JP2016215166A - Cleaning device and cleaning method of panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce a size of a device and simplify the device as the whole device.SOLUTION: A cleaning device 10 of a panel includes a tape supply part 11, and a pair of feed rollers 12a, 12b. A control part 10A drives and controls the pair of feed rollers 12a, 12b, and a tape T1 between the pair of feed rollers 12a, 12b and a tape clamp 13 is loosened. The control part 10A cleans an edge part P1 of the panel P by the tape T1 with the tape clamp 13 closed. Then, the control part 10A collects the tape T1 by a tape collecting part 30 with the tape clamp 13 opened.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a panel cleaning device and a cleaning method for cleaning an edge of a panel.

Conventional technology

  When manufacturing a display device typified by a liquid crystal display device, terminals such as sub-substrates and ICs are formed on terminals formed on the edge of a substrate (hereinafter referred to as “glass substrate”) made of glass or resin as a panel. Electronic components are connected. As a connection method, a method of joining an electronic component to a glass substrate with an anisotropic conductive material is used. Prior to this bonding, the purpose is to remove foreign substances adhering to the surface of the edge of the glass substrate and to improve the sticking property of the anisotropic conductive material to be attached to connect the electronic component to the glass substrate surface. Cleaning is performed.

  As a device for performing this cleaning, a cleaning device using a cleaning tape is known. Such a cleaning device includes a supply reel that supplies a tape, a feed roller that pulls the tape from the supply reel and supplies it, a roller that presses the supplied tape against the edge of the glass substrate, and a winding that winds up the tape used for cleaning. A cleaning unit including a take-up reel is provided for each of the upper surface cleaning and the lower surface cleaning of the glass substrate.

JP 2002-287852 A

  And in the above-mentioned cleaning apparatus, each cleaning part is individually provided with the chemical | medical solution supply apparatus which supplies the chemical | medical solution as a cleaning liquid to a tape.

  An object of the present invention is to provide a panel cleaning device and a cleaning method capable of simplifying and downsizing the structure of the device.

  The present invention provides a panel cleaning apparatus that cleans the edge of the upper surface and the edge of the lower surface of the panel with a pair of cleaning tapes, and presses the first tape for cleaning the edge of the upper surface against the panel. 1 tape pressing portion, a second tape pressing portion for pressing the second tape for cleaning the edge portion of the lower surface against the panel, and a cleaning liquid for the first tape and the second tape. A single cleaning liquid supply unit to be dropped, a moving device that relatively moves the first tape pressing unit and the second pressing unit in a direction along the surface of the panel, the cleaning liquid supply unit, and the movement A control unit that controls the apparatus, wherein the control unit positions the first tape pressing unit at a cleaning liquid supply position by the cleaning liquid supply unit, and supplies the cleaning liquid. A cleaning liquid is dropped on the first tape from the first tape pressing portion, the first tape pressing portion is retracted from the cleaning liquid supply position, and the second tape pressing portion is positioned at the cleaning liquid supply position; The panel cleaning apparatus is configured to control the cleaning liquid supply unit and the moving device so that the cleaning liquid is dropped from the cleaning liquid supply unit onto the second tape.

  In the present invention, the second tape pressing portion is fixedly arranged at the supply position of the cleaning liquid in the direction along the surface of the panel, and the first tape pressing portion is moved by the moving device, The panel cleaning apparatus is moved to a supply position of the cleaning liquid and a position retracted from the supply position.

  The present invention includes a first tape supply unit that supplies the first tape, a second tape supply unit that supplies the second tape, and the first tape from the first tape supply unit. A first pair of feed rollers for feeding the second tape, a second pair of feed rollers for feeding the second tape from the second tape supply unit, and the first tape from the first tape pressing unit. And a tape recovery section for recovering the second tape from the second tape pressing section.

  In the present invention, when the first tape pressing portion and the second tape pressing portion are separated from each other by the moving device, and the first tape pressing portion is at the cleaning liquid supply position, The panel cleaning device is characterized in that the panel is sandwiched between the tape pressing portion and the second tape pressing portion.

  The present invention is a panel cleaning method for cleaning the edge of the upper surface and the edge of the lower surface of the panel with a pair of cleaning tapes, and presses the first tape for cleaning the edge of the upper surface against the panel Cleaning the first tape pressing portion, the second tape pressing portion for pressing the second tape for cleaning the edge of the lower surface against the panel, and cleaning the first tape and the second tape. A single cleaning liquid supply unit for dropping liquid, a moving device for relatively moving the first tape pressing unit and the second pressing unit in a direction along the surface of the panel, and the cleaning liquid supply unit, In the panel cleaning method using the control unit for controlling the moving device, the first tape pressing unit is positioned at the cleaning liquid supply position by the cleaning liquid supply unit. A step of dripping the cleaning liquid from the cleaning liquid supply section onto the first tape; and the first tape pressing section is retracted from the cleaning liquid supply position, and the second tape pressing section is moved to the cleaning liquid. And a step of dropping the cleaning liquid onto the second tape from the cleaning liquid supply section. The panel cleaning method comprises:

  In the present invention, when the first tape pressing portion and the second tape pressing portion are separated from each other by the moving device, and the first tape pressing portion is at the cleaning liquid supply position, The panel cleaning method is characterized in that the panel is sandwiched between the tape pressing portion and the second tape pressing portion.

