JP2020119973A - Sheet peeling device and sheet peeling method - Google Patents

Abstract

To provide a sheet peeling device and sheet peeling method, capable of reducing running cost.SOLUTION: A sheet peeling device EA includes air gap formation means 10 for forming an air gap GP between an adhesive sheet AS bonded to an adherend body WK and the adherend body WK in a more inward region than an outer edge of the adhesive sheet AS and movement means 20 for peeling off the adhesive sheet AS from the adherend body WK by relatively moving the adhesive sheet AS formed with an air gap GP and the adherend body WK.SELECTED DRAWING: Figure 1

Description

The present invention relates to a sheet peeling device and a sheet peeling method.

BACKGROUND ART Conventionally, a sheet peeling device that peels an adhesive sheet attached to an adherend is known (for example, see Patent Document 1).

JP, 2017-123409, A

However, since the peeling device 1 (sheet peeling device) described in Patent Document 1 requires the peeling tape T2 for peeling the protective tape T1 (adhesive sheet) from the wafer W (adherend), the running cost is low. There is a disadvantage that it increases.

An object of the present invention is to provide a sheet peeling device and a sheet peeling method that can reduce running costs.

The present invention employs the configurations described in the claims.

According to the present invention, since a gap is formed between the adhesive sheet and the adherend to separate the adhesive sheet from the adherend, it is not necessary to use a release tape and the running cost can be reduced.

(A)-(C) is explanatory drawing of the sheet peeling apparatus which concerns on one Embodiment of this invention.

An embodiment of the present invention will be described below with reference to the drawings.
The X axis, the Y axis, and the Z axis in the present embodiment are in a relationship of being orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. To do. Further, in the present embodiment, when viewed from the front direction of FIG. 1 parallel to the Y axis as a reference, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, and “down” is the opposite direction. “Left” is the arrow direction of the X axis, “right” is the opposite direction, “front” is the front direction in FIG. 1 parallel to the Y axis, and “rear” is the opposite direction.

In FIG. 1, the sheet peeling apparatus EA is a gap forming unit that forms a gap GP between the adhesive sheet AS and the adherend WK in a region inside the outer edge of the adhesive sheet AS attached to the adherend WK. 10, a moving unit 20 that relatively moves the adhesive sheet AS and the adherend WK in which the gap GP is formed to separate the adhesive sheet AS from the adherend WK, and a gap expanding unit 30 that expands the gap GP. It is provided above the supporting means 40 for supporting the adherend WK.

The space forming means 10 includes a lower opening bowl-shaped chamber 11, and a pressure reducing means 12 such as a pressure reducing pump or a vacuum ejector which communicates with a closed space SP formed by the chamber 11 and the adhesive sheet AS.

The moving means 20 is provided with a direct drive motor 21 as a drive device that supports the chamber 11 with its output shaft 21A.

The gap expanding means 30 is provided so as to be capable of penetrating the adhesive sheet AS, and as shown in the drawing with AA in FIG. 1, supplies a gas as a fluid from a blowout member 31 having a blowout port 31A. A structure that is a fluid supply means and includes a gas supply means 32 such as a pressure pump or a turbine, and blows out gas from the outlet 31A of the blowout member 31 penetrating the adhesive sheet AS into the gap GP to expand the gap GP. Has become.
The blowing member 31 is a needle-like member that is supported in the chamber 11 and has a lower end formed with a blowing port 31A that communicates with the gas supply unit 32.

The support means 40 includes a table 41 having a support surface 41A that can be suction-held by a decompression means such as a decompression pump or a vacuum ejector (not shown).

The operation of the above sheet peeling device EA will be described.
First, with respect to the sheet peeling device EA in which each member is arranged at an initial position shown by a solid line in FIG. 1A, a user of the sheet peeling device EA (hereinafter simply referred to as “user”) or an articulated robot A conveyor (not shown) such as a belt conveyor or the like places the adherend WK at a predetermined position on the support surface 41A with the adhesive sheet AS facing upward. Then, the supporting means 40 drives the depressurizing means (not shown) to start sucking and holding the adherend WK on the supporting surface 41A.

Then, the moving means 20 drives the linear motor 21 to lower the chamber 11 as shown by the chain double-dashed line in FIG. 1(A), and after forming the closed space SP with the chamber 11 and the adhesive sheet AS. The void forming means 10 drives the depressurizing means 12 to start depressurizing the closed space SP. As a result, as shown by the chain double-dashed line in FIG. 1A, the adhesive sheet portion AS1 that forms the closed space SP is pulled toward the closed space SP, and the space between the adhesive sheet portion AS1 and the adherend WK. The air gap GP is formed at the same time, the blowing member 31 pierces the adhesive sheet portion AS1, and the air outlet 31A enters into the air gap GP.

