JP2015047651A - Bite cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to detect easily the height position of a cutting blade fitted to a bite wheel.SOLUTION: A bite cutting device 1 comprises: holding means 10 which includes a holding surface 11 that holds a workpiece W; bite cutting means 20 which comprises a cutting blade 204 that implements cutting to the upper surface Wa of the workpiece W held by the holding means 10; moving means 30 which moves the bite cutting means 20 in the Z axis direction; height position detection means 40 which comprises light emitting means that includes a light emitting surface 43 and light receiving means that includes a light receiving surface 44 and detects the height position of the cutting blade 204; and positioning means 12 which positions the cutting blade 204 between the light emitting surface 43 and the light receiving surface 44 provided at the height position detection means 40 by moving relatively the bite cutting means 20 and the height position detection means 40. Therefore, the height position of the cutting blade 204 can be easily detected even if the workpiece W is held by the holding means 10.

Description

  The present invention relates to a cutting tool for cutting a workpiece with a cutting tool.

  A workpiece in which a plurality of electrodes called bumps are formed on the surface is made to have the same bump height by cutting the surface side using a cutting tool. The cutting tool includes a holding table having a holding surface for holding a workpiece, and a cutting tool having a cutting wheel equipped with a cutting blade that rotates in a direction parallel to the surface of the workpiece held by the holding table. (For example, refer to Patent Document 1 below).

  A contact type sensor is used for setting up the origin of the height position of the cutting blade in the cutting tool. Specifically, the operator places the sensor at a position corresponding to the cutting blade on the holding table, lowers the cutting means while holding the bite wheel so that the bite wheel does not rotate, and puts the cutting blade on the sensor. The height position of the cutting tool when the contact is detected is detected as the origin, and the depth of cut with respect to the workpiece is controlled based on the origin.

JP 2013-111161 A

  However, in the setup of the cutting blade using the contact type sensor as described above, since the height position of the cutting tool when the contact is detected by the sensor is the origin, the setup work is very complicated and troublesome. There is a problem that it takes.

  In addition, the cutting blade is made of, for example, single-crystal diamond, and wears with processing, so it is necessary to detect the height position of the cutting blade at a predetermined timing, but a contact-type sensor was used. In the technique, the height position of the cutting blade cannot be detected while the workpiece is held by the holding table.

  The present invention has been made in view of the above circumstances, and an object thereof is to easily detect the height position of a cutting blade even while a workpiece is held on a holding table. And

  The present invention relates to a cutting tool, a holding unit having a holding surface for holding a workpiece, a spindle having a rotation axis orthogonal to the holding surface, and a spindle mounted on the spindle and held by the holding unit. A cutting tool having a cutting wheel for cutting the upper surface of the workpiece, a cutting tool having a cutting tool, a light emitting device including a light emitting surface, and a light receiving device that faces the light emitting surface and receives light from the light emitting device. A height position detecting means for detecting the height position of the cutting blade by blocking the light emitted by the light emitting means and received by the light receiving means by the cutting blade, the cutting tool and the height A positioning means for relatively moving the position detecting means to position the cutting blade between the light emitting surface and the light receiving surface; and a moving means for moving the cutting tool in the direction of the rotation axis.

  A cutting tool according to the present invention comprises a light emitting means including a light emitting surface and a light receiving means including a light receiving surface, a height position detecting means for detecting the height position of the cutting edge of the cutting tool, a cutting tool and a height The position detecting means is relatively moved to position the cutting blade between the light emitting surface and the light receiving surface of the height position detecting means, and the workpiece is held by the holding means. However, the cutting blade can be positioned between the light emitting surface and the light receiving surface by the positioning means, and the height position of the cutting blade can be easily detected.

It is a perspective view which shows the structure of a cutting tool. It is a perspective view which shows the structure of a positioning means. It is a perspective view which shows the structure of a bite wheel and a bite unit. It is a perspective view which shows the structure of a height position detection means. It is a block diagram which shows the periphery structure of a height position detection means. It is sectional drawing which shows the state which cuts with a cutting tool. It is sectional drawing which shows the state which performs the height position detection of a cutting blade.