  ADVANTAGE OF THE INVENTION According to this invention, the structure of the panel cleaning apparatus can be simplified and reduced in size.

FIG. 1 is a side view of a panel cleaning apparatus according to a first embodiment. FIGS. 2A and 2B are views showing a dripping action of a chemical solution. FIG. 3 is an enlarged view of the panel cleaning apparatus shown in FIG. FIG. 4 is a side view of a panel cleaning apparatus according to the second embodiment. FIG. 5 is a view showing the lower part of the medicine droplet.

BEST MODE FOR CARRYING OUT THE INVENTION

<First embodiment of the present invention>
Next, a first embodiment of the present invention will be described with reference to the drawings.

  The configuration of the panel cleaning apparatus will be described with reference to FIG. Here, the panel cleaning device cleans the surface (upper surface and lower surface) of the edge portion P1 of the panel P and the terminals formed on the edge portion P1 of the panel P. In FIG. 1, the panel cleaning device 10 includes a base 1, a positioning part 2 and a cleaning part 3 provided on the base 1. Among these, the positioning unit 2 includes a moving table 4 that moves on the base 1 and a substrate holding unit 5 provided on the moving table 4, and the substrate holding unit 5 sucks and holds the panel P. Here, examples of the panel P include a glass or resin substrate constituting a liquid crystal display device, an organic EL display device, or the like.

  The moving table 4 is capable of linear movement in three directions of X, Y, and Z and rotational movement in the θ direction around the Z axis on the base 1, and the panel P is held by the substrate holder 5. By driving the moving table 4 in the state, the edge P1 of the panel P is positioned with respect to the cleaning unit 3. The moving table moves the panel P relative to the cleaning unit 3 in the cleaning operation.

  Next, the cleaning unit 3 will be described. The cleaning unit 3 includes an upper surface cleaning unit 3a for cleaning the upper surface of the edge portion P1 of the panel P and a lower surface cleaning unit 3b for cleaning the lower surface.

  First, the cleaning unit 3a for cleaning the upper surface of the edge P1 of the panel P will be described.

  As shown in FIG. 1, the cleaning unit 3a includes a tape supply unit 11 that supplies a cleaning tape T1 for the upper surface, a pair of feed rollers 12a and 12b that supply the tape T1 supplied from the tape supply unit 11, and a pair A tape clamp 13 that holds the tape T1 from the feed rollers 12a and 12b, and a tape pressing portion 16 that presses the tape T1 from the tape clamp 13 against the panel P. The tape pressing portion 16 is pressed against the upper surface of the panel P. The tape T1 is collected by the tape collecting unit 30. Here, the width dimension of the tape T1 is set sufficiently small with respect to the side length of the panel P. Therefore, in this embodiment, in order to clean the terminals formed along the edge portion P1 of the panel P, the tape T1 is directed from one end portion side of the edge portion P1 of the panel P toward the other end portion side. The panel P is moved in the horizontal direction with respect to the tape T1 so as to move along the edge portion P1.

  Of these, the tape supply unit 11 does not have a drive mechanism and is composed of a supply reel having a brake mechanism on the shaft, and tension is applied to the tape T1 when the tape T1 is pulled out. For example, as a brake mechanism, a powder brake or a permanent torque type load generator configured to add to the support shaft by eddy current can be used. Further, the brake mechanism is not limited to the one provided on the shaft of the supply reel, and a configuration in which a rotation resistance is applied in contact with the outer periphery or the side surface of the supply reel can be applied.

  Further, a conveyance guide roller 14 is provided between the pair of feed rollers 12 a and 12 b and the tape clamp 13, and a conveyance guide roller 15 is provided between the tape clamp 13 and the tape pressing unit 16.

Further, a conveyance guide roller 17 is provided on the downstream side of the tape pressing unit 16, and the tape T <b> 1 that has passed through the conveyance guide roller 17 is collected by the tape collection unit 30.
The transport guide rollers 14, 15, and 17 may be appropriately disposed as necessary, and may not be provided as long as the tape T1 can be smoothly fed.

Further, the tape recovery unit 30 includes an ejector that sucks and discharges the tape T1.
Here, the ejector constituting the tape collecting unit 30 exerts a force to move the tape in a certain direction by the air flow or gas pressure difference, in this embodiment, in the tape discharging direction. multiply. As the ejector, a known air ejector or spray nozzle can be applied.

Next, the cleaning unit 3b that cleans the upper surface of the edge P1 of the panel P will be described.
The cleaning unit 3b includes a tape supply unit 21 that supplies a cleaning tape T2 for the lower surface, a pair of feed rollers 22a and 22b that feed the tape T2 supplied from the tape supply unit 21, and a pair of feed rollers 22a and 22b. The lower surface cleaning portion 3b having a tape clamp 23 that sandwiches the tape T2 from the tape clamp 23 and a tape pressing portion 26 that presses the tape T2 from the tape clamp 23 against the lower surface of the panel P, and the cleaning portion 3a is just inverted upside down. It has a configuration. For this reason, the configuration of each unit is the same as that of the cleaning unit 3a, and thus detailed description thereof is omitted. The tape collecting unit 30 is used as the cleaning unit 3a, and the tape T2 used for cleaning is collected by the tape collecting unit 30 common to the cleaning unit 3a.

