JP2016057294A5 - - Google Patents

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Publication number
JP2016057294A5
JP2016057294A5 JP2015173596A JP2015173596A JP2016057294A5 JP 2016057294 A5 JP2016057294 A5 JP 2016057294A5 JP 2015173596 A JP2015173596 A JP 2015173596A JP 2015173596 A JP2015173596 A JP 2015173596A JP 2016057294 A5 JP2016057294 A5 JP 2016057294A5
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JP
Japan
Prior art keywords
charged particle
radiation sensor
plate
group
detector
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JP2015173596A
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English (en)
Japanese (ja)
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JP6162187B2 (ja
JP2016057294A (ja
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Priority claimed from EP14183576.9A external-priority patent/EP2993682A1/en
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JP2015173596A 2014-09-04 2015-09-03 透過型荷電粒子顕微鏡内で分光を実行する方法 Active JP6162187B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP14183576.9A EP2993682A1 (en) 2014-09-04 2014-09-04 Method of performing spectroscopy in a transmission charged-particle microscope
EP14183576.9 2014-09-04

Publications (3)

Publication Number Publication Date
JP2016057294A JP2016057294A (ja) 2016-04-21
JP2016057294A5 true JP2016057294A5 (cg-RX-API-DMAC7.html) 2017-02-23
JP6162187B2 JP6162187B2 (ja) 2017-07-12

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JP2015173596A Active JP6162187B2 (ja) 2014-09-04 2015-09-03 透過型荷電粒子顕微鏡内で分光を実行する方法

Country Status (4)

Country Link
US (1) US9524851B2 (cg-RX-API-DMAC7.html)
EP (2) EP2993682A1 (cg-RX-API-DMAC7.html)
JP (1) JP6162187B2 (cg-RX-API-DMAC7.html)
CN (1) CN105405734B (cg-RX-API-DMAC7.html)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3070732A1 (en) * 2015-03-18 2016-09-21 Fei Company Apparatus and method of performing spectroscopy in a transmission charged-particle microscope
US10495516B2 (en) * 2015-06-30 2019-12-03 Imec Vzw Dedicated transformation spectroscopy
CN109983326A (zh) * 2016-11-09 2019-07-05 Imec 非营利协会 用于组合的stem和eds断层摄影的装备
EP3444836B1 (en) * 2017-08-17 2020-01-29 FEI Company Diffraction pattern detection in a transmission charged particle microscope
US10522323B2 (en) * 2018-04-05 2019-12-31 Fei Company Electron energy loss spectroscopy with adjustable energy resolution
EP3564982A1 (en) * 2018-05-02 2019-11-06 FEI Company Eels detection technique in an electron microscope
US10699875B2 (en) * 2018-11-13 2020-06-30 Fei Company Confocal imaging technique in a charged particle microscope
US11508551B2 (en) * 2018-12-14 2022-11-22 Kla Corporation Detection and correction of system responses in real-time
EP3767663A1 (en) * 2019-07-16 2021-01-20 FEI Company Method of manufacturing a charged particle detector
CN111046325B (zh) * 2019-09-30 2021-11-19 西安交通大学 一种化合物材料电子非弹性散射截面的确定方法
JP2022034866A (ja) * 2020-08-19 2022-03-04 株式会社ニューフレアテクノロジー マルチ電子ビーム検査装置及びその調整方法
US12123816B2 (en) * 2021-06-21 2024-10-22 Fei Company Vibration-free cryogenic cooling
DE102021122388A1 (de) * 2021-08-30 2023-03-02 Carl Zeiss Microscopy Gmbh Teilchenstrahlsäule
US20250069847A1 (en) * 2023-08-22 2025-02-27 Fei Company Differential phase contrast microanalysis using energy loss spectrometers

Family Cites Families (16)

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Publication number Priority date Publication date Assignee Title
JPS595869U (ja) * 1982-07-02 1984-01-14 日本電子株式会社 可変スリツト装置
JPH09330681A (ja) * 1996-06-07 1997-12-22 Ricoh Co Ltd 高分解能電子エネルギー損失分光測定装置
JP2000348670A (ja) * 1999-06-08 2000-12-15 Ricoh Co Ltd 電子線分光装置および電子顕微鏡
JP2003114204A (ja) * 2001-10-03 2003-04-18 Canon Inc 状態検出装置および状態検出方法、走査型分析装置および元素分析方法
JP2004214057A (ja) * 2003-01-06 2004-07-29 Hitachi High-Technologies Corp 電子線分光器、それを備えた電子顕微鏡及び分析方法
FR2874124B1 (fr) 2004-08-04 2006-10-13 Centre Nat Rech Scient Cnrse Dispositif pour l'acquisition d'images et/ou de spectres de pertes d'energie
CN101523171A (zh) * 2005-07-11 2009-09-02 瑞沃瑞公司 用于非破坏性地确定薄膜中元素的分布轮廓的方法和系统
EP2267751A3 (en) * 2005-09-06 2011-01-05 Carl Zeiss SMT AG Particle-optical component
US9153413B2 (en) * 2007-02-22 2015-10-06 Applied Materials Israel, Ltd. Multi-beam scanning electron beam device and methods of using the same
EP2388796A1 (en) * 2010-05-21 2011-11-23 FEI Company Simultaneous electron detection
EP2461348A1 (en) * 2010-12-06 2012-06-06 FEI Company Detector system for use with transmission electron microscope spectroscopy
US20120112091A1 (en) * 2010-11-04 2012-05-10 National Taiwan University Method for adjusting status of particle beams for patterning a substrate and system using the same
JP5637841B2 (ja) * 2010-12-27 2014-12-10 株式会社日立ハイテクノロジーズ 検査装置
US8704176B2 (en) * 2011-08-10 2014-04-22 Fei Company Charged particle microscope providing depth-resolved imagery
EP2690431A1 (en) 2012-07-23 2014-01-29 FEI Company X-ray spectroscopic technique using merged spectral data
EP2824445B1 (en) 2013-07-08 2016-03-02 Fei Company Charged-particle microscopy combined with raman spectroscopy

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