JP2016507900A5 - - Google Patents

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Publication number
JP2016507900A5
JP2016507900A5 JP2015556400A JP2015556400A JP2016507900A5 JP 2016507900 A5 JP2016507900 A5 JP 2016507900A5 JP 2015556400 A JP2015556400 A JP 2015556400A JP 2015556400 A JP2015556400 A JP 2015556400A JP 2016507900 A5 JP2016507900 A5 JP 2016507900A5
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JP
Japan
Prior art keywords
laser beam
reversing module
laser
module according
prism
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JP2015556400A
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English (en)
Japanese (ja)
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JP6242917B2 (ja
JP2016507900A (ja
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Priority claimed from PCT/EP2013/052574 external-priority patent/WO2014121844A1/en
Publication of JP2016507900A publication Critical patent/JP2016507900A/ja
Publication of JP2016507900A5 publication Critical patent/JP2016507900A5/ja
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Publication of JP6242917B2 publication Critical patent/JP6242917B2/ja
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JP2015556400A 2013-02-08 2013-02-08 ビーム反転モジュールおよびそのようなビーム反転モジュールを有する光パワー増幅器 Active JP6242917B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2013/052574 WO2014121844A1 (en) 2013-02-08 2013-02-08 Beam reverser module and optical power amplifier having such a beam reverser module

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017096220A Division JP2017143308A (ja) 2017-05-15 2017-05-15 ビーム反転モジュールおよびそのようなビーム反転モジュールを有する光パワー増幅器

Publications (3)

Publication Number Publication Date
JP2016507900A JP2016507900A (ja) 2016-03-10
JP2016507900A5 true JP2016507900A5 (cg-RX-API-DMAC7.html) 2016-04-21
JP6242917B2 JP6242917B2 (ja) 2017-12-06

Family

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Family Applications (1)

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JP2015556400A Active JP6242917B2 (ja) 2013-02-08 2013-02-08 ビーム反転モジュールおよびそのようなビーム反転モジュールを有する光パワー増幅器

Country Status (3)

Country Link
US (2) US9843153B2 (cg-RX-API-DMAC7.html)
JP (1) JP6242917B2 (cg-RX-API-DMAC7.html)
WO (1) WO2014121844A1 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014121844A1 (en) 2013-02-08 2014-08-14 Carl Zeiss Laser Optics Gmbh Beam reverser module and optical power amplifier having such a beam reverser module
US11906770B2 (en) 2021-10-21 2024-02-20 KLA Corporal Monolithic optical retarder

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US6693939B2 (en) * 2001-01-29 2004-02-17 Cymer, Inc. Laser lithography light source with beam delivery
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