JP2016066784A5 - - Google Patents

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Publication number
JP2016066784A5
JP2016066784A5 JP2015158322A JP2015158322A JP2016066784A5 JP 2016066784 A5 JP2016066784 A5 JP 2016066784A5 JP 2015158322 A JP2015158322 A JP 2015158322A JP 2015158322 A JP2015158322 A JP 2015158322A JP 2016066784 A5 JP2016066784 A5 JP 2016066784A5
Authority
JP
Japan
Prior art keywords
container
cap
lid
holding members
satisfied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015158322A
Other languages
English (en)
Japanese (ja)
Other versions
JP6342368B2 (ja
JP2016066784A (ja
Filing date
Publication date
Application filed filed Critical
Priority to PCT/JP2015/076422 priority Critical patent/WO2016047542A1/ja
Priority to KR1020177007021A priority patent/KR102380665B1/ko
Priority to CN201580051716.7A priority patent/CN106716598B/zh
Priority to TW104131060A priority patent/TWI639540B/zh
Publication of JP2016066784A publication Critical patent/JP2016066784A/ja
Publication of JP2016066784A5 publication Critical patent/JP2016066784A5/ja
Application granted granted Critical
Publication of JP6342368B2 publication Critical patent/JP6342368B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2015158322A 2014-09-24 2015-08-10 容器収容装置 Active JP6342368B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
PCT/JP2015/076422 WO2016047542A1 (ja) 2014-09-24 2015-09-17 容器収容装置
KR1020177007021A KR102380665B1 (ko) 2014-09-24 2015-09-17 용기 수용 장치
CN201580051716.7A CN106716598B (zh) 2014-09-24 2015-09-17 容器收纳装置
TW104131060A TWI639540B (zh) 2014-09-24 2015-09-21 容器收納裝置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014193581 2014-09-24
JP2014193581 2014-09-24

Publications (3)

Publication Number Publication Date
JP2016066784A JP2016066784A (ja) 2016-04-28
JP2016066784A5 true JP2016066784A5 (it) 2017-08-10
JP6342368B2 JP6342368B2 (ja) 2018-06-13

Family

ID=55805865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015158322A Active JP6342368B2 (ja) 2014-09-24 2015-08-10 容器収容装置

Country Status (3)

Country Link
JP (1) JP6342368B2 (it)
CN (1) CN106716598B (it)
TW (1) TWI639540B (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI763944B (zh) * 2017-11-01 2022-05-11 日商東京威力科創股份有限公司 處理液供給系統、處理液供給裝置及載具保管裝置
CN113329910B (zh) 2019-01-22 2024-02-06 上海延锋金桥汽车饰件系统有限公司 车辆内部部件

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3060136B2 (ja) * 1991-12-04 2000-07-10 東京エレクトロン株式会社 半導体製造装置
JP3680907B2 (ja) * 1998-06-02 2005-08-10 大日本スクリーン製造株式会社 基板処理装置
KR20040082483A (ko) * 2003-03-19 2004-09-30 삼성전자주식회사 포토레지스트 공급장치
KR20050088734A (ko) * 2004-03-03 2005-09-07 삼성전자주식회사 포토레지스트 공급 장치
JP4708044B2 (ja) * 2005-02-10 2011-06-22 大日本スクリーン製造株式会社 基板処理装置
CN101364046A (zh) * 2007-08-06 2009-02-11 力晶半导体股份有限公司 液体与液位的侦测预警系统及方法
JP5612265B2 (ja) * 2009-01-23 2014-10-22 株式会社Ｓｃｒｅｅｎセミコンダクターソリューションズ 基板処理装置及び基板処理方法
JP5841007B2 (ja) * 2012-05-28 2016-01-06 株式会社Ｓｃｒｅｅｎセミコンダクターソリューションズ 薬液供給方法と基板処理装置

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