JP2016524651A5 - - Google Patents

Download PDF

Info

Publication number
JP2016524651A5
JP2016524651A5 JP2016511068A JP2016511068A JP2016524651A5 JP 2016524651 A5 JP2016524651 A5 JP 2016524651A5 JP 2016511068 A JP2016511068 A JP 2016511068A JP 2016511068 A JP2016511068 A JP 2016511068A JP 2016524651 A5 JP2016524651 A5 JP 2016524651A5
Authority
JP
Japan
Prior art keywords
wear
resistant layer
plasma
component
arc discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016511068A
Other languages
English (en)
Japanese (ja)
Other versions
JP6621401B2 (ja
JP2016524651A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP2014/058884 external-priority patent/WO2014177641A1/de
Publication of JP2016524651A publication Critical patent/JP2016524651A/ja
Publication of JP2016524651A5 publication Critical patent/JP2016524651A5/ja
Application granted granted Critical
Publication of JP6621401B2 publication Critical patent/JP6621401B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2016511068A 2013-04-30 2014-04-30 耐摩耗層を生産する方法およびその方法によって生産された耐摩耗層 Active JP6621401B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102013007986 2013-04-30
DE102013007986.1 2013-04-30
PCT/EP2014/058884 WO2014177641A1 (de) 2013-04-30 2014-04-30 VERFAHREN ZUR HERSTELLUNG EINER VERSCHLEIßSCHUTZSCHICHT UND MIT DEM VERFAHREN HERGESTELLTE VERSCHLEIßSCHUTZSCHICHT

Publications (3)

Publication Number Publication Date
JP2016524651A JP2016524651A (ja) 2016-08-18
JP2016524651A5 true JP2016524651A5 (https=) 2017-05-25
JP6621401B2 JP6621401B2 (ja) 2019-12-18

Family

ID=50630803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016511068A Active JP6621401B2 (ja) 2013-04-30 2014-04-30 耐摩耗層を生産する方法およびその方法によって生産された耐摩耗層

Country Status (6)

Country Link
US (1) US9803273B2 (https=)
EP (1) EP2992121B1 (https=)
JP (1) JP6621401B2 (https=)
KR (1) KR20160003045A (https=)
PL (1) PL2992121T3 (https=)
WO (1) WO2014177641A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017220152B4 (de) * 2017-11-13 2021-01-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Antriebsanordnung für ein Zweirad
CN109055901A (zh) * 2018-10-25 2018-12-21 大连维钛克科技股份有限公司 一种提高硬质涂层与基材结合力的装置及工艺
JP7417916B2 (ja) * 2018-11-06 2024-01-19 株式会社ダイセル 炭素移着膜が形成された摺動部材
DE102019210061A1 (de) * 2019-07-09 2021-01-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Auf Gleitreibung beanspruchtes System
CN114207178B (zh) * 2019-07-31 2024-06-04 欧瑞康表面处理解决方案股份公司普费菲孔 涂覆于基材上的梯级无氢碳基硬材料层
DE102019213573A1 (de) * 2019-09-06 2021-03-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Ausbildung einer mit ta-C gebildeten Schicht oder einer mit mindestens einer mit ta-C gebildeten Schicht gebildeten Beschichtung sowie damit ausgebildet ta-C-Schicht oder Beschichtung
JP7302878B2 (ja) * 2020-04-17 2023-07-04 日本アイ・ティ・エフ株式会社 炭素膜および摺動部材
US20240093344A1 (en) 2020-10-06 2024-03-21 Oerlikon Surface Solutions Ag, Pfäffikon Hard carbon coatings with improved adhesion strength by means of hipims and method thereof
WO2023066510A1 (en) 2021-10-22 2023-04-27 Oerlikon Surface Solutions Ag, Pfäffikon Method for forming hard and ultra-smooth a-c by sputtering