Here, the moving device 19 that relatively moves the tape pressing portion 16 and the tape pressing portion 26 in the horizontal direction and the vertical direction will be described with reference to FIGS.
In this embodiment, the tape pressing portion 26 is fixedly arranged in the vertical direction and the horizontal direction, and the tape pressing portion 16 is arranged in the vertical direction and the horizontal direction with respect to the tape pressing portion 26 fixedly arranged. The moving device 19 is configured to move. More specifically, the tape pressing portion 16 has a horizontal position substantially coincident with the tape pressing portion 26 and moves forward from the forward position (see FIG. 2B) for pressing the tape T1 against the panel P. The front end of the tape pressing portion 16 is retreated in the horizontal direction from the front end of the tape pressing portion 26 so that the pressing of the T1 to the panel P is released and the chemical solution 40a is not dropped from the chemical liquid supply portion 40 to the tape T2, which will be described later. The retracted position (see FIG. 2A) can be taken.

In this embodiment, the tape pressing portion 16 is in a retracted position (“rising, retracting position”) at a position where the tape T1 is pressed against the panel P, and the tape T1 is applied to the panel P. As shown by an arrow in FIG. 2A between the forward position at the pressing position (“downward, forward position”), an example of linear movement in an oblique direction will be described. The movement between the horizontal movement and the vertical movement may be combined, for example, the movement may be lowered after horizontally moving from the backward position to the forward position, and then moved upward from the forward position and then moved horizontally to the backward position.

2A, a gap G having a size larger than the thickness of the edge of the panel P is formed between the tape pressing portion 16 and the tape pressing portion 26 at the ascending and retracting positions. .
Further, when the panel P is not sandwiched in the lowered and advanced positions shown in FIG. 2B, between the tape pressing portion 16 and the tape pressing portion 26, the thickness dimension of the edge portion of the panel P is determined. A small gap is formed. Here, the tape pressing portion 16 is elastically supported by an urging means such as a spring (not shown), whereby the edge of the panel P is pressed between the tape pressing portion 16 and the tape pressing portion 26. It is designed to be clamped by pressure.
As such a moving device 19, a cam mechanism can be adopted. Hereinafter, the cam mechanism 19 will be described.

  Further, as shown in FIG. 1, a chemical solution supply unit 40 that drops a chemical solution 40 a as a cleaning solution on the tape T <b> 1 on the tape pressing unit 16 side is provided above the tape pressing unit 16. The dropping position of the chemical solution 40a by the chemical solution supply unit 40 is set so as to be on the inclined upper side surface of the tape pressing unit 16 positioned at the lowered and advanced positions shown in FIG. Thereby, the chemical | medical solution 40a dripped from this chemical | medical solution supply part 40 is directly supplied to the cleaning surface (surface which wipes off panel P) side of the tape T1, as shown in FIG.2 (b). On the other hand, when the tape pressing unit 16 is in the raised and retracted position, the chemical liquid 40a dripped from the chemical liquid supplying unit 40 is a cleaning surface of the tape T2 on the pressing surface that is the surface facing the panel P in the tape pressing unit 26. Supplied directly to the side. That is, the chemical liquid 40a is dropped from the common discharge valve 43 (described later) on the two tapes T1 and T2.

  In addition, it is for cleaning the chemical | medical solution 40a and the panel P reliably, for example, ethanol and isopropyl alcohol (IPA) are included. Here, dripping the chemical solution includes not only dropping the chemical solution on the top but also dropping the chemical solution in a linear state.

  In this way, by supplying the chemical solution directly to the cleaning surface of the tape T1, for example, compared to the case where the chemical solution is supplied to the surface opposite to the cleaning surface of the tape T1, the liquid permeability as the material of the tape T1 Not only those but also liquid-impermeable ones can be used.

  Further, as the chemical solution supply unit 40, one having a chemical solution tank 41 and a pressure tank 42 connected to the chemical solution tank 41 through a connection line 45 including a check valve 47 as shown in FIG. 5 can be used.

  As shown in FIG. 5, in the operation of the chemical solution supply unit 40, the chemical solution 40a in the chemical solution tank 41 is provided by applying a negative pressure to the pressure tank 42 with the discharge valve 43 provided in the discharge line 46 closed. Through the connecting line 45 and check valve 47 into the pressure tank 42. Further, by applying a positive pressure to the pressure tank 42 and opening the discharge valve 43, the chemical liquid 40 a in the pressure tank 42 can be dropped from the discharge valve 43 onto the tape T <b> 1 via the discharge line 46.

  Of the above components, the pair of feed rollers 12a, 12b and 22a, 22b, the tape clamps 13, 23, the tape pressing unit 16, the tape recovery unit 30, the cam mechanism 19, and the chemical solution supply unit 40 are all control devices. The drive is controlled by 10A.

  Next, the operation of the present embodiment having such a configuration will be described with reference to FIGS. 1, 2, and 3.

  As shown in FIG. 1, the cleaning tape T <b> 1 drawn out from the tape supply unit 11 is sandwiched between a pair of feed rollers 12 a and 12 b, and is passed through a conveyance guide roller 14, a tape clamp 13, and a conveyance guide roller 15. It is applied to the pressing part 16 and then passed to the tape collecting part 30 via the conveyance guide roller 17.

