JP2017011076A - Holding device and method for separation - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a holding device capable of surely performing edge cutting between an object to be held and a holding surface without damaging the object to be held.SOLUTION: A holding device includes: holding means having a holding surface for holding an object to be held by being in surface contact with one surface side of the object to be held; holding force application means for applying holding force to the holding surface; and fluid supply means for supplying fluid between the holding surface and the object to be held and forming separation space between the holding surface and the object to be held to separate the object to be held from the holding surface. This holding device also includes pressing means for preventing the fluid from flowing out from an outer edge part of the object to be held by pressing the outer edge part of the object to be held.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a holding device and a separation method.

  Conventionally, even if the object to be held is caught in the suction port or the object to be held and the holding surface are in close contact with each other, gas is supplied between the object to be held and the holding surface to cut the edges. Thus, a holding device has been proposed that can remove the object to be held from the holding surface without applying stress to the object to be held (see, for example, Patent Document 1).

JP 2003-174077 A

  However, in the suction holding device 10 described in Patent Document 1, gas may escape from only a part between the wafer holding body H (held body) and the suction surface 28 (holding surface). There arises an inconvenience that the entire edge cut between the body H and the suction surface 28 cannot be performed. Here, in the case of Patent Document 1, the distance for forcibly separating the outer edge portion of the wafer holder H from the suction surface 28 may be increased. In this case, the curvature of the wafer holder H becomes larger than necessary. Another inconvenience occurs in that a fragile semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) constituting the wafer holder H is damaged.

  An object of the present invention is to provide a holding device and a separation method that can reliably perform edge cutting between a held body and a holding surface without damaging the held body.

  In order to solve the above-described problems, the present invention provides a holding means having a holding surface for holding the held body in surface contact with one surface side of the held body, and applying a holding force to the holding surface. A fluid is supplied between the holding force applying means, the holding surface and the held body, and a space is formed between the holding surface and the held body to separate the held body from the holding surface. A holding device comprising a fluid supply means, comprising: a pressing means for pressing the outer edge portion of the held body to prevent the fluid from flowing out from the outer edge portion of the held body. It is a holding device.

  The fluid supply means has a separation assisting means for limiting a separation amount by which the held body is separated from the holding surface by the fluid supplied, and the separation assisting means is elastically deformed on the other surface of the held body. A pressing member having a contact surface capable of surface contact, and the pressing member deforms the shape of the contact surface by the fluid supplied by the fluid supply means, from the central portion toward the outer edge. The separation space may be enlarged sequentially to assist the separation of the object to be held from the holding surface.

  The fluid supply means has a separation assisting means for limiting a separation amount by which the held body is separated from the holding surface by the fluid supplied, and the separation assisting means is elastically deformed on the other surface of the held body. A pressing member having an abutting surface that can be brought into surface contact with the fluid, and the pressing member maintains the shape of the abutting surface by the fluid supplied by the fluid supply means, and expands the spacing space. Assistance for separating the object to be held from the holding surface may be performed.

  According to another aspect of the present invention, after a surface contact with one surface side of the held body and holding the held body with the holding surface, a fluid is supplied between the holding surface and the held body, In a separation method in which a separation space is formed between the holding surface and the held body and the held body is separated from the holding surface, the outer edge portion of the held body is pressed to move from the outer edge portion of the held body. A separation method comprising a pressing step for preventing the fluid from flowing out.

  As described above, according to the present invention, the outer edge portion of the held body is pressed to prevent the fluid supplied between the holding surface and the held body from flowing out from the outer edge portion of the held body. Therefore, it is possible to reliably perform edge cutting between the held body and the holding surface without damaging the held body.

Sectional drawing which shows the holding | maintenance apparatus which concerns on 1st Embodiment. Operation | movement explanatory drawing of the holding | maintenance apparatus which concerns on 1st Embodiment. Operation | movement explanatory drawing of the conveying apparatus which concerns on 2nd Embodiment.

