TWI639540B - Accommodation device for container - Google Patents

Abstract

The object of the present invention is to prevent the replacement of an erroneous container while identifying the container of the processing liquid to be replaced in a short time. In order to solve the above-mentioned problems, a container storage device for storing a plurality of containers 10 storing processing liquids for manufacturing semiconductors includes: a mounting table 13 for mounting the container 10; and a support plate 32 corresponding to the containers 10 mounted on the mounting table 13. The amount of the processing liquid contained therein rises and falls; and the shielding member 34 changes in relative position with respect to the container 10 in response to the rise and fall of the support plate 32. When the amount of liquid in the container 10 is lower than a predetermined volume, the shielding member 34 rises to a position where the container 10 is prevented from moving from the mounting table 13.

Description

Container storage device

The present invention relates to a container storage device that stores a "container containing a processing liquid for manufacturing semiconductors such as a photoresist liquid or a developing liquid".

For example, in the photoetching step in the manufacturing process of a semiconductor device, various liquids are used to "form a photoresist film by coating a photoresist liquid on a wafer" or "developing a photoresist film by supplying a developing solution". deal with. The above-mentioned series of liquid processing is performed by a substrate processing system equipped with "various liquid processing devices" or "a transfer mechanism for transferring wafers between devices".

In this substrate processing system, various processing liquids are supplied from a container storing the processing liquid to various liquid processing apparatuses. However, since a plurality of liquids such as a photoresist liquid or a developing liquid are used as the processing liquid system, As the photoresist liquid or the developing liquid itself, various types are used. Therefore, in this substrate processing system, a plurality of processing liquid containers are arranged.

Therefore, for example, in order to prevent the "empty container after use" from being replaced with a container of a different type by mistake, for example, Patent Document 1 proposes a method of managing each container.

In the method of Patent Document 1, for example, a barcode for identification is affixed in advance on the container surface of the processing liquid, and the barcode is read when the container is replaced, and the appropriateness of the replaced container is determined by comparing with the previously registered data. . [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2001-217217

[Problems to be Solved by the Invention]

In addition, in the substrate processing system as described above, in order to efficiently store a plurality of containers, for example, as shown in FIG. 29, a storage cabinet 201 is used, and the storage cabinet 201 is provided with racks 200 provided in multiple stages in the vertical direction. Further, a plurality of containers 210 are arranged on the stand 200 of each stage.

Therefore, when the container 210 becomes empty, it takes time to determine from the plurality of containers 210 that the container 210 needs to be replaced. In particular, the container 210 is usually colored, and the remaining amount of the processing liquid cannot be confirmed from the outside. Because the size or shape of the container 210 is substantially the same regardless of the type of the processing liquid, it is difficult to use the external The empty container 210 is identified.

Therefore, during the replacement operation of the container 210, there is a possibility that the container 210 of a different object may be replaced by mistake. In addition, if the processing liquid is mixed due to the replacement of the wrong container 210, cleaning of the processing liquid system or the like is required. Therefore, it takes a lot of time and costs to restore the substrate processing system.

The present invention is made in view of this point, and an object thereof is to prevent the replacement of an erroneous container while identifying a container of a processing liquid to be replaced in a short time. [Solution to Problem]

In order to achieve the above object, the present invention is a container storage device that stores a plurality of containers storing a processing liquid for manufacturing semiconductors, and is characterized by including: a plurality of mounting tables for mounting the containers; and a moving member having a configuration At a position where "the container is moved from the mounting table in order to replace the container on the mounting table" is blocked, and when the predetermined conditions are established, the relative position of the container on the mounting table changes, and In order to change the position of the container, "retreat."

According to the present invention, a moving member is disposed at a position that prevents "the container from being moved from the mounting table in order to replace the container." When the predetermined condition is satisfied, the moving member retreats from the position that prevents the "movement for the container replacement". The predetermined condition refers to, for example, a case where the liquid volume of the processing liquid in the container is lower than the predetermined volume, and the container must be replaced. Therefore, the present invention can prevent, for example, when replacing a "container whose liquid volume is lower than a predetermined volume", an erroneous replacement of a container different from the replacement object, that is, an erroneous replacement corresponding to "a position where the moving member has not moved from the container The situation of the container on the retreat. In addition, since the moving mechanism moves, the container to be replaced can be easily identified by identifying the position of the moving mechanism.

The predetermined condition may also be established in a case where the liquid amount of the processing liquid in the container is lower than the predetermined amount.

It may further include a liquid amount detecting mechanism for detecting the liquid amount of the processing liquid in the container; in accordance with the liquid amount detected by the liquid amount detecting mechanism, the relative position of the moving member to the container on the mounting table may change .

The liquid quantity detection mechanism may also be a displacement mechanism that is displaced in position in the height direction in response to the weight of the container placed on the mounting table; a displacement transmission member is connected to the displacement mechanism, and the displacement transmission member connects the displacement mechanism The change in position of is transmitted to the moving member, so that the moving member moves.