  A cutting tool 1 shown in FIG. 1 is a processing apparatus that performs cutting with a cutting tool (hereinafter referred to as “cutting tool”) on a circular workpiece W, and has a device base 2 that extends in the Y-axis direction. ing. A column 3 extending in the Z-axis direction is erected on the rear side in the Y-axis direction of the upper surface 2 a of the apparatus base 2. A cassette 4a for storing the workpiece W before processing and a cassette 4b for storing the workpiece W after processing are arranged facing each other at the front in the Y-axis direction of the upper surface 2a of the apparatus base 2. Yes.

  In the vicinity of the cassette 4a and the cassette 4b, a transfer robot 5 for carrying out the workpiece W from the cassette 4a and loading the workpiece W into the cassette 4b is disposed. The transfer robot 5 includes a bendable arm 5a and a hand 5b provided at the tip of the arm 5a, and the transfer robot 5 is installed so that the hand 5b reaches the cassette 4a and the cassette 4b. Further, in the movable range of the hand 5 b of the transfer robot 5, the temporary placing means 6 that temporarily places the workpiece W before processing and positions the workpiece W at a fixed position, and the workpiece W after processing are cleaned. A cleaning means 7 is provided.

  A rectangular conveyance processing unit 8 is formed at the center of the upper surface 2a of the apparatus base 2, and the conveyance processing unit 8 includes a holding unit 10 having a holding surface 11 for holding the workpiece W, and a holding unit. Positioning means 12 shown in FIG. 2 is provided which supports 10 from below and moves in the Y-axis direction. The holding means 10 may be configured to be rotatable, but it is not necessary to rotate the workpiece W when cutting the workpiece W.

  The positioning means 12 shown in FIG. 2 supports the ball screw 13 extending in the Y-axis direction, the motor 14 connected to one end of the ball screw 13, a pair of guide rails 15 extending parallel to the ball screw 13, and the holding means 10 from below. And at least a moving base 16. A nut inside the moving base 16 is screwed into the ball screw 13, and a lower portion is in sliding contact with the pair of guide rails 15. The positioning means 12 includes a detachment area P1 in which the workpiece W is attached to and detached from the holding means 10 in the transfer processing unit 8 shown in FIG. It can be moved between the cutting area P2 to be performed.

  In the vicinity of the temporary placement means 6, a first transport means 9a for transporting the workpiece W before processing from the temporary placement means 6 to the holding means 10 located in the attachment / detachment area P1 is disposed. Further, in the vicinity of the cleaning unit 7, a second transport unit 9 b that transports the processed workpiece W from the holding unit 10 located in the attachment / detachment region P <b> 1 to the cleaning unit 7 is disposed.

  In front of the column 3, there are provided a cutting tool 20 for cutting a workpiece W and a moving means 30 for moving the cutting tool 20 in the Z-axis direction. The cutting tool 20 includes a spindle 21 having a Z-axis direction axis orthogonal to the holding surface 11 of the holding means 10 and serving as a rotating shaft, a housing 22 that rotatably surrounds the spindle 21, and one end of the spindle 21. The motor 23 connected, the support part 24 which supports the housing 22, and the bite wheel 200 detachably attached to the lower end of the spindle 21 are provided.

  As shown in FIG. 3, a bite unit 201 is attached to the bite wheel 200. The cutting tool unit 201 includes a cutting tool shank 202 formed in a prismatic shape, a cutting tool 203 fixed to the cutting tool shank 202 by screw fastening, a cutting blade 204 detachably attached to the tip of the cutting tool 203, And a knob portion 205 for adjusting the angle. When the motor 23 shown in FIG. 1 rotates the spindle 21, the bite wheel 200 can be rotated at a predetermined rotation speed.