Hereinafter, a holding device according to each embodiment of the present invention will be described with reference to the drawings.
The X axis, the Y axis, and the Z axis in each embodiment are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Furthermore, in the present embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “ “Left” is the arrow direction of the X axis, “Right” is the opposite direction, “Front” is the front direction orthogonal to the page, and “Rear” is the opposite direction of the Y axis arrow direction.
In the description after the second embodiment, the same configuration and the same operation described in the first embodiment are omitted or simplified as appropriate.

[First Embodiment]
In FIG. 1, the holding device 10 has a holding means 20 having a holding surface 21 </ b> C for holding the held body WK in surface contact with one surface (lower surface) side of the held body WK, and a holding force on the holding surface 21 </ b> C. Gas as a fluid is supplied between the holding surface 21C and the object to be held WK, and the holding surface 21C and the object to be held are supplied. A fluid supply means 40 including a pressurizing means such as a pressurizing pump or a turbine that forms a space SP (see FIG. 2C) between the holding body WK and separates the held body WK from the holding surface 21C; The held body WK is held by the pressing means 50 that presses the outer edge of the held body WK and prevents the gas from flowing out from the outer edge of the held body WK, and the gas supplied by the fluid supply means 40. Spacing away from surface 21C And a spaced auxiliary means 60 for limiting.

  The holding means 20 includes a holding table 21 in which a chamber 21A communicating with the holding force applying means 30 and the fluid supply means 40 is formed, and a holding surface 21C communicating with the chamber 21A via the suction port 21B is formed. ing.

  The pressing means 50 can be moved by a driving device such as a linear motion motor or an articulated robot (not shown). And a contact body 52.

  The separation assisting means 60 includes a linear motion motor 61 as a driving device held on the upper surface of the substrate 51 and a holding plate held by an output shaft 61A of the linear motion motor 61 that passes through a through hole 51B formed in the substrate 51. 62 and a pressing member 63 having a contact surface 63A that is held by the holding plate 62 and elastically deformed and can be brought into surface contact with the other surface (upper surface) of the held body WK. The contact surface 63A has a central portion that is recessed in a spherical shape with respect to the outer edge portion, and a through hole 63B that penetrates the holding plate 62 and the pressing member 63 is formed in the central portion. In the case of the present embodiment, the amount of the depression at the center with respect to the outer edge of the contact surface 63A is set to 1 mm.

Next, operation | movement of the holding | maintenance apparatus 10 in 1st Embodiment is demonstrated.
First, with respect to the holding device 10 in which each member indicated by a solid line in FIG. 1 stands by at an initial position, one surface of the held body WK is held by a holding surface 21C by a manual means or a conveying means such as an articulated robot or a belt conveyor. Place on top. Then, the holding force applying means 30 drives the pressure reducing means, the pressure inside the chamber 21A is reduced, the held surface WK is sucked and held by the holding surface 21C, and the pressure sensor indicates that the inside of the chamber 21A is in a predetermined reduced pressure state. When it is detected by a pressure detection means (not shown) such as a load cell, the decompression means is stopped. Then, the process of performing a predetermined process with respect to the to-be-held body WK is implemented.

  When the predetermined process for the held body WK is completed, the pressing unit 50 drives a driving device (not shown) and presses the outer edge portion of the held body WK with the contact body 52 as shown in FIG. Stop driving the drive equipment. Then, the separation assisting means 60 drives the linear motion motor 61, and as shown in FIG. 2B, the contact surface 63A is pressed against the other surface of the held body WK to be in close contact with the linear motion. The drive of the motor 61 is stopped. At this time, the gas (atmosphere) present between the held body WK and the contact surface 63A escapes from the through holes 63B and 51A. Thereafter, the fluid supply means 40 drives the pressurizing means to supply gas into the chamber 21A, and the pressure detection means (not shown) detects that the inside of the chamber 21A has reached a predetermined pressure state higher than atmospheric pressure. Then, the driving of the pressurizing means is stopped.