The liquid quantity detection mechanism may also be provided with an air bag. The volume of the internal gas of the air bag changes according to the weight of the container placed on the mounting table. The air bag is connected to the cylinder tube mechanism, and the cylinder tube mechanism responds to The gas volume inside the air bag moves the moving member.

The moving member may be a shielding member that moves in a vertical direction on the side of the container.

The moving member may also be located above the container when the liquid volume of the processing liquid in the container is more than a predetermined level, to prevent the container from moving up and down; when the liquid volume of the processing liquid in the container is lower than At a predetermined time, the moving member is moved to a position retracted from above the container.

The invention according to another aspect is a container storage device, which includes a plurality of containers storing processing liquids for manufacturing semiconductors, and is characterized by including a plurality of mounting tables for mounting the containers, and a moving member disposed in an obstacle " In order to replace the container on the mounting platform, the container is moved from the mounting platform "position; the driving mechanism moves the moving member; the flow detection mechanism is used to detect the flow rate of the processing liquid supplied from the container to the outside And a control unit, when the detected flow rate detected by the flow rate detection mechanism is lower than a predetermined threshold, the control unit controls the driving mechanism so that the moving member retreats from a position that hinders "movement for replacing the container". [Effect of the invention]

According to the present invention, at the same time, the container of the processing liquid to be replaced can be identified in a short time, and the wrong container can be prevented from being replaced.

Hereinafter, embodiments of the present invention will be described. FIG. 1 is a front view of a container storage device 1 according to this aspect. The container 10 stored in the container storage device 1 stores, for example, a processing liquid for manufacturing semiconductors. Examples of the treatment liquid include a photoresist liquid, a developing liquid, and a chemical liquid for forming an antireflection film.

The container storage device 1 includes: a storage cabinet 11; a rack base 12 arranged in a plurality of sections in the storage cabinet 11; and a plurality of mounting platforms 13 arranged on the top surface of the rack base 12. In addition, although FIG. 1 depicts a state in which "two sets of mounts 12 are provided in the up-down direction, and four mounts 13 are provided in the horizontal direction on the top surface of each mount 12," The shape of the storage cabinet 11 "and the number and arrangement of the pedestal 12 and the mounting table 13" are not limited to the contents of this embodiment, and can be arbitrarily set. Further, a top plate 14 is provided above the upper frame stand 12.

A "container 10" for storing a processing liquid is placed on each of the mounting tables 13. A cap 21 integrally connected to the "supply tube 20 inserted into the container 10" is attached to an opening above the container 10. The processing liquid in the container 10 is supplied to the outside of the container 10 through the supply tube 20 and the cap 21.

As shown in FIG. 2, the mounting table 13 includes, for example, a slightly cylindrical mounting plate 30 provided on the top surface of the pedestal 12, and a spring extending on the top surface of the mounting plate 30 in the vertical direction. Plate 31; a support plate 32 provided at the end of the spring plate 31 on the opposite side of the mounting plate 30 to support the bottom surface of the container 10; a cam mechanism 33 as a displacement transmitting member connected to the bottom surface of the support plate 32; and The shielding member 34 is a moving member that is moved up and down by the cam mechanism 33. The side surface of the support plate 32 is slidably supported by the cylindrical guide part 35, for example. Therefore, if the container 10 is placed on the support plate 32, the reed 31 will expand and contract according to the amount of the processing liquid in the container 10, the support plate 32 will move in the up-down direction, and this up-down movement will be transmitted to the cam mechanism 33. .

The cam mechanism 33 includes, for example, a connecting rod 40 connected to the bottom surface of the support plate 32, and a bearing 41 that supports the connecting rod 40 to slide freely. The connecting rod 40 has a plurality of freely rotatable joints, and is configured to freely rotate with the bearing 41 as a viewpoint. An end portion of the connecting rod 40 on the side opposite to the support plate 32 is, for example, freely slidably connected to the oval cam member 42. Accordingly, as the support plate 32 moves up and down, the cam member 42 moves through the connecting rod 40.

On the top surface of the cam member 42, the blocking member 34 is supported by, for example, a support rod 43 connected below the blocking member 34. Therefore, by operating the cam mechanism 33, the shielding member 34 can be moved. In addition, FIG. 2 depicts a state in which, for example, the container 10 is filled with the processing liquid, and the shielding member 34 has moved substantially to the upper limit position. In addition, as shown in FIG. 3, for example, the shielding member 34 has a semi-cylindrical shape that “covers the surface (the left side in FIG. 3) received by the operator when the container 10 is replaced”. The shape of the shielding member 34 is not limited to this embodiment, and may be, for example, a cylindrical shape covering the periphery of the container 10 or a flat plate-shaped member.