  1 includes a ball screw 31 extending in the Z-axis direction, a motor 32 connected to one end of the ball screw 31, a guide rail 33 extending parallel to the ball screw 31, and one surface connected to the support portion 24. The lift table 34 is provided. As for the raising / lowering stand 34, the nut formed inside engages with the ball screw 31, and the side part is in sliding contact with the pair of guide rails 33. By rotating the ball screw 31 by the motor 32, the cutting tool 20 can be moved up and down in the Z-axis direction at a predetermined feed speed together with the lifting table 34.

  The cutting tool 1 includes a height position detecting means 40 for detecting the height position of the cutting tool 20. The height position detecting means 40 is disposed, for example, on the upper surface side of the moving base 16 and on the outer peripheral side of the holding means 11, and in the Y-axis direction together with the holding means 10 by the positioning means 12 shown in FIG. It is movable.

  As shown in FIG. 4, the height position detection means 40 includes a frame 41, a detection unit 42 disposed on the upper surface of the frame 41, and a light emission unit 430 including a light emission surface 43 on one end side of the detection unit 42. The light receiving means 440 including the light receiving surface 44 is provided on the other end side of the detection unit 42. A gap 45 through which the cutting blade 204 shown in FIG. 3 can enter is formed between the light emitting surface 43 and the light receiving surface 44. A protective cover 46 that covers the detection unit 42 is rotatably attached to the frame body 41 by a shaft portion 48 connected to a shaft support portion 47. By rotating the shaft part 48, the protective cover 46 can be rotated to cover the detection part 42. The disposition position of the height position detecting means 40 is not particularly limited, and the cutting edge 204 is located around the holding means 10 and is relatively moved by the bite unit 201 and the height position detecting means 40. Any position that can enter the gap 45 is acceptable.

  As shown in FIG. 5, a light source 400 is connected to the light emitting surface 43 of the height position detecting means 40, and a photoelectric conversion unit 401 is connected to the light receiving surface 44 of the height position detecting means 40. . The measurement light can be emitted from the light emitting surface 43 by the light transmitted from the light source 400. When the measurement light is received by the light receiving surface 44 facing the light emitting surface 43, the measurement light received by the photoelectric conversion unit 401 is output as an output voltage. And can be sent to the voltage recognition unit 403.

  A reference voltage setting unit 402 in which a reference voltage at the height position of the cutting blade is stored in advance is connected to the voltage recognition unit 403. The voltage recognizing unit 403 compares the reference voltage stored in the reference voltage setting unit 402 with the output voltage converted by the photoelectric conversion unit 401 and recognizes that the output voltage has dropped and reached the reference voltage. A detection signal can be sent to the reference position detection unit 404. The reference position detection unit 404 is connected to a scale 49 that detects the position of the cutting tool 20 in the Z-axis direction. When the voltage output from the photoelectric conversion unit 401 reaches the reference voltage, the scale 49 at that time The position information is read out and stored as the origin of the cutting tool 20 in the Z-axis direction.

  Next, the operation of the cutting tool 1 will be described. A circular workpiece W shown in FIG. 1 is an example of a workpiece to be cut. The workpiece W is, for example, a resinous wafer or a TSV wafer (Through Silicon Via). In the workpiece W, the device D is formed in each of the regions partitioned by the lattice-shaped division lines S, and the surface on which the device D is formed is the upper surface Wa. On the other hand, the surface opposite to the upper surface Wa is the lower surface Wb held by the holding means 10. A plurality of workpieces W before processing are accommodated in the cassette 4a. First, the basic flow until the workpiece W accommodated in the cassette 4a is processed and accommodated in the cassette 4b will be described.

  The transport robot 5 unloads one workpiece W before processing from the cassette 4 a and transports it to the temporary placement means 6. After positioning the center position of the workpiece W in the temporary placing means 6, the workpiece W is transported to the holding means 10 located in the attachment / detachment region P1 by the first transport means 9a.

