JP2016211735A - Sealing component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sealing component that prevents deformation of the sealing component and thus prevents generation of a gap at the site of the sealing component, thereby capable of enhancing reliability of a substrate treatment process.SOLUTION: A sealing component 100 comprises: a body part 110; a cooling part 111 comprising a flow channel through which a refrigerant moves inside the body part; and a first tube 120 and a second tube 130 in communication with the cooling part from at least one side of the body part. The refrigerant is supplied to the cooling part through the first tube, and discharged from the cooling part through the second tube.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a sealing member, and more particularly to a sealing member in which a coolant is circulated inside the sealing member to improve the temperature used.

  The substrate processing apparatus is used when manufacturing a flat panel display, and is roughly classified into a vapor deposition apparatus and an annealing apparatus.

  The vapor deposition apparatus is an apparatus for forming a transparent conductive layer, an insulating layer, a metal layer, or a silicon layer, which is a core component of a flat panel display. There are a chemical vapor deposition apparatus and a physical vapor deposition apparatus such as sputtering.

  The annealing apparatus is an apparatus for improving the characteristics of the deposited film after depositing the film on the substrate, and performing heat treatment to crystallize or change the phase of the deposited film.

  FIG. 1 shows a conventional substrate processing apparatus. FIG. 1A is a schematic sectional side view of a conventional substrate processing apparatus, and FIG. 1B is a perspective view of the sealing member 10 shown in FIG.

  As an example, a conventional substrate processing apparatus includes a main body 1, and a chamber 3, which is a space in which a substrate is loaded and processed, is formed inside the main body 1. On the front surface of the main body 1, an entrance / exit 5 that communicates with the chamber 3 and through which the substrate enters and exits is formed, and a door 7 for opening and closing the entrance / exit 5 is provided. In the substrate processing apparatus, it is essential to install a sealing member 10 that seals between the inlet / outlet 5 and the chamber 3 in order to form and maintain the atmosphere inside the chamber 3. Thereby, a sealing member 10 that is crimped by the door 7 and seals the chamber 3 may be provided on the front surface portion of the main body 1 outside the entrance / exit 5. Referring to FIG. 1B, the sealing member 10 may be formed in a substantially circular cross section.

  The sealing member 10 applied to the conventional substrate processing apparatus is Viton (registered trademark) (FPM) or the like, and is almost made of rubber. Therefore, it is generally used in a relatively low temperature environment of 15 to 200 ° C. In a high temperature environment, it is made of a special material such as KALREZ (registered trademark) (FFPM) or PERFLUORO (FFPM) which is not rubbery. The configured sealing member 10 must be used. However, this is expensive, and the sealing member 10 made of a special material has a problem that the use environment is limited to about 300 ° C. In a higher temperature environment, there is a problem that a gap is generated due to deformation of the sealing member 10 due to warping, rotting or tearing. As a result, foreign matter flows into the chamber 3 and the heat of the chamber 3 leaks to the outside, which reduces the reliability of the substrate processing process.

  Prior art related to the sealing member is disclosed in Patent Document 1 and the like.

  Prior art related to the substrate processing apparatus is disclosed in Patent Document 2 and the like.

Korean Published Patent Publication No. 10-2012-0044227 Korean Published Patent Publication No. 10-2010-0008722

  The present invention has been devised to solve the above-described problems of the prior art, and provides a sealing member in which the operating temperature is improved by circulating a refrigerant inside the sealing member. For the purpose.

  It is another object of the present invention to provide a sealing member that can improve the reliability of the substrate processing step by preventing deformation of the sealing member and preventing the generation of a gap at the site of the sealing member.

  In order to achieve the above object, a sealing member according to an embodiment of the present invention includes a body part and a cooling part including a flow path in which a refrigerant moves in the body part.

  A first tube and a second tube communicated with the cooling unit from at least one side of the body unit may be included.

  The refrigerant may be supplied to the cooling unit through the first pipe, and the refrigerant in the cooling unit may be discharged through the second pipe.

  A cross-sectional shape of the body portion of the sealing member may be a circle or a rectangle.

  According to the present invention configured as described above, the operating temperature can be improved by circulating the refrigerant inside the sealing member.

