fixing screw 742 into the recess. A hole 741a (751a) is provided.

  The first cutting tool 740 (second cutting tool 750) includes a plate-like base 740a (750a) and a cutting blade 740b (750b) fixed to the lower end of the base 740a (750a) in the longitudinal direction. The cutting blade 740b (750b) is made of, for example, single crystal diamond, and the tip of the cutting blade 740b (750b) becomes the tip 740d (750d) of the first cutting tool 740 (second cutting tool 750). . In addition, an elongated hole 740c (750c) through which the fixing screw 742 is passed is provided at a substantially central portion of the base 740a (750a). The fixing screw 742 through the elongated hole 740c (750c) of the base 740a (750a) is screwed into the screw hole 741a (751a) of the shank 741 (751) and tightened, and the first cutting tool 740 ( The first byte unit 74 (second byte unit 75) is configured by fixing the second byte 750). Then, by fixing the shank 741 (751) to the bottom surface 73b of the bite wheel 73 with screws or the like, the first bite unit 74 (second bite unit 75) is attached to the bite wheel 73. The first tool unit 74 and the second tool unit 75 are mounted on the tool wheel 73 so that the turning directions of the cutting blades 740b and 750b are the same.

  In the present embodiment, the height position of the first cutting tool 740 (second cutting tool 750) is adjusted by changing the mounting position of the first cutting tool 740 (second cutting tool 750) with respect to the shank 741 (751). 750c). The adjustment of the height position of the first cutting tool 740 (second cutting tool 750) is not limited to that shown in this embodiment. For example, the first cutting tool unit 74 (second cutting tool) with respect to the cutting tool wheel 73 is used. The mounting position of the unit 75) may be adjusted so as to be adjustable.

  As shown in FIG. 1, at a position adjacent to the turning means 7 lowered to the turning position, detection is performed by detecting the tip 740d (750d) of the first cutting tool 740 (second cutting tool 750) with the transmission optical sensor 80. Means 8 are provided. The detection means 8 shown in FIG. 3 includes, for example, a shaft portion 81 that stands on the upper surface 11a of the base 11 and can be rotated in the direction of arrow R by a motor (not shown). The shaft portion 81 has an axial direction that is the Z-axis direction, and can be moved up and down in the Z-axis direction by a driving means such as an air cylinder built therein. One end of an arm portion 82 that extends in the horizontal direction and rotates in the arrow R direction as the shaft portion 81 rotates is connected to the upper end portion of the shaft portion 81 in the longitudinal direction (Z-axis direction). The other end of the arm portion 82 is connected to a support plate 83 on which a transmissive optical sensor 80 is disposed. The support plate 83 may be configured to be movable in parallel with the upper surface 11a of the base 11 from the arm portion 82, for example.

  The transmissive optical sensor 80 disposed on the support plate 83 is formed of, for example, a bottom plate 800, a side plate 801 and a side plate 802 that are erected in parallel with each other from the bottom plate 800, and has a concave longitudinal section. It has become. Between the side plate 801 and the side plate 802, a cutting tool passing portion 80a through which the cutting blade 740b (750b) of the first cutting tool 740 (second cutting tool 750) rotated by the rotating means 72 shown in FIG. 1 is passed. . A light projecting unit 804 for projecting measurement light and a light receiving unit 805 for receiving measurement light are arranged on the inner surface upper portions of the side plate 801 and the side plate 802 so as to face each other. The measurement light projected from the light projecting unit 804, for example, travels straight in the horizontal direction and reaches the light receiving unit 805 or is blocked by the first tool 740 (second tool 750) that passes through the tool passing unit 80a. It is done. The light receiving unit 805 that senses light blocking by the first byte 740 (second byte 750) outputs a signal (for example, voltage) corresponding to the amount of received light that changes over time.

  The detection unit 8 includes a detection unit 84 and a calculation unit 85. The detector 84 is connected to the transmissive optical sensor 80, receives a signal corresponding to the amount of light received from the light receiver 805, and the first byte 740 (second byte 750) blocks the measurement light. Detect that

  The calculation unit 85 includes at least a CPU and a storage element such as a memory, and is connected to the detection unit 84. When the measurement light is shielded by the first tool 740 (second tool 750), that is, the transmissive optical sensor 80 detects the tip 740d (750d) of the first tool 740 (second tool 750). Is transmitted from the detection unit 84 to the calculation unit 85 and stored in the calculation unit 85. Based on this information, the calculation unit 85 calculates the period at which the transmission optical sensor 80 detects the tip 740d of the first cutting tool 740 or the tip 750d of the second cutting tool 750 that is rotated by the rotating means 72. Further, as shown in FIG. 1, the height measuring unit 4 is connected to the calculating unit 85, and the height position of the turning means 7 measured by the height measuring unit 4 (for example, the first cutting tool 740 of the first cutting tool 740). Information on the position of the tip 740d in the Z-axis direction) is sent.

