JP2016524651A - 耐摩耗層を生産する方法およびその方法によって生産された耐摩耗層 - Google Patents
耐摩耗層を生産する方法およびその方法によって生産された耐摩耗層 Download PDFInfo
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Abstract
Description
耐摩耗層が、摩耗に曝される内燃機関コンポーネントの表面上に、本発明に係る方法を用いて形成(生産)される。この点において、パルス化レーザー放射によりアーク放電が真空条件下で連続して点火されることによってプラズマが形成され、アーク放電は、アノードと、グラファイトで構成されるカソードとの間にもたらされる。プラズマのイオン化部分が、sp2およびsp3の混成炭素の混合物を含む少なくともおおよそ水素フリーの四面体アモルファス(ta−C)から形成される層(VDI基準2840に従うta−C)として形成され、少なくとも1つのコンポーネントの表面上に堆積する。
また、本発明に従って生産された耐摩耗層は、平均粗さ深さRzが最大1.0μmであるのが有益である。平均粗さ深さRzは、全ての測定された値の個々の粗さ深さの算術平均値に相当する。
耐摩耗層の微小硬度が少なくとも3500HV、好ましくは4000HV、さらに好ましくは少なくとも5000HV、特に好ましくは少なくとも5700HV、特に非常に好ましくは6000HVである場合、平均粗さ値Raが0.08μm未満、特に好ましくは0.05μm未満であることが特に良好であり、これによって耐摩耗性を向上させ、また耐用年数を増大し得る。Helmut Fischer GmbH & Co.KG社の機器「FISCHERSCOPE H100C XYP」が、硬度測定に用いることができる。試験力は、インデンターの侵入深さが、層厚さの最大1/10に達するように選択されるべきである。
この点において、sp3の混成炭素の割合は、40%を超えて、好ましくは50%を超えて存在すべきである。
図1は、真空チャンバ1を有する真空コーティングプラントを示しており、回転装置には、コーティングされるコンポーネント14が、固定され、2回、および3回の回転でコーティングされ得る。既知のアーク放電源もしくはスパッター源2、またはこれらの組合せが、プラズマエッチングのため、または薄い接着層を堆積させるために真空チャンバ1内に存在する。
コーティングが、好ましくは、コンポーネント14の表面上への耐摩耗層の形成時に、3倍の回転で形成すべきである。真空チャンバ1を空にして、表面のクリーニングおよび表面活性化を実行した後に、厚さがおよそ0.1μmのCr接着層が、スパッタリングによって堆積される。
Raが平均で0.09μm、Rzが平均で1.0μm、Rpkが平均で0.28μm。フィッシャースコープ(Fischerscope)を用いて判定された耐摩耗層の微小硬度は、7040HVであり、Lawaveを用いて判定されたヤング率は、740GPaであった。
Claims (13)
- 耐摩耗層を、摩耗に曝される内燃機関のコンポーネントの表面上に形成生産する方法であって、
パルス式レーザー放射によりアーク放電が真空条件下で連続して点火されることによってプラズマが形成され、
前記アーク放電は、アノード(6)と、グラファイトのカソード(10)との間にもたらされ、前記プラズマのイオン化部分が、sp2およびsp3の混成炭素の混合物を含む少なくともおおよそ水素フリーの四面体アモルファス(ta−C)から形成される層として、少なくとも1つのコンポーネント(14)の表面上に堆積し、前記プラズマについて、アブソーバ電極(5)によって、前記プラズマの正に帯電するイオンが前記少なくとも1つのコンポーネント(14)の方向に屈折し、少なくともおおよそ同じ電圧が前記アノード(6)および前記アブソーバ電極(5)に印加され、前記アーク放電がもたらされると同時に、電流が前記アブソーバ電極(5)を通って流れ、該電流は、前記アノード(6)を通って流れる前記電流よりも少なくとも1.5倍大きく、前記少なくとも1つのコンポーネント(14)のコーティングされた前記表面の機械仕上げおよび/または化学的機械仕上げが実行されなく、前記表面の平滑化をもたらす方法。 - 前記アブソーバ電極(5)を通って流れる前記電流は、前記アノード(6)を通って流れる前記電流よりも少なくとも2倍大きいことを特徴とする請求項1に記載の方法。
- 前記プラズマは、レーザーアークチャンバ(3)内で形成されて、前記少なくとも1つのコンポーネント(14)が配置される真空チャンバ(1)中に屈折することを特徴とする請求項1または2に記載の方法。
- 前記プラズマの正に帯電するイオンが、前記アブソーバ電極(5)によって、前記少なくとも1つのコンポーネント(14)の前記表面に影響を与えないように屈折して、前記カソード(10)から直接的に放出し、電子が、前記プラズマから前記アブソーバ電極(5)の方向に移動することを特徴とする請求項1から3のいずれか一項に記載の方法。
- 前記真空チャンバ(1)内に配置されるアーク放電源、またはスパッター源(2)を用いて、薄い接着層が前記少なくとも1つのコンポーネント(14)上に堆積することを特徴とする請求項1から4のいずれか一項に記載の方法。
- 複数のストリップを有するアブソーバ電極(5)が用いられ、これらの間に、より大きな滴または小滴が、前記少なくとも1つのコンポーネント(14)の前記表面に影響を与えないように通されることを特徴とする請求項1から5のいずれか一項に記載の方法。
