JP2016513617A - 複合皮膜及びその方法 - Google Patents
複合皮膜及びその方法 Download PDFInfo
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- 238000000576 coating method Methods 0.000 title claims abstract description 63
- 239000011248 coating agent Substances 0.000 title claims abstract description 59
- 238000000034 method Methods 0.000 title claims description 37
- 239000002131 composite material Substances 0.000 title description 11
- 229910021332 silicide Inorganic materials 0.000 claims abstract description 39
- 239000000758 substrate Substances 0.000 claims abstract description 35
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229910052751 metal Inorganic materials 0.000 claims abstract description 30
- 239000002184 metal Substances 0.000 claims abstract description 30
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 11
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 10
- 229910016006 MoSi Inorganic materials 0.000 claims description 57
- 229910052710 silicon Inorganic materials 0.000 claims description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 17
- 239000000203 mixture Substances 0.000 claims description 17
- 239000010703 silicon Substances 0.000 claims description 17
- 239000011159 matrix material Substances 0.000 claims description 10
- 230000007704 transition Effects 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 229910021350 transition metal silicide Inorganic materials 0.000 claims description 7
- 230000002787 reinforcement Effects 0.000 claims description 6
- 239000012720 thermal barrier coating Substances 0.000 claims description 6
- 230000007613 environmental effect Effects 0.000 claims description 5
- 239000012779 reinforcing material Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 229910020968 MoSi2 Inorganic materials 0.000 abstract description 13
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 12
- 229910008814 WSi2 Inorganic materials 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 47
- 238000005516 engineering process Methods 0.000 description 18
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 13
- 229910010271 silicon carbide Inorganic materials 0.000 description 12
- 239000011153 ceramic matrix composite Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910021486 amorphous silicon dioxide Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910021343 molybdenum disilicide Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
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Abstract
Description
αeff=(tMoSi2E’MoSi2αMoSi2+tSi3N4E’Si3N4αSi3N4)/(tMoSi2E’MoSi2+tSi3N4E’Si3N4)、
ここで、各材料iについて、tiが積層体中の全ての層の合計厚さであり、E’iが、E’i=Ei/(1−νi)として定義される二軸弾性率であり、νiがポアソン比であり、αiが熱膨張率である。整理すると、厚さの比率は、
tMoSi2/tSi3N4=−((αeff−αSi3N4)/(αeff−αMoSi2))(E’Si3N4/E’MoSi2)
