JP2016045189A5 - - Google Patents

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JP2016045189A5
JP2016045189A5 JP2015105818A JP2015105818A JP2016045189A5 JP 2016045189 A5 JP2016045189 A5 JP 2016045189A5 JP 2015105818 A JP2015105818 A JP 2015105818A JP 2015105818 A JP2015105818 A JP 2015105818A JP 2016045189 A5 JP2016045189 A5 JP 2016045189A5
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JP2015105818A
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JP2016045189A (ja
JP6655888B2 (ja
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Priority to EP15002337.2A priority patent/EP2995903B1/en
Priority to US14/823,209 priority patent/US10260867B2/en
Publication of JP2016045189A publication Critical patent/JP2016045189A/ja
Publication of JP2016045189A5 publication Critical patent/JP2016045189A5/ja
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米国特許第６２５２６６８号明細書
JP2015105818A 2014-08-20 2015-05-25 計測装置、計測方法、および物品の製造方法 Expired - Fee Related JP6655888B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015105818A JP6655888B2 (ja) 2014-08-20 2015-05-25 計測装置、計測方法、および物品の製造方法
EP15002337.2A EP2995903B1 (en) 2014-08-20 2015-08-05 Interferometric measurement apparatus, measurement method, and method of manufacturing article with reduced influence of cyclic errors
US14/823,209 US10260867B2 (en) 2014-08-20 2015-08-11 Measurement apparatus and method that measure shape of surface while canceling cyclical errors to zero by summing of cyclic errors having different phases

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014167960 2014-08-20
JP2014167960 2014-08-20
JP2015105818A JP6655888B2 (ja) 2014-08-20 2015-05-25 計測装置、計測方法、および物品の製造方法

Publications (3)

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JP2016045189A JP2016045189A (ja) 2016-04-04
JP2016045189A5 true JP2016045189A5 (ja) 2018-05-31
JP6655888B2 JP6655888B2 (ja) 2020-03-04

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JP2015105818A Expired - Fee Related JP6655888B2 (ja) 2014-08-20 2015-05-25 計測装置、計測方法、および物品の製造方法

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US (1) US10260867B2 (ja)
EP (1) EP2995903B1 (ja)
JP (1) JP6655888B2 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018010961A1 (en) * 2016-07-13 2018-01-18 Asml Netherlands B.V. Cyclic error measurements and calibration procedures in interferometers

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5191391A (en) * 1991-01-29 1993-03-02 Excel Precision High resolution plane mirror interferometer
JPH08327453A (ja) * 1995-05-29 1996-12-13 Shimadzu Corp 偏光干渉計
JPH10213486A (ja) * 1997-01-30 1998-08-11 Shimadzu Corp 偏光干渉計
US6421130B1 (en) * 1999-03-29 2002-07-16 The Regents Of The University Of California Constant volume gas cell optical phase-shifter
US6252668B1 (en) 1999-11-19 2001-06-26 Zygo Corporation Systems and methods for quantifying nonlinearities in interferometry systems
JP3616342B2 (ja) * 2000-03-28 2005-02-02 株式会社日立製作所 レーザ測長計、露光装置、及び電子線描画装置
JP2001317933A (ja) * 2000-05-02 2001-11-16 Ricoh Co Ltd 形状測定装置
EP1390690A4 (en) * 2001-03-13 2009-07-08 Zygo Corp REDUCTION OF CYCLIC ERRORS IN AVERAGE INTERFEROMETRIC POSITION MEASUREMENTS
US7164481B2 (en) * 2003-09-01 2007-01-16 Kabushiki Kaisha Ohara Coefficient of linear expansion measuring apparatus and coefficient of linear expansion measuring method
JP2006078354A (ja) * 2004-09-10 2006-03-23 Canon Inc プローブ制御装置および形状測定装置
JP4500736B2 (ja) * 2005-06-10 2010-07-14 キヤノン株式会社 形状測定装置
JP2009002706A (ja) * 2007-06-19 2009-01-08 Nikon Corp 計測方法及びパターン形成方法
JP4909244B2 (ja) * 2007-11-16 2012-04-04 浜松ホトニクス株式会社 干渉測定装置
JP5679793B2 (ja) * 2010-12-15 2015-03-04 キヤノン株式会社 形状測定装置及び方法
JP5754971B2 (ja) * 2011-02-14 2015-07-29 キヤノン株式会社 形状測定装置及び形状測定方法
JP2012237686A (ja) * 2011-05-12 2012-12-06 Canon Inc 測定装置
DE102011115027A1 (de) * 2011-10-07 2013-04-11 Polytec Gmbh Kohärenzrasterinterferometer und Verfahren zur ortsaufgelösten optischen Vermessung der Oberflächengeometrie eines Objekts
JP5984406B2 (ja) * 2012-02-01 2016-09-06 キヤノン株式会社 測定装置
JP2014109481A (ja) * 2012-11-30 2014-06-12 Canon Inc 計測方法及び計測装置

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