  Further, the present invention can improve the reliability of the substrate processing step by preventing the sealing member from being deformed and preventing the generation of a gap at the site of the sealing member.

FIG. 1A is a schematic side sectional view of a conventional substrate processing apparatus, and FIG. 1B is a perspective view of the sealing member shown in FIG. It is the perspective view and enlarged plan view of a sealing member by one embodiment of the present invention. FIG. 6 is a perspective view and an enlarged plan sectional view of a sealing member according to another embodiment of the present invention.

  The following detailed description of the invention refers to the accompanying drawings that illustrate, by way of illustration, specific embodiments in which the invention may be practiced. These embodiments are described in detail to enable those skilled in the art to fully practice the invention. It should be understood that the various embodiments of the present invention are different from each other but need not be mutually exclusive. For example, the specific shapes, structures, and characteristics described herein may be embodied in other embodiments without departing from the spirit and scope of the invention in connection with one embodiment. It should also be understood that the location or arrangement of individual components within each disclosed embodiment may be altered without departing from the spirit and scope of the present invention. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the present invention is, together with the full scope of equivalents of what the claims claim if appropriate Limited only by the following claims. Like reference numerals in the drawings denote the same or similar functions throughout various aspects, and lengths, areas, thicknesses, etc. and forms thereof may be exaggerated for convenience.

  In explaining the present embodiment, the processing of the substrate includes the steps of heating and cooling the substrate, all steps for depositing a predetermined film on the substrate, annealing and crystallizing the predetermined film deposited on the substrate. Or it must be understood as a concept including any heat treatment step for phase change.

  The sealing member of the present invention is not necessarily limited to the one used in the substrate processing apparatus, and it will be clarified that any of them can be applied to an apparatus that requires sealing.

  Hereinafter, a substrate processing apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

  2 is a perspective view [FIG. 2A] and an enlarged plan sectional view [FIG. 2B] of a sealing member 100 according to an embodiment of the present invention.

  Referring to FIG. 2, the sealing member 100 according to the first embodiment may include a body part 110 and a cooling part 111.

  The body part 110 constitutes the body of the sealing member 100. The body part 110 is an outer skin of the sealing member 100 and can be substantially sealed by being interposed between an entrance / exit of a substrate processing apparatus or the like and a door for opening / closing the entrance / exit. The body part 110 is a rubber which is a material of the conventional sealing member 10 and includes Viton (registered trademark) (FPM) which can be used in an environment of 15 to 200 ° C. As a special material, it is used in an environment of 260 ° C. or less. TEFLON (registered trademark) or the like may be included.

  The cooling unit 111 can provide a flow path through which the refrigerant moves inside the body unit 110. A liquid or gaseous refrigerant flows through the cooling unit 111, and the cold air of the refrigerant can be transmitted to the body unit 110. Accordingly, the possibility of deformation of the body portion 110 of the sealing member 100 is greatly reduced even in a high temperature environment.

  FIG. 2B shows that the cooling part 111 is formed in a hollow form inside the body part 110, but the cooling part 111 is formed in a form in which a tube is inserted inside the body part 110. You can also However, in this specification, it demonstrates supposing the cooling part 111 of a hollow form. The cross-sectional shapes of the body part 110 and the cooling part 111 may be circular.

  The cooling part 111 can be formed on the entire body part 110, but a part of the cooling part 111 is provided in order to facilitate the flow with an external refrigerant supply means (not shown) and a refrigerant discharge means (not shown). A shielding film 115 can be formed. On one side of the shielding film 115, the refrigerant is drawn, and the refrigerant flows in the direction (P1) opposite to the shielding film 115, and on the other side, the refrigerant flows from the direction (P2) opposite to the shielding film 115. Can be discharged to the outside.

  The shielding film 115 is preferably made of the same material as the body part 110 and formed integrally with the body part 110. That is, it is desirable to form the cooling part 111 immediately in a hollow form so that the body part 110 includes the shielding film 115 without separately inserting the shielding film 115 into the body part 110. It goes without saying that the cooling part 111 can be formed on the entire body part 110 without forming the shielding film 115.

