KR20150130972A - 스토퍼 구조물을 갖는 압전 에너지 수확 장치 - Google Patents

스토퍼 구조물을 갖는 압전 에너지 수확 장치 Download PDF

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Publication number
KR20150130972A
KR20150130972A KR1020157019541A KR20157019541A KR20150130972A KR 20150130972 A KR20150130972 A KR 20150130972A KR 1020157019541 A KR1020157019541 A KR 1020157019541A KR 20157019541 A KR20157019541 A KR 20157019541A KR 20150130972 A KR20150130972 A KR 20150130972A
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KR
South Korea
Prior art keywords
silicon dioxide
layer
resonator beam
dioxide layer
stopper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020157019541A
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English (en)
Korean (ko)
Inventor
로버트 쥐. 안도스카
티. 거스 맥도날드
데이비드 트라우어니히트
캐슬린 엠. 베쓰
Original Assignee
마이크로젠 시스템즈, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 마이크로젠 시스템즈, 인코포레이티드 filed Critical 마이크로젠 시스템즈, 인코포레이티드
Publication of KR20150130972A publication Critical patent/KR20150130972A/ko
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/186—Vibration harvesters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/186—Vibration harvesters
    • H02N2/188—Vibration harvesters adapted for resonant operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/08—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for recovering energy derived from swinging, rolling, pitching or like movements, e.g. from the vibrations of a machine
    • H01L41/1136—
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/181—Circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/304—Beam type
    • H10N30/306—Cantilevers

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
KR1020157019541A 2013-03-13 2013-12-31 스토퍼 구조물을 갖는 압전 에너지 수확 장치 Withdrawn KR20150130972A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361780247P 2013-03-13 2013-03-13
US61/780,247 2013-03-13
PCT/US2013/078520 WO2014143373A1 (en) 2013-03-13 2013-12-31 Piezoelectric energy harvester device with stopper structure

Publications (1)

Publication Number Publication Date
KR20150130972A true KR20150130972A (ko) 2015-11-24

Family

ID=51537486

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020157019541A Withdrawn KR20150130972A (ko) 2013-03-13 2013-12-31 스토퍼 구조물을 갖는 압전 에너지 수확 장치

Country Status (6)

Country Link
US (1) US9479089B2 (enExample)
EP (1) EP2971761A4 (enExample)
JP (1) JP2016517684A (enExample)
KR (1) KR20150130972A (enExample)
CA (1) CA2892278A1 (enExample)
WO (1) WO2014143373A1 (enExample)

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DE112013006824B4 (de) * 2013-03-13 2021-07-22 Panasonic Corporation Leistungsgenerator
EP3038247A4 (en) * 2013-08-16 2017-05-10 AMC ENERGY CO., Ltd. Piezoelectric harvesting system using repulsion force
JP5934926B2 (ja) * 2013-12-12 2016-06-15 パナソニックＩｐマネジメント株式会社 振動発電装置、振動モニタリング装置及びシステム
ES2890451T3 (es) * 2015-03-27 2022-01-19 Saronikos Trading & Services Unipessoal Lda Reloj electrónico de pulsera o de bolsillo que comprende una corona giratoria
KR102234578B1 (ko) * 2015-04-21 2021-03-31 (주)와이솔 압전 진동 모듈
DE102017200111B3 (de) * 2017-01-05 2018-03-15 Robert Bosch Gmbh Mikromechanische Schallwandleranordnung und entsprechendes Herstellungsverfahren
EP3460981B1 (en) 2017-07-26 2022-03-30 Tri-Force Management Corporation Power generation element
CN109587612A (zh) * 2018-12-31 2019-04-05 瑞声声学科技(深圳)有限公司 压电式麦克风
US11791748B2 (en) * 2019-07-24 2023-10-17 Tdk Corporation Smart wheel energy harvester

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Also Published As

Publication number Publication date
EP2971761A1 (en) 2016-01-20
EP2971761A4 (en) 2016-08-31
JP2016517684A (ja) 2016-06-16
US9479089B2 (en) 2016-10-25
US20150188458A1 (en) 2015-07-02
WO2014143373A1 (en) 2014-09-18
CA2892278A1 (en) 2014-09-18

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PA0105 International application

Patent event date: 20150717

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid