JP2016063226A5 - - Google Patents
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- Publication number
- JP2016063226A5 JP2016063226A5 JP2015178095A JP2015178095A JP2016063226A5 JP 2016063226 A5 JP2016063226 A5 JP 2016063226A5 JP 2015178095 A JP2015178095 A JP 2015178095A JP 2015178095 A JP2015178095 A JP 2015178095A JP 2016063226 A5 JP2016063226 A5 JP 2016063226A5
- Authority
- JP
- Japan
- Prior art keywords
- component
- applying
- material deposited
- hno3
- components
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims 36
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims 24
- 229910017604 nitric acid Inorganic materials 0.000 claims 24
- 238000000034 method Methods 0.000 claims 23
- 239000000463 material Substances 0.000 claims 20
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims 18
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 claims 12
- 239000000126 substance Substances 0.000 claims 9
- 230000001590 oxidative effect Effects 0.000 claims 8
- 239000012286 potassium permanganate Substances 0.000 claims 8
- 238000005406 washing Methods 0.000 claims 8
- 239000000203 mixture Substances 0.000 claims 7
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims 4
- 238000004140 cleaning Methods 0.000 claims 4
- 238000005238 degreasing Methods 0.000 claims 4
- 238000001035 drying Methods 0.000 claims 4
- 238000005530 etching Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000009832 plasma treatment Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462051920P | 2014-09-17 | 2014-09-17 | |
| US62/051,920 | 2014-09-17 | ||
| US14/525,118 | 2014-10-27 | ||
| US14/525,118 US9406534B2 (en) | 2014-09-17 | 2014-10-27 | Wet clean process for cleaning plasma processing chamber components |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016063226A JP2016063226A (ja) | 2016-04-25 |
| JP2016063226A5 true JP2016063226A5 (https=) | 2018-10-18 |
| JP6584249B2 JP6584249B2 (ja) | 2019-10-02 |
Family
ID=55455446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015178095A Active JP6584249B2 (ja) | 2014-09-17 | 2015-09-10 | プラズマ処理チャンバの構成部品を洗浄する湿式洗浄工程 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9406534B2 (https=) |
| JP (1) | JP6584249B2 (https=) |
| KR (1) | KR20160033056A (https=) |
| CN (1) | CN105428210B (https=) |
| TW (1) | TWI693651B (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20190070639A1 (en) * | 2017-09-07 | 2019-03-07 | Applied Materials, Inc. | Automatic cleaning machine for cleaning process kits |
| KR102461911B1 (ko) * | 2018-07-13 | 2022-10-31 | 삼성전자주식회사 | 플라즈마 제네레이터, 이를 포함하는 세정수 처리 장치, 반도체 세정 장치 및 세정수 처리 방법 |
| US11488848B2 (en) * | 2018-07-31 | 2022-11-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated semiconductor die vessel processing workstations |
| KR102836261B1 (ko) * | 2018-09-21 | 2025-07-18 | 램 리써치 코포레이션 | 플라즈마 프로세싱 챔버를 컨디셔닝하기 위한 방법 |
| KR102156980B1 (ko) * | 2018-11-28 | 2020-09-16 | 배기백 | 차량의 크롬몰딩 복원방법 |
| KR102024757B1 (ko) * | 2019-02-15 | 2019-09-24 | (주)에이텍솔루션 | 이온 소스의 세정 방법 및 이를 이용한 반도체 소자의 제조 방법 |
| KR102027183B1 (ko) * | 2019-03-08 | 2019-10-01 | (주)에이텍솔루션 | 이온 소스의 세정 방법 및 이를 이용한 반도체 소자의 제조 방법 |
| WO2021126889A1 (en) * | 2019-12-17 | 2021-06-24 | Applied Materials, Inc. | Surface profiling and texturing of chamber components |
| CN111534825B (zh) * | 2020-05-14 | 2022-05-31 | 富乐德科技发展（大连）有限公司 | 去除半导体设备不锈钢部件钛及氮化钛沉积膜的工艺 |
| US20210391150A1 (en) * | 2020-06-10 | 2021-12-16 | Plasma-Therm Llc | Plasma Source Configuration |
| US12237186B2 (en) * | 2022-09-15 | 2025-02-25 | Applied Materials, Inc. | On-board cleaning of tooling parts in hybrid bonding tool |
| CN118988887A (zh) * | 2024-09-26 | 2024-11-22 | 安徽富乐德科技发展股份有限公司 | 一种带有复杂的空腔结构的shower head的清洗工艺 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100265289B1 (ko) * | 1998-01-26 | 2000-09-15 | 윤종용 | 플라즈마식각장치의 캐소우드 제조방법 및 이에 따라 제조되는 캐소우드 |
| KR100445273B1 (ko) * | 2001-10-26 | 2004-08-21 | 손정하 | 세라믹 절연체의 세정방법 |
| CN100382230C (zh) * | 2002-04-17 | 2008-04-16 | 兰姆研究公司 | 硅电极及其生产方法、生产硅部件及加工半导体晶片方法 |
| US6902628B2 (en) * | 2002-11-25 | 2005-06-07 | Applied Materials, Inc. | Method of cleaning a coated process chamber component |
| US7045072B2 (en) * | 2003-07-24 | 2006-05-16 | Tan Samantha S H | Cleaning process and apparatus for silicate materials |
| US7077918B2 (en) * | 2004-01-29 | 2006-07-18 | Unaxis Balzers Ltd. | Stripping apparatus and method for removal of coatings on metal surfaces |
| US20090142247A1 (en) * | 2007-12-03 | 2009-06-04 | Applied Materials, Inc. | Chemical treatment to reduce machining-induced sub-surface damage in semiconductor processing components comprising silicon carbide |
| ES2764249T3 (es) * | 2008-05-02 | 2020-06-02 | Oerlikon Surface Solutions Ag Pfaeffikon | Procedimiento para decapar piezas de trabajo y solución de decapado |
| US8075701B2 (en) * | 2008-06-30 | 2011-12-13 | Lam Research Corporation | Processes for reconditioning multi-component electrodes |
| US8734586B2 (en) * | 2012-02-02 | 2014-05-27 | Sematech, Inc. | Process for cleaning shield surfaces in deposition systems |
-
2014
- 2014-10-27 US US14/525,118 patent/US9406534B2/en active Active
-
2015
- 2015-09-10 JP JP2015178095A patent/JP6584249B2/ja active Active
- 2015-09-16 KR KR1020150131195A patent/KR20160033056A/ko not_active Withdrawn
- 2015-09-16 TW TW104130517A patent/TWI693651B/zh active
- 2015-09-17 CN CN201510593168.2A patent/CN105428210B/zh active Active
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