The container storage device 1 according to this embodiment is configured as described above. Next, the replacement operation of the container 10 in the container storage device 1 will be described.

As shown in FIG. 2, in a state where the container 10 is filled with the processing liquid, according to the weight of the container 10, the spring plate 31 is pushed down through the support plate 32 according to the weight of the container 10. At this time, the reeds 31 and the support plate 32 serving as the displacement mechanism function as a liquid amount detecting mechanism for "detecting the remaining amount of the processing liquid in the container". Further, in a state where the reed 31 and the support plate 32 are pressed down, the shutter member 34 is pressed upward by the cam member 42. In this way, if the shielding member 34 is pushed upward, since the shielding member 34 becomes an obstacle, for example, the gap between "the upper frame 12 or the top plate 14" and "the upper end of the shielding member 34" becomes smaller, so that The container 10 cannot be moved from the mounting table 13. In other words, the shielding member 34 is in a state of being disposed at a position that prevents the container 10 from being moved from the mounting table 13 in order to replace the container 10 on the mounting table 13.

In addition, if the chemical solution in the container 10 is reduced, the weight of the container 10 is reduced, and the support plate 32 is gradually pressed up due to the reed 31. Thereby, for example, as shown in FIG. 4, the cam member 42 moves through the connecting rod 40 to lower the shielding member 34. In addition, if the predetermined conditions are satisfied, specifically, if the processing liquid in the container 10 becomes substantially empty, the shielding member 34 as an obstacle will descend to the lower limit position. In other words, the shielding member 34 is retracted from a position that prevents the "movement for replacing the container 10". As a result, the gap between the "upper end of the shielding member 34" and the "stand 12 or the top plate 14" will be in a state where "the degree to which the container 10 can be moved from the mounting table 13" is ensured, and can be replaced. The container 10. In addition, when the shielding member 34 is lowered, the position of the shielding member 34 in the up-down direction becomes different from that of other containers 10 that are not empty. Therefore, it becomes "by checking the position of the shielding member 34, the operator can The state of the empty container 10 "can be easily determined by visual inspection.

When the worker confirms the position of the shielding member 34 and identifies the empty container 10, the container 10 is replaced. After the container 10 is replaced, due to the weight of the new container 10, the reed 31 and the support plate 32 are lowered, and subsequently, the cam member 33 and the shielding member 34 are pushed up to the upper limit position again. Thereby, the container 10 of the mounting table 13 is in the state of "unable to be taken out due to the shielding member 34" again.

According to the above embodiment, the shielding member 34 moves the container relatively up and down in response to the amount of liquid in the container 10, and when the liquid amount is lower than a predetermined threshold, for example, when it becomes empty, because of the obstacle "for replacing the mounting table 13" The position of the container 10 on top of the container 10 is moved, so that accidental replacement of the "container 10 which is different from the replacement object during the replacement operation of the container 10" can be prevented, that is, it can prevent accidental replacement corresponding to " The container 10 of the mounting table 13 ″ where the shielding member 34 is not retracted from the position where the movement of the container 10 is blocked.

In addition, although the container 10 is replaced in a normal replacement operation, for example, a label attached to the container 10 is confirmed to identify the empty container 10, but an identifier such as a label does not always face the operator. Therefore, it sometimes takes time to determine the empty container 10. In contrast, in the present invention, by confirming the position of the shielding member 34 visually, the container 10 to be replaced can be easily identified. Furthermore, since the shielding member 34 operates in response to the amount of liquid in the container 10, for example, the approximate liquid amount in the container 10 can be known by an operator confirming the position of the height of the shielding member in the field. Therefore, it is effective in "holding the approximate replacement time of the container 10". Therefore, according to the present invention, replacement errors can be prevented and the container 10 replacement operation can be performed efficiently.

In addition, since the shielding member can be moved up and down by a mechanism that does not require an electric drive device such as the cam mechanism 33 and the reed 31, it is not necessary to use a control device such as a substrate processing system (not shown) of the container storage device 1 Wait for special control. Therefore, the container storage device 1 can be realized at a low cost without increasing the load on the control device or generating wiring work.

However, it does not negate "the use of an electric drive device such as an electric actuator in the container storage device 1", for example, an "electric or air-actuated drive mechanism", etc. The measuring mechanism of the displacement amount of the sheet 31 ”or“ the piezoelectric element for measuring the weight of the container 10 ”detects the amount of liquid in the container 10 and moves the shielding member 34 based on the detection signal.

When measuring the amount of liquid in the electrical container 10, for example, a flow meter or a liquid level meter may be provided in the supply pipe 20 in the container 10, and for example, "the detection of the flow meter becomes zero" or " When the detection level of the liquid level gauge becomes the zero level ", it is determined that the container 10 has been replaced, and the shielding member 34 is moved.