- 前記各表面上での真空条件下でのアーク放電による請求項1から請求項6のいずれか一項に記載の方法を用いて、摩耗に曝される内燃機関コンポーネントの表面上に形成された耐摩耗層であって、
前記耐摩耗層は、sp2およびsp3の混成炭素の混合物を含む少なくともおおよそ水素フリーの四面体アモルファス(ta−C)から形成されることを特徴とし、前記耐摩耗層は、微小硬度が少なくとも3500HVであり、算術平均粗さ値Raが0.1μmであり、機械的、物理的および/または化学的表面処理がされていないことを特徴とする耐摩耗層。 - 前記耐摩耗層の微小硬度が少なくとも4000HVである請求項7に記載の耐摩耗層。
- 前記耐摩耗層は、平均粗さ深さRzが最大1.0μmであることを特徴とする請求項7または8に記載の耐摩耗層。
- 前記耐摩耗層は、緩和ピーク高さRpkが最大0.35μmであることを特徴とする請求項7から9のいずれか一項に記載の耐摩耗層。
- 前記耐摩耗層の微小硬度が少なくとも5000HV、好ましくは少なくとも5700HV、特に好ましくは6000HVであることを特徴とする請求項7から10のいずれか一項に記載の耐摩耗層。
- 前記耐摩耗層は、レーザービームによって好ましくは点火されるパルス式アーク放電を用いて、特に好ましくはプラズマフィルタおよび/またはアブソーバ電極を用いて形成されたことを特徴とする請求項7から11のいずれか一項に記載の耐摩耗層。
- 付加的な化学元素が含有されないことを特徴とする請求項7から12のいずれか一項に記載の耐摩耗層。
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DE102019210061A1 (de) * | 2019-07-09 | 2021-01-14 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Auf Gleitreibung beanspruchtes System |
US20220275498A1 (en) * | 2019-07-31 | 2022-09-01 | Oerlikon Surface Solutions Ag, Pfäffikon | Graded hydrogen-free carbon-based hard material layer coated onto a substrate |
DE102019213573A1 (de) * | 2019-09-06 | 2021-03-11 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Ausbildung einer mit ta-C gebildeten Schicht oder einer mit mindestens einer mit ta-C gebildeten Schicht gebildeten Beschichtung sowie damit ausgebildet ta-C-Schicht oder Beschichtung |
KR20230082022A (ko) | 2020-10-06 | 2023-06-08 | 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 | HiPIMS에 의해 향상된 접착력을 갖는 경질 탄소 코팅 및 그 제조방법 |
CN118234886A (zh) | 2021-10-22 | 2024-06-21 | 欧瑞康表面解决方案股份公司,普费菲孔 | 通过溅射形成坚硬且超光滑a-C的方法 |
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JP2008297477A (ja) * | 2007-06-01 | 2008-12-11 | Kanagawa Prefecture | 低摩擦摺動部材 |
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JP2020076119A (ja) * | 2018-11-06 | 2020-05-21 | 株式会社ダイセル | 炭素移着膜が形成された摺動部材 |
JP7417916B2 (ja) | 2018-11-06 | 2024-01-19 | 株式会社ダイセル | 炭素移着膜が形成された摺動部材 |
JP2021172828A (ja) * | 2020-04-17 | 2021-11-01 | 日本アイ・ティ・エフ株式会社 | 炭素膜および摺動部材 |
JP7302878B2 (ja) | 2020-04-17 | 2023-07-04 | 日本アイ・ティ・エフ株式会社 | 炭素膜および摺動部材 |
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WO2014177641A1 (de) | 2014-11-06 |
EP2992121B1 (de) | 2019-06-19 |
KR20160003045A (ko) | 2016-01-08 |
EP2992121A1 (de) | 2016-03-09 |
PL2992121T3 (pl) | 2019-11-29 |
JP6621401B2 (ja) | 2019-12-18 |
US20160153083A1 (en) | 2016-06-02 |
US9803273B2 (en) | 2017-10-31 |
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