JP2016127162A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP2016127162A JP2016127162A JP2015000204A JP2015000204A JP2016127162A JP 2016127162 A JP2016127162 A JP 2016127162A JP 2015000204 A JP2015000204 A JP 2015000204A JP 2015000204 A JP2015000204 A JP 2015000204A JP 2016127162 A JP2016127162 A JP 2016127162A
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Abstract
【解決手段】半導体チップCP1,CP2を製造する際に、絶縁膜PAの上面を平坦化する処理を行う。そして、半導体チップCP1の絶縁膜PAと半導体チップCP2の絶縁膜PAとが互いに対向する向きで、半導体チップCP1のコイルCL1aと半導体チップCP2のコイルCL1bとが磁気的に結合するように、半導体チップCP1と半導体チップCP2とが絶縁シートZSを介して重ねられる。
【選択図】図37
Description
<回路構成について>
図1は、一実施の形態の半導体装置を用いた電子装置(半導体装置)の一例を示す回路図である。なお、図1において、点線で囲まれた部分が、半導体チップCP1内に形成され、一点鎖線で囲まれた部分が半導体チップCP2内に形成され、二点鎖線で囲まれた部分が半導体パッケージPKG内に形成されている。
図2は、信号の伝送例を示す説明図である。
次に、本実施の形態の半導体パッケージの構成例について説明する。なお、半導体パッケージは半導体装置とみなすこともできる。
次に、半導体パッケージPKGの製造工程の一例について、図11〜図16を参照しながら説明する。図11は、半導体パッケージPKGの製造工程中の断面図であり、上記図9に相当する断面が示されている。
次に、本実施の形態の半導体パッケージ(半導体装置)PKGを用いた電子システム(電子装置)の一例について説明する。図17は、本実施の形態の半導体パッケージPKGを用いた電子システム(電子装置)の一例、ここでは電気自動車システム、を示す説明図(回路ブロック図)である。
図18は、本実施の形態の半導体チップ(半導体装置)CPの断面構造を模式的に示す断面図であり、図19は、本実施の形態の半導体チップ(半導体装置)CPの平面図である。図19には、半導体チップCPにおける、最上層の配線層(ここでは第4配線層)のメタルパターンが示されている。ここで、最上層の配線層(ここでは第4配線層)のメタルパターンは、後述の導電膜CDによって形成されたパターンである。
次に、本実施の形態の半導体チップ(半導体装置)CPの製造工程について説明する。以下の製造工程により、上記図18および図19の半導体チップCPが製造される。
図37は、上記図9の半導体パッケージPKGの一部を拡大して示した部分拡大断面図である。なお、図37では、図面を見やすくするために、封止樹脂部MR、ダイパッドDPおよびリードLDについては、図示を省略している。
本発明者は、上記図37や後述の図39のように、2つの半導体チップを絶縁シート(ZS)を間に挟んで重ね合わせ、一方の半導体チップのコイルと他方の半導体チップのコイルとを磁気結合(誘導結合)させ、それら磁気結合したコイルを介して、一方の半導体チップから他方の半導体チップへ信号を伝達する技術について検討している。
本実施の形態の半導体装置(半導体パッケージ)は、コイル(CL1a,CL1b)を有する半導体チップCP1(第1半導体チップ)と、コイル(CL1b,CL2b)を有する半導体チップCP2(第2半導体チップ)と、半導体チップCP1と半導体チップCP2との間に介在する絶縁シートZSとを備えている。そして、半導体チップCP1と半導体チップCP2とが絶縁シートZSを介して重ねられ、半導体チップCP1のコイル(CL1a,CL1b)と半導体チップCP2のコイル(CL2a,CL2b)とが磁気的に結合されている。
半導体チップCP1,CP2を製造する際に絶縁膜PAの上面を平坦化する処理(工程)を行うことは、本実施の形態2と上記実施の形態1とで共通である。しかしながら、絶縁膜PAの上面を平坦化する処理の具体的手法が、上記実施の形態1と本実施の形態2とで相違している。
BK 動力分配機構
BW ワイヤ
CC 制御回路
CD 導電膜
CL1,CL1a,CL1b,CL2,CL2a,CL2b コイル
CNV コンバータ
CP,CP1,CP2 半導体チップ
CTC 制御部
CW コイル配線
DB ダイボンド材
DF ディファレンシャル
DP ダイパッド
DR 駆動回路
DS 段差
DTR 駆動輪
ENG エンジン
G1,G2 ゲート電極
GF ゲート絶縁膜
GND 接地電位
h1 大きさ
IL1,IL2,IL3,IL4 層間絶縁膜
INV インバータ
LD,LD1,LD2 リード
LOD 負荷
M1,M2,M3,M4 配線
M1a,M2a,M3a,M4a シールリング用の配線
MOT モータ
MR 封止樹脂部
NS n型半導体領域
NW n型ウエル
OP,OP1,OP2 開口部
PA,PA1,PA2 絶縁膜
PD,PD1,PD2 パッド
PKG 半導体パッケージ
PS p型半導体領域
PW p型ウエル
Qn nチャネル型MISFET
Qp pチャネル型MISFET
RG1 領域
RX1,RX2 受信回路
RY リレー
SB 半導体基板
SJ 車軸
SG1,SG2,SG3,SG4 信号
