JP2016089233A - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
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- JP2016089233A JP2016089233A JP2014226380A JP2014226380A JP2016089233A JP 2016089233 A JP2016089233 A JP 2016089233A JP 2014226380 A JP2014226380 A JP 2014226380A JP 2014226380 A JP2014226380 A JP 2014226380A JP 2016089233 A JP2016089233 A JP 2016089233A
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- film forming
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- 238000005192 partition Methods 0.000 claims abstract description 55
- 230000006698 induction Effects 0.000 claims abstract description 9
- 238000010891 electric arc Methods 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 5
- 230000001939 inductive effect Effects 0.000 claims abstract description 4
- 239000002184 metal Substances 0.000 claims description 14
- 230000007246 mechanism Effects 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 51
- 230000001681 protective effect Effects 0.000 abstract description 10
- 230000001678 irradiating effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 17
- 230000015572 biosynthetic process Effects 0.000 description 15
- 230000008569 process Effects 0.000 description 13
- 238000012545 processing Methods 0.000 description 13
- 238000012423 maintenance Methods 0.000 description 10
- 229910052799 carbon Inorganic materials 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 7
- -1 carbon ions Chemical class 0.000 description 6
- 238000012546 transfer Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000013077 target material Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910003481 amorphous carbon Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
- H01J37/32669—Particular magnets or magnet arrangements for controlling the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- General Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
Abstract
Description
ヒンジ機構170は、一対のヒンジブロック171A、171B、回転軸172、プランジャ173を備えている。
図9(B)は、ヒンジ機構170により接続された、複数の磁石部161を成膜チャンバ150側から順に伸ばしていき、隔壁部162を直線状態に伸ばす工程を示している。フィルタ部160は、隔壁部162がフレキシブルであることと、成膜チャンバ150側から屈曲させることで、ソースチャンバ140を移動させずに、フランジ部160aの着脱が可能である。
Claims (5)
- アーク放電によってプラズマを発生させるソース部と、
前記ソース部で発生した前記プラズマを照射するために被成膜材が配置される成膜部と、
前記ソース部から前記成膜部に向けて前記プラズマを誘導する誘導部と、を有し、
前記誘導部は、
前記ソース部および前記成膜部のそれぞれに気密に接続され、内部を前記プラズマが通過する隔壁部と、
前記隔壁部の内部に前記プラズマを誘導するための磁場を形成する複数の磁石部と、を備え、
前記複数の磁石部は、連結角度が調整できるように接続され、
前記隔壁部は、前記複数の磁石部の連結角度に応じて屈曲可能な管状部材を有することを特徴とする成膜装置。 - 前記複数の磁石部は、前記連結角度を調整することで、前記ソース部から前記成膜部に前記プラズマを誘導できるように前記隔壁部を屈曲した第1の状態と、前記複数の磁石部から前記隔壁部を取り外せるように前記隔壁部を直線状にする第2の状態とに変形可能であることを特徴とする請求項1に記載の成膜装置。
- 前記複数の磁石部を連結するヒンジブロック及び回転軸と、前記第1の状態に保持する第1のストッパーと、前記第2の状態に保持する第2のストッパーと、を含むヒンジ機構をさらに有することを特徴とする請求項2に記載の成膜装置。
- 前記磁石部のそれぞれは、金属管と、その外周に巻回された電磁石コイルとを有し、
前記複数の磁石部が連結されたイオン誘導部は、一端のフランジ部がソース部に接続され、他端のフランジ部が成膜部に接続されることを特徴とする請求項1乃至3のいずれか1項に記載の成膜装置。 - 前記隔壁部は、前記管状部材の内部に設けられ、前記プラズマ中のパーティクルを除去するバッフルをさらに備えることを特徴とする請求項1乃至4のいずれか1項に記載の成膜装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014226380A JP6059195B2 (ja) | 2014-11-06 | 2014-11-06 | 成膜装置 |
US14/932,520 US9896760B2 (en) | 2014-11-06 | 2015-11-04 | Deposition apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014226380A JP6059195B2 (ja) | 2014-11-06 | 2014-11-06 | 成膜装置 |
Publications (2)
Publication Number | Publication Date |
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JP2016089233A true JP2016089233A (ja) | 2016-05-23 |
JP6059195B2 JP6059195B2 (ja) | 2017-01-11 |
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JP2014226380A Active JP6059195B2 (ja) | 2014-11-06 | 2014-11-06 | 成膜装置 |
Country Status (2)
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US (1) | US9896760B2 (ja) |
JP (1) | JP6059195B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108342701A (zh) * | 2017-01-25 | 2018-07-31 | 谢尔盖·米克海洛夫 | 用于表面处理的设备和方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10814659B2 (en) | 2018-06-28 | 2020-10-27 | Xerox Corporation | Methods for printing conductive objects |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996026531A2 (en) * | 1995-02-20 | 1996-08-29 | Avimo Group Limited | Filtered cathodic arc source |
JP2002105628A (ja) * | 2000-10-03 | 2002-04-10 | Nissin Electric Co Ltd | 真空アーク蒸着装置 |
JP2005023407A (ja) * | 2003-07-02 | 2005-01-27 | Shin Meiwa Ind Co Ltd | 成膜装置及び成膜方法 |
WO2007089216A1 (en) * | 2005-09-01 | 2007-08-09 | Gorokhovsky Vladimir I | Plasma vapor deposition method and apparatus utilizing bipolar bias controller |
US20080105657A1 (en) * | 2006-11-03 | 2008-05-08 | Atomic Energy Council - Institute Of Nuclear Energy Research | Macroparticle-filtered coating plasma source device |
-
2014
- 2014-11-06 JP JP2014226380A patent/JP6059195B2/ja active Active
-
2015
- 2015-11-04 US US14/932,520 patent/US9896760B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996026531A2 (en) * | 1995-02-20 | 1996-08-29 | Avimo Group Limited | Filtered cathodic arc source |
JP2002105628A (ja) * | 2000-10-03 | 2002-04-10 | Nissin Electric Co Ltd | 真空アーク蒸着装置 |
JP2005023407A (ja) * | 2003-07-02 | 2005-01-27 | Shin Meiwa Ind Co Ltd | 成膜装置及び成膜方法 |
WO2007089216A1 (en) * | 2005-09-01 | 2007-08-09 | Gorokhovsky Vladimir I | Plasma vapor deposition method and apparatus utilizing bipolar bias controller |
US20080105657A1 (en) * | 2006-11-03 | 2008-05-08 | Atomic Energy Council - Institute Of Nuclear Energy Research | Macroparticle-filtered coating plasma source device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108342701A (zh) * | 2017-01-25 | 2018-07-31 | 谢尔盖·米克海洛夫 | 用于表面处理的设备和方法 |
Also Published As
Publication number | Publication date |
---|---|
US20160130700A1 (en) | 2016-05-12 |
US9896760B2 (en) | 2018-02-20 |
JP6059195B2 (ja) | 2017-01-11 |
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