JP2017020897A - 物理量センサー、電子機器および移動体 - Google Patents
物理量センサー、電子機器および移動体 Download PDFInfo
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- JP2017020897A JP2017020897A JP2015138778A JP2015138778A JP2017020897A JP 2017020897 A JP2017020897 A JP 2017020897A JP 2015138778 A JP2015138778 A JP 2015138778A JP 2015138778 A JP2015138778 A JP 2015138778A JP 2017020897 A JP2017020897 A JP 2017020897A
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015138778A JP2017020897A (ja) | 2015-07-10 | 2015-07-10 | 物理量センサー、電子機器および移動体 |
| US15/188,230 US20170074896A1 (en) | 2015-07-10 | 2016-06-21 | Physical quantity sensor, electronic apparatus, and moving object |
| CN201610514596.6A CN106338297A (zh) | 2015-07-10 | 2016-06-30 | 物理量传感器、电子设备以及移动体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015138778A JP2017020897A (ja) | 2015-07-10 | 2015-07-10 | 物理量センサー、電子機器および移動体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017020897A true JP2017020897A (ja) | 2017-01-26 |
| JP2017020897A5 JP2017020897A5 (enExample) | 2018-07-26 |
Family
ID=57826188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015138778A Withdrawn JP2017020897A (ja) | 2015-07-10 | 2015-07-10 | 物理量センサー、電子機器および移動体 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20170074896A1 (enExample) |
| JP (1) | JP2017020897A (enExample) |
| CN (1) | CN106338297A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018056147A1 (ja) * | 2016-09-23 | 2018-03-29 | 住友精密工業株式会社 | センサ |
| JP2018179575A (ja) * | 2017-04-05 | 2018-11-15 | セイコーエプソン株式会社 | 物理量センサー、電子機器、および移動体 |
| GB2565295A (en) * | 2017-08-07 | 2019-02-13 | Atlantic Inertial Systems Ltd | Accelerometer |
| JP6939475B2 (ja) * | 2017-11-28 | 2021-09-22 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーデバイス、複合センサーデバイス、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体 |
| JP2020085744A (ja) * | 2018-11-28 | 2020-06-04 | セイコーエプソン株式会社 | 加速度センサー、電子機器および移動体 |
| JP7135901B2 (ja) * | 2019-01-31 | 2022-09-13 | セイコーエプソン株式会社 | 慣性センサー、電子機器および移動体 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19639946B4 (de) * | 1996-09-27 | 2006-09-21 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
| GB0304595D0 (en) * | 2003-02-28 | 2003-04-02 | Bae Systems Plc | An accelerometer |
| CN1273835C (zh) * | 2003-08-05 | 2006-09-06 | 北京大学 | 一种高灵敏度谐振加速度计芯片 |
| CN101000360B (zh) * | 2006-01-13 | 2012-05-16 | 台达电子工业股份有限公司 | 加速度计 |
| CN100498340C (zh) * | 2006-02-28 | 2009-06-10 | 株式会社电装 | 角速度传感器及其操作方法 |
| CN100567993C (zh) * | 2006-05-23 | 2009-12-09 | 北京航空航天大学 | 一种双轴谐振式微机械加速度计 |
| JP4310325B2 (ja) * | 2006-05-24 | 2009-08-05 | 日立金属株式会社 | 角速度センサ |
| US8207586B2 (en) * | 2008-09-22 | 2012-06-26 | Alps Electric Co., Ltd. | Substrate bonded MEMS sensor |
| JP5962900B2 (ja) * | 2012-04-02 | 2016-08-03 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
| JP6098780B2 (ja) * | 2012-04-19 | 2017-03-22 | セイコーエプソン株式会社 | ジャイロセンサーおよび電子機器 |
| CN102955046B (zh) * | 2012-10-23 | 2014-05-14 | 合肥工业大学 | 一种单片集成cmos mems多层金属三轴电容式加速度传感器及制备方法 |
| JP6206651B2 (ja) * | 2013-07-17 | 2017-10-04 | セイコーエプソン株式会社 | 機能素子、電子機器、および移動体 |
-
2015
- 2015-07-10 JP JP2015138778A patent/JP2017020897A/ja not_active Withdrawn
-
2016
- 2016-06-21 US US15/188,230 patent/US20170074896A1/en not_active Abandoned
- 2016-06-30 CN CN201610514596.6A patent/CN106338297A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20170074896A1 (en) | 2017-03-16 |
| CN106338297A (zh) | 2017-01-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180614 |
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| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180614 |
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| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20190117 |