In addition, although in the above embodiment, the shielding member 34 is moved up and down, the moving direction of the shielding member 34 is not limited to the content of this embodiment, as long as the container 10 does not need to be replaced, it can be What is necessary is to prevent "the container 10 moves from the movement of the mounting table 13", and the direction of the movement can be set arbitrarily. Further, a mechanism for moving a moving member such as the shielding member 34 is not limited to the cam mechanism 33, and various known mechanisms can be used.

Regarding other embodiments, for example, as shown in FIG. 5, as a mechanism for moving the shielding member 34, an air cylinder 50 or the like may be used instead of the cam mechanism 33. When the air cylinder 50 is used, for example, an air bag 51 which is filled with gas and can be freely expanded and contracted in the vertical direction is provided below the support plate 32. The air bag 51 and the air cylinder 50 are connected by an air supply pipe 52. . As the support plate 32 moves up and down, the gas volume in the air bag 51 changes, and this volume change is transmitted to the air cylinder through the air supply pipe 52, whereby the air cylinder 50 passes through the support rod 43, The shielding member 34 is moved up and down.

When the air cylinder 50 is used, the air bag 51 is not necessarily provided. For example, the support plate 32 and the guide portion 35 may be configured, and the air supply pipe 52 may be communicated and provided in the “space A surrounded by the support plate 32 and the guide portion 35” so that the “through the support plate 32 and the guide portion 35” The space A ″ surrounded by the guide portion 35 can be kept airtight. Since the space A can also function as an air bag in this case, and the volume change of the space A can be transmitted from the air supply pipe 52 to the air cylinder 50, the shielding member 34 can be moved up and down by the air cylinder. The other configurations are the same as those in the case of FIG. 2, and therefore descriptions thereof are omitted.

In another embodiment, for example, as shown in FIG. 6, a rack and a pinion 60 may be used as a displacement transmitting member that transmits the operation of the support plate 32 to the shielding member 34. In this case, for example, one rack 61 is connected to the support plate 32, and the other rack 63 is provided, for example, by sandwiching the pinion 6 provided on the outside of the guide portion 35. The pinion gear 62 is fixed to a position in the height direction and is provided. In FIG. 6, for example, another rack 63 is directly fixed to the shielding member 34.

For example, as shown in FIG. 7, after the container 10 is replaced, the rack 61 and the support plate 32 move downward together, thereby the other rack 63 provided with the pinion gear 62 raised and the shielding member 34 Raise to a position that prevents the container 10 from being replaced. The other configurations are the same as those in the case of FIG. 2, and therefore descriptions thereof are omitted.

The member for preventing the movement of the container 10 is not limited to the shielding member 34, and various members may be used. For example, as shown in FIG. 8, an air bag 70 may be provided as a moving member instead of the shielding member 34 in the space between the guide portion 35 and the mounting plate 30. In this case, a space A surrounded by the support plate 32 and the guide portion 35 is hermetically formed, and the air pipe 52 is provided to communicate the space A and the air bag 70. The other components are the same as those in the case of FIG. 2.

As shown in FIG. 8, when the container 10 is filled with the processing liquid, the space A is compressed, and the gas in the space A is moved to the air bag 70, so that the air bag 70 is stretched upward. Thereby, the airbag 70 can perform the function which obstructs the "movement for replacing the container 10." When the processing liquid in the container 10 decreases, the support plate 32 is pushed upward by the reeds 31, and the volume of the space A is increased. In this way, the gas passes through the gas supply pipe 52 and flows into the space A side from the air bag 70. As shown in FIG. 9, the air bag 70 is contracted and the container 10 is in a state of being replaceable. In addition, in the case where the air bag is used instead of the shielding member 34, the use of electric driving equipment or electrical measuring equipment is not completely denied. For example, it is the same as the case where the shielding member 34 is electrically moved. For example, the remaining amount of the processing liquid in the container 10 may be measured electrically, and the remaining amount may be stored in the air bag 70 according to the remaining amount, for example, by an air compressor. After the gas is supplied, the air bag 70 is stretched, and the gas is exhausted using a solenoid valve or the like, so that the air bag 70 is contracted.

Although in the above embodiment, the shielding member 34 is used as a moving moving member to prevent the container 10 from being replaced, the article used as the moving member is not limited to the shielding member. For example, as shown in FIGS. 10 and 11, a slightly U-shaped holding member 80 for holding the container 10 may be provided, and the cap 21 may be sandwiched at a position lower than the cap 21 of the container 10, and The holding member 80 operates in conjunction with the vertical movement of the support plate 32.