  Next, when the separation assisting means 60 drives the linear motion motor 61 to raise the pressing member 63 as shown in FIG. 2C, the pressing member 63 is pressed by the gas supplied by the fluid supply means 40. The shape of the contact surface 63A is deformed, and the separation space SP is sequentially enlarged from the central portion toward the outer edge, thereby assisting to separate the held body WK from the holding surface 21C. If the presser member 63 continues to be raised thereafter, the separation space SP expands to the position of the outer edge of the held body WK pressed by the contact body 52 as shown in FIG. As a result, even if the held body WK and the holding surface 21C are in close contact, the held body WK can be separated from the holding surface 21C without applying stress to the held body WK. At this time, since the outer edge portion of the held body WK is pressed by the contact body 52, gas does not flow out from the outer edge portion of the held body WK, and the held body WK and the holding surface as in the past. There is no inconvenience that the gas escapes from only a part between the holding member 21C and the entire edge of the holding body WK and the holding surface 21C cannot be cut. Further, since the displacement of the held body WK is restricted by the pressing member 63, the held body WK is not curved more than necessary as in the conventional case, and the held body WK is fragile. Even if a fragile wafer is stuck on the holding sheet, they are not damaged.

  Thereafter, when the separation space SP is expanded to the outer edge portion pressed by the contact body 52, the holding means 20 opens a valve (not shown) to bring the chamber 21A to atmospheric pressure, and as shown in FIG. WK is held again by the holding surface 21C. At this time, an upper pressure means such as a pressure pump or a turbine (not shown) such as a pressure pump or a turbine, or a fluid supply means 40 is used as a fluid in the space formed by the held body WK, the contact body 52, and the substrate 51. Gas may be supplied to perform edge cutting between the outer edge portion of the contact surface 63A and the held body WK. In this case, the pressing unit 50 may include a shielding unit such as an electromagnetic valve or a shutter that can open and close the through hole 51A. Thereafter, the pressing means 50 and the separation assisting means 60 drive a driving device and a direct acting motor 61 (not shown) to return each member to the initial position. And the to-be-held body WK is conveyed by the next process by a manual or conveying means which is not illustrated, and the same operation | movement is repeated after that.

  According to the first embodiment as described above, the fluid supplied between the holding surface 21C and the held body WK by pressing the outer edge of the held body WK flows out from the outer edge of the held body WK. Therefore, the edge of the held body WK and the holding surface 21C can be reliably cut without damaging the held body WK.

[Second Embodiment]
Next, a second embodiment will be described. The holding device 10A of the second embodiment is applied to a conveying device that holds and conveys the held body WK, and the conveying device is a linear motor or multi-joint that is not illustrated by the holding device 10A that holds the held body WK. It can be moved by a driving device such as a robot.

  The difference between the holding device 10 and the holding device 10A is that, instead of the holding surface 21C, a holding surface 21D whose central portion is recessed in a spherical shape with respect to the outer edge portion, and the pressing means 50 are used instead of the holding means 21 The holding surface 21 </ b> D is provided with pressing means 50 </ b> A for pressing the outer edge portion of the held body WK on the mounting surfaces 70 </ b> A and 70 </ b> B that perform predetermined processing on the body WK. In the case of the present embodiment, the amount of the depression at the center portion with respect to the outer edge portion of the holding surface 21D is set to 1 mm.

  The pressing means 50A is constituted by a closed loop contact body 52A that can be elastically deformed.

Next, the operation of the transport device in the second embodiment will be described.
First, a driving device (not shown) is driven, and as shown in FIG. 3A, the contact body 52A is pressed against the outer edge portion of the held body WK located on the placement surface 70A, and the driving of the driving device is stopped. To do. Next, the holding force applying means 30 drives the pressure reducing means, and as shown in FIG. Thereafter, a driving device (not shown) is driven and, as shown in FIGS. 3C and 3D, the held body WK is placed on the placement surface 70B, and then the held body is placed on the placement surface 70B. The outer edge of the WK is pressed by the contact body 52A, and the driving of the driving device is stopped.

  Next, when the holding force applying means 30 stops driving the pressure reducing means, the held body WK falls on the placement surface 70B by its own weight, but the held body WK is biting into or held in the suction port 21B. Since the surface 21C may be in close contact with the surface 21C, the fluid supply means 40 drives the pressurizing means to supply gas into the chamber 21A. As a result, as shown in FIG. 3E, a separation space SP is formed between the holding surface 21D and the held body WK, and the held body WK is reliably edged from the holding surface 21D, so that the mounting surface 70B. Placed on top. In addition, the gas (atmosphere) existing between the holder WK and the placement surface 70B escapes from a hole or the like (not shown) of the placement surface 70B. Next, after the fluid supply means 40 stops driving the pressurizing means, a driving device (not shown) is driven to separate the holding device 10A from the held body WK, and thereafter the same operation as described above is repeated.

