JP2016211052A - 硬質皮膜および硬質皮膜被覆部材 - Google Patents
硬質皮膜および硬質皮膜被覆部材 Download PDFInfo
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Abstract
Description
TiaCrbAlcZrdLe(BxCyNz)・・・(1)
上記式(1)において、
LはSiとYのうちの1種以上の元素であり、
a、b、c、d、e、x、y、zは、夫々Ti、Cr、Al、Zr、L、B、C、Nの原子比であり、各原子比は下記範囲を満たす。
0≦a≦0.30、0.10≦b≦0.30、0.40≦c≦0.70、0.03≦d≦0.20、0≦e≦0.10、0≦x≦0.15、0≦y≦0.10、0.80≦z≦1、a+b+c+d+e=1、x+y+z=1
皮膜Q:TiaCrbAlcLe(BxCyNz)・・・(2)
上記式(2)において、
LはSiとYのうちの1種以上の元素であり、
a、b、c、e、x、y、zは、夫々Ti、Cr、Al、L、B、C、Nの原子比であり、各原子比は下記範囲を満たす。
0≦a≦0.30、0.10≦b≦0.30、0.40≦c≦0.70、0≦e≦0.10、0≦x≦0.15、0≦y≦0.10、0.80≦z≦1、a+b+c+e=1、x+y+z=1
皮膜R:Zr(BsCtNu)・・・(3)
上記式(3)において、
s、t、uは夫々B、C、Nの原子比であり、各原子比は下記範囲を満たす。
0≦s≦0.15、0≦t≦0.10、0.80≦u≦1、s+t+u=1
上記式(1)において、
LはSiとYのうちの1種以上の元素であり、
a、b、c、d、e、x、y、zは、夫々Ti、Cr、Al、Zr、L、B、C、Nの原子比であり、各原子比は下記範囲を満たす。
0≦a≦0.30、0.10≦b≦0.30、0.40≦c≦0.70、0.03≦d≦0.20、0≦e≦0.10、0≦x≦0.15、0≦y≦0.10、0.80≦z≦1、a+b+c+d+e=1、x+y+z=1
皮膜Q:TiaCrbAlcLe(BxCyNz)・・・(2)
上記式(2)において、
LはSiとYのうちの1種以上の元素であり、
a、b、c、e、x、y、zは、夫々Ti、Cr、Al、L、B、C、Nの原子比であり、各原子比は下記範囲を満たす。
0≦a≦0.30、0.10≦b≦0.30、0.40≦c≦0.70、0≦e≦0.10、0≦x≦0.15、0≦y≦0.10、0.80≦z≦1、a+b+c+e=1、x+y+z=1
皮膜R:Zr(BsCtNu)・・・(3)
上記式(3)において、
s、t、uは夫々B、C、Nの原子比であり、各原子比は下記範囲を満たす。
0≦s≦0.15、0≦t≦0.10、0.80≦u≦1、s+t+u=1
表1に示す組成の皮膜を、アーク蒸発源とスパッタリング蒸発源をそれぞれ複数個有し、AIP法とスパッタリング法のいずれも実施可能なPVD複合装置を用いて形成した。尚、本発明の硬質皮膜は、上述の通りAIP法とスパッタリング法のいずれの方法でも成膜可能であるが、以下ではAIP法で形成した。基材として、硬さ調査用に13mm角×4mm厚の鏡面超硬合金試験片を用意し、また切削試験用にインサート(CNMG432、超硬合金)を用意した。そして、これらの基材上に同時に成膜した。詳細には、これらの基材を上記装置に導入後、5×10-3Paまで排気し、その後、基材を500℃まで加熱してから、Arイオンによるエッチングを5分間実施した。その後、窒素のみまたは窒素とメタンガスの混合ガスを4Paとなるまで導入し、アーク電流:150A、基材に印加するバイアス電圧:−50Vの条件で、約3μmの上記皮膜を形成して、硬さ調査用サンプルと切削試験用サンプルを得た。
前記硬さ調査用サンプルを用いて、荷重1Nの条件でビッカース硬さを測定した。
チタン系金属を切削する場合の摩耗進行は、凝着摩耗が主体であるといわれている。よって本実施例では、耐凝着性を下記に示す通り切削寿命で評価した。即ち、前記切削試験用サンプルを用いて、下記条件で切削試験を行い、下記に示す通り逃げ面摩耗の最大部分が300μmに達する切削長で耐凝着性を評価した。以下では、前記逃げ面摩耗の最大部分が300μmに達する切削長を単に「切削寿命」という。
切削試験条件
工具:CNMG432、材質K313
被削材:Ti−6Al−4V
速度:45m/分
送り:0.15mm/分
DOC(Depth Of Cut):2mm
潤滑:湿式
評価:逃げ面摩耗の最大部分が300μmに達する切削長
表2に示す通り皮膜QとしてTiCrAlN膜、皮膜RとしてZrN膜を、交互に積層した積層型硬質皮膜を、実施例1と同じ装置の特にAIP蒸発源を用い、AIP法で形成した。詳細は次の通りである。実施例1と同じ基材を用意し、表2に示す組成・膜厚の皮膜Qと、表2に示す組成・膜厚の皮膜Rとを交互に積層させ、全体厚みが約3μmの積層皮膜を形成する以外は、実施例1と同様にして成膜した。表2の皮膜Qと皮膜Rの各膜厚は、積層周期を変化させることにより変えた。前記皮膜Qの形成には、N以外の成分である(Ti,Cr,Al)ターゲット、上記皮膜Rの形成には、Zrターゲットを用いた。
Claims (5)
- 基材上に形成される硬質皮膜であって、下記式(1)で表される組成を満たすことを特徴とする硬質皮膜。
TiaCrbAlcZrdLe(BxCyNz)・・・(1)
上記式(1)において、
LはSiとYのうちの1種以上の元素であり、
a、b、c、d、e、x、y、zは、夫々Ti、Cr、Al、Zr、L、B、C、Nの原子比であり、各原子比は下記範囲を満たす。
0≦a≦0.30、
0.10≦b≦0.30、
0.40≦c≦0.70、
0.03≦d≦0.20、
0≦e≦0.10、
0≦x≦0.15、
0≦y≦0.10、
0.80≦z≦1、
a+b+c+d+e=1、
x+y+z=1 - 基材上に形成される硬質皮膜であって、下記式(2)で表される組成を満たしかつ膜厚が1.0nm以上50nm以下である皮膜Qと、下記式(3)で表される組成を満たしかつ膜厚が1.0nm以上50nm以下である皮膜Rとを交互に積層したものであることを特徴とする硬質皮膜。
皮膜Q:TiaCrbAlcLe(BxCyNz)・・・(2)
上記式(2)において、
LはSiとYのうちの1種以上の元素であり、
a、b、c、e、x、y、zは、夫々Ti、Cr、Al、L、B、C、Nの原子比であり、各原子比は下記範囲を満たす。
0≦a≦0.30、
0.10≦b≦0.30、
0.40≦c≦0.70、
0≦e≦0.10、
0≦x≦0.15、
0≦y≦0.10、
0.80≦z≦1、
a+b+c+e=1、
x+y+z=1
皮膜R:Zr(BsCtNu)・・・(3)
上記式(3)において、
s、t、uは夫々B、C、Nの原子比であり、各原子比は下記範囲を満たす。
0≦s≦0.15、
0≦t≦0.10、
0.80≦u≦1、
s+t+u=1 - 基材上に、請求項1または2に記載の硬質皮膜が形成された硬質皮膜被覆部材。
- 純チタンまたはチタン合金の切削に用いられる切削工具である請求項3に記載の硬質皮膜被覆部材。
- 純チタンまたはチタン合金の塑性加工に用いられる塑性加工用工具である請求項3に記載の硬質皮膜被覆部材。
Priority Applications (7)
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JP2015097299A JP2016211052A (ja) | 2015-05-12 | 2015-05-12 | 硬質皮膜および硬質皮膜被覆部材 |
PCT/JP2016/062930 WO2016181813A1 (ja) | 2015-05-12 | 2016-04-25 | 硬質皮膜および硬質皮膜被覆部材 |
CN201680023831.8A CN107532280A (zh) | 2015-05-12 | 2016-04-25 | 硬质皮膜和硬质皮膜被覆构件 |
CA2983720A CA2983720A1 (en) | 2015-05-12 | 2016-04-25 | Hard coating and hard coating-covered member |
DE112016002130.5T DE112016002130T5 (de) | 2015-05-12 | 2016-04-25 | Hartbeschichtung und Element, das mit der Hartbeschichtung bedeckt ist |
KR1020177032592A KR20170137162A (ko) | 2015-05-12 | 2016-04-25 | 경질 피막 및 경질 피막 피복 부재 |
US15/571,287 US20180355469A1 (en) | 2015-05-12 | 2016-04-25 | Hard coating and hard coating-covered member |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2019171648A1 (ja) * | 2018-03-07 | 2019-09-12 | 住友電工ハードメタル株式会社 | 表面被覆切削工具及びその製造方法 |