In this case, the holding member 80 is provided on the opposite side from the "operator pick-up side (left side of Fig. 10 and Fig. 11)" when the container 10 in the mounting table 13 is replaced. In addition, a movable mechanism 81 is provided. The movable mechanism 81 moves up and down with the connecting rod 40 connected to the bottom surface of the support plate 32, so that the holding member 80 can be rotated in the θ direction of FIG. 11; and the movable mechanism 81 supports and The opposite end portion of the “holding member 80 holding one side of the container 10”. Thereby, for example, as shown in FIG. 11, when the container 10 immediately after replacement is placed on the mounting table 13, the holding member 80 moves to suppress from above the container 10, and functions to hinder the movement of the container 10.

In addition, if the processing liquid in the container 10 is reduced, the holding member 80 will act as "using the movable mechanism 81 as a fulcrum and standing upright from the horizontal direction to the vertical direction"; if the container 10 becomes empty, as shown in FIG. 12, for example, The holding member 80 moves from above the container 10 to a retracted position. Thereby, the movement of the container 10 is not hindered by the holding member 80, and the replacement operation of the container 10 can be performed.

Moreover, in the above embodiment, according to the liquid volume of the processing liquid in the container 10, the shielding member 34 or the holding member 80 is moved through the cam mechanism 33 or the movable mechanism 81. However, for example, the cam The so-called displacement transmitting member such as the mechanism 33 or the movable mechanism 81 is configured to be easily removed, and the "unused container 10" can be removed by performing the "removal" operation from time to time.

In addition, similarly to the case where the shielding member 34 is moved by an electric drive device, for example, a diagram in which the remaining amount of the processing liquid in the container 10 is electrically measured and the holding member 80 is moved in accordance with the remaining amount may be used. The "electric drive mechanism 90" shown in 13 replaces the "movable mechanism 81". As the drive mechanism 90, for example, an electric actuator or an air cylinder can be used. In this case, the driving mechanism 90 is rotated so that when the container 10 is replaced, the holding member 80 is erected in the vertical direction by the driving mechanism 90; in other cases, that is, when the container 10 is not replaced, The driving mechanism 90 is rotated so that the holding member 80 faces the horizontal direction, and the replacement of the wrong container 10 can be prevented. In addition, when a driving mechanism 90 that is electrically driven is used, as shown in FIG. 13, there is no need for a mechanism such as a cam mechanism 33 or a reed 31, and the support plate 32 does not need to be raised and lowered. In this case, the container 10 may be directly placed on the mounting plate 30.

When the amount of liquid in the container 10 is electrically measured, for example, as shown in FIG. 13, a liquid level meter 91 may be provided near the bottom end of the container 10 near the front end of the supply tube 20 to detect the vicinity of the bottom surface of the container 10 The presence or absence of a treatment liquid; or, as shown in FIG. 13, a flow meter 101 as a flow detection mechanism may be provided in the “external supply pipe 100 for supplying a treatment liquid from a container 10 to a demand source” to detect the presence or absence of a flow through an external supply. The processing liquid in the tube 100; thereby, the presence or absence of the processing liquid in the container 10 is detected. When the liquid level gauge 91 is used, for example, when the detection level of the liquid level gauge 91 becomes the zero level, it can be determined as the replacement time of the container 10. In addition, when the flow meter 101 is used, if the detection value of the flow meter 101 becomes zero, it can be determined as the replacement time of the container 10. In addition, a detection signal from the level gauge 91 or a detection signal from the flowmeter 101 is input to the control device 102, and the control device 102 controls the operation of the drive mechanism 90 based on the detection signals.

In addition, although FIG. 13 illustrates a case where the holding member 80 is rotated between the vertical direction and the horizontal direction by the driving mechanism 90, how to move the holding member 80 is not limited to this embodiment. For example, as shown in FIG. 14, a driving mechanism 110 may be provided to reciprocate the holding member 80 held in the horizontal state in the horizontal direction, and by moving the holding member 80 to the left of FIG. 14, for example, "to replace the container 10 movement ", and the holding member 80 is moved to the right in Fig. 14 so that the container 10 can be replaced. For example, as shown in FIG. 15, the driving mechanism 120 may be provided to reciprocate the holding member 80 held in a horizontal state in the vertical direction, and by moving the holding member 80 in the downward direction in FIG. 15, for example, "for replacement "Movement of the container 10", and the holding member 80 is moved upward in Fig. 15 so that the container 10 can be replaced. In addition, although the drawing of the control device 102, the liquid level meter 91, and the flow meter 101 is omitted in FIGS. 14 and 15, other types of equipment described below may be appropriately installed as necessary.

In addition, the shape of the holding member 80 is not limited to the content of this embodiment, and may be arbitrarily set as long as it has a function of "preventing the container 10 from being moved when the container 10 is replaced". For example, as shown in FIG. 16, the holding members 130 a and 130 b having a semicircular shape in a plan view may be arranged, and the holding members 130 a and 130 b may be sandwiched near the cap 21 at a position lower than the cap 21 of the container 10. 130b is moved in the horizontal direction (the up-down direction in FIG. 16) by the drive mechanism 131, respectively.