  1 to 5, in the tool turning apparatus 1, the first tool 740 and the second tool 750 are rotated using the rotating means 72, and the lifting / lowering means 2 lowers the turning means 7. The operation of the tool turning device 1 when recognizing the difference in height position (difference in tip position) between the first tool 740 and the second tool 750 will be described. The first bit 740 and the second bit 750 are mounted on the bite wheel 73 by the operator so that their height positions coincide with each other, but actually, for example, as shown in FIG. The first cutting tool 740 and the second cutting tool 750 are the second cutting tool 7 when the turning means 7 is at the origin position than the height position Za0 of the first cutting tool 740 when the turning means 7 is at the origin position. The height position Zb0 of 750 is in the + Z direction. Here, it is assumed that the difference in height position between the first byte 740 and the second byte 750 is d0. In addition, the adjustment which makes the height position of the 1st cutting tool 740 and the 2nd cutting tool 750 correspond is performed using a dial gauge, for example.

  First, the shaft portion 81 shown in FIG. 3 rotates in the direction of arrow R, and the transmission type optical sensor 80 on the support plate 83 is positioned below the turning means 7. Then, the byte passing unit 80a and the first byte 740 (second byte 750) are aligned so that the first byte 740 (second byte 750) can pass through the byte passing unit 80a. The alignment is performed so that, for example, a straight line (measurement light beam) connecting the light projecting unit 804 and the light receiving unit 805 is orthogonal to the trajectory of the first bit 740 (second bit 750).

  Next, the rotating means 72 rotates the rotating shaft 70 at a constant speed (angular speed ω), and the bite wheel 73 rotates at the angular speed ω as the rotating shaft 70 rotates. Then, the first cutting tool 740 and the second cutting tool 750 mounted on the bottom surface 73b of the cutting tool wheel 73 rotate around the rotation shaft 70 at a period T (that is, T = 2π / ω). In this state, the lifting / lowering means 2 lowers the turning means 7 at a constant speed v, and brings the tip 740d of the rotating first tool 740 and the tip 750d of the second tool 750 closer to the transmissive optical sensor 80. .

  As shown in FIG. 4, the transmissive optical sensor 80 is positioned at the detection position so that the first cutting tool 740 (second cutting tool 750) can pass through the cutting tool passing portion 80a. Therefore, the turning means 7 descends in the −Z direction. First, when the tip 740d of the first cutting tool 740 reaches the measuring light L line projected from the light projecting unit 804, the measuring light L is transmitted to the first cutting tool. Blocked by 740. Therefore, the amount of light received by the light receiving unit 805 varies.

  A signal (voltage) corresponding to the amount of received light that changes over time due to light shielding by the first byte 740 is sent from the light receiving unit 805 to the detection unit 84. The detection unit 84 compares a signal (voltage) corresponding to the amount of received light transmitted from the light receiving unit 805 with a reference voltage Vc set in the detection unit 84 in advance. The reference voltage Vc is a threshold for determining the detection of the tip 740d of the first cutting tool 740 by the transmissive optical sensor 80, and is arbitrarily set.

  As shown in the graph of FIG. 5, for example, when the voltage input from the light receiving unit 805 to the detection unit 84 first starts to become equal to or lower than the reference voltage Vc, the transmissive photosensor 80 first detects the tip of the first bit 740. The detection part 84 detects as t1 (time t1) when 740d is detected. In the graph of FIG. 5, the horizontal axis indicates time (t), and the vertical axis indicates voltage (V) corresponding to the amount of received light.

  Information about the time t1 when the transmission optical sensor 80 first detects the tip 740d of the first bit 740 is sent from the detection unit 84 to the calculation unit 85. The calculation unit 85 calculates the first height position Za1 of the turning means 7 measured by the height measurement unit 4 at time t1, that is, the position of the tip 740d of the first cutting tool 740 in the Z-axis direction at time t1, for example. Za1 is stored.

  The lifting / lowering means 2 further continues the lowering of the turning means 7. Then, a signal (voltage) corresponding to the amount of received light that changes with time due to light shielding by the first byte 740 continues to be sent from the light receiving unit 805 to the detecting unit 84. As shown in FIG. 5, when the first byte 740 finishes passing through the byte passing portion 80a, the measurement light L is not blocked by the first byte 740, and the signal (voltage) sent to the detecting portion 84 is It becomes the same value as the reference voltage Vc.