  In the second embodiment as described above, the same effect as that of the first embodiment can be obtained.

  The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, the holding force applying means is not limited as long as the holding force can be applied to the holding surface as long as it is within the range in view of the common general technical knowledge at the time of filing (others). Description of means and steps is omitted).

The holding means 20, 20A may include a chamber divided into a plurality of compartments therein. In such a case, when the object to be held WK is separated from the holding surfaces 21C and 21D, from the center side of the holding surfaces 21C and 21D toward the outer edge side compartment, or from the outer edge side to the center side compartment. The fluid can be supplied sequentially, and the separation space SP can be sequentially enlarged to separate the held body WK from the holding surfaces 21C and 21D.
The holding means 20, 20 </ b> A may not have the chamber 21 </ b> A formed therein, and the suction port 21 </ b> B may directly communicate with the holding force applying means 30 and the fluid supply means 40.
The holding means 20 and 20A may have holding surfaces 21C and 21D in which a suction port 21B is formed by a porous body.
The holding surfaces 21C and 21D are a spherical shape, a dome shape, an ellipsoidal surface shape, a parabolic surface shape, a toroidal shape, a half pipe shape, a curved surface shape such as a free-form surface shape, a polygonal prism surface such as a polygonal surface shape and a prism shape. It may be recessed in a shape, a staircase shape, or the like.
The amount of the depression in the central portion with respect to the outer edge portion of the holding surface 21D may be 1 mm or more, or 1 mm or less.

When the holding force applying unit 30 includes chambers divided into a plurality of compartments in the holding units 20 and 20A, the holding force applying unit 30 may be configured to decompress the plurality of chambers independently.
The holding force applying means 30 may drive the pressure reducing means so that the pressure in the chamber 21A is in a predetermined reduced pressure state based on the detection result of the pressure detecting means (not shown) during the suction holding of the held object WK.
The holding force applying means may be an electrostatic chuck, a magnet, an adhesive, or the like that holds the held body WK by applying a Coulomb force, a magnetic force, an adhesive force, or the like as a holding force.

The fluid supply means 40 and the upper pressurizing means (not shown) supply simple gas such as nitrogen gas, oxygen gas and rare gas, mixed gas, gas such as air, supply liquid such as water and oil, gel Those that supply the powder, those that supply the powder, those that supply steam, and the like can be employed. In such a case, the holding means 20 and 20A include removal means such as a suction device, a blower, and a drying device that remove fluid such as liquid and powder remaining on the holding surfaces 21C and 21D and the held body WK. It may be.
When the fluid supply means 40 includes chambers divided into a plurality of compartments in the holding means 20 and 20A, the fluid supply means 40 may be configured to supply fluid independently to the plurality of chambers.
The fluid supply means 40 may drive the pressurizing means while forming the separation space SP so that the pressure in the chamber 21A becomes a predetermined pressure state based on the detection result of the pressure detection means (not shown).

