JP2016164919A - 電力用半導体モジュール - Google Patents
電力用半導体モジュール Download PDFInfo
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- JP2016164919A JP2016164919A JP2015044532A JP2015044532A JP2016164919A JP 2016164919 A JP2016164919 A JP 2016164919A JP 2015044532 A JP2015044532 A JP 2015044532A JP 2015044532 A JP2015044532 A JP 2015044532A JP 2016164919 A JP2016164919 A JP 2016164919A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 197
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 29
- 239000000919 ceramic Substances 0.000 claims description 19
- 238000010304 firing Methods 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- 229910002601 GaN Inorganic materials 0.000 claims description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 238000002955 isolation Methods 0.000 abstract 8
- 230000005855 radiation Effects 0.000 abstract 1
- 229910000679 solder Inorganic materials 0.000 description 20
- 239000000463 material Substances 0.000 description 12
- 229920005989 resin Polymers 0.000 description 11
- 239000011347 resin Substances 0.000 description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- 230000017525 heat dissipation Effects 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 230000004907 flux Effects 0.000 description 5
- 230000008646 thermal stress Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000011889 copper foil Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229920001296 polysiloxane Polymers 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/0601—Structure
- H01L2224/0603—Bonding areas having different sizes, e.g. different heights or widths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
- H01L2224/48139—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate with an intermediate bond, e.g. continuous wire daisy chain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
- H01L2224/49111—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting two common bonding areas, e.g. Litz or braid wires
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
- H01L2224/49113—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting different bonding areas on the semiconductor or solid-state body to a common bonding area outside the body, e.g. converging wires
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19107—Disposition of discrete passive components off-chip wires
Abstract
Description
(実施の形態1)
まず図1〜図5を用いて、本実施の形態の電力用半導体モジュールの構成について説明する。まず図1を用いて、各部分について概略的に説明する。図1を参照して、本実施の形態の電力用半導体モジュール100は、ベース板1と、第1絶縁層2と、第1配線パターン3と、第2絶縁層4と、第2配線パターン5と、ケース6とを主に有している。
まず本実施の形態においては、第1絶縁層2と第2絶縁層4とが互いに積層されるように配置されるため、第1配線パターン3と重畳する部分を含むように、第2配線パターン5が積層される。これにより、電力用半導体モジュール100内部の配線インダクタンスを低減させることができる。このことについて、再度図1および図2を用いて説明する。
本実施の形態の電力用半導体モジュールは、以下に述べる点において実施の形態1の電力用半導体モジュール100と異なっている。まず図6〜図9を用いて、本実施の形態の電力用半導体モジュールの構成について説明する。図6〜図9を参照して、基本的に図6は実施の形態1の図1に、図7は実施の形態1の図3に、図8は実施の形態1の図4に、図9は実施の形態1の図5に、それぞれ対応する。