  As shown in FIG. 3, in this state, the tape clamp 13 is open, and the tape collecting unit 30 sucks and discharges the tape T1 so as to feed the tape T1 downstream in the tape feeding direction. Therefore, the tape T1 is passed without slack in the above path. Since the tape T1 is sandwiched between the pair of stopped feed rollers 12a and 12b, the tape T1 is not conveyed in this state. This state is the initial state of the tape T1.

The cleaning tape T2 drawn out from the tape supply unit 21 is sandwiched between a pair of feed rollers 22a and 22b, applied to a tape pressing unit 26 through a tape clamp 23, and then to a tape through a conveyance guide roller 17. It is passed to the collection unit 30.
In this state, the tape clamp 23 is open. Further, the tape collecting unit 30 always performs suction and discharge so as to feed the tape T2 toward the downstream in the tape feeding direction. Therefore, the tape T2 is passed along with the tape T1 without slack in the above path. Since the tape T2 is sandwiched between the pair of stopped feed rollers 22a and 22b, the tape T2 is not conveyed in this state. This state is the initial state of the tape T2.

  From this state, first, the tape clamp 13 is closed, and the tape T1 is clamped by the tape clamp 13. Then, the tape T1 is fed by one pitch from the tape supply unit 11 by the pair of feed rollers 12a and 12b. At this time, the tape supply unit 11 rotates as the tape T1 is pulled out. However, since the tension is applied to the tape T1 by the brake mechanism built in the tape supply unit 11, it is prevented from being pulled out excessively.

  Here, the drawn tape T1 is fed to the tape clamp 13 side through the conveyance guide roller 14 (see FIG. 1). However, since the tape clamp 13 is closed, the tape T1 causes a slack A between the pair of feed rollers 12a and 12b and the tape clamp 13. In FIG. 1, this slack state is expressed by a two-dot chain line with the conveyance guide roller 14.

  The amount of the slack A is a length corresponding to one pitch of the tape T1. That is, the tape T1 is fed by one pitch by the pair of feed rollers 12a and 12b, and is slackened by one pitch between the tape clamp 13 and the pair of feed rollers 12a and 12b. That is, in this embodiment, the portion of the tape T1 on which the chemical liquid 40a is dropped on the upper side of the tape pressing portion 16 is on the lower surface of the tape pressing portion 16 when the panel P is cleaned. The length corresponding to the amount sent to the position facing the edge (terminal) of the panel P is set. This feed amount can be obtained by experiment or calculated based on a design value.

In parallel with the above-described pulling-out operation of the tape T1, the tape pressing portion 16 is positioned by the cam mechanism 19 from the ascending / retreating position to the descending / advancing position, which is the chemical liquid supply position of the tape T1. And the chemical | medical solution 40a is dripped by the amount set beforehand from the chemical | medical solution supply part 40 along the dripping line B (refer FIG. 1). The chemical solution 40a dropped from the chemical solution supply unit 40 is dropped onto the tape T1 before use (on the cleaning surface) on the tape pressing unit 16 (see FIG. 2B). The dropping of the chemical liquid 40a on the tape T1 is not necessarily performed in parallel with the drawing operation of the tape T1, and may be dropped after the drawing operation, or the tape T1 may be drawn after the dropping.
After the chemical solution 40a is dropped, the tape pressing unit 16 is moved back to the ascending / retreating position.

  Next, when the tape clamp 13 is opened, the suction and discharge force of the tape recovery unit 30 is applied to the tape T1 that has been loosened by one pitch between the pair of feed rollers 12a and 12b and the tape clamp 13, and the tape T1 is recovered by the tape T1. The tape T1 is not loosened by being sent to the portion 30 side. That is, in the tape pressing portion 16, the portion of the tape T1 where the chemical solution 40a is dropped is fed by the slack of the tape T1, that is, by one feed pitch. When the tape clamp 13 is opened, the tape T1 is held between the pair of feed rollers 12a and 12b, so that the tape T1 is prevented from being pulled out from the tape supply unit 11. The tape clamp 13 is closed when the time required for the tape T1 to be fed by the slack has elapsed. In addition, after the tape clamp 13 is closed, the pair of feed rollers 12a and 12b are operated to feed the tape T1 from the tape supply unit 11 by one pitch. In this state, it waits for the panel P to be cleaned.

  Further, after the tape pressing unit 16 is positioned at the rising and retracting position, the chemical solution 40a is dropped from the chemical solution supply unit 40. In this case, since the tape pressing part 16 is in the retracted position, the chemical liquid 40a dropped from the chemical liquid supply part 40 is dropped onto the tape T2 (on the cleaning surface) on the tape pressing part 26 (FIG. 2A). FIG. 3 state).

  Next, the moving table 4 moves to the left in the Y direction in FIG. 3, and the end on one side of the side along the X direction of the panel P enters between the tape pressing portion 16 and the tape pressing portion 26. After the edge of the panel P enters between the tape pressing unit 16 and the tape pressing unit 26, the moving table 4 lowers the substrate holding unit 5 until the lower surface of the panel P contacts the upper surface of the tape pressing unit 26.

Thereafter, the tape pressing unit 16 is lowered by the cam mechanism 19 and moved to the advance position. As a result, the edge portion P1 of the panel P is sandwiched between the tape pressing portion 16 and the tape pressing portion 26.
In this state, the tape pressing unit 16 contacts the panel P with a predetermined pressing force. Further, the portion of the tape T1 where the chemical solution 40a is dropped is positioned at a position facing the upper surface of the edge portion P1 of the panel P to be cleaned.

