JP2016517684A5 - - Google Patents
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- Publication number
- JP2016517684A5 JP2016517684A5 JP2016500152A JP2016500152A JP2016517684A5 JP 2016517684 A5 JP2016517684 A5 JP 2016517684A5 JP 2016500152 A JP2016500152 A JP 2016500152A JP 2016500152 A JP2016500152 A JP 2016500152A JP 2016517684 A5 JP2016517684 A5 JP 2016517684A5
- Authority
- JP
- Japan
- Prior art keywords
- silicon dioxide
- dioxide layer
- resonator beam
- stop
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 92
- 239000000463 material Substances 0.000 claims description 68
- 235000012239 silicon dioxide Nutrition 0.000 claims description 46
- 239000000377 silicon dioxide Substances 0.000 claims description 46
- 238000000034 method Methods 0.000 claims description 29
- 238000000151 deposition Methods 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 238000000059 patterning Methods 0.000 claims description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- 238000011084 recovery Methods 0.000 claims description 13
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 6
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical class [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 6
- 239000011787 zinc oxide Substances 0.000 claims description 6
- 230000000295 complement effect Effects 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 229910044991 metal oxide Inorganic materials 0.000 claims description 5
- 150000004706 metal oxides Chemical class 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 229920002120 photoresistant polymer Polymers 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- 244000144972 livestock Species 0.000 claims description 3
- 238000012806 monitoring device Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 239000002033 PVDF binder Substances 0.000 description 4
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000005289 physical deposition Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361780247P | 2013-03-13 | 2013-03-13 | |
| US61/780,247 | 2013-03-13 | ||
| PCT/US2013/078520 WO2014143373A1 (en) | 2013-03-13 | 2013-12-31 | Piezoelectric energy harvester device with stopper structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016517684A JP2016517684A (ja) | 2016-06-16 |
| JP2016517684A5 true JP2016517684A5 (enExample) | 2017-02-02 |
Family
ID=51537486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016500152A Pending JP2016517684A (ja) | 2013-03-13 | 2013-12-31 | 停止部構造を有する圧電エネルギー回収器デバイス |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9479089B2 (enExample) |
| EP (1) | EP2971761A4 (enExample) |
| JP (1) | JP2016517684A (enExample) |
| KR (1) | KR20150130972A (enExample) |
| CA (1) | CA2892278A1 (enExample) |
| WO (1) | WO2014143373A1 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112013006824B4 (de) * | 2013-03-13 | 2021-07-22 | Panasonic Corporation | Leistungsgenerator |
| EP3038247A4 (en) * | 2013-08-16 | 2017-05-10 | AMC ENERGY CO., Ltd. | Piezoelectric harvesting system using repulsion force |
| JP5934926B2 (ja) * | 2013-12-12 | 2016-06-15 | パナソニックＩｐマネジメント株式会社 | 振動発電装置、振動モニタリング装置及びシステム |
| ES2890451T3 (es) * | 2015-03-27 | 2022-01-19 | Saronikos Trading & Services Unipessoal Lda | Reloj electrónico de pulsera o de bolsillo que comprende una corona giratoria |
| KR102234578B1 (ko) * | 2015-04-21 | 2021-03-31 | (주)와이솔 | 압전 진동 모듈 |
| DE102017200111B3 (de) * | 2017-01-05 | 2018-03-15 | Robert Bosch Gmbh | Mikromechanische Schallwandleranordnung und entsprechendes Herstellungsverfahren |
| EP3460981B1 (en) | 2017-07-26 | 2022-03-30 | Tri-Force Management Corporation | Power generation element |
| CN109587612A (zh) * | 2018-12-31 | 2019-04-05 | 瑞声声学科技(深圳)有限公司 | 压电式麦克风 |
| US11791748B2 (en) * | 2019-07-24 | 2023-10-17 | Tdk Corporation | Smart wheel energy harvester |
Family Cites Families (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1363215A (en) * | 1973-01-04 | 1974-08-14 | Mullard Ltd | Mechanical-electrical transducer |
| CH626479A5 (enExample) | 1979-07-05 | 1981-11-13 | Suisse Horlogerie | |
| US4906840A (en) | 1988-01-27 | 1990-03-06 | The Board Of Trustees Of Leland Stanford Jr., University | Integrated scanning tunneling microscope |
| US5708320A (en) | 1994-10-28 | 1998-01-13 | Alps Electric Co., Ltd | Vibratory gyroscope |
| DE4445177C5 (de) | 1994-11-22 | 2015-09-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung mikromechanischer Bauelemente mit freistehenden Mikrostrukturen |
| US5646583A (en) | 1996-01-04 | 1997-07-08 | Rockwell International Corporation | Acoustic isolator having a high impedance layer of hafnium oxide |
