JP2016051724A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP2016051724A JP2016051724A JP2014174271A JP2014174271A JP2016051724A JP 2016051724 A JP2016051724 A JP 2016051724A JP 2014174271 A JP2014174271 A JP 2014174271A JP 2014174271 A JP2014174271 A JP 2014174271A JP 2016051724 A JP2016051724 A JP 2016051724A
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- H—ELECTRICITY
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- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
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- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
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- H01L25/10—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers
- H01L25/105—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being of a type provided for in group H01L27/00
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- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/10—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers
- H01L25/11—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/117—Stacked arrangements of devices
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- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
- H01L2023/4075—Mechanical elements
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4871—Bases, plates or heatsinks
- H01L21/4882—Assembly of heatsink parts
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1076—Shape of the containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1094—Thermal management, e.g. cooling
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
- H01L23/4012—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws for stacked arrangements of a plurality of semiconductor devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
【解決手段】パワースタック1は、複数のパワーカードユニット4と、冷媒の流路Pを有する複数の冷却器5とを交互に積層して成る積層ユニット2と、複数の冷却器5に対して冷媒を供給し又は排出するパイプ23と、を備える。パイプ23は、積層ユニット2を積層方向で貫通するように設けられると共にその外周面30にはネジ山31が形成されている。パワースタック1は、ネジ山31にねじ込まれることで、積層ユニット2の積層方向で加圧された状態を維持するナット22を更に備えている。
【選択図】図2
Description
2 積層ユニット
3 パイプアッセンブリー
4 パワーカードユニット
5 冷却器
6 パワーカード
7 絶縁シート
11 区画板
13 上流側貫通孔
14 下流側貫通孔
16 パイプガイド面
17 湾曲面
20 パイプユニット
21 ネジ付きキャップ
22 ナット
23 パイプ
29 上端部
30 外周面
31 ネジ山
P 流路
Claims (3)
- 複数の半導体モジュールと、冷媒の流路を有する複数の冷却器とを交互に積層して成る積層ユニットと、
前記複数の冷却器に対して前記冷媒を供給し又は排出する冷媒給排管と、
を備え、
前記冷媒給排管は、前記積層ユニットを積層方向で貫通するように設けられると共にその外周面にはネジ山が形成されており、
前記ネジ山にねじ込まれることで、前記積層ユニットの積層方向で加圧された状態を維持する締結部材を更に備えた、
半導体装置。 - 前記冷媒給排管は、前記積層ユニットが有する前記複数の冷却器を貫通しており、
各冷却器は、前記流路を挟んで積層方向で対向する2つの区画板を有し、
各区画板には、前記冷媒給排管が貫通可能な貫通孔が形成されており、
前記2つの区画板のうち少なくとも何れか一方には、前記冷媒給排管を前記貫通孔に挿入する際に前記冷媒給排管を前記貫通孔に案内するガイドが設けられている、
請求項1に記載の半導体装置。 - 複数の半導体モジュールと、冷媒の流路を有する複数の冷却器とを交互に積層して積層ユニットを形成し、
前記積層ユニットを積層方向で貫通するように設けられた冷媒給排管のネジ山に締結部材をねじ込むことで前記積層ユニットを積層方向で加圧する、
半導体装置の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014174271A JP6206359B2 (ja) | 2014-08-28 | 2014-08-28 | 半導体装置 |
US14/835,166 US9627294B2 (en) | 2014-08-28 | 2015-08-25 | Semiconductor device and method of manufacturing the same |
CN201510531399.0A CN105390459B (zh) | 2014-08-28 | 2015-08-26 | 半导体装置及制造半导体装置的方法 |
DE102015114178.7A DE102015114178A1 (de) | 2014-08-28 | 2015-08-26 | Halbleitervorrichtung und Verfahren zum Herstellen derselben |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014174271A JP6206359B2 (ja) | 2014-08-28 | 2014-08-28 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016051724A true JP2016051724A (ja) | 2016-04-11 |
JP6206359B2 JP6206359B2 (ja) | 2017-10-04 |
Family