In addition, the holding member 80 does not need to hold the container 10 itself. For example, as shown in FIG. 17, the holding member 140 having a substantially flat shape in a plan view may be disposed at the “position of the cap 21 covering the container 10” and be “closest to The position above the cap 21 "restricts the movement of the container 10 in the up and down direction and obstructs" the movement for replacing the container 10 ". In this case, as for the operation of the holding member 140, for example, the driving mechanism 110 shown in FIG. 14 can be used to move the holding member 140 in the left-right direction of FIG. 17; for example, the driving mechanism 120 shown in FIG. 15 can also be used to make The holding member 140 moves in the vertical direction; the driving mechanism 131 shown in FIG. 16 can also be used to move the holding member 140 in the vertical direction of FIG. 17.

In addition, although FIG. 17 depicts a configuration in which the slightly flat holding member 140 is disposed closest to the cap 21, the holding member 140 may be replaced, for example, as shown in FIG. 18, and a cover with a bottom opening may be used instead. The body 141 surrounds the cap 21 to restrict the container 10 from moving in the up and down direction, and retreats the cap 21 upward by the driving mechanism 120 as necessary; the shape of the holding member or the cover is not limited to the content of this implementation, but Arbitrarily set. From the viewpoint of relatively moving the container 10 to the holding members 80 and 140 or the lid 141, it is not necessary to move the holding members 80 and 140 or the lid 141. For example, the driving mechanism 120 shown in FIG. 15 may be moved. It is connected to the support plate 32 and moves the container 10 itself relative to the holding members 80 and 40 or the lid 141.

When the container 10 itself is moved, for example, as shown in FIG. 19, the reed 31 may be disposed at a position deviated from the center of the container 10, and the support plate 32 may be “supported on one side of the reed 31”. The end portion on the opposite side is fixed to the guide portion 35 rotatably by a hinge 142, for example, and a holding member 140 is provided above the cap 21 of the container 10. In addition, the hinge 142 side of FIG. 19 is an access surface. In this case, if the processing liquid in the container 10 is reduced, the end of the support plate 32 on the side opposite to the hinge 142 due to the reed 31 will be gradually pressed upward. For example, as shown in FIG. 20, the container 10 is directed toward the receiving end. The direction of the face is inclined. In this way, for example, the cap 21 is moved to a position that does not interfere with the holding member 140 in a plan view, and the container 10 can be taken out from the mounting table 13 in an oblique direction. In this case, the so-called "mechanism for tilting the container 10", such as the reed 31, the support plate 32, and the hinge 142, is also understood as "within the scope of the moving member of the present invention that moves in a manner that prevents the container 10 from being replaced".

Alternatively, the semi-cylindrical shielding member 34 may be replaced as another embodiment when the shielding member is used. For example, flat shielding members 150a and 150b having a predetermined height as shown in FIGS. 21 and 22 may be used. It is set on the access surface of the operator (left side of Fig. 21, left side of Fig. 22), and at the same time, a rotation shaft 151 such as a hinge is provided at the ends of the shielding members 150a and 150b so that it can be used as a hinged door Opening and closing. In this case, for example, when the container 10 does not need to be replaced, the rotating shaft 151 is fixed by an electromagnetic brake (not shown), so that the blocking members 150a and 150b cannot be opened and closed in advance; when the liquid level gauge 91 and the flowmeter 101 detect When it needs to be replaced, by releasing the electromagnetic brake, the operator can open the shielding members 150a and 150b and access the container 10.

Moreover, in the above embodiment, the so-called members that prevent the container 10 from moving, such as the shielding member 34 or the shielding members 150a and 150b, are arranged inside, for example, the mounting plate 30. However, these arrangements are not limited. Contents of this embodiment. For example, as shown in FIG. 23, a rod-shaped rod-shaped member 152 having a slightly U-shape which obstructs the movement of the container 10 in front of the container 10 as viewed from the side of the operator receiving side, and a driving mechanism 153 may be provided. It rotates the rod-shaped member 152 toward, for example, the surface of the worker receiving side shown in FIG. 24. FIG. 24 depicts a state in which the container 10 is viewed from the right side of FIG. 23, and the left side of FIG. 24 is the receiving surface of the operator. When the rod-shaped member 152 is rotated, for example, as shown in FIG. 25, other racks 63 and shielding members 34 may be removed from the mounting table 13 shown in FIG. 6, and the rod-shaped member 152 may be connected to the The pinion 62 is fixed in position, and the rod-shaped member 152 is rotated by the rotation of the pinion 62.