  Then, the moving table 4 moves to move in the X direction of FIG. 1, that is, the tape pressing portion 16 and the tape pressing portion 26 from one end of the panel P to the other end. The edge portion P1 slides between the tape pressing portion 16 and the tape pressing portion 26. In this case, the upper surface of the panel P is cleaned (cleaned) by the upper surface cleaning tape T1 pressed by the tape pressing portion 16, and the lower surface cleaning tape T2 pressed by the tape pressing portion 26 is used for the panel P2. The lower surface is cleaned. At this time, since the tape pressing portion 16 is biased, the tape T1 and the tape T2 come into contact with the panel P with a predetermined pressing force.

  In this embodiment, the direction in which the tape T1 slides is defined as the X direction. However, the tape T1 may be slid along the edge of the panel P. The sliding direction is not limited to the X direction, and the Y direction. Alternatively, the X direction and the Y direction may be combined.

  Thus, while the upper surface of the panel P is cleaned by the cleaning tape T1, the tapes T1 and T2 are fixed by the tape clamps 13 and 23 at the upstream side of the tape pressing portions 16 and 26 as described above. In addition, on the downstream side of the tape pressing portions 16 and 26, the tension by the collecting portion 30 is applied. For this reason, the tapes T1 and T2 are prevented from being displaced from the tape pressing portions 16 and 26 even during cleaning by biasing contact with the panel P. In other words, the tension applied to the tapes T1 and T2 by the recovery unit 30 is set to a magnitude sufficient to hold the tapes T1 and T2 on the tape pressing units 16 and 26 during cleaning.

  When such cleaning of the panel P is completed, the chemical liquid 40a is dripped from the chemical liquid supply section 40 onto the tape T1 on the tape pressing section 16 positioned at the descending and advancing position. At this time, since the tape pressing part 16 is in the same position as the state shown in FIG. 2B, the chemical liquid 40a can be dropped onto the tape T1 applied to the tape pressing part 16 from the chemical liquid supply part 40. Here, the portion where the chemical liquid 40a is dropped onto the tape T1 is used when the next panel P is cleaned.

  After supply of the chemical solution 40a to the tape T1, the cleaning tape T1 for the upper surface is supplied from the tape supply unit 11. That is, the tape T1 is pulled out from the tape supply unit 11 by one pitch by the pair of feed rollers 12a and 12b.

  At this time, since the tape clamp 13 is closed, a slack A occurs between the pair of feed rollers 12a and 12b and the conveyance guide roller 14, as shown by a two-dot chain line in FIG.

  In parallel with the withdrawal of the tape T1, a cleaning tape T2 for lower surface is supplied from the tape supply unit 21. That is, the tape T2 is pulled out from the tape supply unit 21 by the pair of feed rollers 22a and 22b. At this time, the tape supply unit 21 rotates as the tape T2 is pulled out. However, the tape T2 is tensioned by the brake mechanism built in the tape supply unit 21, so that the tape T2 is pulled out excessively from the tape supply mechanism 21. Is prevented.

At this time, since the tape clamp 23 is closed, a slack A is generated between the pair of feed rollers 22a and 22b and the tape clamp 23 on the tape T2 drawn from the tape supply unit 21 as shown by a two-dot chain line in FIG. .

  The amount of slack A generated in the tape T1 and the tape T2 is a length corresponding to one pitch of each tape feed. That is, the tape T1 is between the tape clamp 13 and the pair of feed rollers 12a and 12b, and the tape T2 is between the tape clamp 23 and the pair of feed rollers 22a and 22b, as in the first embodiment. It will sag. Specifically, the length of one feed pitch of the tape T1 is the same as that of the first embodiment when the portion of the tape T1 where the chemical liquid 40a is dropped on the upper side of the tape pressing portion 16 is used when the panel P is cleaned. The amount sent to a position facing the edge (terminal) of the panel P on the lower surface of the tape pressing portion 16 is set. Further, the length of one feed pitch of the tape T2 is such that when the panel P is cleaned, the portion of the tape T2 that is in contact with the panel P is fed, and a new portion of the tape T2 is positioned on the upper surface of the tape pressing portion 26. It is set to a length corresponding to the feed amount.

  In the embodiment described above, the moving table 4 moves in the X direction to clean the panel P (cleaning), and the chemical solution 40a is dripped onto the tape T1 on the tape pressing portion 16 located at the forward movement position. After the dropping of the chemical solution 40a, the tape T1 is slackened by driving the pair of feed rollers 12a, 12b, and the tape T2 is slackened by driving the pair of feed rollers 22a, 22b. The steps may be performed in parallel.

  When such cleaning of the panel P is completed, the tape pressing portion 16 is raised and retracted by the cam mechanism 19, the substrate holding portion 5 is raised by the moving table 4, and moved to the right in the Y direction in FIG. Panel P leaves | separates from the tape press parts 16 and 26, and is carried out.

  At the same time, the tape clamp 13 and the tape clamp 23 are opened. As a result, the tape T1 on the downstream side of the pair of feed rollers 12a and 12b is fed by the tape collecting unit 30 by the above-described slack A (one pitch).

