JP2016516657A5 - - Google Patents
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- Publication number
- JP2016516657A5 JP2016516657A5 JP2016501874A JP2016501874A JP2016516657A5 JP 2016516657 A5 JP2016516657 A5 JP 2016516657A5 JP 2016501874 A JP2016501874 A JP 2016501874A JP 2016501874 A JP2016501874 A JP 2016501874A JP 2016516657 A5 JP2016516657 A5 JP 2016516657A5
- Authority
- JP
- Japan
- Prior art keywords
- glass
- glass sheet
- glass sheets
- interfaces
- modified layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 claims description 43
- 210000002381 Plasma Anatomy 0.000 claims description 7
- 229920002313 fluoropolymer Polymers 0.000 claims description 6
- 239000004811 fluoropolymer Substances 0.000 claims description 6
- 230000004048 modification Effects 0.000 claims description 4
- 238000006011 modification reaction Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 2
- 125000003118 aryl group Chemical group 0.000 claims 9
- BLRPTPMANUNPDV-UHFFFAOYSA-N silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 8
- 229910000077 silane Inorganic materials 0.000 claims 8
- 238000000137 annealing Methods 0.000 claims 6
- 230000005484 gravity Effects 0.000 claims 3
- PARWUHTVGZSQPD-UHFFFAOYSA-N Phenylsilane Chemical compound [SiH3]C1=CC=CC=C1 PARWUHTVGZSQPD-UHFFFAOYSA-N 0.000 claims 2
- ZZNQQQWFKKTOSD-UHFFFAOYSA-N diethoxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](OCC)(OCC)C1=CC=CC=C1 ZZNQQQWFKKTOSD-UHFFFAOYSA-N 0.000 claims 2
- 238000010030 laminating Methods 0.000 claims 2
- 238000006116 polymerization reaction Methods 0.000 claims 2
- 230000000717 retained Effects 0.000 claims 2
- JCVQKRGIASEUKR-UHFFFAOYSA-N triethoxy(phenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=CC=C1 JCVQKRGIASEUKR-UHFFFAOYSA-N 0.000 claims 2
- FFUAGWLWBBFQJT-UHFFFAOYSA-N Bis(trimethylsilyl)amine Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 claims 1
- 230000001351 cycling Effects 0.000 claims 1
- -1 polytetrafluoroethylene Polymers 0.000 claims 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims 1
- 239000004810 polytetrafluoroethylene Substances 0.000 claims 1
- 150000004756 silanes Chemical class 0.000 claims 1
- 239000000969 carrier Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- 230000032798 delamination Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 201000001195 sepiapterin reductase deficiency Diseases 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000004435 hydrogen atoms Chemical group [H]* 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000527 sonication Methods 0.000 description 1
- 238000000391 spectroscopic ellipsometry Methods 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361791418P | 2013-03-15 | 2013-03-15 | |
| US61/791,418 | 2013-03-15 | ||
| US14/047,251 US9340443B2 (en) | 2012-12-13 | 2013-10-07 | Bulk annealing of glass sheets |
| US14/047,251 | 2013-10-07 | ||
| PCT/US2014/025537 WO2014151353A1 (en) | 2013-03-15 | 2014-03-13 | Bulk annealing of glass sheets |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017147681A Division JP6434096B2 (ja) | 2013-03-15 | 2017-07-31 | ガラスシートのバルクアニール |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016516657A JP2016516657A (ja) | 2016-06-09 |
| JP2016516657A5 true JP2016516657A5 (de) | 2017-03-16 |
| JP6186493B2 JP6186493B2 (ja) | 2017-08-23 |
Family
ID=51580938
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016501874A Expired - Fee Related JP6186493B2 (ja) | 2013-03-15 | 2014-03-13 | ガラスシートのバルクアニール |
| JP2017147681A Expired - Fee Related JP6434096B2 (ja) | 2013-03-15 | 2017-07-31 | ガラスシートのバルクアニール |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017147681A Expired - Fee Related JP6434096B2 (ja) | 2013-03-15 | 2017-07-31 | ガラスシートのバルクアニール |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP2969997A1 (de) |
| JP (2) | JP6186493B2 (de) |
| KR (1) | KR102239613B1 (de) |
| CN (1) | CN105658594B (de) |
| TW (2) | TWI679175B (de) |
| WO (1) | WO2014151353A1 (de) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI617437B (zh) | 2012-12-13 | 2018-03-11 | 康寧公司 | 促進控制薄片與載體間接合之處理 |
