JP2016518698A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2016518698A5 JP2016518698A5 JP2016500127A JP2016500127A JP2016518698A5 JP 2016518698 A5 JP2016518698 A5 JP 2016518698A5 JP 2016500127 A JP2016500127 A JP 2016500127A JP 2016500127 A JP2016500127 A JP 2016500127A JP 2016518698 A5 JP2016518698 A5 JP 2016518698A5
- Authority
- JP
- Japan
- Prior art keywords
- aperture
- image
- light source
- numerical aperture
- numerical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 238000005286 illumination Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361777531P | 2013-03-12 | 2013-03-12 | |
| US61/777,531 | 2013-03-12 | ||
| PCT/US2013/076175 WO2014143298A1 (en) | 2013-03-12 | 2013-12-18 | Customized pupil stop shape for control of edge profile in laser annealing systems |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016518698A JP2016518698A (ja) | 2016-06-23 |
| JP2016518698A5 true JP2016518698A5 (https=) | 2017-02-09 |
| JP6346263B2 JP6346263B2 (ja) | 2018-06-20 |
Family
ID=51526290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016500127A Active JP6346263B2 (ja) | 2013-03-12 | 2013-12-18 | レーザアニールシステムにおいてエッジプロファイルを制御するためのカスタマイズされた瞳ストップ形状 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US9395545B2 (https=) |
| EP (1) | EP2969368A4 (https=) |
| JP (1) | JP6346263B2 (https=) |
| KR (3) | KR102091652B1 (https=) |
| CN (4) | CN107577056B (https=) |
| TW (2) | TWI645457B (https=) |
| WO (1) | WO2014143298A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102091652B1 (ko) * | 2013-03-12 | 2020-03-20 | 어플라이드 머티어리얼스, 인코포레이티드 | 레이저 어닐링 시스템들에서의 에지 프로파일의 제어를 위한 맞춤화된 퍼필 스톱 장치 |
| CN110133772B (zh) * | 2019-06-25 | 2024-06-11 | 南京溯远基因科技有限公司 | 光阑装置及基因测序仪 |
| CN111921174A (zh) * | 2020-06-19 | 2020-11-13 | 合肥润成体育用品有限公司 | 一种羽毛球拍手柄制作方法 |
| CN112355488B (zh) * | 2020-11-05 | 2021-12-03 | 中国工程物理研究院激光聚变研究中心 | 一种抗激光损伤的软边光阑制备方法 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3750693T3 (de) * | 1986-11-28 | 1999-12-23 | Fuji Photo Film Co., Ltd. | Optisches System für Laser. |
| US4912321A (en) * | 1987-03-26 | 1990-03-27 | Texas Instruments Incorporated | Radiation scanning system with pupil control |
| US5059013A (en) | 1988-08-29 | 1991-10-22 | Kantilal Jain | Illumination system to produce self-luminous light beam of selected cross-section, uniform intensity and selected numerical aperture |
| US5305054A (en) * | 1991-02-22 | 1994-04-19 | Canon Kabushiki Kaisha | Imaging method for manufacture of microdevices |
| US5473408A (en) * | 1994-07-01 | 1995-12-05 | Anvik Corporation | High-efficiency, energy-recycling exposure system |
| US5642287A (en) | 1995-03-02 | 1997-06-24 | Sotiropoulos; Nicholas | Sculpturing device for laser beams |
| JPH09326343A (ja) * | 1996-06-04 | 1997-12-16 | Nikon Corp | 露光方法及び装置 |
| KR980005334A (ko) * | 1996-06-04 | 1998-03-30 | 고노 시게오 | 노광 방법 및 노광 장치 |
| US6813003B2 (en) * | 2002-06-11 | 2004-11-02 | Mark Oskotsky | Advanced illumination system for use in microlithography |
| JP3760235B2 (ja) * | 2003-04-04 | 2006-03-29 | 独立行政法人 宇宙航空研究開発機構 | 半導体レーザ及び半導体レーザの発振方法 |
| JP4323903B2 (ja) * | 2003-09-12 | 2009-09-02 | キヤノン株式会社 | 照明光学系及びそれを用いた露光装置 |
| US7176405B2 (en) | 2005-04-22 | 2007-02-13 | Ultratech, Inc. | Heat shield for thermal processing |
| WO2007077875A1 (ja) * | 2005-12-28 | 2007-07-12 | Nikon Corporation | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP4698460B2 (ja) * | 2006-03-27 | 2011-06-08 | オムロンレーザーフロント株式会社 | レーザアニーリング装置 |
| JP5191674B2 (ja) * | 2007-03-05 | 2013-05-08 | 株式会社アルバック | レーザーアニール装置及びレーザーアニール方法 |
| CA2684602A1 (en) | 2007-04-23 | 2008-11-06 | California Institute Of Technology | Single-lens, 3-d imaging device using polarization-coded aperture masks combined with a polarization-sensitive sensor |
| JP2009072789A (ja) * | 2007-09-18 | 2009-04-09 | Hamamatsu Photonics Kk | レーザ加工装置 |
| TWI566051B (zh) * | 2008-01-21 | 2017-01-11 | 尼康股份有限公司 | 照明裝置、曝光裝置、曝光方法以及元件製造方法 |