  After conveying the workpiece W to the holding means 10, the holding means 10 is moved in the Y-axis direction by the positioning means 12 shown in FIG. 2, and is moved below the cutting tool 20 in the cutting region P2. Thereafter, the cutting means 20 is moved in the Z-axis direction together with the lifting platform 34 by the moving means 30, and the cutting of the workpiece W is performed by the cutting tool 20.

  As shown in FIG. 6, the cutting tool 20 is positioned at a predetermined position in the Z-axis direction, the spindle 21 constituting the cutting tool 20 is rotated, and the cutting wheel 200 is moved at a predetermined rotational speed, for example, in the direction of arrow A. Rotate. Then, while moving the holding means 10 in the Y-axis direction, the cutting blade 204 that moves circularly in a direction parallel to the holding surface 11 of the holding means 10 is brought into contact with the upper surface Wa side of the workpiece W to perform cutting. By such cutting, for example, when a plurality of electrodes are formed on the surface Wa of the workpiece W, the heights of the plurality of electrodes can be made uniform.

  After the cutting of the workpiece W is completed, the holding means 10 located in the cutting area P2 shown in FIG. 1 moves in the Y-axis direction and returns to the attachment / detachment area P1. Then, the cut workpiece W is transferred to the cleaning unit 7 by the second transfer unit 9b, cleaned and dried, and then held by the hand 5b of the transfer robot 5 and accommodated in the cassette 4b. .

  Next, a process for detecting the height position of the cutting blade 204 of the cutting tool 20 will be described. In the cutting tool 1, the height position of the cutting edge 204 is not detected during the processing of the workpiece W, but may be performed every time one workpiece W is cut, for example, It may be performed after the workpiece W is cut.

  At the time of detecting the height position of the cutting blade 204, as shown in FIG. 7, the bite wheel 200 is lowered in the Z-axis direction while rotating at a rotational speed of, for example, 10 to 100 rpm, and the rotating cutting blade 204 is made to emit light. 43 and the light receiving surface 44. At this time, the rotational locus of the cutting blade 204 is positioned in the gap 45 by relatively moving the height position detection means 40 and the cutting tool cutting means 20 in the Y-axis direction by the positioning means 12 shown in FIG. adjust.

  At this time, the height position detection means 40 emits measurement light from the light emitting surface 43 toward the light receiving surface 44, and sends the measurement light received by the light receiving surface 44 to the photoelectric conversion unit 401 shown in FIG. The voltage recognition unit 403 determines whether or not the output voltage converted by the photoelectric conversion unit 401 has reached the reference voltage. In the voltage recognition unit 403 shown in FIG. 5, the reference voltage stored in the reference voltage setting unit 402 is set in advance. The reference voltage is, for example, 3V.

  Here, as the cutting blade 204 shown in FIG. 7 descends and enters the gap 45, the measurement light projected from the light emitting surface 43 toward the light receiving surface 44 is gradually blocked by the cutting blade 204. The amount of measurement light received by the light receiving surface 44 also decreases, and the output voltage converted by the photoelectric conversion unit 401 and recognized by the voltage recognition unit 403 also decreases. Therefore, as shown in the graph of FIG. 5, when a predetermined time elapses after the voltage recognition unit 403 starts to recognize the output voltage, the output voltage decreases and reaches the reference voltage. The reason why the waveform shown in the graph of FIG. 5 is comb-shaped is that light is shielded only when the bite wheel 200 rotates and the cutting blade 204 passes through the gap 45.

  When the voltage recognition unit 403 recognizes that the output voltage converted by the photoelectric conversion unit 401 has reached the reference voltage, the voltage recognition unit 403 sends a detection signal to the reference position detection unit 404 that the output voltage has reached the reference voltage. When receiving the detection signal, the reference position detection unit 404 sets the height position in the Z-axis direction of the cutting tool 20 detected by the scale 49 as the reference position in the Z-axis direction of the cutting tool 20. For example, if the position of the height position detecting means 40 is adjusted so that the reference position becomes equal to the position of the holding surface 11 of the holding means 10 in the Z-axis direction, the workpiece W is cut to a desired height. Control for bringing the blade 204 into contact can be easily performed. On the other hand, even when the reference position is not equal to the position of the holding surface 11 of the holding means 10 in the Z-axis direction, the distance in the Z-axis direction between the reference position and the position of the holding surface 11 of the holding means 10 in the Z-axis direction is If stored in the apparatus, the cutting blade 204 can be brought into contact with a desired height of the workpiece W.