  When the first rotating bit 740 shown in FIG. 4 starts to pass through the bit passing part 80a and shields the measuring light L, the time t2 when the transmission type optical sensor 80 detects the tip 740d of the first bit 740 for the second time. Is sent from the detection unit 84 to the calculation unit 85. Here, times t2, t3, and t4 shown in the graph of FIG. 5 indicate times when the voltage input from the light receiving unit 805 to the detecting unit 84 starts to become equal to or lower than the reference voltage Vc. Then, the calculation unit 85 calculates a cycle in which the transmission optical sensor 80 detects the tip 740d of the first bit 740. Here, the period from the time t1 to the time t2 shown in the graph of FIG. 5 is a period in which the transmissive optical sensor 80 detects the tip 740d of the first bit 740, and has the same value as the period T determined by the rotating means 72. Become. Then, as the lowering means 2 continues to descend by the lifting means 2, the calculation unit 85 continues to calculate the period at which the transmission optical sensor 80 detects the tip 740 d of the first cutting tool 740.

  When the turning means 7 continues to descend, the second cutting tool 750 eventually passes through the cutting tool passing portion 80a, and the transmission optical sensor 80 detects the tip 750d of the second cutting tool 750 at time t5 in FIG. Since the first tool 740 and the second tool 750 are separated from each other by 180 degrees, the transmissive optical sensor 80 thereafter uses the first tool 740 and the second tool 750 for each rotation of the rotating means 72. Are detected alternately. Therefore, as shown in FIG. 5, the byte detection cycle is ½ times (T / 2) the time required for one rotation of the rotating means 72 (that is, the cycle T). As shown in the graph of FIG. 5, the calculation unit 85 has the second height position Za2 measured by the height measurement unit 4 at time t5 (time t5) when the calculated period is ½ times the period T. Remember. The second height position Za2 is, for example, the position of the tip 740d of the first cutting tool 740 at time t5. The time t5 is the time when the transmission optical sensor 80 first detects the tip 750d of the second bit 750.

  For example, after the calculation unit 85 calculates a period that is ½ times the period T, the rotation of the rotating shaft 70 by the rotating unit 72 is stopped, and the elevating unit 2 raises the turning unit 7 in the + Z direction so as to be a transmission type. Separated from the optical sensor 80. Further, the shaft portion 81 is rotated to move the transmissive optical sensor 80 to a position away from the lower side of the turning means 7.

The calculation unit 85 calculates a difference d1 between the position Za1 of the tip 740d of the first byte 740 at time t1 and the position Za2 of the tip 740d of the first byte 740 at time t5. The calculation unit 85 calculates the difference d1 using the following calculation formula, for example.
d1 = Za1-Za2 (Equation 1)
Expression (1) calculates the difference d1 from the actual measurement value of the position measured by the height measurement unit 4.

Further, the calculation unit 85 may calculate the difference d1 by the following calculation formula, for example.
d1 = (t5−t1) × v (Equation 2)
Equation (2) is to calculate the difference d1 from the descending speed v of the turning means 7 by the elevating means 2 and the actual measurement value of the time when the tip of the cutting tool is detected by the detecting unit 84. As described above, it is preferable to calculate the difference d1 not only by the equation (1) but also by the equation (2) because a more reliable difference d1 can be calculated.

  In this way, when the second byte 750 is detected only after a plurality of cycles have elapsed since the first byte 740 is first detected, and a clear height position difference d1 between the two bytes is calculated. It can be determined that the height positions of the first bit 740 and the second bit 750 are different. On the other hand, when the first byte 740 is first detected and when the second byte 750 is first detected are within the same period, that is, unlike the example of FIG. 5, the first byte 740 is detected. And the second byte 750 are first detected within one rotation of the bite wheel 73 (when the period T / 2 in the example of FIG. 5 is calculated from the beginning), the two bytes Even if there is a difference in height position, it can be determined that the height position is substantially coincident with the difference being negligible. Even if the height position difference d1 is small, the first byte 740 and the second byte 750 may not be detected within the same period depending on the timing, but the height position difference d1 is set. A threshold value is provided, and when the value of d1 is smaller than a predetermined threshold value, it is determined that the height position difference between the first byte 740 and the second byte 750 is substantially the same. You can also. The second byte 750 may be detected first, and then the first byte 740 may be detected. In this case, a threshold value is provided for the height position difference d1, and the value of d1 is If it is smaller than the predetermined threshold value, it may be determined that the difference in height position between the first byte 740 and the second byte 750 is practically the same. As described above, in the tool turning device 1, it is recognized whether or not the height positions of the first tool 740 and the second tool 750 coincide with each other only when the lifting means 2 lowers the turning means 7 once. It becomes possible to do.