JP2022168833A (ja) * | 2021-04-26 | 2022-11-08 | ユニオンツール株式会社 | 切削工具用硬質皮膜 |
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CN112601833A (zh) * | 2018-08-01 | 2021-04-02 | Osg株式会社 | 硬质被膜和硬质被膜被覆构件 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006082209A (ja) * | 2004-09-17 | 2006-03-30 | Sumitomo Electric Hardmetal Corp | 表面被覆切削工具 |
JP2007191765A (ja) * | 2006-01-20 | 2007-08-02 | Kobe Steel Ltd | 硬質皮膜 |
JP2008006546A (ja) * | 2006-06-29 | 2008-01-17 | Sumitomo Electric Hardmetal Corp | 刃先交換型切削チップ |
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US20070007765A1 (en) * | 2003-10-20 | 2007-01-11 | Ingram Thomas L | Flexible connectors and methods of manufacturing same |
JP4500810B2 (ja) * | 2004-04-30 | 2010-07-14 | 住友電工ハードメタル株式会社 | 表面被覆立方晶窒化硼素焼結体工具およびその製造方法 |
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- 2016-04-25 DE DE112016002130.5T patent/DE112016002130T5/de not_active Withdrawn
- 2016-04-25 CA CA2983720A patent/CA2983720A1/en not_active Abandoned
- 2016-04-25 US US15/571,287 patent/US20180355469A1/en not_active Abandoned
- 2016-04-25 CN CN201680023831.8A patent/CN107532280A/zh active Pending
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WO2019171648A1 (ja) * | 2018-03-07 | 2019-09-12 | 住友電工ハードメタル株式会社 | 表面被覆切削工具及びその製造方法 |
JPWO2019171648A1 (ja) * | 2018-03-07 | 2020-12-17 | 住友電工ハードメタル株式会社 | 表面被覆切削工具及びその製造方法 |
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JP7067689B2 (ja) | 2018-03-07 | 2022-05-16 | 住友電工ハードメタル株式会社 | 表面被覆切削工具及びその製造方法 |
JP2022168833A (ja) * | 2021-04-26 | 2022-11-08 | ユニオンツール株式会社 | 切削工具用硬質皮膜 |
JP7445693B2 (ja) | 2021-04-26 | 2024-03-07 | ユニオンツール株式会社 | 切削工具用硬質皮膜 |
Also Published As
Publication number | Publication date |
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DE112016002130T5 (de) | 2018-01-25 |
US20180355469A1 (en) | 2018-12-13 |
WO2016181813A1 (ja) | 2016-11-17 |
CN107532280A (zh) | 2018-01-02 |
CA2983720A1 (en) | 2016-11-17 |
KR20170137162A (ko) | 2017-12-12 |
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