  Further, if the reference position of the cutting tool 20 is recognized by a similar method after processing several workpieces, even if the cutting blade 204 is worn, the reference is corresponding to the wear. Since the position can be adjusted, even when the cutting blade 204 is worn, the cutting blade 204 is brought into contact with a desired position in the Z-axis direction of the workpiece W to process the workpiece W to a desired thickness. can do. Such recognition of the reference position can be performed even when the workpiece W is held on the holding means 10.

  Furthermore, immediately after replacement of the bite wheel 200 and the cutting blade 204, the reference position of the bite cutting means 20 is recognized, and after processing several workpieces W, the reference position of the bite cutting means 20 is similarly recognized. In addition, if the reference position has changed, the amount of change is the amount of wear of the cutting blade 204, so it is possible to detect how much wear has occurred at the tip of the cutting blade 204, and the operator Depending on the amount of wear, the tool can be replaced with a new bite wheel 200 or cutting blade 204.

  As described above, the cutting tool 1 includes the height position detecting means 40 including the light emitting means 430 including the light emitting surface 43 and the light receiving means 440 including the light receiving surface 44, the cutting tool 20 and the height position detecting means 40. And the positioning means 12 for positioning the cutting edge 204 in the gap 45 between the light emitting surface 43 and the light receiving surface 44 provided in the height position detecting means 40, so that the workpiece W is held by the holding means 10. Even when the cutting blade 204 is held, the gap 45 between the light emitting surface 43 and the light receiving surface 44 can be positioned by the positioning means 12 on the orbit where the cutting blade 204 rotates, so that the height position of the cutting blade 204 can be easily set. Can be detected.

1: Tool cutting device 2: Device base 2a: Upper surface 3: Column 4a, 4b Cassette 5: Transfer robot 5a: Arm 5b: Hand 6: Temporary placing means 7: Cleaning means 8: Transfer processing section 9a: First transfer means 9b: Second conveying means 10: Holding means 11: Holding surface 12: Positioning means 13: Ball screw 14: Motor 15: Guide rail 16: Moving base 20: Tool cutting means 21: Spindle 22: Housing 23: Motor 24: Support unit 200: Bite wheel 201: Bite unit 202: Bite shank 203: Bite 204: Cutting blade 205: Knob part 30: Moving means 31: Ball screw 32: Motor 33: Guide rail 34: Lifting table 40: Height position detecting means 41: Frame 42: Detection unit 430: Light emitting means 43: Light emitting surface 440: Light receiving means 44: Light plane 45: cavity 46: protective cover 47: shaft support 48: shaft portion 49: Scale 400: light source 401: photoelectric conversion unit 402: reference voltage setting unit 403: voltage recognition unit 404: reference position detection unit

Claims (1)

A cutting tool,
Holding means having a holding surface for holding the workpiece;
A bite cutting means having a spindle having a rotation axis orthogonal to the holding surface, and a bite wheel having a cutting blade attached to the spindle and cutting an upper surface of a workpiece held by the holding means;
A light-emitting means including a light-emitting surface; and a light-receiving means that faces the light-emitting surface and receives light from the light-emitting means, and the light emitted by the light-emitting means and received by the light-receiving means is blocked by the cutting blade A height position detecting means for detecting the height position of the cutting blade,
Positioning means for relatively moving the cutting tool and the height position detecting means to position the cutting blade between the light emitting surface and the light receiving surface;
A cutting tool comprising: moving means for moving the cutting tool in the direction of the rotation axis.

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