JP2016133623A5 - - Google Patents
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- JP2016133623A5 JP2016133623A5 JP2015008107A JP2015008107A JP2016133623A5 JP 2016133623 A5 JP2016133623 A5 JP 2016133623A5 JP 2015008107 A JP2015008107 A JP 2015008107A JP 2015008107 A JP2015008107 A JP 2015008107A JP 2016133623 A5 JP2016133623 A5 JP 2016133623A5
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- substrate
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- 239000000758 substrate Substances 0.000 claims description 85
- 238000001514 detection method Methods 0.000 claims description 56
- 238000005259 measurement Methods 0.000 claims description 20
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 2
- 238000005286 illumination Methods 0.000 claims 4
- 238000000059 patterning Methods 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015008107A JP6413784B2 (ja) | 2015-01-19 | 2015-01-19 | 基板処理装置及びデバイス製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015008107A JP6413784B2 (ja) | 2015-01-19 | 2015-01-19 | 基板処理装置及びデバイス製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018172644A Division JP6680330B2 (ja) | 2018-09-14 | 2018-09-14 | パターン形成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016133623A JP2016133623A (ja) | 2016-07-25 |
| JP2016133623A5 true JP2016133623A5 (https=) | 2017-12-07 |
| JP6413784B2 JP6413784B2 (ja) | 2018-10-31 |
Family
ID=56426116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015008107A Active JP6413784B2 (ja) | 2015-01-19 | 2015-01-19 | 基板処理装置及びデバイス製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6413784B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI736621B (zh) * | 2016-10-04 | 2021-08-21 | 日商尼康股份有限公司 | 圖案描繪裝置及圖案描繪方法 |
| KR102630749B1 (ko) * | 2021-08-03 | 2024-01-30 | 주식회사 디에이테크놀로지 | 이차전지 제조 시스템의 전극 측정 장치 및 방법 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005197483A (ja) * | 2004-01-08 | 2005-07-21 | Nikon Corp | 撮像手段の回転誤差計測方法、及びこの回転誤差計測方法を用いた調整方法又は計測方法、及びこの回転誤差計測方法で計測された回転誤差を使用する位置計測装置、及びこの位置計測装置を備えた露光装置 |
| JP2006268032A (ja) * | 2005-02-24 | 2006-10-05 | Fuji Photo Film Co Ltd | 描画装置および描画装置の校正方法 |
| JP5210199B2 (ja) * | 2009-02-23 | 2013-06-12 | 大日本スクリーン製造株式会社 | 画像記録方法 |
| JP6123252B2 (ja) * | 2012-11-21 | 2017-05-10 | 株式会社ニコン | 処理装置及びデバイス製造方法 |
| KR101812857B1 (ko) * | 2012-08-28 | 2017-12-27 | 가부시키가이샤 니콘 | 기판 지지 장치, 및 노광 장치 |
| JP2014081452A (ja) * | 2012-10-16 | 2014-05-08 | Nikon Corp | 露光装置、およびデバイス製造方法 |
-
2015
- 2015-01-19 JP JP2015008107A patent/JP6413784B2/ja active Active
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