セラミックスからなる第1絶縁層2および第2絶縁層4は、金属からなるベース板1とは熱膨張係数が大きく異なっている。このため半導体素子7の駆動時の発熱により、第1絶縁層2および第2絶縁層4とベース板1との熱膨張係数差により大きな応力が発生する。これにより、特に第1絶縁層2および第2絶縁層4の平面視における面積が大きければ、第1絶縁層2および第2絶縁層4にクラックなどの損傷が生じやすくなる。この応力による損傷は、特に第1絶縁層2および第2絶縁層4の平面視におけるサイズが大きくなれば生じやすくなる。
本実施の形態の電力用半導体モジュールは、以下に述べる点において実施の形態1の電力用半導体モジュール100と異なっている。まず図10〜図13を用いて、本実施の形態の電力用半導体モジュールの構成について説明する。図10〜図13を参照して、基本的に図10は実施の形態1の図1に、図11は実施の形態1の図3に、図12は実施の形態1の図4に、図13は実施の形態1の図5に、それぞれ対応する。
まず半導体素子7が載置されない領域においては、第1絶縁層2上の第1配線パターン3と、第2絶縁層4上の第2配線パターン5とが積層された構成を有する。このため実施の形態1などと同様に、第1配線パターン3と第2配線パターン5とによる低インダクタンス化が実現できる。
Claims (11)
- 第1絶縁層と、
前記第1絶縁層上の少なくとも一部に形成された第1配線パターンと、
前記第1配線パターン上の少なくとも一部に積層された第2絶縁層と、
前記第2絶縁層上の少なくとも一部に、前記第1配線パターンと重畳する部分を含むように形成された第2配線パターンと、
平面視において前記第2絶縁層が形成される領域以外の領域に配置された半導体素子とを備え、
前記第1絶縁層と前記第2絶縁層とはともにセラミックス材料により形成された、電力用半導体モジュール。 - 前記半導体素子は、前記第1絶縁層において、前記第2絶縁層が形成される領域以外の領域上に配置されている、請求項1に記載の電力用半導体モジュール。
- 前記第1絶縁層は前記第2絶縁層よりも焼成温度の高いセラミックス材料からなる、請求項2に記載の電力用半導体モジュール。
- 前記第2絶縁層は低温同時焼成セラミックスからなる、請求項3に記載の電力用半導体モジュール。
- 前記第1絶縁層としてアルミナ系のセラミックス材料が使用され、前記第2絶縁層としてガラス系のセラミックス材料が使用される、請求項4に記載の電力用半導体モジュール。
- 前記第1絶縁層は複数の領域に分割されている、請求項1〜5のいずれか1項に記載の電力用半導体モジュール。
- 前記半導体素子は、前記第2絶縁層が積層された前記第1絶縁層とは別個の第3絶縁層上に載置されている、請求項1に記載の電力用半導体モジュール。
- 前記第1絶縁層は前記第2絶縁層よりも焼成温度の高いセラミックス材料からなる、請求項7に記載の電力用半導体モジュール。
- 前記第3絶縁層は高温同時焼成セラミックスからなる、請求項7または8に記載の電力用半導体モジュール。
- 前記半導体素子はワイドバンドギャップ半導体により構成される、請求項1〜9のいずれか1項に記載の電力用半導体モジュール。
- 前記ワイドバンドギャップ半導体は炭化珪素、窒化ガリウムおよびダイヤモンドからなる群から選択されるいずれかである、請求項10に記載の電力用半導体モジュール。
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111682021A (zh) * | 2020-06-17 | 2020-09-18 | 上海临港电力电子研究有限公司 | 功率半导体模块衬底及其所应用的功率半导体设备 |
JP6899976B1 (ja) * | 2020-07-08 | 2021-07-07 | 三菱電機株式会社 | パワー半導体モジュール及び電力変換装置 |
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JPH0645509A (ja) * | 1992-07-21 | 1994-02-18 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JP2007201517A (ja) * | 2002-08-28 | 2007-08-09 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JP2007234690A (ja) * | 2006-02-28 | 2007-09-13 | Hitachi Ltd | パワー半導体モジュール |
WO2012026418A1 (ja) * | 2010-08-27 | 2012-03-01 | 株式会社村田製作所 | 半導体装置 |
US20140152373A1 (en) * | 2012-12-05 | 2014-06-05 | Lockheed Martin Corporation | Power module having stacked substrates arranged to provide tightly-coupled source and return current paths |
-
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- 2015-03-06 JP JP2015044532A patent/JP6305362B2/ja active Active
Patent Citations (5)
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JPH0645509A (ja) * | 1992-07-21 | 1994-02-18 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JP2007201517A (ja) * | 2002-08-28 | 2007-08-09 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JP2007234690A (ja) * | 2006-02-28 | 2007-09-13 | Hitachi Ltd | パワー半導体モジュール |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111682021A (zh) * | 2020-06-17 | 2020-09-18 | 上海临港电力电子研究有限公司 | 功率半导体模块衬底及其所应用的功率半导体设备 |
JP6899976B1 (ja) * | 2020-07-08 | 2021-07-07 | 三菱電機株式会社 | パワー半導体モジュール及び電力変換装置 |
WO2022009348A1 (ja) * | 2020-07-08 | 2022-01-13 | 三菱電機株式会社 | パワー半導体モジュール及び電力変換装置 |
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