| GB2345397B (en) | 1997-08-19 | 2001-10-31 | Citizen Watch Co Ltd | Piezoelectric vibrator |
| US6078126A (en) | 1998-05-29 | 2000-06-20 | Motorola, Inc. | Resonant piezoelectric alerting device |
| JP3845544B2 (ja) | 1999-10-01 | 2006-11-15 | 日本碍子株式会社 | 圧電／電歪デバイス及びその製造方法 |
| JP2003037312A (ja) * | 2001-07-23 | 2003-02-07 | Matsushita Electric Ind Co Ltd | 応力センサー |
| JP2003218418A (ja) * | 2002-01-18 | 2003-07-31 | Matsushita Electric Ind Co Ltd | 圧電型発電器 |
| US7181977B2 (en) | 2002-01-22 | 2007-02-27 | Measurement Specialties, Inc. | Sensor assembly with lead attachment |
| DE10221420A1 (de) | 2002-05-14 | 2003-12-11 | Enocean Gmbh | Vorrichtung zur Umwandlung mechanischer Energie in elektrische Energie |
| US7270952B2 (en) | 2002-09-24 | 2007-09-18 | Intel Corporation | Detecting molecular binding by monitoring feedback controlled cantilever deflections |
| US6858970B2 (en) | 2002-10-21 | 2005-02-22 | The Boeing Company | Multi-frequency piezoelectric energy harvester |
| US20050134149A1 (en) | 2003-07-11 | 2005-06-23 | Deng Ken K. | Piezoelectric vibration energy harvesting device |
| US7397169B2 (en) | 2004-03-19 | 2008-07-08 | Lawrence Livermore National Security, Llc | Energy harvesting using a thermoelectric material |
| WO2005104257A1 (en) | 2004-04-23 | 2005-11-03 | Agency For Science, Technology And Research | Micro-electromechanical device |
| JP2006216898A (ja) * | 2005-02-07 | 2006-08-17 | Nec Tokin Corp | 圧電発電装置 |
| US7692365B2 (en) | 2005-11-23 | 2010-04-06 | Microstrain, Inc. | Slotted beam piezoelectric composite |
| US20070125176A1 (en) | 2005-12-02 | 2007-06-07 | Honeywell International, Inc. | Energy harvesting device and methods |
| WO2007070022A2 (en) * | 2005-12-09 | 2007-06-21 | Chubb International Holdings Limited | Electromechanical energy harvesting system |
| DE102006037692A1 (de) * | 2006-08-11 | 2008-02-14 | Robert Bosch Gmbh | Schaltungsmodul |
| US7839058B1 (en) | 2007-01-29 | 2010-11-23 | Microstrain, Inc. | Wideband vibration energy harvester |
| EP2140505B1 (en) | 2007-03-21 | 2012-06-27 | The University of Vermont and State Agricultural | Piezoelectric vibrational energy harvesting systems incorporating parametric bending mode energy harvesting |
| US7893599B2 (en) | 2008-01-29 | 2011-02-22 | Washington State University | Energy converters and associated methods |
| EP2109217A3 (en) | 2008-04-07 | 2013-05-15 | Stichting IMEC Nederland | System and method for resonance frequency tuning of resonant devices |
| US8222754B1 (en) * | 2008-05-28 | 2012-07-17 | Arjae Spectral Enterprises Ltd. | Vibration-based power generator |
| KR101243868B1 (ko) * | 2009-12-14 | 2013-03-20 | 한국전자통신연구원 | 가변 축전층이 내장된 능동형 압전 에너지변환 소자 및 그 제조 방법 |
| JP2011160576A (ja) * | 2010-02-02 | 2011-08-18 | Seiko Epson Corp | 圧電型発電機 |
| US20110264293A1 (en) | 2010-04-27 | 2011-10-27 | Earl David Forrest | System and method of determining an energy harvesting capability of a location |
| US8479363B2 (en) | 2010-05-11 | 2013-07-09 | Hao Zhang | Methods for wafer level trimming of acoustically coupled resonator filter |
| US20120049694A1 (en) | 2010-08-27 | 2012-03-01 | Stichting Imec Nederland | Micromachined Piezoelectric Energy Harvester with Polymer Beam |
| US9054294B2 (en) | 2011-10-06 | 2015-06-09 | Texas Instruments Incorporated | Soft mechanical stops to limit over-travel of proof masses in cantilevered piezoelectric devices |
| US8866316B2 (en) | 2012-06-21 | 2014-10-21 | General Electric Company | Tunable vibration energy harvester and method |
| WO2014164325A1 (en) | 2013-03-13 | 2014-10-09 | Microgen Systems, Inc. | Symmetric dual piezoelectric stack microelectromechanical piezoelectric cantilever energy harvester |
| DE112013006824B4 (de) * | 2013-03-13 | 2021-07-22 | Panasonic Corporation | Leistungsgenerator |
| US9728707B2 (en) * | 2014-02-05 | 2017-08-08 | Microgen Systems, Inc. | Packaged piezoelectric energy harvester device with a compliant stopper structure, system, and methods of use and making |
-
2013
- 2013-12-31 WO PCT/US2013/078520 patent/WO2014143373A1/en not_active Ceased
- 2013-12-31 JP JP2016500152A patent/JP2016517684A/ja active Pending
- 2013-12-31 KR KR1020157019541A patent/KR20150130972A/ko not_active Withdrawn
- 2013-12-31 US US14/145,560 patent/US9479089B2/en not_active Expired - Fee Related
- 2013-12-31 EP EP13877574.7A patent/EP2971761A4/en not_active Withdrawn
- 2013-12-31 CA CA2892278A patent/CA2892278A1/en not_active Abandoned
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