ID=55312366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014174271A Expired - Fee Related JP6206359B2 (ja) | 2014-08-28 | 2014-08-28 | 半導体装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9627294B2 (ja) |
JP (1) | JP6206359B2 (ja) |
CN (1) | CN105390459B (ja) |
DE (1) | DE102015114178A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190012610A (ko) * | 2017-07-28 | 2019-02-11 | 현대모비스 주식회사 | 전력반도체용 냉각장치 |
JP2019186430A (ja) * | 2018-04-12 | 2019-10-24 | トヨタ自動車株式会社 | 半導体装置 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD837623S1 (en) * | 2015-10-20 | 2019-01-08 | LWE, Inc. | Load beam for press pack clamp |
KR102413829B1 (ko) * | 2015-12-30 | 2022-06-29 | 한온시스템 주식회사 | 전기소자 냉각용 열교환기 |
EP3206468B1 (de) * | 2016-02-15 | 2018-12-26 | Siemens Aktiengesellschaft | Umrichter mit gleichspannungszwischenkreis |
JP6596398B2 (ja) * | 2016-08-29 | 2019-10-23 | 本田技研工業株式会社 | 電力変換装置 |
KR102512004B1 (ko) * | 2018-02-01 | 2023-03-21 | 한온시스템 주식회사 | 전장부품 냉각기 및 그 제조 방법 |
EP3653982B1 (en) | 2018-11-14 | 2021-06-16 | Hydro Extruded Solutions AS | Arrangement for thermal management of thermally condintioned objects and a method for assembling same |
KR102651940B1 (ko) * | 2018-11-22 | 2024-03-27 | 현대자동차주식회사 | 수냉각 장치 및 이를 포함하는 수냉각식 파워 모듈 어셈블리 |
GB2614045A (en) * | 2021-12-14 | 2023-06-28 | Zhuzhou Crrc Times Electric Co Ltd | Power semiconductor apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009212137A (ja) * | 2008-02-29 | 2009-09-17 | Nissan Motor Co Ltd | 発熱素子の冷却装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3573574A (en) * | 1969-08-12 | 1971-04-06 | Gen Motors Corp | Controlled rectifier mounting assembly |
US8125781B2 (en) * | 2004-11-11 | 2012-02-28 | Denso Corporation | Semiconductor device |
US20060219396A1 (en) * | 2005-04-04 | 2006-10-05 | Denso Corporation | Lamination-type cooler |
CN101507379A (zh) * | 2005-09-06 | 2009-08-12 | 超刀片公司 | 三维多层模块化计算机体系结构 |
US7965508B2 (en) | 2007-03-27 | 2011-06-21 | Denso Corporation | Cooling device for electronic component and power converter equipped with the same |
JP4345862B2 (ja) | 2007-03-27 | 2009-10-14 | 株式会社デンソー | 冷却器及びこれを備えた電力変換装置 |
JP5531999B2 (ja) | 2011-03-28 | 2014-06-25 | 株式会社デンソー | 電力変換装置 |
JP5488565B2 (ja) * | 2011-03-29 | 2014-05-14 | 株式会社デンソー | 電力変換装置 |
JP5991345B2 (ja) * | 2013-12-26 | 2016-09-14 | 株式会社デンソー | 電力変換装置 |
US9437523B2 (en) * | 2014-05-30 | 2016-09-06 | Toyota Motor Engineering & Manufacturing North America, Inc. | Two-sided jet impingement assemblies and power electronics modules comprising the same |
-
2014
- 2014-08-28 JP JP2014174271A patent/JP6206359B2/ja not_active Expired - Fee Related
-
2015
- 2015-08-25 US US14/835,166 patent/US9627294B2/en active Active
- 2015-08-26 DE DE102015114178.7A patent/DE102015114178A1/de not_active Ceased
- 2015-08-26 CN CN201510531399.0A patent/CN105390459B/zh not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009212137A (ja) * | 2008-02-29 | 2009-09-17 | Nissan Motor Co Ltd | 発熱素子の冷却装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190012610A (ko) * | 2017-07-28 | 2019-02-11 | 현대모비스 주식회사 | 전력반도체용 냉각장치 |
KR102298138B1 (ko) * | 2017-07-28 | 2021-09-06 | 현대모비스 주식회사 | 전력반도체용 냉각장치 |
JP2019186430A (ja) * | 2018-04-12 | 2019-10-24 | トヨタ自動車株式会社 | 半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
DE102015114178A1 (de) | 2016-03-03 |
US9627294B2 (en) | 2017-04-18 |
CN105390459B (zh) | 2018-06-19 |
CN105390459A (zh) | 2016-03-09 |
US20160064305A1 (en) | 2016-03-03 |
JP6206359B2 (ja) | 2017-10-04 |
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