  Similarly, the tape collection unit 30 feeds the tape T2 on the downstream side of the pair of feed rollers 22a and 22b by the above-described slack A (1 pitch).

  In the embodiment described above, the tape clamp 13 and the tape clamp 23 are opened after the panel is carried out, but these steps may be performed simultaneously.

Next, the tape clamp 13 and the tape clamp 23 are closed again, and the above-described operation is repeated.
When the tape pressing portion 16 is moved upward and backward by the cam mechanism 19, the tension of the tape T1 on the downstream side of the tape clamp 13 is momentarily weakened by the amount corresponding to the shortening of the transport path length of the tape T1. However, since the tension is maintained by the tape collecting unit 30 made of an ejector, the slack is eliminated immediately.

  As described above, according to the present embodiment, the chemical solution 40a supplied to the cleaning tape T1 for the upper surface of the edge portion P1 of the panel P and the chemical solution 40a supplied to the cleaning tape T2 for the lower surface are single. It was made to supply with the chemical | medical solution supply part 40. FIG. Therefore, the number of the chemical solution supply units 40 that are desired to be supplied with the chemical solution 40a near the cleaning position so as to prevent the supplied chemical solution 40a from evaporating or being contaminated by contact with other members as much as possible. Therefore, the structure of the cleaning device can be simplified and reduced in size.

  Further, the discharge valve 43 of the chemical solution 40a by the chemical solution supply unit 40 is fixedly disposed at a position above the tape pressing units 16 and 26, and the cleaning tape pressing unit 26 for the lower surface of the edge P1 of the panel P is supplied. The tape T1 and the tape T2 are fixedly arranged at the positions and moved between the lowering as the supply position, the ascending position as the feeding position, and the ascending and retracting positions as the retracting position. The chemical solution 40a is supplied along the same dropping line B. Accordingly, the discharge valve 43 of the chemical solution supply unit 40 only needs to open the discharge valve 43 to drop the chemical solution 40a. The upper surface cleaning tape T1 and the lower surface cleaning tape are used as the chemical solution 40a. It is not necessary to provide a special driving device for adhering to both sides of T2, and this also makes it possible to simplify the structure.

  Further, the tape T1 is fed by the pair of feed rollers 12a and 12b to form the slack A on the tape T1, and the tape T2 is fed by the pair of feed rollers 22a and 22b to form the slack A on the tape T2. When the tape T1 on the pressing unit 16 and / or the tape T2 on the tape pressing unit 26 needs to be conveyed, the tape collecting unit 30 sends the tapes T1 and T2 by the amount of slack A by simply opening the tape clamps 13 and 23. Can do. Therefore, the tapes T1 and T2 can be supplied only by operating the feed rollers 12a and 12b and the feed rollers 22a and 22b without using a rotation driving mechanism for the supply reels of the tape supply units 11 and 21. In general, since the rotation driving mechanism of the supply reel has a large structure, the entire apparatus can be reduced in size by not using a large driving mechanism for the tape supply units 11 and 21.

  In addition, since a single ejector can be used to feed the cleaning tapes T1 and T2 and to apply tension to the tapes, it is necessary to provide a feeding mechanism and a tension mechanism for winding the tapes T1 and T2. In addition, it is possible to eliminate complicated control for controlling the tension force by controlling the torque applied to the supply and take-up reels. Furthermore, since the drive source can be reduced, energy saving is achieved.

In this way, since simple configuration and control can be performed, it is possible to improve maintainability, reduce failure rate, reduce apparatus cost, and improve cleaning efficiency (productivity).
Furthermore, since the chemical liquid can be dropped from the chemical liquid supply unit 40 onto the cleaning surface of the tape T1 and the cleaning surface of the tape T2, both the liquid permeable material and the liquid impermeable material are used as the materials of the tape T1 and T2. Can be used.

  Further, since the tape collecting unit 30 made of an ejector is always turned on, the tape T1 is not loosened by the tension that is always applied even if the tape pressing unit 16 moves up and down. Further, since the tape T1 is not fixed by the tape collecting unit 30, the movement of the tape T1 is not hindered or cut off.

  In the present embodiment, the conveyance guide rollers 14 and 15 are not included in the constituent members for the lower surface, but may be appropriately installed.

  Note that the tape pressing portion 26 does not necessarily have to be fixed, and may be movable up and down.

<Second Embodiment>
The second embodiment will be described below with reference to FIG.
In the second embodiment shown in FIG. 4, an additional tape clamp 31 is provided between the tape pressing portions 16 and 26 and the tape collecting portion 30, and other configurations are the same as those shown in FIGS. This is the same as the first embodiment.

In the present embodiment, as shown in FIG. 4, the first embodiment is the same as the first embodiment in that the upper surface cleaning unit 3 a and the lower surface cleaning unit 3 b are provided with the tape collecting unit 30. , 26 and the tape collecting unit 30 is different in that an additional tape clamp 31 is provided.
Since the description of the panel cleaning operation is the same as that of the first embodiment, a description of the additional tape clamp 31 will be given below.

  As described above, the additional tape clamp 31 is provided between the tape pressing portions 16 and 26 and the tape collecting portion 30, and the tape T1 that has passed through the tape pressing portion 16 and the tape T2 that has passed through the tape pressing portion 26 have been provided. Is recovered by the tape recovery unit 30 via the additional tape clamp 31.

