JP2016110827A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2016110827A5 JP2016110827A5 JP2014246986A JP2014246986A JP2016110827A5 JP 2016110827 A5 JP2016110827 A5 JP 2016110827A5 JP 2014246986 A JP2014246986 A JP 2014246986A JP 2014246986 A JP2014246986 A JP 2014246986A JP 2016110827 A5 JP2016110827 A5 JP 2016110827A5
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- roller
- housing
- posture
- lower roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000002500 ions Chemical class 0.000 claims description 155
- 238000000605 extraction Methods 0.000 claims description 21
- 239000000725 suspension Substances 0.000 claims description 20
- 230000032258 transport Effects 0.000 description 13
- 238000010884 ion-beam technique Methods 0.000 description 11
- 230000005484 gravity Effects 0.000 description 9
- 238000000926 separation method Methods 0.000 description 9
- 230000002093 peripheral Effects 0.000 description 7
- 210000002381 Plasma Anatomy 0.000 description 3
- WTEOIRVLGSZEPR-UHFFFAOYSA-N Boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 2
- 241000894007 species Species 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- RBFQJDQYXXHULB-UHFFFAOYSA-N Arsine Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- XYFCBTPGUUZFHI-UHFFFAOYSA-N phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000004642 transportation engineering Methods 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014246986A JP6573099B2 (ja) | 2014-12-05 | 2014-12-05 | イオン源、支持台、吊下機構、イオン源搬送システム及びイオン源搬送方法 |
| KR1020150115953A KR101946101B1 (ko) | 2014-12-05 | 2015-08-18 | 이온원, 지지대, 현수 기구, 이온원 반송 시스템 및 이온원 반송 방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014246986A JP6573099B2 (ja) | 2014-12-05 | 2014-12-05 | イオン源、支持台、吊下機構、イオン源搬送システム及びイオン源搬送方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016110827A JP2016110827A (ja) | 2016-06-20 |
| JP2016110827A5 true JP2016110827A5 (de) | 2017-12-07 |
| JP6573099B2 JP6573099B2 (ja) | 2019-09-11 |
Family
ID=56122234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014246986A Active JP6573099B2 (ja) | 2014-12-05 | 2014-12-05 | イオン源、支持台、吊下機構、イオン源搬送システム及びイオン源搬送方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6573099B2 (de) |
| KR (1) | KR101946101B1 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6418262B2 (ja) * | 2017-03-09 | 2018-11-07 | 日新イオン機器株式会社 | イオンビーム照射装置、イオン源の着脱方法 |
| JP6653067B2 (ja) * | 2017-09-20 | 2020-02-26 | 日新イオン機器株式会社 | イオン源支持台 |
| JP7325723B2 (ja) * | 2021-09-30 | 2023-08-15 | 日新イオン機器株式会社 | イオン源移動装置およびイオン注入装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0751541B2 (ja) | 1986-02-26 | 1995-06-05 | 花王株式会社 | カルボン酸塩の製造法 |
| JPS62198649U (de) * | 1986-06-07 | 1987-12-17 | ||
| JPH0343244U (de) * | 1989-09-06 | 1991-04-23 | ||
| JPH08264144A (ja) * | 1995-03-20 | 1996-10-11 | Nissin Electric Co Ltd | イオン源装置 |
| JPH11273581A (ja) * | 1998-03-26 | 1999-10-08 | Sumitomo Heavy Ind Ltd | Ｅｃｒイオン源 |
| WO2008012989A1 (fr) * | 2006-07-27 | 2008-01-31 | S & S Engineering Corp. | Mécanisme de transport horizontal pour chariot autopropulsé |
| JP2009023811A (ja) * | 2007-07-21 | 2009-02-05 | Kawasaki Heavy Ind Ltd | 傾動式台車枠搬送装置 |
| JP5979019B2 (ja) * | 2013-01-22 | 2016-08-24 | 株式会社Ihi | 長尺物搬送台車 |
-
2014
- 2014-12-05 JP JP2014246986A patent/JP6573099B2/ja active Active
-
2015
- 2015-08-18 KR KR1020150115953A patent/KR101946101B1/ko active IP Right Grant
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6573099B2 (ja) | イオン源、支持台、吊下機構、イオン源搬送システム及びイオン源搬送方法 | |
| US10625938B2 (en) | Article transport facility | |
| JP2016110827A5 (de) | ||
| JP5168594B2 (ja) | 基板搬送設備 | |
| CN108033267B (zh) | 金属板材搬运工艺 | |
| KR20150106360A (ko) | 용기 반송 설비 | |
| CN104889961B (zh) | 一种便捷式铝板存放箱 | |
| JP6667316B2 (ja) | エアセパレータ | |
| CN201177705Y (zh) | 玻璃基板承载装置 | |
| CN117905817B (zh) | 抱闸装置、运动台及抱闸装置控制方法 | |
| CN107539795A (zh) | 一种自动放杯机 | |
| CN212449653U (zh) | 一种soma组装设备 | |
| KR20140087123A (ko) | 플라즈마 처리 장치용 기판 이송 장치 | |
| KR101381219B1 (ko) | 웨이퍼 카세트 로케이팅 장치 | |
| KR101922352B1 (ko) | 이온원 지지대 | |
| JP2011071434A (ja) | 容器搬送設備 | |
| CN103633005B (zh) | 大面积异形晶片匀胶均匀性控制装置 | |
| JP2013177213A (ja) | 物品処理設備及び物品処理設備における処理装置の設置方法 | |
| CN209757158U (zh) | 一种通信产品用减震效果好的运输装置 | |
| CN211540956U (zh) | 一种贴合设备的固定装置 | |
| CN204230218U (zh) | 一种卧式lpcvd石英舟 | |
| KR101035735B1 (ko) | 차단기 운반용 리프트 | |
| JP2013089845A (ja) | ウエーハカセット | |
| JP6043210B2 (ja) | ミラートロンスパッタ装置 | |
| CN107298312B (zh) | 相邻两个印铁机铁板磁性防划伤机构的横向间距调节机构 |