JP2016119434A5 - - Google Patents
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- JP2016119434A5 JP2016119434A5 JP2014259753A JP2014259753A JP2016119434A5 JP 2016119434 A5 JP2016119434 A5 JP 2016119434A5 JP 2014259753 A JP2014259753 A JP 2014259753A JP 2014259753 A JP2014259753 A JP 2014259753A JP 2016119434 A5 JP2016119434 A5 JP 2016119434A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electrode layer
- semiconductor
- interlayer film
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014259753A JP6322130B2 (ja) | 2014-12-24 | 2014-12-24 | 半導体装置、その製造方法、それを用いた電力変換装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014259753A JP6322130B2 (ja) | 2014-12-24 | 2014-12-24 | 半導体装置、その製造方法、それを用いた電力変換装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016119434A JP2016119434A (ja) | 2016-06-30 |
| JP2016119434A5 true JP2016119434A5 (https=) | 2017-04-13 |
| JP6322130B2 JP6322130B2 (ja) | 2018-05-09 |
Family
ID=56244448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014259753A Expired - Fee Related JP6322130B2 (ja) | 2014-12-24 | 2014-12-24 | 半導体装置、その製造方法、それを用いた電力変換装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6322130B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6964538B2 (ja) * | 2018-02-28 | 2021-11-10 | 株式会社 日立パワーデバイス | 半導体装置および電力変換装置 |
| JP7835974B2 (ja) * | 2021-12-13 | 2026-03-26 | ミネベアパワーデバイス株式会社 | 半導体装置および電力変換装置 |
| JP2023144467A (ja) * | 2022-03-28 | 2023-10-11 | 株式会社 日立パワーデバイス | 半導体装置および電力変換装置 |
| JP2023147422A (ja) * | 2022-03-30 | 2023-10-13 | 株式会社 日立パワーデバイス | 半導体装置および電力変換装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000114525A (ja) * | 1998-08-03 | 2000-04-21 | Fuji Electric Co Ltd | 半導体装置およびその製造方法 |
| JP6072432B2 (ja) * | 2012-05-15 | 2017-02-01 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
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2014
- 2014-12-24 JP JP2014259753A patent/JP6322130B2/ja not_active Expired - Fee Related