  Further, in the present embodiment, the tape collecting unit 30 includes an ejector, but it is possible to control the ejector to operate only when necessary. The additional tape clamp 31 is also driven and controlled by the control device 10A.

  In the present embodiment, the edge of the panel P is positioned between the tape pressing part 16 and the tape pressing part 26, and the edge of the panel P is sandwiched between the tape pressing part 16 and the tape pressing part 26. At this stage, the additional tape clamp 31 clamps the tapes T1 and T2. In other words, the chemical liquid 40a is dropped on the cleaning surface of the tape T2 positioned on the upper surface of the tape pressing portion 26, and the portion where the chemical liquid 40a is dropped on the tape T1 is positioned at the lower surface of the tape pressing portion 16. The tape clamp 31 clamps the tapes T1 and T2.

Then, the panel P is cleaned while maintaining this state.
In this way, when the panel P is cleaned, the tape T1 and T2 are not removed from the tape collection unit 30 even if resistance is applied between the tapes T1 and T2 and the panel P. Since it is prevented from being pulled back from the side, it is possible to reliably prevent the tape pressing portions 16 and 26 from being displaced.

  In the present embodiment, the tapes T1 and T2 are clamped by the additional tape clamp 31 and the operation of the ejector of the tape recovery unit 30 is stopped at a timing when it is not necessary to transport both the tape T1 and the tape T2. Is possible. Here, as the timing at which the tape T1 and the tape T2 do not need to be conveyed together, the following timing can be given.

  From the initial setting to the start of the operation of supplying the chemical liquid 40a to the tapes T1 and T2 for the cleaning of the first panel P.

  While the panel P is being cleaned as described above. In other words, after the chemical solution 40a is dropped on the cleaning surface of the tape T2 positioned on the upper surface of the tape pressing portion 26, and the portion of the tape T1 where the chemical solution 40a is dropped is positioned on the lower surface of the tape pressing portion 16, Until the cleaning of the panel P is completed and the tape pressing portion 16 starts to move down, rise from the forward position, and move to the backward position.

  Thus, by operating the ejector only when necessary, it is possible to reduce the operating noise and the power consumption of the operating energy source such as high-pressure air.

  As described above, according to the present embodiment, when the slack A is formed on the tape T1 or the tape T2, and the tape T1 on the tape pressing portion 16 and / or the tape T2 on the tape pressing portion 26 needs to be conveyed, By simply opening the tape clamps 13 and 23 and the additional tape clamp 31, the tapes T <b> 1 and T <b> 2 can be fed by the tape recovery unit 30 by the amount of slack A. Therefore, the tapes T1 and T2 can be supplied only by operating the feed rollers 12a and 12b and the feed rollers 22a and 22b without using a drive mechanism for the tape supply units 11 and 21 including the supply reel. Since the supply reel drive mechanism generally has a large structure, the entire apparatus can be reduced in size by not using a large drive mechanism for the tape supply units 11 and 21.

  In addition, since a single ejector can simultaneously feed the cleaning tapes T1 and T2 and the tension applied to the tape, there is no need to provide a separate tension mechanism, and the torque applied to the supply and take-up reels is controlled. The complicated control that controls the tension force can be eliminated. Furthermore, since the drive source can be reduced, energy saving is achieved.

  Since the ejector operates only when necessary, the operating noise is reduced and the consumption of operating energy sources such as high-pressure air is reduced.

  Even when the ejector is not operated, the tape is held by the additional tape clamp 31, so that the tension force does not fluctuate. Therefore, stable cleaning can be performed.

  In this way, since simple configuration and control can be performed, it is possible to improve maintainability, reduce failure rate, reduce apparatus cost, and improve cleaning efficiency (productivity).

  In addition, the tape collection | recovery part 30 may operate | move always. By doing so, the operation control can be eliminated, and the control and mechanism can be simplified. In the present embodiment, the tape collecting unit 30 is operated only when necessary, and the tape T1 and the tape T2 are sucked. However, the first embodiment and the second embodiment are described. In this case, the tape collecting unit 30 may be operated only when necessary.

<Other variations>
Next, another modification of the present invention will be described.
In any of the above embodiments, the tapes T1 and T2 can be collected in a collection box and reused or discarded without having a take-up reel for collecting the cleaning tapes T1 and T2. T1 and T2 may be wound on a take-up reel.

  Moreover, the ejector of the tape collection | recovery part 30 may consist of an air blowing nozzle, for example.

  The collection unit 30 may be composed of a nip roller instead of the ejector. However, in this case, it is difficult to apply tension at all times, but it can be used particularly effectively with an additional tape clamp as in the third embodiment.

  Further, as the tape collecting unit 30, a step roller or an elastic tension roller may be used in place of the ejector. In this case, a constant tension force is difficult to be applied, but a constant tension can be applied. Furthermore, since the tension roller can block unstable tension, it can be used effectively in the second embodiment.

  Furthermore, although the example which collect | recovers both tapes T1 and T2 was shown by the tape collection | recovery part 30 which consists of a single ejector, you may provide a tape collection | recovery part for each tape T1 and T2.

  Furthermore, in the above embodiment, the example in which the substrate holding unit 5 moves during cleaning has been described, but the cleaning unit 3 may move or both may move. In this case, the configuration is very complicated, but the cleaning time is halved and the productivity is increased.