After that, the moving means 20 and the gap expanding means 30 drive the linear motion motor 21 and the gas supply means 32, and as shown in FIG. 1(B), the chamber 11 is raised while blowing the gas into the gap GP from the outlet 31A. Let As a result, the gap GP is expanded toward the outer edge of the adhesive sheet AS, and the adhesive sheet AS is peeled off from the adherend WK as shown in FIG. 1(C).

When the peeling of the adhesive sheet AS from the adherend WK is completed, the moving means 20 stops the drive of the linear motion motor 21, and the gap forming means 10 stops the drive of the pressure reducing means 12 to reduce the pressure in the sealed space SP. After the release, the space expanding means 30 stops driving the gas supply means 32. The adhesive sheet AS from which the decompression of the closed space SP has been released is put into a collection means (not shown) such as a collection box or a collection bag that has moved below the adhesive sheet AS, or is removed from the chamber 11 by the user. And then collected. Next, after the supporting means 40 stops driving the depressurizing means (not shown) to release the suction holding of the adherend WK on the support surface 41A, the user or the conveying means (not shown) moves the adherend WK to the next step. When transported, the moving means 20 drives the linear motor 21 to return the chamber 11 to the initial position, and thereafter, the same operation as above is repeated.

According to the embodiment as described above, since the gap GP is formed between the adhesive sheet AS and the adherend WK to separate the adhesive sheet AS from the adherend WK, it is not necessary to use a release tape, and the running The cost can be reduced.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the present invention is mainly illustrated and described with respect to particular embodiments mainly, but with respect to the embodiments described above, without departing from the scope of the technical idea and the object of the present invention, the shape, Those skilled in the art can make various modifications in the material, quantity, and other detailed configurations. Further, the description of limiting the shape, the material, etc. disclosed above is described as an example for facilitating the understanding of the present invention, and does not limit the present invention. The description with the name of the member from which some or all of the above restrictions are removed is included in the present invention.

For example, the sheet peeling apparatus EA may include a suppressing unit that suppresses the gas blown from the blowout port 31A from being blown out from the outer edge of the adhesive sheet AS. An example of such suppressing means is one including a pressing member supported by a driving device. In this case, the suppressing means drives the driving device, and the gap expanding means 30 drives the gas supply means 32 to blow out the gas from the outlet 31A in a state where the adhesive sheet AS is pressed by the pressing member.

The space forming means 10 may employ a lower opening type bowl-shaped chamber 11 that presses the outer edge of the adhesive sheet AS, or a plate-like suction having a holding surface that holds a part or all of the adhesive sheet AS. Even if a configuration is adopted in which the adhesive sheet AS is sucked by the plate, the suction plate is raised by the moving means 20 and the region inside the outer edge of the adhesive sheet AS is separated from the adherend WK to form the gap GP. Alternatively, a plurality of chambers 11 having different sizes may be provided.
The space forming means 10 employs energy applying means for applying energy rays to the adhesive sheet AS when the adhesive sheet AS is self-peeling by applying energy rays such as ultraviolet rays, infrared rays, visible rays, sound waves, X-rays or gamma rays. A structure may be adopted in which the region inside the outer edge of the adhesive sheet AS is peeled off from the adherend WK to form the gap GP. In this case, the chamber 11 may or may not be provided. May be.

The moving means 20 may move the adherend WK to remove the adhesive sheet AS from the adherend WK without moving or while moving the adhesive sheet AS, or instead of the linear motor 21. Alternatively, in combination, the adhesive sheet AS and the adherend WK may be relatively moved by another driving device such as an articulated robot.