| US10014177B2 (en) | 2012-12-13 | 2018-07-03 | Corning Incorporated | Methods for processing electronic devices |
| US10086584B2 (en) | 2012-12-13 | 2018-10-02 | Corning Incorporated | Glass articles and methods for controlled bonding of glass sheets with carriers |
| US9340443B2 (en) | 2012-12-13 | 2016-05-17 | Corning Incorporated | Bulk annealing of glass sheets |
| JP6186493B2 (ja) * | 2013-03-15 | 2017-08-23 | コーニング インコーポレイテッド | ガラスシートのバルクアニール |
| US10510576B2 (en) | 2013-10-14 | 2019-12-17 | Corning Incorporated | Carrier-bonding methods and articles for semiconductor and interposer processing |
| CN106132688B (zh) * | 2014-01-27 | 2020-07-14 | 康宁股份有限公司 | 用于薄片与载体的受控粘结的制品和方法 |
| EP3129221A1 (de) | 2014-04-09 | 2017-02-15 | Corning Incorporated | Vorrichtungsmodifizierter substratartikel und herstellungsverfahren |
| KR102573207B1 (ko) | 2015-05-19 | 2023-08-31 | 코닝 인코포레이티드 | 시트와 캐리어의 결합을 위한 물품 및 방법 |
| EP3313799B1 (de) | 2015-06-26 | 2022-09-07 | Corning Incorporated | Verfahren und artikel mit einem bogen und einem träger |
| TW201825623A (zh) | 2016-08-30 | 2018-07-16 | 美商康寧公司 | 用於片材接合的矽氧烷電漿聚合物 |
| TWI810161B (zh) | 2016-08-31 | 2023-08-01 | 美商康寧公司 | 具以可控制式黏結的薄片之製品及製作其之方法 |
| KR102346393B1 (ko) * | 2017-06-19 | 2022-01-03 | 동우 화인켐 주식회사 | 터치센서를 포함하는 플렉시블 표시장치의 제조방법 |
| JP7260523B2 (ja) | 2017-08-18 | 2023-04-18 | コーニング インコーポレイテッド | ポリカチオン性高分子を使用した一時的結合 |
| CN111615567B (zh) | 2017-12-15 | 2023-04-14 | 康宁股份有限公司 | 用于处理基板的方法和用于制备包括粘合片材的制品的方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4397722A (en) * | 1981-12-31 | 1983-08-09 | International Business Machines Corporation | Polymers from aromatic silanes and process for their preparation |
| WO2004079826A1 (ja) * | 1996-10-22 | 2004-09-16 | Mitsutoshi Miyasaka | 薄膜トランジスタの製造方法、及び表示装置と電子機器 |
| US20050001201A1 (en) * | 2003-07-03 | 2005-01-06 | Bocko Peter L. | Glass product for use in ultra-thin glass display applications |
| US20050069713A1 (en) * | 2003-09-30 | 2005-03-31 | Rahul Gupta | Capillary coating method |
| CN101437772B (zh) * | 2006-05-08 | 2011-09-07 | 旭硝子株式会社 | 薄板玻璃叠层体、使用了薄板玻璃叠层体的显示装置的制造方法及支持用玻璃基板 |
| WO2009094558A2 (en) * | 2008-01-24 | 2009-07-30 | Brewer Science Inc. | Method for reversibly mounting a device wafer to a carrier substrate |
| JPWO2009128359A1 (ja) * | 2008-04-17 | 2011-08-04 | 旭硝子株式会社 | ガラス積層体、支持体付き表示装置用パネルおよびこれらの製造方法 |
| JP5029523B2 (ja) * | 2008-07-14 | 2012-09-19 | 旭硝子株式会社 | ガラス積層体、支持体付き表示装置用パネル、表示装置用パネル、表示装置およびこれらの製造方法 |
| TW201033000A (en) * | 2009-01-09 | 2010-09-16 | Asahi Glass Co Ltd | Glass laminate and manufacturing method therefor |
| US8697228B2 (en) * | 2009-05-06 | 2014-04-15 | Corning Incorporated | Carrier for glass substrates |
| US9847243B2 (en) * | 2009-08-27 | 2017-12-19 | Corning Incorporated | Debonding a glass substrate from carrier using ultrasonic wave |
| CN102576106B (zh) * | 2009-10-20 | 2015-02-11 | 旭硝子株式会社 | 玻璃层叠体及其制造方法、显示面板的制造方法及利用该制造方法获得的显示面板 |
| BR112012019405A2 (pt) * | 2010-02-03 | 2018-03-20 | Asahi Glass Company, Limited | metodo e aparelho para recozimento de folha de vidro |
| US20110250346A1 (en) * | 2010-04-07 | 2011-10-13 | Remington Jr Michael P | Adhesion of organic coatings on glass |
| TW201309611A (zh) * | 2011-07-12 | 2013-03-01 | Asahi Glass Co Ltd | 附積層膜之玻璃基板之製造方法 |
| JP6186493B2 (ja) * | 2013-03-15 | 2017-08-23 | コーニング インコーポレイテッド | ガラスシートのバルクアニール |
-
2014
- 2014-03-13 JP JP2016501874A patent/JP6186493B2/ja not_active Expired - Fee Related
- 2014-03-13 KR KR1020157029187A patent/KR102239613B1/ko active IP Right Grant
- 2014-03-13 TW TW106121917A patent/TWI679175B/zh not_active IP Right Cessation
- 2014-03-13 TW TW103109136A patent/TWI594960B/zh not_active IP Right Cessation
- 2014-03-13 WO PCT/US2014/025537 patent/WO2014151353A1/en active Application Filing
- 2014-03-13 EP EP14728700.7A patent/EP2969997A1/de not_active Withdrawn
- 2014-03-13 CN CN201480027673.4A patent/CN105658594B/zh not_active Expired - Fee Related
-
2017
- 2017-07-31 JP JP2017147681A patent/JP6434096B2/ja not_active Expired - Fee Related
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