JP2016536653A - マイクロリソグラフィー投影露光装置用のミラー - Google Patents
マイクロリソグラフィー投影露光装置用のミラー Download PDFInfo
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- 238000001393 microlithography Methods 0.000 title claims description 4
- 238000009792 diffusion process Methods 0.000 claims abstract description 51
- 230000004888 barrier function Effects 0.000 claims abstract description 48
- 230000006641 stabilisation Effects 0.000 claims abstract description 46
- 238000011105 stabilization Methods 0.000 claims abstract description 46
- 229910052751 metal Inorganic materials 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 18
- 230000003287 optical effect Effects 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 230000005670 electromagnetic radiation Effects 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 17
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 12
- 239000010948 rhodium Substances 0.000 claims description 12
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 8
- 238000005286 illumination Methods 0.000 claims description 8
- 229910052707 ruthenium Inorganic materials 0.000 claims description 8
- 239000010955 niobium Substances 0.000 claims description 6
- 229910052703 rhodium Inorganic materials 0.000 claims description 6
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 6
- 230000000087 stabilizing effect Effects 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052741 iridium Inorganic materials 0.000 claims description 4
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 3
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052796 boron Inorganic materials 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 118
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- 229910052760 oxygen Inorganic materials 0.000 description 3
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- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000006094 Zerodur Substances 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
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- 238000000576 coating method Methods 0.000 description 1
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- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
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- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- GALOTNBSUVEISR-UHFFFAOYSA-N molybdenum;silicon Chemical compound [Mo]#[Si] GALOTNBSUVEISR-UHFFFAOYSA-N 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/20—Carburising
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- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
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- G—PHYSICS
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
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- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
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- Optical Elements Other Than Lenses (AREA)
Abstract
Description
Claims (13)
- 光学有効面を有するミラーであって、前記ミラーは、
ミラー基板(11)と、
前記光学有効面(10a)に入射する電磁放射光を反射するための反射層スタック(12)と、を備えており、
金属拡散障壁層(13)が、前記反射層スタック(12)の面のうち前記光学有効面(10a)側の面の上に配置されており、
安定化層(14)が、前記拡散障壁層(13)の面のうち前記光学有効面(10a)側の面の上に配置されており、電磁放射光で前記光学有効面(10a)を照射すると、前記安定化層は、前記安定化層(14)のない類似する構造に比べて、前記拡散障壁層(13)の変形を低減し、さらに、
前記安定化層(14)は多孔性であり、幾何学密度と真密度との比で定義される前記安定化層(14)の相対密度は80%以下である、光学有効面を有するミラー。 - 幾何学密度と真密度との前記比で定義される前記安定化層(14)の前記相対密度は、70%以下であることを特徴とする、請求項1に規定のミラー。
- 前記安定化層(14)は、シリコン(Si)、モリブデン(Mo)、ホウ素(B)、炭素(C)、ルテニウム(Ru)、ロジウム(Rh)、及び窒化物からなる群から選択される少なくとも1つの材料を含有することを特徴とする、請求項1または2に記載のミラー。
- 前記安定化層(14)は、炭化物、具体的には、炭化ケイ素(SiC)または炭化ホウ素(B4C)を含有することを特徴とする、請求項1〜3のいずれか一項に記載のミラー。
- 前記安定化層(14)は、窒化物を含有することを特徴とする、請求項1〜4のいずれか一項に記載のミラー。
- 前記安定化層(14)は、共有結合により結合される原子から形成されることを特徴とする、請求項1〜5のいずれか一項に記載のミラー。
- 前記安定化層(14)は、4nm以下の厚み、具体的には、2nm以下の厚みを有することを特徴とする、請求項1〜6のいずれか一項に記載のミラー。
- 前記拡散障壁層(13)は、ルテニウム(Ru)、ロジウム(Rh)、ニオブ(Nb)、ジルコニウム(Zr)、白金(Pt)、イリジウム(Ir)、及び銀(Ag)からなる群から選択される少なくとも1つの材料を含有することを特徴とする、請求項1〜7のいずれか一項に記載のミラー。
- 前記拡散障壁層(13)は、0.3nm以上2nm以下の厚み、具体的には、0.3nm以上1.5nm以下の厚みを有することを特徴とする、請求項1〜8のいずれか一項に記載のミラー。