Moreover, from the viewpoint of preventing accidental replacement of the container 10 that does not need to be replaced, it is not necessary to hinder the movement of the container 10 itself. Generally, for example, as shown in FIG. 26, a bracket 160 for preventing rotation is provided on the cap 21. Therefore, for example, as shown in FIG. 26, a “fixing member 161 for fixing the bracket 160” and a “driving mechanism 162 for moving the fixing member 161” may be provided. When the container 10 does not need to be replaced, the position of the fixing bracket 160 The fixing member 161 is moved, and the fixing member 161 is moved to release the fixing of the bracket 160 when replacement is needed. In this way, the fixing member 161 or the driving mechanism 162 that prevents the cap 21 from being removed from the container 10 is also understood as "within the scope of the moving member of the present invention that prevents the container 10 from moving in a manner that prevents the container 10 from being replaced".

In the above embodiment, the air bag 70 is used as a substitute for the shielding member 34 by expanding and contracting the air bag 70. However, for example, as shown in FIG. 27, it may be arranged along the inner peripheral surface of the mounting plate 30, for example. When the ring-shaped air bag 170 detects that the container 10 needs to be replaced by the liquid level meter 91 or the flow meter 101, the gas is supplied to the air bag 170 through a gas supply pipe 52 from a gas supply source (not shown). By supplying the gas, the container 10 is held by the air bag 170, and the movement for replacing the container 10 can be prevented.

In addition, in the case of using an electrical mechanism, in addition to electrically moving the holding member 80 or electrically detecting the residual amount of the processing liquid in the container 10, for example, consideration is also given to providing a container 10 for identifying a replacement object. The display lamp 180. In this case, for example, as shown in FIG. 28, a display lamp 180 may be provided near each mounting table 13 and the display lamp 180 corresponding to the container 10 movable at the container replacement position may be turned on. In addition, since a substrate processing system (not shown) using the container storage device 1 is usually installed in a plurality of clean rooms, a plurality of container storage devices 1 are also provided. Therefore, it is sometimes difficult to determine at a glance which container 10 of the container storage device 1 is the replacement target. In this case, for example, as shown in FIG. 28, a display lamp 181 may be provided at any place where the top plate 14 of the container storage device 1 is easily identifiable, and it is possible to determine at a glance which container storage device 1 has the container 10 to be replaced. The lighting of the display lamps 180 and 181 is controlled by the control device 102, for example.

Moreover, in the above embodiment, as a predetermined condition for setting the container 10 to a replaceable state, "the amount of the processing liquid in the container 10 is reduced to a predetermined amount, and the container 10 needs to be replaced." The situation is described as an example, however, the predetermined conditions set to the state of the replaceable container 10 are not limited to the contents of this embodiment. For example, when changing the "type of processing liquid used in a substrate processing system (not shown)", the container 10 may need to be replaced regardless of the remaining amount of the processing liquid in the container 10. In this case, for example, as shown in FIG. 13, a switch 102 a may be set in the control device 102 in advance, without the detection of the liquid level meter 91 or the detection of the flow meter 101. The switch 102 a can directly operate the driving mechanism 90. Similarly, the on and off of the display lamps 180 and 181 can be controlled by the switch 102a.

As mentioned above, although suitable embodiment of this invention was demonstrated referring an accompanying drawing, this invention is not limited to this example. As long as it is an ordinary knowledgeable person within the scope of the ideology described in the scope of the patent application, it is naturally also within the technical scope of the present invention that various modifications or amendments can be considered. The present invention is not limited to the above embodiments, and various aspects can be adopted. Although in the above embodiment, the case where the container storage device 1 stores a container for "processing liquid for manufacturing semiconductor wafers" is taken as an example, the processing liquid is not limited to the processing liquid for manufacturing semiconductor wafers. For example, it is a matter of course that it can also be applied to the case where the container "the adhesive used in the bonding process for bonding semiconductor wafers to each other" is accommodated. [Industrial use possibilities]

The present invention is applicable when a container for storing a processing liquid is stored.

1‧‧‧ container storage device
10‧‧‧ container
11‧‧‧Storage cabinet
12‧‧‧ stand
13‧‧‧mounting table
14‧‧‧Top plate
20‧‧‧Supply tube
21‧‧‧ Cap
30‧‧‧mounting plate
31‧‧‧ reed
32‧‧‧ support board
33‧‧‧ cam mechanism
34‧‧‧shielding member
35‧‧‧Guide
40‧‧‧Connector
41‧‧‧bearing
42‧‧‧ cam member
43‧‧‧ support stick
50‧‧‧air cylinder
51‧‧‧airbag
2‧‧‧ trachea
60‧‧‧ Rack and pinion
61‧‧‧ Rack
62‧‧‧ Pinion
63‧‧‧ Rack
70‧‧‧airbag
80‧‧‧ holding member
81‧‧‧ movable mechanism
90‧‧‧ drive mechanism
91‧‧‧ level meter
100‧‧‧External supply pipe
101‧‧‧Flowmeter
102‧‧‧Control device
102a‧‧‧Switch
110‧‧‧Drive mechanism
120‧‧‧Drive mechanism
130a‧‧‧Retaining member
130b‧‧‧ holding member
131‧‧‧Drive mechanism
140‧‧‧Retaining member
141‧‧‧ cover
142‧‧‧ hinge
150a‧‧‧shielding member
150b‧‧‧shielding member
151‧‧‧rotation axis
152‧‧‧ rod-shaped member
153‧‧‧Drive mechanism
160‧‧‧Fixed bracket
161‧‧‧Fixed components
162‧‧‧Drive mechanism
170‧‧‧airbag
180‧‧‧ Display Light
181‧‧‧ Display Light
200‧‧‧ stand
201‧‧‧Storage cabinet
210‧‧‧ container
A‧‧‧space

