JP2016190769A5 - - Google Patents
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- Publication number
- JP2016190769A5 JP2016190769A5 JP2015072668A JP2015072668A JP2016190769A5 JP 2016190769 A5 JP2016190769 A5 JP 2016190769A5 JP 2015072668 A JP2015072668 A JP 2015072668A JP 2015072668 A JP2015072668 A JP 2015072668A JP 2016190769 A5 JP2016190769 A5 JP 2016190769A5
- Authority
- JP
- Japan
- Prior art keywords
- silica particles
- hydrothermal
- containing compound
- silicon
- purification step
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 14
- 239000006185 dispersion Substances 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 5
- 238000000746 purification Methods 0.000 claims 5
- 239000002210 silicon-based material Substances 0.000 claims 5
- 238000010335 hydrothermal treatment Methods 0.000 claims 4
- 238000001035 drying Methods 0.000 claims 3
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 claims 2
- 238000010304 firing Methods 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 2
- 239000000377 silicon dioxide Substances 0.000 claims 2
- 239000003957 anion exchange resin Substances 0.000 claims 1
- 239000003729 cation exchange resin Substances 0.000 claims 1
- 239000003456 ion exchange resin Substances 0.000 claims 1
- 229920003303 ion-exchange polymer Polymers 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000002156 mixing Methods 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 239000011342 resin composition Substances 0.000 claims 1
- 239000007858 starting material Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015072668A JP6440551B2 (ja) | 2015-03-31 | 2015-03-31 | シリカ粒子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015072668A JP6440551B2 (ja) | 2015-03-31 | 2015-03-31 | シリカ粒子の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016190769A JP2016190769A (ja) | 2016-11-10 |
| JP2016190769A5 true JP2016190769A5 (enrdf_load_stackoverflow) | 2018-04-26 |
| JP6440551B2 JP6440551B2 (ja) | 2018-12-19 |
Family
ID=57245269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015072668A Active JP6440551B2 (ja) | 2015-03-31 | 2015-03-31 | シリカ粒子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6440551B2 (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111032801B (zh) * | 2017-08-31 | 2021-08-24 | 日挥触媒化成株式会社 | 硬质涂层形成用涂料组合物及光学部件 |
| JP7470508B2 (ja) * | 2018-11-22 | 2024-04-18 | 株式会社日本触媒 | シリカ粉体、シリカ粉体の製造方法、および焼成シリカ粉体の製造方法 |
| JP7225898B2 (ja) * | 2019-02-21 | 2023-02-21 | 三菱ケミカル株式会社 | シリカ粒子の製造方法、シリカゾルの製造方法及び研磨方法 |
| JP7491081B2 (ja) * | 2020-06-22 | 2024-05-28 | 三菱ケミカル株式会社 | シリカ粒子の製造方法、シリカゾルの製造方法、研磨方法、半導体ウェハの製造方法及び半導体デバイスの製造方法 |
| CN112919542B (zh) * | 2021-03-05 | 2024-04-19 | 赵琳琳 | 一种复合电镀用改性颗粒的制备方法 |
| KR20250030503A (ko) * | 2022-07-22 | 2025-03-05 | 가부시키가이샤 닛폰 쇼쿠바이 | 조성물 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4184683B2 (ja) * | 2002-03-19 | 2008-11-19 | 宇部日東化成株式会社 | 金属酸化物球状粒子およびその製造方法 |
| JP4731137B2 (ja) * | 2004-07-06 | 2011-07-20 | 日揮触媒化成株式会社 | シリカ系微粒子の製造方法 |
| WO2006009132A1 (ja) * | 2004-07-21 | 2006-01-26 | Catalysts & Chemicals Industries Co., Ltd. | シリカ系微粒子、その製造方法、被膜形成用塗料および被膜付基材 |
| KR102260856B1 (ko) * | 2013-08-01 | 2021-06-03 | 닛키 쇼쿠바이카세이 가부시키가이샤 | 해쇄 실리카 입자의 제조방법 및 그 입자를 포함하는 수지 조성물 |
-
2015
- 2015-03-31 JP JP2015072668A patent/JP6440551B2/ja active Active
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