  When the height position difference d1 between the first byte 740 and the second byte 750 calculated and recognized by the calculation unit 85 is a difference that cannot be ignored (for example, the height position difference exceeds the threshold value). The operator adjusts the mounting position of the first cutting tool 740 or the second cutting tool 750. For example, when adjusting the height position of the first cutting tool 740, a dial gauge or the like is used.

  For example, a dial gauge probe not shown is applied to the first bit 740 shown in FIG. Then, the fixing screw 742 is loosened from the shank 741, the upper end of the first cutting tool 740 is brought into contact with the upper end of the recess 741b, and the height position of the first cutting tool 740 is adjusted while checking the value of the dial gauge. Then, by setting the first cutting tool 740 at a desired height position and then tightening the fixing screw 742, the height positions of the first cutting tool 740 and the second cutting tool 750 can be matched. Become. Since there may be a height position difference based on the wear difference between the first bit 740 and the second bit 750, the height position is periodically checked, and the first bit 740 or the second bit 740 It is preferable to adjust the height position of the cutting tool 750.

  The cutting tool 1 according to the present invention is not limited to the above embodiment, and the size and shape of the first cutting tool 740 (second cutting tool 750) shown in the accompanying drawings are also included. However, the present invention is not limited to this, and can be appropriately changed within a range in which the effect of the present invention can be exhibited. Further, instead of the transmission type optical sensor 80, a reflection type optical sensor may be used. In this case, when the light projected from the light projecting unit is blocked by the first tool 740 or the second tool 750, the light receiving unit receives the reflected light.

1: Bite turning device 10: Base 10a: Upper surface of base 11: Column
A: Removable area B: Turning area W: Workpiece 12: Cleaning means 100: Input means 101: First cassette 102: Robot
103: Second cassette 104: Temporary placement area 105: Positioning means
106: Loading arm 107: Unloading arm 108: Cleaning means 2: Lifting means 20: Ball screw 21: Guide rail 22: Motor 23: Lifting plate 3: Holding means (chuck table) 30: Suction unit 300: Holding surface 31: Frame Body 4: Height measuring unit 40: Scale 41: Reading unit 7: Turning means 70: Rotating shaft 71: Housing 72: Rotating means (pulse motor)
73: Bite wheel 73b: Bottom of bite wheel 76: Holder 74: First bite unit
740: First bit 740a: Base 740b: Cutting blade 740c: Long hole
740d: First cutting tool tip 741: Shank 741a: Screw hole 741b: Recess 75: Second cutting tool unit 750: Second cutting tool 750a: Base 750b: Cutting blade 750c: Slotted hole
750d: Tip of second bit 751: Shank 751a: Screw hole 751b: Recess 742: Fixing screw 8: Detection means
80: Transmission type optical sensor 80a: Tool passing portion 800: Bottom plate 801: Side plate
802: Side plate 804: Light projecting unit 805: Light receiving unit 81: Shaft unit 82: Arm unit 83: Support plate
84: Detection unit 85: Calculation unit

Claims (1)

Turning means including a rotating means for rotating a tool for turning a work around an axis of rotation, a holding means for holding the work, an elevating means for raising and lowering the turning means with respect to the holding means, A tool turning device comprising: a height measuring unit that measures the height position of the turning means that is raised and lowered by the lifting means;
The cutting tool is two of a first tool and a second tool arranged at symmetrical positions across the rotation axis,
Detecting means for detecting a tip of the first byte and the second byte;
The detection means includes an optical sensor including a light projecting section for projecting measurement light and a light receiving section for receiving the measurement light, a detection section for detecting that the cutting light is shielded by the cutting tool, and the rotating means. A calculation unit that calculates a period in which the optical sensor detects the tip of the cutting tool that circulates,
Using the rotating means to rotate the first bit and the second bit at a constant speed, and the lifting means lowers the turning means at a constant speed;
The calculation unit includes a first height position of the turning means measured by the height measurement unit when the optical sensor first detects the tip of the cutting tool,
The difference from the second height position measured by the height measuring unit when the calculated period by continuing the descent by the elevating means becomes 1/2 times the time required for one rotation of the rotating means is calculated. Calculate
A tool turning device that recognizes a difference in height position between the first tool and the second tool by the calculating unit.

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