  Furthermore, in the said embodiment, although the tape press part 16 was moved by the cam mechanism 19, while the tape press part 16 was made to contact the panel P with predetermined | prescribed pressing force, the part by which the chemical | medical solution 40a of the tape T1 was dripped is a panel. It may be moved by another known mechanism such as a cylinder so as to be positioned at a position facing the upper surface to be cleaned of the edge portion P1 of P.

  In the first embodiment and the second embodiment described above, the tape pressing portion 26 that presses the lower surface tape T2 is fixed, and the tape pressing portion 16 that presses the upper surface tape T1 is replaced with the tape pressing portion. The tape pressing portion 16 that presses the upper surface tape T1 is fixed, and the tape pressing portion 26 that presses the lower surface tape T2 is fixed to the tape pressing portion 16. Thus, it may be movable in the horizontal and vertical directions. In this case, the chemical solution supply unit 40 may be moved horizontally directly above the tape pressing unit 26 in synchronization with the movement of the tape pressing unit 26. Even in such a form, the chemical solution 40a can be dropped from the chemical solution supply unit 40 to the tape T2 without being hindered by the tape pressing unit 16.

  Further, one of the tape pressing unit 16 and the tape pressing unit 26 may be moved in the horizontal direction and the other may be moved in the vertical direction. In short, it is only necessary that the tape pressing portion 16 and the tape pressing portion 26 can move relatively in the horizontal direction and the vertical direction.

DESCRIPTION OF SYMBOLS 1 Base 2 Positioning part 3 Cleaning part 4 Moving table 5 Substrate holding part 10 Panel cleaning device 10A Control part 11 Tape supply part 12a, 12b Feed roller 13 Tape clamp 16 Tape pressing part 19 Cam mechanism 21 Tape supply part 22a, 22b Feed roller 23 Tape clamp 26 Tape pressing unit 30 Tape recovery unit 31 Additional tape clamp 40 Chemical solution supply unit

Claims (6)

In the panel cleaning apparatus for cleaning the edge of the upper surface and the edge of the lower surface of the panel with a pair of cleaning tapes,
A first tape pressing section that presses the panel with a first tape that cleans the edge of the upper surface;
A second tape pressing portion that presses the panel with a second tape that cleans the edge of the lower surface;
A single cleaning liquid supply section for dropping a cleaning liquid on the first tape and the second tape;
A moving device for relatively moving the first tape pressing portion and the second pressing portion in a direction along the surface of the panel;
A controller for controlling the cleaning liquid supply unit and the moving device;
The control unit positions the first tape pressing unit at the cleaning liquid supply position by the cleaning liquid supply unit, drops the cleaning liquid from the cleaning liquid supply unit to the first tape, and The first tape pressing portion is retracted from the cleaning liquid supply position, the second tape pressing portion is positioned at the cleaning liquid supply position, and the cleaning liquid is applied to the second tape from the cleaning liquid supply portion. A panel cleaning apparatus, wherein the cleaning liquid supply unit and the moving device are controlled to drop. The second tape pressing portion is fixedly disposed at the cleaning liquid supply position in a direction along the surface of the panel, and the first tape pressing portion is provided by the moving device with the cleaning liquid supply position. 2. The panel cleaning device according to claim 1, wherein the panel cleaning device is moved to a position retracted from the supply position. A first tape supply unit for supplying the first tape;
A second tape supply unit for supplying the second tape;
A first pair of feed rollers for feeding the first tape from the first tape supply unit;
A second pair of feed rollers for feeding the second tape from the second tape supply unit;
The first tape from the first tape pressing section, and a tape collection section for collecting the second tape from the second tape pressing section, further comprising: Or the panel cleaning apparatus of 2.   The first tape pressing portion and the second tape pressing portion are separated from each other by the moving device, and the first tape pressing portion is located when the first tape pressing portion is at the cleaning liquid supply position. The panel cleaning apparatus according to claim 1, wherein the panel is sandwiched by the second tape pressing portion. A panel cleaning method for cleaning an edge of an upper surface and an edge of a lower surface of a panel with a pair of cleaning tapes, wherein the first tape for cleaning the edge of the upper surface is pressed against the panel. A tape pressing portion, a second tape pressing portion that presses the second tape that cleans the edge of the lower surface against the panel, and a cleaning liquid is dropped on the first tape and the second tape. A moving device that relatively moves a single cleaning liquid supply unit, the first tape pressing unit, and the second pressing unit in a direction along the surface of the panel; and the cleaning liquid supply unit and the moving device. In a method of cleaning a panel using a control unit to control,
Positioning the first tape pressing part at the cleaning liquid supply position by the cleaning liquid supply part, and dropping the cleaning liquid from the cleaning liquid supply part to the first tape;
The first tape pressing section is retracted from the cleaning liquid supply position, the second tape pressing section is positioned at the cleaning liquid supply position, and the cleaning liquid supply section cleans the second tape. And a step of dripping the liquid. A panel cleaning method comprising:   The first tape pressing portion and the second tape pressing portion are separated from each other by the moving device, and the first tape pressing portion is located when the first tape pressing portion is at the cleaning liquid supply position. The panel cleaning method according to claim 5, wherein the panel is clamped by the second tape pressing portion.

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