The contact bodies 52 and 52A may be made of an elastically deformable member such as rubber or resin, or may be made of an inelastically deformable member such as resin, metal, or glass. Only the surface in contact with the body WK may be provided with an elastically deformable member such as rubber or resin.
The contact bodies 52 and 52A may be formed with irregularities on the holding surface by embossing or the like, or a coating layer containing fluorine or silicon or the like may be laminated. The contact bodies 52 and 52A themselves may be made of fluorine. You may form with resin, a silicon resin, etc. Thereby, it can prevent that the to-be-held body WK sticks to the contact bodies 52 and 52A.
The abutting bodies 52 and 52A may have any shape as long as the outer edge of the held body WK can be pressed. For example, a circular ring shape, an elliptical ring shape, a polygonal ring shape such as a quadrangle, an irregular ring shape, or the like. It may be a ring shape, a frame shape in which straight lines and curves are combined, or the like.
Since the separation space SP cannot be expanded to the outer edge (end portion) of the held body WK pressed by the contact bodies 52 and 52A, the contact body 52 is configured to press the outer edge of the held body WK as much as possible. Is preferred.
After the separation space SP is expanded to the position of the outer edge portion of the held body WK pressed by the contact bodies 52 and 52A (after the state of FIGS. 2D and 3D), the fluid supply means 40 is added. The pressure means is driven to further pressurize the chamber 21A instantly, and gas is released from the outer edge of the held body WK pressed by the contact bodies 52 and 52A, so that the outer edge of the held body WK is cut off. May be performed. In this case, the abutting bodies 52 and 52A may be deformed so as to be pushed upward by further pressurizing the inside of the chamber 21A, or a transfer means (not shown) drives the driving device, and the abutting body. The pressing force applied to the held body WK by the 52 and 52A may be reduced, or the contact bodies 52 and 52A may be slightly lifted from the held body WK.
After the separation space SP is expanded to the position of the outer edge portion of the held body WK pressed by the contact bodies 52 and 52A (after the state shown in FIGS. 2D and 3D), the transfer means (not shown) is driven. The outer edge part of the to-be-held body WK may be trimmed by driving the device and rotating the pressing means 50, 50A within the holding surface 21C and the mounting surface 70B.
The contact body 52A may or may not protrude from the holding surface 21D, and the protrusion amount may be arbitrarily determined by a protrusion amount adjusting means (not shown) such as a driving device or a screwdriver mechanism. it can.

The separation assisting means 60 may be configured to drive the linear motion motor 61 in accordance with the supply of fluid to the chamber 21 </ b> A by the fluid supply means 40 and raise the contact surface 63 </ b> A, or without driving the linear motion motor 61. Alternatively, the contact surface 63A may be deformed by the fluid supplied by the fluid supply means 40 without using the direct acting motor 61, and the separation space SP may be enlarged.
The separation assisting unit may employ a pressing member having a contact surface that can be brought into surface contact without elastic deformation on the other surface of the held body WK. In this case, the pressing member is moved by the fluid supply unit 40. The supplied fluid maintains the shape of the contact surface to enlarge the separation space SP, and assists the separation of the held body WK from the holding surface 21C. When such a holding member is used, when the held body WK is separated from the holding surface 21C, the surface shape of the held body WK is kept different from the case where a holding member having an elastically deformable contact surface is used. Thus, the object to be held WK can be separated from the holding surface 21C.
The holding plate 62 may be made of a member that is not elastically deformable, such as metal, glass, ceramics, or a polymer resin, or may be made of an elastically deformable member such as rubber or resin. .
The contact surface 63A is a spherical shape, dome shape, ellipsoidal surface shape, paraboloid shape, toroidal shape, half-pipe shape, polygonal surface shape such as a free-form surface shape, polygonal surface shape, prism shape, etc. Alternatively, it may be recessed in a staircase shape.
The amount of depression in the central portion with respect to the outer edge portion of the contact surface 63A may be 1 mm or more, or 1 mm or less.
The contact surface 63A may be formed with irregularities by embossing or the like, a coating layer containing fluorine, silicon, or the like may be laminated, or the contact surface 63A itself is formed of a fluorine resin or a silicon resin. May be. Thereby, it can prevent that the to-be-held body WK sticks to the contact surface 63A.
The separation assisting means 60 may or may not be present.