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2305938C (en) * 2000-04-10 2007-07-03 Vladimir I. Gorokhovsky Filtered cathodic arc deposition method and apparatus
DE102004041235A1 (de) 2004-08-26 2006-03-02 Ina-Schaeffler Kg Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben
DE102006009160B4 (de) * 2006-02-22 2010-01-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Anordnung für die Separation von Partikeln aus einem Plasma
JP2007297592A (ja) * 2006-04-04 2007-11-15 Nissan Motor Co Ltd 低摩擦摺動機構
EP1884978B1 (en) * 2006-08-03 2011-10-19 Creepservice S.à.r.l. Process for the coating of substrates with diamond-like carbon layers
JP5273337B2 (ja) 2007-06-01 2013-08-28 神奈川県 低摩擦摺動部材
WO2010020274A1 (en) * 2008-08-18 2010-02-25 Metso Paper, Inc. Coating for lowering friction effect and improving wear resistance of a component in a fibre web machine and process of producing the same
DE102011003254A1 (de) * 2011-01-27 2012-08-02 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring, mit einer Beschichtung sowie Verfahren zur Herstellung eines Gleitelements
DE102011016611A1 (de) * 2011-04-01 2012-10-04 Technische Universität Dresden Gleitsystem
JP2014520250A (ja) * 2011-04-25 2014-08-21 ウオーターズ・テクノロジーズ・コーポレイシヨン 保護被膜を有するバルブ
EP2587518B1 (en) * 2011-10-31 2018-12-19 IHI Hauzer Techno Coating B.V. Apparatus and Method for depositing Hydrogen-free ta C Layers on Workpieces and Workpiece

Similar Documents

Publication Publication Date Title
JP2016524651A5 (https=)
US9803273B2 (en) Method of producing an anti-wear layer and anti-wear layer produced by means of said method
Vetter 60 years of DLC coatings: historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial applications
JP6228731B2 (ja) ワークピース上に水素フリーのta−C層を堆積させる装置および方法ならびにワークピース
JP2020501351A5 (https=)
WO2014156310A8 (ja) 金属被膜の成膜装置および成膜方法
JP2009533551A5 (https=)
WO2009065039A3 (en) Methods and apparatus for sputtering deposition using direct current
JP6236613B2 (ja) Hipims層
Nominé et al. Surface charge at the oxide/electrolyte interface: toward optimization of electrolyte composition for treatment of aluminum and magnesium by plasma electrolytic oxidation
US8628647B2 (en) Arrangement for the separation of particles from a plasma
MX2017007356A (es) Fuente de plasma del catodo hueco.
DE602004018517D1 (de) Abscheideverfahren mit einem thermischen plasma das mit einer ersetzbaren platte expandiert wird
BR112017011770A2 (pt) fonte de plasma que utiliza um revestimento de redução de macro partícula e método de usar a fonte de plasma que utiliza um revestimento de redução de macro partícula para a deposição de revestimentos de filme fino e modificação de superfícies
RU2007139636A (ru) Эрозионно стойкие покрытия и способы нанесения покрытий
JP2014173129A (ja) プラズマを用いた薄膜の成膜方法
JP6561048B2 (ja) TiB2を含有する層で工作物をコーティングする方法
CN110998784A (zh) 涂层工艺中的以及与涂层工艺有关的改善
Kimura et al. Properties of diamond-like carbon films prepared by high power pulsed sputtering with two facing targets
RU2016135017A (ru) Способ локального ремонта поврежденного теплового барьера
CA2798210C (en) Method for spark deposition using ceramic targets
RU2013133581A (ru) Способ получения интерметаллического антиэмиссионного покрытия на сеточных электродах генераторных ламп
RU2430986C2 (ru) Способ формирования сверхтвердого аморфного углеродного покрытия в вакууме
KR102171588B1 (ko) 스퍼터링 장치 및 방법
KR20140038952A (ko) 이온 충격을 이용하여 기판의 표면을 수정하기 위한 방법