  In order to supply and discharge the coolant to the cooling unit 111, it may include a first pipe 120 and a second pipe 130 communicated with the cooling unit 111 from at least one side of the body part 110.

  One end of the first tube 120 is connected to the cooling unit 111 through the side hole 113, and the other end is connected to an external refrigerant supply unit (not shown) to be supplied with the refrigerant.

  One end of the second pipe 130 communicates with the cooling unit 111 through the side hole 113, and the other end is connected to an external refrigerant discharge means (not shown) to discharge the refrigerant circulating through the cooling unit 111 to the outside. can do.

  As shown in FIG. 2, the first pipe 120 and the second pipe 130 are formed on the same side of the cooling unit 111, and after the refrigerant supplied from the first pipe 120 circulates through the entire body part 110, the second pipe 120 and the second pipe 130 are formed. It is configured to be discharged to the pipe 130, and is formed on the opposite side of the cooling part 111. The refrigerant supplied from the first pipe 120 is divided into two left and right lines of the cooling part 111, and circulates through the body part 110. Then, it can be configured to be discharged to the second pipe 130.

  A method of manufacturing the sealing member 100 shown in FIG. 2 is as follows. First, a material such as rubber that is hollow inside or contains a tube inside is prepared. Subsequently, after joining both sides into a circular shape using a bonding agent and connecting them, the first tube 120 and the second tube 130 are inserted on the side surfaces. Then, the space between the first and second pipes 120 and 130 and the body part 110 can be sealed to complete the manufacturing of the sealing member 100.

  FIG. 3 is a perspective view [FIG. 3A] and an enlarged plan view [FIG. 3B] of a sealing member 100 'according to another embodiment of the present invention. FIG. 3 omits the description of the configuration shown in FIG. 2, and only the differences will be described.

  In FIG. 3, the sealing member 100 ′ has a quadrangular cross section of the body part 110 ′ and the cooling part 111 ′. A method of manufacturing the sealing member 100 ′ is as follows. First, a body part 110 'including a cooling part 111' is formed of a plastic material. Subsequently, the entire shape is formed into a quadrangle using heat bonding, and the first tube 120 ′ and the second tube 130 ′ are inserted on the side surfaces. Then, the space between the first and second pipes 120 ′ and 130 ′ and the body part 110 ′ can be sealed to complete the manufacturing of the sealing member 100 ′.

  When the sealing member 100 of FIG. 2 is made of rubber, it is not easy to form a quadrangle with a uniform cross-sectional shape. On the other hand, the sealing member 100 ′ of FIG. By forming, there exists an advantage that flat sealing member 100 'can be used.

  As described above, the sealing member 100 of the present invention can transmit the cool air of the refrigerant to the body part 110 by forming the cooling part 111 in which the refrigerant can move inside the body part 110. There is an effect that the material of the body part 110 can be used even at a temperature higher than the applicable intrinsic temperature. Further, the temperature of the sealing member 100 can be properly managed, the durability can be improved, the deformation of the sealing member 100 can be prevented, and the occurrence of a gap in the portion of the sealing member 100 can be prevented. There is an effect that reliability can be improved.

  As described above, the present invention has been illustrated and described with reference to preferred embodiments. However, the present invention is not limited to the above-described embodiments, and various modifications and changes can be made by those skilled in the art without departing from the spirit of the present invention. Is possible. Such variations and modifications should be recognized as falling within the scope of the present invention and claims.

  The present invention is applicable to fields related to sealing members.

10, 100: sealing member,
110: Body part
113: Side hole,
115: shielding film,
120: first pipe,
130: Second tube.

Claims (4)

The body part,
A cooling part including a flow path through which the refrigerant moves inside the body part;
A sealing member comprising:   The sealing member according to claim 1, further comprising a first pipe and a second pipe communicating with the cooling part from at least one side of the body part. The refrigerant is supplied to the cooling unit through the first pipe,
The sealing member according to claim 2, wherein the refrigerant in the cooling unit is discharged through the second pipe.   The sealing member according to claim 1, wherein a cross-sectional shape of the body portion of the sealing member is a circle or a rectangle.