JP2016530699A - プラズマ処理システムのためのアンテナアレイ構成 - Google Patents
プラズマ処理システムのためのアンテナアレイ構成 Download PDFInfo
- Publication number
- JP2016530699A JP2016530699A JP2016516652A JP2016516652A JP2016530699A JP 2016530699 A JP2016530699 A JP 2016530699A JP 2016516652 A JP2016516652 A JP 2016516652A JP 2016516652 A JP2016516652 A JP 2016516652A JP 2016530699 A JP2016530699 A JP 2016530699A
- Authority
- JP
- Japan
- Prior art keywords
- antenna array
- loop antenna
- deposition system
- closed
- closed loop
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000151 deposition Methods 0.000 claims description 85
- 230000008021 deposition Effects 0.000 claims description 82
- 238000000034 method Methods 0.000 claims description 22
- 238000009826 distribution Methods 0.000 claims description 20
- 238000005229 chemical vapour deposition Methods 0.000 claims description 13
- 238000003491 array Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 description 72
- 239000004020 conductor Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 8
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000012707 chemical precursor Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/3211—Antennas, e.g. particular shapes of coils
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
- H01J37/32155—Frequency modulation
- H01J37/32165—Plural frequencies
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
- H05H1/4652—Radiofrequency discharges using inductive coupling means, e.g. coils
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical Vapour Deposition (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201361829476P | 2013-05-31 | 2013-05-31 | |
US61/829,476 | 2013-05-31 | ||
PCT/US2014/034144 WO2014193553A1 (en) | 2013-05-31 | 2014-04-15 | Antenna array configurations for plasma processing systems |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016530699A true JP2016530699A (ja) | 2016-09-29 |
JP2016530699A5 JP2016530699A5 (zh) | 2017-06-01 |
Family
ID=51989299
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016516652A Pending JP2016530699A (ja) | 2013-05-31 | 2014-04-15 | プラズマ処理システムのためのアンテナアレイ構成 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2016530699A (zh) |
KR (1) | KR20160016917A (zh) |
CN (1) | CN105340063A (zh) |
WO (1) | WO2014193553A1 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10682059B1 (en) * | 2018-12-28 | 2020-06-16 | Endra Life Sciences Inc. | Radio frequency applicator and thermoacoustic imaging system employing the same |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02112010U (zh) * | 1989-02-27 | 1990-09-07 | ||
JPH04290428A (ja) * | 1990-12-03 | 1992-10-15 | Applied Materials Inc | Uhf/vhf共振アンテナ供給源を用いたプラズマリアクタ |
JPH051383A (ja) * | 1991-06-25 | 1993-01-08 | Canon Inc | 大面積マイクロ波プラズマcvd装置 |
JPH06251896A (ja) * | 1992-12-28 | 1994-09-09 | Hitachi Ltd | プラズマ処理方法及び装置 |
JPH08277472A (ja) * | 1995-04-04 | 1996-10-22 | Canon Inc | 堆積膜の製造装置およびその製造方法 |
JPH11243062A (ja) * | 1997-12-10 | 1999-09-07 | Canon Inc | プラズマcvd方法及びプラズマcvd装置 |
JP2000345351A (ja) * | 1999-05-31 | 2000-12-12 | Anelva Corp | プラズマcvd装置 |
JP2001035697A (ja) * | 1999-07-27 | 2001-02-09 | Japan Science & Technology Corp | プラズマ発生装置 |
JP2011515030A (ja) * | 2008-01-30 | 2011-05-12 | アプライド マテリアルズ インコーポレイテッド | インピーダンス遷移部との統合マイクロ波導波管 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100238627B1 (ko) * | 1993-01-12 | 2000-01-15 | 히가시 데쓰로 | 플라즈마 처리장치 |
KR200253559Y1 (ko) * | 2001-07-30 | 2001-11-22 | 주식회사 플라즈마트 | 회전방향으로 균일한 플라즈마 밀도를 발생시키는유도결합형 플라즈마 발생장치의 안테나구조 |
KR100523851B1 (ko) * | 2003-05-07 | 2005-10-27 | 학교법인 성균관대학 | 대면적처리용 내장형 선형안테나를 구비하는 유도결합플라즈마 처리장치 |
EP1480250A1 (en) * | 2003-05-22 | 2004-11-24 | HELYSSEN S.à.r.l. | A high density plasma reactor and RF-antenna therefor |
JP4471589B2 (ja) * | 2003-05-26 | 2010-06-02 | 三井造船株式会社 | プラズマ発生用アンテナ装置及びプラズマ処理装置 |
JP4324205B2 (ja) * | 2007-03-30 | 2009-09-02 | 三井造船株式会社 | プラズマ生成装置およびプラズマ成膜装置 |
TW200845833A (en) * | 2007-05-01 | 2008-11-16 | Delta Electronics Inc | Plasma generating device |
JP5592098B2 (ja) * | 2009-10-27 | 2014-09-17 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
US20120279943A1 (en) * | 2011-05-03 | 2012-11-08 | Applied Materials, Inc. | Processing chamber with cooled gas delivery line |
-
2014
- 2014-04-15 WO PCT/US2014/034144 patent/WO2014193553A1/en active Application Filing
- 2014-04-15 JP JP2016516652A patent/JP2016530699A/ja active Pending
- 2014-04-15 CN CN201480037128.3A patent/CN105340063A/zh active Pending
- 2014-04-15 KR KR1020157036828A patent/KR20160016917A/ko not_active Application Discontinuation
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02112010U (zh) * | 1989-02-27 | 1990-09-07 | ||
JPH04290428A (ja) * | 1990-12-03 | 1992-10-15 | Applied Materials Inc | Uhf/vhf共振アンテナ供給源を用いたプラズマリアクタ |
JPH051383A (ja) * | 1991-06-25 | 1993-01-08 | Canon Inc | 大面積マイクロ波プラズマcvd装置 |
JPH06251896A (ja) * | 1992-12-28 | 1994-09-09 | Hitachi Ltd | プラズマ処理方法及び装置 |
JPH08277472A (ja) * | 1995-04-04 | 1996-10-22 | Canon Inc | 堆積膜の製造装置およびその製造方法 |
JPH11243062A (ja) * | 1997-12-10 | 1999-09-07 | Canon Inc | プラズマcvd方法及びプラズマcvd装置 |
JP2000345351A (ja) * | 1999-05-31 | 2000-12-12 | Anelva Corp | プラズマcvd装置 |
JP2001035697A (ja) * | 1999-07-27 | 2001-02-09 | Japan Science & Technology Corp | プラズマ発生装置 |
JP2011515030A (ja) * | 2008-01-30 | 2011-05-12 | アプライド マテリアルズ インコーポレイテッド | インピーダンス遷移部との統合マイクロ波導波管 |
Non-Patent Citations (1)
Title |
---|
伊藤 憲和, 外5名: "新型電極を用いたVHF-PECVD法によるa-Si:Hの大面積製膜", 第61回応用物理学会学術講演会講演予稿集, vol. 5a-R-1, JPN6018034860, September 2000 (2000-09-01), pages 841, ISSN: 0003873803 * |
Also Published As
Publication number | Publication date |
---|---|
CN105340063A (zh) | 2016-02-17 |
WO2014193553A1 (en) | 2014-12-04 |
KR20160016917A (ko) | 2016-02-15 |
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