The holding devices 10, 10 </ b> A and the conveying device may be configured so as to hold the held body WK by being inverted and arranged or placed horizontally.
The predetermined process performed on the held body WK on the holding surface 21C and the mounting surfaces 70A and 70B is, for example, a wafer in which the held body WK has a protective sheet attached to the upper surface and a holding sheet attached to the lower surface. In some cases, after holding the holding sheet by the holding surface 21C and the mounting surfaces 70A and 70B, the protective sheet may be peeled off by a peeling means (not shown), or one or a plurality of held bodies WK are laminated. In the case of a sheet-like member such as a wafer, paper, or resin, a character, a photograph, a conductive pattern such as an electrode or a wiring may be printed on the held body WK, or an ultraviolet curable resin or the like may be printed on the held body WK. In the case where an energy ray curable resin such as an electron beam curable resin is applied, the energy ray curable resin may be cured, or a conductive paint or anti-static paint on the support WK. Antifouling paint, rustproof paint, UV In the case where a functional paint such as a base coat is applied, the functional paint may be dried or stabilized, and any treatment may be performed on the held object WK. Alternatively, the predetermined process may not be performed.
The holding device 10A is in surface contact with the upper surface of the object to be held WK in the state of FIG. 3A, and can apply the pressure reducing force and pressure of the holding force applying means 30 and the fluid supply means 40 to the object to be held WK. A cushioning means capable of elastic deformation such as sponge or resin having a through hole may be provided. Thereby, when the to-be-held body WK moves to the holding surface 21D side or the mounting surface 70B side, the impact applied to the to-be-held body WK can be reduced.
As shown by a two-dot chain line in FIG. 1, the held body WK has a wafer WF attached to the upper surface (or lower surface) of the adhesive sheet AS, or the wafer WF and the upper surface (or lower surface) of the adhesive sheet AS. The frame member RF may be attached.
As indicated by a two-dot chain line in FIG. 1, when the frame member RF is attached to the upper surface of the adhesive sheet AS, the pressing unit 50 may press the outer edge portion of the held body WK via the frame member RF. And when there is no frame member RF, the press means 50 should just press the outer edge part of adhesive sheet AS.
The material, type, shape, and the like of the held body WK, the adhesive sheet AS, the frame member RF, and the like in the present invention are not particularly limited. For example, the adhesive sheet AS may be a circle, an ellipse, a polygon such as a triangle or a rectangle, and other shapes. Further, as the held body WK, for example, an adhesive sheet, a resin sheet, a rubber sheet, paper, a resin plate, a wooden plate, an iron plate, a stainless steel plate, an aluminum plate, a copper plate, or a single plate such as a glass plate, or the like Two or more laminated composites may be used. In addition, the object to be held WK includes food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as circuit boards, electrode substrates, and optical disks, or earthenware members and articles in any form. Can also be targeted. In addition, the adhesive sheet is replaced with a functional or application reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. A sheet, a film, a tape, etc. may be sufficient.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 10 ... Holding device 20 ... Holding means 21B ... Suction port 21C ... Holding surface 30 ... Holding force provision means 40 ... Fluid supply means 50 ... Pressing means 60 ... Separation Auxiliary means 63 ... pressing member 63A ... contact surface SP ... separation space WK ...

Claims (4)

Holding means having a holding surface for holding the held body in surface contact with one surface side of the held body;
Holding force applying means for applying a holding force to the holding surface;
Fluid supply means for supplying a fluid between the holding surface and the object to be held and forming a space between the holding surface and the object to be held to separate the object to be held from the holding surface; In the holding device
A holding apparatus comprising: a pressing unit that presses an outer edge portion of the held body to prevent the fluid from flowing out from the outer edge portion of the held body.   The fluid supply means has a separation assisting means for limiting a separation amount by which the held body is separated from the holding surface by the fluid supplied, and the separation assisting means is elastically deformed on the other surface of the held body. A pressing member having a contact surface capable of surface contact, and the pressing member deforms the shape of the contact surface by the fluid supplied by the fluid supply means, from the central portion toward the outer edge. The holding apparatus according to claim 1, wherein the space is sequentially expanded to assist the space to be held from the holding surface.   The fluid supply means has a separation assisting means for limiting a separation amount by which the held body is separated from the holding surface by the fluid supplied, and the separation assisting means is elastically deformed on the other surface of the held body. A pressing member having an abutting surface that can be brought into surface contact with the fluid, and the pressing member maintains the shape of the abutting surface by the fluid supplied by the fluid supply means, and expands the spacing space. The holding device according to claim 1, wherein the holding device is assisted to separate the held body from the holding surface. After the surface is brought into contact with one surface of the held body and the held body is held by the holding surface, a fluid is supplied between the holding surface and the held body, and the holding surface and the held body In a separation method in which a separation space is formed between the holding surfaces and the held body is separated,
A separation method comprising a pressing step of pressing the outer edge portion of the held body to prevent the fluid from flowing out from the outer edge portion of the held body.

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