| JP4655136B2 (ja) * | 2008-10-28 | 2011-03-23 | ソニー株式会社 | 対物レンズ、これを用いた光学ピックアップ装置、光記録再生装置及び収差補正方法 |
| JP5385652B2 (ja) * | 2009-03-24 | 2014-01-08 | キヤノン株式会社 | 位置検出装置、露光装置、位置検出方法、露光方法及びデバイス製造方法 |
| CN102063014A (zh) * | 2009-11-13 | 2011-05-18 | 上海微电子装备有限公司 | 一种用于微光刻的照明光学系统 |
| JP5595021B2 (ja) * | 2009-12-03 | 2014-09-24 | 住友重機械工業株式会社 | レーザ処理装置 |
| DE102010029089B4 (de) * | 2010-05-18 | 2019-08-29 | Carl Zeiss Ag | Optisches System zur Kalibrierung einer Lichtquelle |
| TWI448671B (zh) * | 2011-05-05 | 2014-08-11 | Sunplus Technology Co Ltd | 溫度感測裝置 |
| US20120325784A1 (en) | 2011-06-24 | 2012-12-27 | Applied Materials, Inc. | Novel thermal processing apparatus |
| US9064165B2 (en) * | 2012-03-28 | 2015-06-23 | Metrologic Instruments, Inc. | Laser scanning system using laser beam sources for producing long and short wavelengths in combination with beam-waist extending optics to extend the depth of field thereof while resolving high resolution bar code symbols having minimum code element widths |
| KR102091652B1 (ko) * | 2013-03-12 | 2020-03-20 | 어플라이드 머티어리얼스, 인코포레이티드 | 레이저 어닐링 시스템들에서의 에지 프로파일의 제어를 위한 맞춤화된 퍼필 스톱 장치 |
-
2013
- 2013-12-18 KR KR1020197018383A patent/KR102091652B1/ko active Active
- 2013-12-18 JP JP2016500127A patent/JP6346263B2/ja active Active
- 2013-12-18 CN CN201710626274.5A patent/CN107577056B/zh active Active
- 2013-12-18 KR KR1020157028567A patent/KR101754265B1/ko active Active
- 2013-12-18 CN CN201380074089.XA patent/CN105026097B/zh active Active
- 2013-12-18 EP EP13878326.1A patent/EP2969368A4/en not_active Withdrawn
- 2013-12-18 KR KR1020177017870A patent/KR101994993B1/ko active Active
- 2013-12-18 CN CN201610048597.6A patent/CN105643107B/zh active Active
- 2013-12-18 WO PCT/US2013/076175 patent/WO2014143298A1/en not_active Ceased
- 2013-12-18 CN CN201710676222.9A patent/CN107479203B/zh active Active
- 2013-12-19 US US14/134,728 patent/US9395545B2/en not_active Expired - Fee Related
- 2013-12-23 TW TW106136995A patent/TWI645457B/zh active
- 2013-12-23 TW TW102147791A patent/TWI607493B/zh active
-
2016
- 2016-07-18 US US15/212,964 patent/US10444522B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ES2541834T3 (es) | Procedimiento y dispositivo para estructurar una superficie de cuerpo sólido con un revestimiento duro con un láser que utilizan máscara y diafragma | |
| EP3552753A3 (en) | System for and method of processing transparent materials using laser beam focal lines adjustable in length and diameter | |
| BR112015016385A2 (pt) | fabricação de um objeto em volume por litografia, de resolução espacial melhorada | |
| EP2796321A3 (en) | Vehicle lamp | |
| BR112016002100A2 (pt) | dispositivo para tratar o canal vaginal ou outros orifícios obtidos natural ou cirurgicamente e aparelho relacionado | |
| JP2015111673A5 (https=) | ||
| EP4276539A3 (en) | Illumination optical unit for projection lithography | |
| EP2827181A3 (en) | Microscope system, objective lens unit, and microscope main body | |
| FR3050253B1 (fr) | Feu de vehicule et vehicule comportant celui-ci | |
| EP2713095A3 (en) | Vehicle illumination apparatus | |
| JP2013130881A5 (https=) | ||
| EP3657229A3 (en) | Microscope, focusing unit, fluid holding unit, and optical unit | |
| JP2013127629A5 (https=) | ||
| WO2015168218A3 (en) | Light control systems and methods | |
| EP2857895A3 (en) | Compact electromagnetic actuator | |
| JP2016518698A5 (https=) | ||
| WO2015124372A3 (en) | Lithographic system | |
| EP2708801A3 (en) | Method of controlling vehicle lamp and vehicle lamp | |
| FR3017187B1 (fr) | Lampe pour vehicule | |
| BR112017006025A2 (pt) | acoplador óptico, e, método para melhorar a visualização de uma área de superfície em um visor. | |
| JP2012245285A5 (https=) | ||
| EP2740991A3 (en) | Vehicle lighting apparatus | |
| EP2878985A3 (en) | Light source device and projector | |
| WO2016105934A3 (en) | Selective plane illumination microscopy instruments | |
| JP2019012190A5 (https=) |