JPH02112010U - - Google Patents
Info
- Publication number
- JPH02112010U JPH02112010U JP2160989U JP2160989U JPH02112010U JP H02112010 U JPH02112010 U JP H02112010U JP 2160989 U JP2160989 U JP 2160989U JP 2160989 U JP2160989 U JP 2160989U JP H02112010 U JPH02112010 U JP H02112010U
- Authority
- JP
- Japan
- Prior art keywords
- copper film
- thickness
- base member
- loop antenna
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000004593 Epoxy Substances 0.000 description 1
Landscapes
- Details Of Aerials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2160989U JPH02112010U (zh) | 1989-02-27 | 1989-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2160989U JPH02112010U (zh) | 1989-02-27 | 1989-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02112010U true JPH02112010U (zh) | 1990-09-07 |
Family
ID=31238998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2160989U Pending JPH02112010U (zh) | 1989-02-27 | 1989-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02112010U (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009540715A (ja) * | 2006-06-16 | 2009-11-19 | オムニ−アイ・デイ・リミテツド | 電磁放射線の強化とデカップリング |
| JP2016530699A (ja) * | 2013-05-31 | 2016-09-29 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | プラズマ処理システムのためのアンテナアレイ構成 |
-
1989
- 1989-02-27 JP JP2160989U patent/JPH02112010U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009540715A (ja) * | 2006-06-16 | 2009-11-19 | オムニ−アイ・デイ・リミテツド | 電磁放射線の強化とデカップリング |
| JP2016530699A (ja) * | 2013-05-31 | 2016-09-29 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | プラズマ処理システムのためのアンテナアレイ構成 |