FIG. 1 is a schematic front view showing the configuration of a container storage device according to an embodiment. [FIG. 2] A schematic side explanatory view showing a configuration near a mounting table. Fig. 3 is a cross-sectional view showing the shape of the shielding member. [Fig. 4] A schematic side explanatory view showing a configuration near a mounting table. [Fig. 5] A schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. FIG. 6 is a schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. FIG. 7 is a schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. [FIG. 8] A schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. FIG. 9 is a schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. [Fig. 10] A plan view showing the shape of a holding member. [FIG. 11] A schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. [Fig. 12] A schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. [Fig. 13] A schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. [FIG. 14] A schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. [FIG. 15] A schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. 16 is a plan view showing the shape of a holding member according to another embodiment. 17 is a plan view showing the shape of a holding member according to another embodiment. [FIG. 18] A schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. [FIG. 19] A schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. [Fig. 20] A schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. [FIG. 21] A schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. [FIG. 22] A plan view showing the shape of a holding member according to another embodiment. [FIG. 23] A schematic front view showing a structure near a mounting table according to another embodiment. [Fig. 24] A schematic right side view showing a configuration in the vicinity of a mounting table according to another embodiment. [FIG. 25] A schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. [FIG. 26] A schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. [FIG. 27] A schematic side explanatory view showing a configuration in the vicinity of a mounting table according to another embodiment. [FIG. 28] A schematic front view showing the configuration of another container storage device according to this aspect. [FIG. 29] A schematic perspective view showing a configuration of a conventional storage cabinet.

Claims (8)

A container accommodating device which stores a plurality of containers storing a processing liquid for manufacturing semiconductors, and is characterized by comprising: a plurality of mounting tables for mounting the containers; and a moving member configured to prevent "for changing the Position of the container on the mounting table to move the container from the mounting table ", and the relative position of the container on the mounting table will change when the predetermined conditions are established, and it will prevent" the movement for replacing the container " Back off. The container storage device according to item 1 of the scope of the patent application, wherein the predetermined condition is that the liquid amount of the processing liquid in the container is lower than the predetermined amount. The container storage device according to item 2 of the scope of patent application, further comprising a liquid amount detecting mechanism for detecting the liquid amount of the processing liquid in the container; corresponding to the liquid amount detected by the liquid amount detecting mechanism, the The relative position of the moving member with respect to the container on the mounting table changes. The container storage device according to item 3 of the scope of the patent application, wherein the liquid amount detection mechanism is a displacement mechanism, and a position in the height direction of the displacement mechanism will be displaced according to the weight of the container placed on the mounting table; A displacement transmitting member is connected to the displacement mechanism, and the displacement transmitting member transmits a change in the position of the displacement mechanism to the moving member to move the moving member. The container storage device according to item 3 of the scope of application for a patent, wherein the liquid quantity detection mechanism is provided with an air bag, and the volume of the gas inside the air bag changes according to the weight of the container placed on the mounting table; The air bag is connected to a cylinder mechanism, which moves the moving member in response to the volume of gas inside the air bag. The container accommodating device according to any one of claims 1 to 5, wherein the moving member is a shielding member that moves in a vertical direction on a side of the container. The container accommodating device according to any one of claims 3 to 5, wherein when the liquid volume of the processing liquid in the container is greater than or equal to a predetermined level, the moving member is positioned above the container to prevent The container moves in the up and down direction; when the liquid volume of the processing liquid in the container is lower than a predetermined volume, the moving member moves to a position to retreat from above the container. A container storage device containing a plurality of containers storing a processing liquid for manufacturing semiconductors, comprising: a plurality of mounting tables for mounting the containers; a moving member disposed on the block "for changing the mounting table" Position of the container to move the container from the mounting table; a driving mechanism to move the moving member; a flow detection mechanism to detect the flow of the processing liquid supplied from the container to the outside; and a control unit, when When the detected flow rate detected by the flow rate detection mechanism is lower than a predetermined threshold, the control unit controls the driving mechanism so that the moving member retreats from a position that hinders "movement for replacing the container".