- 前記ミラー(10)は、30nm未満の動作波長、具体的には、15nm未満の動作波長用に設計されていることを特徴とする、請求項1〜9のいずれか一項に記載のミラー。
- 前記ミラーは、マイクロリソグラフィー投影露光装置のミラーであることを特徴とする、請求項1〜10のいずれか一項に記載のミラー。
- マイクロリフォグラフィー投影露光装置(500)の光学システムであって、具体的には、照光装置または投影レンズは、請求項1〜11のいずれか一項に記載の少なくとも1つのミラーを備える、光学システム。
- 照光装置および投影レンズを備えるマイクロリソグラフィー投影露光装置(500)であって、前記投影露光装置は、請求項1〜11のいずれか一項に記載のミラーを有することを特徴とする、マイクロリソグラフィー投影露光装置。
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Application Number | Priority Date | Filing Date | Title |
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DE201310222330 DE102013222330A1 (de) | 2013-11-04 | 2013-11-04 | Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage |
DE102013222330.7 | 2013-11-04 | ||
PCT/EP2014/072576 WO2015062919A1 (de) | 2013-11-04 | 2014-10-21 | Spiegel, insbesondere für eine mikrolithographische projektionsbelichtungsanlage |
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JP2016536653A true JP2016536653A (ja) | 2016-11-24 |
JP6505730B2 JP6505730B2 (ja) | 2019-04-24 |
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US (1) | US9810993B2 (ja) |
JP (1) | JP6505730B2 (ja) |
DE (1) | DE102013222330A1 (ja) |
WO (1) | WO2015062919A1 (ja) |
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KR20230121844A (ko) * | 2020-12-30 | 2023-08-21 | 에이에스엠엘 네델란즈 비.브이. | 검사 시스템을 세정하기 위한 장치 및 방법 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH01502857A (ja) * | 1987-04-01 | 1989-09-28 | ヒユーズ・エアクラフト・カンパニー | 炭化珪素からなる軽量ミラー |
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DE102004062289B4 (de) | 2004-12-23 | 2007-07-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Thermisch stabiler Multilayer-Spiegel für den EUV-Spektralbereich |
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EP3159912A1 (en) | 2007-01-25 | 2017-04-26 | Nikon Corporation | Optical element, exposure apparatus using this, and device manufacturing method |
TWI427334B (zh) | 2007-02-05 | 2014-02-21 | Zeiss Carl Smt Gmbh | Euv蝕刻裝置反射光學元件 |
ES2304104B1 (es) * | 2007-02-23 | 2009-08-25 | Consejo Superior De Investigaciones Cientificas | Estructura multicapa formada por laminas de nanoparticulas con propiedades de cristal fotonico unidimensional, procedimiento para su fabricacion y sus aplicaciones. |
DE102009043824A1 (de) | 2009-08-21 | 2011-02-24 | Asml Netherlands B.V. | Reflektives optisches Element und Verfahren zu dessen Herstellung |
EP2509102A1 (en) | 2009-12-04 | 2012-10-10 | Asahi Glass Company, Limited | Optical member for euv lithography, and process for production of reflective-layer-attached substrate for euv lithography |
DE102011083461A1 (de) | 2011-09-27 | 2013-03-28 | Carl Zeiss Smt Gmbh | Verfahren zum Erzeugen einer Deckschicht aus Siliziumoxid an einem EUV-Spiegel |
DE102012202850A1 (de) * | 2012-02-24 | 2013-08-29 | Asml Netherlands B.V. | Verfahren zum Optimieren eines Schutzlagensystems für ein optisches Element, optisches Element und optisches System für die EUV-Lithographie |
DE102013102670A1 (de) * | 2013-03-15 | 2014-10-02 | Asml Netherlands B.V. | Optisches Element und optisches System für die EUV-Lithographie sowie Verfahren zur Behandlung eines solchen optischen Elements |
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JP2001330703A (ja) * | 2000-03-31 | 2001-11-30 | Carl-Zeiss-Stiftung Trading As Carl Zeiss | 保護層系を有する多層系および製造方法 |
US20050276988A1 (en) * | 2002-12-12 | 2005-12-15 | Johann Trenkler | Protective coating system for reflective optical elements, reflective optical element and method for the production thereof |
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WO2012015639A1 (en) * | 2010-07-30 | 2012-02-02 | Novartis Ag | Method for making uv-absorbing ophthalmic lenses |
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US20160246179A1 (en) | 2016-08-25 |
WO2015062919A1 (de) | 2015-05-07 |
DE102013222330A1 (de) | 2015-05-07 |
JP6505730B2 (ja) | 2019-04-24 |
US9810993B2 (en) | 2017-11-07 |
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