により有効熱膨張に関係付けられる。
Si3N4:αSi3N4=3.3x10-6/C、ESi3N4=310GPa、νSi3N4=0.25→E’Si3N4=413GPa、
MoSi2:αMoSi2=8.25x10-6/C、EMoSi2=432GPa、νMoSi2=0.16→E’MoSi2=514GPaとなる。
Claims (30)
- 基板と、
基板の表面に設けられた皮膜であって、MoSi2又はWSi2又は(Mo,W)Si2又は白金族金属ケイ化物から基本的になる1以上の金属ケイ化物層、及びSi3N4から基本的になる1以上の層を含む皮膜と
を含む物品。 - 1以上の金属ケイ化物層が基板の表面と接触している、請求項1記載の物品。
- Si3N4の1以上の層が基板の表面と接触している、請求項1記載の物品。
- 1以上の金属ケイ化物層とSi3N4の1以上の層との間にある1以上の遷移領域をさらに含んでいて、遷移領域が金属ケイ化物層とSi3N4との混合物を含んでいる、請求項1記載の物品。
- MoSi2又はWSi2又は(Mo,W)Si2又は白金族金属ケイ化物から基本的になる複数の金属ケイ化物層と、
Si3N4から基本的になる複数の層と
を含んでいて、金属ケイ化物層とSi3N4の層が交互に配置されている、請求項1記載の物品。 - 1以上の金属ケイ化物層とSi3N4の1以上の層との厚さ比によって、基板の熱膨張率に実質的に等しい熱膨張率が皮膜にもたらされる、請求項1記載の物品。
- 基板が、SiC、Si3N4、遷移金属ケイ化物及び/又はケイ素を補強材相又はマトリックス相として含む、請求項1記載の物品。
- 皮膜上に設けられた耐環境コーティング(40)及び遮熱コーティング(40)のの少なくとも一方をさらに備える、請求項1記載の物品。
- Si3N4の割合が、皮膜の約55体積%超である、請求項1記載の物品。
- 1以上の金属ケイ化物層が、皮膜の約1体積%〜約45体積%であるMoSi2から基本的になる、請求項1記載の物品。
- 1以上の金属ケイ化物層が、MoSi2から基本的になり、Si3N4の1以上の層の厚さに対するMoSi2の1以上の層の厚さの比率が、約0.01〜約0.75である、請求項1記載の物品。
- SiC、Si3N4、遷移金属ケイ化物及び/又はケイ素を金属性又は非金属性のマトリックス中の補強材料として含むケイ素含有領域を含む基板と、
基板の表面に設けられた皮膜であって、MoSi2及びSi3N4を含み、Si3N4の割合が、皮膜の約55体積%超である、皮膜と
を備える物品。 - MoSi2とSi3N4とが混合物である、請求項12記載の物品。
- 混合物が機能傾斜材料である、請求項13記載の物品。
- 混合物が、Mo5Si3、Si及び/又はSiNxをさらに含む、請求項13記載の物品。
- 基板を備える物品を皮膜する方法であって、
皮膜を基板の表面に塗工する工程であって、皮膜が、MoSi2又はWSi2又は(Mo,W)Si2又は白金族金属ケイ化物から基本的になる1以上の金属ケイ化物層と、Si3N4から基本的になる1以上の層とを含む、工程を含む方法。 - 1以上の金属ケイ化物層が、基板の表面と接触している、請求項16記載の方法。
- Si3N4の1以上の層が、基板の表面と接触している、請求項16記載の方法。
- 1以上の金属ケイ化物層及びSi3N4の1以上の層が、化学気相蒸着により塗工されている、請求項14記載の方法。
- 1以上の金属ケイ化物層とSi3N4の1以上の層との間に遷移領域を形成する工程であって、遷移領域が、金属ケイ化物の相とSi3N4の相の両方の混合物を含む、工程をさらに含む、請求項16記載の方法。
- MoSi2又はWSi2又は(Mo,W)Si2又は白金族金属ケイ化物から基本的になる複数の金属ケイ化物層を形成し、Si3N4から基本的になる複数の層を形成する工程であって、金属ケイ化物層とSi3N4が交互している、工程をさらに含む、請求項16記載の方法。
- 1以上の金属ケイ化物層とSi3N4の1以上の層との厚さ比によって、基板の熱膨張率に実質的に等しい熱膨張率が皮膜にもたらされる、請求項16記載の方法。
- 基板が、SiC、Si3N4、遷移金属ケイ化物及び/又はケイ素を補強材相又はマトリックス相として含む、請求項16記載の方法。
- 耐環境コーティング(40)及び遮熱コーティング(40)のの少なくとも一方を皮膜上に塗工する工程をさらに含む、請求項16記載の方法。
- Si3N4の割合が、皮膜の約55体積%超である、請求項16記載の方法。
- 皮膜を熱処理して、金属ケイ化物とSi3N4との混合物を形成する工程をさらに含む、請求項16記載の方法。
- SiC、Si3N4、遷移金属ケイ化物及び/又はケイ素を金属性又は非金属性のマトリックス中の補強材料として含むケイ素含有領域を含む基板を備える物品を皮膜する方法であって、
皮膜を基板の表面に塗工する工程であって、皮膜がMoSi2及びSi3N4を含み、Si3N4の割合が、皮膜の約55体積%超である、工程を含む、方法。 - MoSi2とSi3N4とが混合物である、請求項27記載の方法。
- 混合物が機能傾斜材料である、請求項28記載の方法。
- 混合物が、Mo5Si3、Si及び/又はSiNxをさらに含む、請求項28記載の方法。
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US20210024426A1 (en) * | 2019-07-22 | 2021-01-28 | Rolls-Royce High Temperature Composites Inc. | Method of forming a barrier layer on a ceramic matrix composite |
US11655194B2 (en) | 2019-10-17 | 2023-05-23 | General Electric Company | Ceramic composites with an intermediate layer having a carbon sink material for high temperature applications |
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