SR シールリング
ST 素子分離領域
TR1,TR2 トランス
TX1,TX2 送信回路
V1 プラグ
V2,V3,V4 ビア部
V1a,V2a,V3a,V4a シールリング用のビア部
VCC 電源電圧
VD 隙間
ZS 絶縁シート
Claims (12)
- 第1コイルを有する第1半導体チップと、第2コイルを有する第2半導体チップと、前記第1半導体チップと前記第2半導体チップとの間に介在する絶縁シートとを備え、前記第1半導体チップと前記第2半導体チップとが前記絶縁シートを介して重ねられ、前記第1コイルと前記第2コイルとが磁気的に結合された半導体装置の製造方法であって、
(a)前記第1半導体チップを準備する工程、
(b)前記第2半導体チップを準備する工程、
(c)前記第1コイルと前記第2コイルとが磁気的に結合するように、前記第1半導体チップと前記第2半導体チップとを前記絶縁シートを介して重ねる工程、
を有し、
前記(a)工程は、
(a1)第1半導体基板上に、一層以上の配線層を有しかつ前記第1コイルを含む第1配線構造を形成する工程、
(a2)前記第1配線構造上に第1絶縁膜を形成する工程、
(a3)前記第1絶縁膜の上面を平坦化する工程、
を有し、
前記(b)工程は、
(b1)第2半導体基板上に、一層以上の配線層を有しかつ前記第2コイルを含む第2配線構造を形成する工程、
(b2)前記第2配線構造上に第2絶縁膜を形成する工程、
(b3)前記第2絶縁膜の上面を平坦化する工程、
を有し、
前記(c)工程では、前記第1半導体チップの前記第1絶縁膜と前記第2半導体チップの前記第2絶縁膜とが互いに対向する向きで、前記第1半導体チップと前記第2半導体チップとが前記絶縁シートを介して重ねられる、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記(a3)工程は、
(a4)前記第1絶縁膜上に第1マスク層を形成する工程、
(a5)前記第1マスク層をエッチングマスクとして用いて、前記第1絶縁膜をエッチバックする工程、
を有し、
前記(b3)工程は、
(b4)前記第2絶縁膜上に第2マスク層を形成する工程、
(b5)前記第2マスク層をエッチングマスクとして用いて、前記第2絶縁膜をエッチバックする工程、
を有する、半導体装置の製造方法。 - 請求項2記載の半導体装置の製造方法において、
前記(a5)工程を行うことにより、前記第1絶縁膜の上面の平坦性が向上し、
前記(b5)工程を行うことにより、前記第2絶縁膜の上面の平坦性が向上する、半導体装置の製造方法。 - 請求項2記載の半導体装置の製造方法において、
前記第1絶縁膜は、第1樹脂膜を含み、
前記(a5)工程では、前記第1樹脂膜がエッチバックされ、
前記第2絶縁膜は、第2樹脂膜を含み、
前記(b5)工程では、前記第2樹脂膜がエッチバックされる、半導体装置の製造方法。 - 請求項4記載の半導体装置の製造方法において、
前記第1樹脂膜および前記前記第2樹脂膜は、それぞれポリイミドからなる、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記(a3)工程では、前記第1絶縁膜の上面を研磨することにより、前記第1絶縁膜の上面を平坦化し、
前記(b3)工程では、前記第2絶縁膜の上面を研磨することにより、前記第2絶縁膜の上面を平坦化する、半導体装置の製造方法。 - 請求項6記載の半導体装置の製造方法において、
前記(a3)工程では、CMP法により前記第1絶縁膜の上面を研磨し、
前記(b3)工程では、CMP法により前記第2絶縁膜の上面を研磨する、半導体装置の製造方法。 - 請求項6記載の半導体装置の製造方法において、
前記第1絶縁膜は、第1酸化シリコン膜を含み、
前記(a3)工程では、前記第1酸化シリコン膜が研磨され、
前記第2絶縁膜は、第2酸化シリコン膜を含み、
前記(b3)工程では、前記第2酸化シリコン膜が研磨される、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記第1絶縁膜は、前記第1半導体チップの最上層の膜であり、
前記第2絶縁膜は、前記第2半導体チップの最上層の膜である、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記(c)工程は、
(c1)チップ搭載部上に前記第1半導体チップを搭載する工程、
(c2)前記第1半導体チップの前記第1絶縁膜と前記第2半導体チップの前記第2絶縁膜とが対向する向きで、前記第1半導体チップ上に前記第2半導体チップを前記絶縁シートを介して搭載して重ねる工程、
を有する、半導体装置の製造方法。 - 請求項10記載の半導体装置の製造方法において、
前記第1半導体チップは、複数の第1パッドを有し、
前記第2半導体チップは、複数の第2パッドを有し、
前記(c)工程後、
(d)複数の第1外部端子と前記第1半導体チップの前記複数の第1パッドとを複数の第1導電性接続部材を介してそれぞれ電気的に接続し、複数の第2外部端子と前記第2半導体チップの前記複数の第2パッドとを複数の第2導電性接続部材を介してそれぞれ電気的に接続する工程、
を更に有する、半導体装置の製造方法。 - 請求項11記載の半導体装置の製造方法において、
前記(d)工程後、
(e)前記第1半導体チップ、前記第2半導体チップ、前記絶縁シート、前記チップ搭載部、前記複数の第1導電性接続部材、前記複数の第2導電性接続部材、前記複数の第1外部端子および前記複数の第2外部端子を封止する封止部を形成する工程、
を更に有する、半導体装置の製造方法。
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