JP2016066784A5 - - Google Patents
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- Publication number
- JP2016066784A5 JP2016066784A5 JP2015158322A JP2015158322A JP2016066784A5 JP 2016066784 A5 JP2016066784 A5 JP 2016066784A5 JP 2015158322 A JP2015158322 A JP 2015158322A JP 2015158322 A JP2015158322 A JP 2015158322A JP 2016066784 A5 JP2016066784 A5 JP 2016066784A5
- Authority
- JP
- Japan
- Prior art keywords
- container
- cap
- lid
- holding members
- satisfied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims 1
Description
なお、図１７では略平板状の保持部材１４０をキャップ２１の上方直近に設けた様子を描図したが、保持部材１４０に代えて、例えば図１８に示すような、底面が開口した蓋体１４１によりキャップ２１を囲うことで容器１０の上下方向の移動を制限し、必要に応じて駆動機構１２０でキャップ２１を上方向に退避させるようにしてもよく、保持部材や蓋体の形状は本実施の内容に限定されるものではなく任意に設定できる。また、容器１０と保持部材８０、１４０や蓋体１４１とを相対的に移動させるという観点からは、必ずしも保持部材８０、１４０や蓋体１４１を移動させる必要はなく、例えば図１５に示す駆動機構１２０を支持板３２に接続して、保持部材８０、１４０や蓋体１４１に対して容器１０そのものを移動させるようにしてもよい。 In FIG. 17, the state in which the substantially flat holding member 140 is provided immediately above the cap 21 is illustrated. However, instead of the holding member 140, for example, a lid 141 having an open bottom as shown in FIG. 18. By enclosing the cap 21, the movement of the container 10 in the vertical direction may be restricted, and the cap 21 may be retracted upward by the drive mechanism 120 as necessary. It is not limited to the contents of, and can be set arbitrarily. Further, from the viewpoint of relatively moving the container 10 and the holding members 80 and 140 and the lid body 141, it is not always necessary to move the holding members 80 and 140 and the lid body 141. For example, the drive mechanism shown in FIG. The container 10 itself may be moved with respect to the holding members 80 and 140 and the lid 141 by connecting 120 to the support plate 32.
Claims (1)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020177007021A KR102380665B1 (en) | 2014-09-24 | 2015-09-17 | Container accommodation device |
| CN201580051716.7A CN106716598B (en) | 2014-09-24 | 2015-09-17 | Container storage device |
| PCT/JP2015/076422 WO2016047542A1 (en) | 2014-09-24 | 2015-09-17 | Container accommodation device |
| TW104131060A TWI639540B (en) | 2014-09-24 | 2015-09-21 | Accommodation device for container |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014193581 | 2014-09-24 | ||
| JP2014193581 | 2014-09-24 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016066784A JP2016066784A (en) | 2016-04-28 |
| JP2016066784A5 true JP2016066784A5 (en) | 2017-08-10 |
| JP6342368B2 JP6342368B2 (en) | 2018-06-13 |
Family
ID=55805865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015158322A Active JP6342368B2 (en) | 2014-09-24 | 2015-08-10 | Container container |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6342368B2 (en) |
| CN (1) | CN106716598B (en) |
| TW (1) | TWI639540B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI763944B (en) * | 2017-11-01 | 2022-05-11 | 日商東京威力科創股份有限公司 | Process liquid supply system, process liquid supply device, and carrier storage device |
| WO2020154325A1 (en) | 2019-01-22 | 2020-07-30 | Shanghai Yanfeng Jinqiao Automotive Trim Systems Co. Ltd. | Vehicle interior component |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3060136B2 (en) * | 1991-12-04 | 2000-07-10 | 東京エレクトロン株式会社 | Semiconductor manufacturing equipment |
| JP3680907B2 (en) * | 1998-06-02 | 2005-08-10 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| KR20040082483A (en) * | 2003-03-19 | 2004-09-30 | 삼성전자주식회사 | Devices for suppling photoresist |
| KR20050088734A (en) * | 2004-03-03 | 2005-09-07 | 삼성전자주식회사 | Apparatus for supplying photoresist |
| JP4708044B2 (en) * | 2005-02-10 | 2011-06-22 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| CN101364046A (en) * | 2007-08-06 | 2009-02-11 | 力晶半导体股份有限公司 | Detecting and early-warning system for liquid and liquid level and method |
| JP5612265B2 (en) * | 2009-01-23 | 2014-10-22 | 株式会社Ｓｃｒｅｅｎセミコンダクターソリューションズ | Substrate processing apparatus and substrate processing method |
| JP5841007B2 (en) * | 2012-05-28 | 2016-01-06 | 株式会社Ｓｃｒｅｅｎセミコンダクターソリューションズ | Chemical supply method and substrate processing apparatus |
-
2015
- 2015-08-10 JP JP2015158322A patent/JP6342368B2/en active Active
- 2015-09-17 CN CN201580051716.7A patent/CN106716598B/en active Active
- 2015-09-21 TW TW104131060A patent/TWI639540B/en active
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