JP2017020897A - 物理量センサー、電子機器および移動体 - Google Patents

物理量センサー、電子機器および移動体 Download PDF

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Publication number
JP2017020897A
JP2017020897A JP2015138778A JP2015138778A JP2017020897A JP 2017020897 A JP2017020897 A JP 2017020897A JP 2015138778 A JP2015138778 A JP 2015138778A JP 2015138778 A JP2015138778 A JP 2015138778A JP 2017020897 A JP2017020897 A JP 2017020897A
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Japan
Prior art keywords
fixed
movable
electrode side
fixed electrode
movable electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2015138778A
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English (en)
Japanese (ja)
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JP2017020897A5 (enExample
Inventor
田中　悟
Satoru Tanaka
悟 田中
翔太 木暮
Shota Kogure
翔太 木暮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2015138778A priority Critical patent/JP2017020897A/ja
Priority to US15/188,230 priority patent/US20170074896A1/en
Priority to CN201610514596.6A priority patent/CN106338297A/zh
Publication of JP2017020897A publication Critical patent/JP2017020897A/ja
Publication of JP2017020897A5 publication Critical patent/JP2017020897A5/ja
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
JP2015138778A 2015-07-10 2015-07-10 物理量センサー、電子機器および移動体 Withdrawn JP2017020897A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015138778A JP2017020897A (ja) 2015-07-10 2015-07-10 物理量センサー、電子機器および移動体
US15/188,230 US20170074896A1 (en) 2015-07-10 2016-06-21 Physical quantity sensor, electronic apparatus, and moving object
CN201610514596.6A CN106338297A (zh) 2015-07-10 2016-06-30 物理量传感器、电子设备以及移动体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015138778A JP2017020897A (ja) 2015-07-10 2015-07-10 物理量センサー、電子機器および移動体

Publications (2)

Publication Number Publication Date
JP2017020897A true JP2017020897A (ja) 2017-01-26
JP2017020897A5 JP2017020897A5 (enExample) 2018-07-26

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015138778A Withdrawn JP2017020897A (ja) 2015-07-10 2015-07-10 物理量センサー、電子機器および移動体

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US (1) US20170074896A1 (enExample)
JP (1) JP2017020897A (enExample)
CN (1) CN106338297A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12644707B2 (en) 2023-01-18 2026-06-02 Seiko Epson Corporation Inertial sensor and intertial measurement unit

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018056147A1 (ja) * 2016-09-23 2018-03-29 住友精密工業株式会社 センサ
JP2018179575A (ja) * 2017-04-05 2018-11-15 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
GB2565295A (en) * 2017-08-07 2019-02-13 Atlantic Inertial Systems Ltd Accelerometer
JP6939475B2 (ja) * 2017-11-28 2021-09-22 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、複合センサーデバイス、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体
JP2020085744A (ja) * 2018-11-28 2020-06-04 セイコーエプソン株式会社 加速度センサー、電子機器および移動体
JP7135901B2 (ja) * 2019-01-31 2022-09-13 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
EP4336240B1 (en) * 2021-06-10 2025-07-30 Stanley Electric Co. Ltd. Optical scanning device and electronic apparatus

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19639946B4 (de) * 1996-09-27 2006-09-21 Robert Bosch Gmbh Mikromechanisches Bauelement
GB0304595D0 (en) * 2003-02-28 2003-04-02 Bae Systems Plc An accelerometer
CN1273835C (zh) * 2003-08-05 2006-09-06 北京大学 一种高灵敏度谐振加速度计芯片
CN101000360B (zh) * 2006-01-13 2012-05-16 台达电子工业股份有限公司 加速度计
CN100498340C (zh) * 2006-02-28 2009-06-10 株式会社电装 角速度传感器及其操作方法
CN100567993C (zh) * 2006-05-23 2009-12-09 北京航空航天大学 一种双轴谐振式微机械加速度计
JP4310325B2 (ja) * 2006-05-24 2009-08-05 日立金属株式会社 角速度センサ
US8207586B2 (en) * 2008-09-22 2012-06-26 Alps Electric Co., Ltd. Substrate bonded MEMS sensor
JP5962900B2 (ja) * 2012-04-02 2016-08-03 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP6098780B2 (ja) * 2012-04-19 2017-03-22 セイコーエプソン株式会社 ジャイロセンサーおよび電子機器
CN102955046B (zh) * 2012-10-23 2014-05-14 合肥工业大学 一种单片集成cmos mems多层金属三轴电容式加速度传感器及制备方法
JP6206651B2 (ja) * 2013-07-17 2017-10-04 セイコーエプソン株式会社 機能素子、電子機器、および移動体

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12644707B2 (en) 2023-01-18 2026-06-02 Seiko Epson Corporation Inertial sensor and intertial measurement unit

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Publication number Publication date
CN106338297A (zh) 2017-01-18
US20170074896A1 (en) 2017-03-16

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