The space expanding means 30 may employ the non-needle-shaped blowing member 31 as long as the blowing port 31A of the blowing member 31 piercing the adhesive sheet AS can be located between the adhesive sheet AS and the adherend WK. However, a plurality of blowing members 31 may be provided.
The air gap expanding means 30 employs a blowout member 31 that is formed on one side so that the blowout port 31A opens in a direction that intersects the extending direction of the blowout member 31, or a blowout member 31 in which the blowout port 31A opens radially. Alternatively, in this case, a drive device such as a rotation motor that rotates the blowout member 31 may be employed so that the blowout port 31A faces in any direction such as the left-right direction or the front-back direction.
The air gap expanding means 30 may be configured as a separate body independent of the air gap forming means 10. In this case, the air gap expanding means 30 is provided with a drive device for displacing the blowing member 31, and the adhesive sheet AS is pierced with the blowing member 31 to be positioned in the gap GP. The gas may be blown out from the blowout port 31A, or the gas may be blown toward the gap GP from the blowout port 31A located at a position adjacent to the gap GP between the adhesive sheet AS and the adherend WK. Good.
The void expanding means 30 may be used in place of or in combination with the blowing member 31 and the gas supplying means 32 to expand the void GP with a chamber and a pressure reducing means that are larger than the void forming means 10, or more than the void forming means 10. The gap GP may be expanded stepwise by a plurality of large chambers and decompression means, and when the adhesive sheet AS is self-peeling by applying energy rays, the adhesive sheet AS is provided with energy rays and adherend WK. An energy ray irradiating means for peeling off the adhesive sheet AS to expand the gap GP may be adopted, and the atmosphere GP may be filled with air, a gas such as a single gas or a composite gas, a liquid such as water, a gel or liquid nitrogen. It may be supplied or may or may not be provided in the sheet peeling device EA.

The supporting unit 40 may or may not be included in the sheet peeling device EA.

Even if the adherend WK has another adhesive sheet attached to the surface side to which the adhesive sheet AS is not attached and is integrated with a frame member such as a ring frame or a frame member via the other adhesive sheet AS. Of course, the frame member may be an annular member, a non-annular member (the outer periphery is not connected), a circular member, an elliptic member, a polygonal member having a triangular shape or more, and other shapes.

The materials, types, shapes, etc. of the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS may have a circular shape, an elliptic shape, a polygonal shape such as a triangle or a quadrangle, or any other shape, or may have an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. Such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, an adhesive sheet having an intermediate layer between the base sheet and the adhesive layer, a cover layer provided on the upper surface of the base sheet, and the like. It may have three or more layers, and may be a so-called double-sided adhesive sheet capable of peeling the base material sheet from the adhesive layer. The double-sided adhesive sheet may be a single-layer or multi-layer intermediate layer. It may have one or a single layer or multiple layers without an intermediate layer. Examples of the adherend WK include foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording boards such as optical disks, glass plates, steel plates, pottery, wooden boards or resin plates. Also, members and articles of any form can be targeted. It should be noted that the adhesive sheet AS may be changed to a functional or practical reading method, for example, an arbitrary label such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, and a recording layer forming resin sheet. Any sheet, film, tape or the like having any shape can be attached to any adherend WK as described above.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions or steps described with respect to the means and steps, let alone the constituents of one embodiment shown in the above embodiment. The process is not limited at all. For example, if the gap forming means can form a gap between the adhesive sheet and the adherend in a region inside the outer edge of the adhesive sheet attached to the adherend, the technical common sense at the time of filing the application In the light of the above, there is no limitation as long as it is within the technical scope (the explanation of other means and steps is omitted).
Further, the drive device in the above-described embodiment includes an electric device such as a rotary motor, a linear motor, a linear motor, a single-axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to being adopted, it is also possible to adopt a combination of them directly or indirectly (some overlap with those exemplified in the embodiment).
In the above-described embodiment, when a member that supports (holds) a supported member (held member) such as a supporting (holding) unit or a supporting (holding) member is adopted, a gripping unit such as a mechanical chuck or a chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, support device (holding) the supported member (holding member) with drive equipment, etc. May be adopted.

EA... Sheet peeling device 10... Void forming means 20... Moving means 30... Void expanding means 31... Blowing member 31A... Blowing outlet 32... Gas supplying means (fluid supplying means)
AS... Adhesive sheet GP... Void WK... Adherend

Claims (4)

Gap forming means for forming a gap between the adhesive sheet and the adherend in a region inside the outer edge of the adhesive sheet attached to the adherend,
A sheet peeling apparatus, comprising: a moving unit that relatively moves the adhesive sheet having the voids formed therein and the adherend to peel the adhesive sheet from the adherend. The sheet peeling device according to claim 1, further comprising a gap expanding unit that expands the gap. The gap expanding means is provided so as to be capable of penetrating the adhesive sheet, comprises a blowing member having a blowout port, and a fluid supply means for supplying a fluid from the blowout port, and the blowout member of the blowing member penetrating the adhesive sheet. The sheet peeling apparatus according to claim 2, wherein a fluid is blown from the air outlet to the gap to expand the gap. A void forming step of forming a void between the adhesive sheet and the adherend in a region inside the outer edge of the adhesive sheet attached to the adherend,
A sheet peeling method, which comprises performing a moving step of peeling the adhesive sheet from the adherend by relatively moving the adhesive sheet in which the voids are formed and the adherend.

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