JP2016037622A - アルミニウム部材の電解研磨方法及びアルミニウム部材 - Google Patents
アルミニウム部材の電解研磨方法及びアルミニウム部材 Download PDFInfo
- Publication number
- JP2016037622A JP2016037622A JP2014160129A JP2014160129A JP2016037622A JP 2016037622 A JP2016037622 A JP 2016037622A JP 2014160129 A JP2014160129 A JP 2014160129A JP 2014160129 A JP2014160129 A JP 2014160129A JP 2016037622 A JP2016037622 A JP 2016037622A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum member
- electrolytic polishing
- aluminum
- electropolishing
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052782 aluminium Inorganic materials 0.000 title claims abstract description 145
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims abstract description 145
- 238000005498 polishing Methods 0.000 title claims abstract description 91
- 238000000034 method Methods 0.000 title claims abstract description 61
- 239000007788 liquid Substances 0.000 claims abstract description 56
- 238000005530 etching Methods 0.000 claims abstract description 20
- 239000002131 composite material Substances 0.000 claims abstract description 17
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 10
- 238000002835 absorbance Methods 0.000 claims description 23
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 3
- 238000007517 polishing process Methods 0.000 claims description 3
- 239000008151 electrolyte solution Substances 0.000 claims description 2
- 238000009499 grossing Methods 0.000 abstract description 3
- 230000007704 transition Effects 0.000 description 43
- 239000010408 film Substances 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000004090 dissolution Methods 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000006061 abrasive grain Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000011481 absorbance measurement Methods 0.000 description 1
- -1 buffs Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014160129A JP2016037622A (ja) | 2014-08-06 | 2014-08-06 | アルミニウム部材の電解研磨方法及びアルミニウム部材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014160129A JP2016037622A (ja) | 2014-08-06 | 2014-08-06 | アルミニウム部材の電解研磨方法及びアルミニウム部材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016037622A true JP2016037622A (ja) | 2016-03-22 |
| JP2016037622A5 JP2016037622A5 (enrdf_load_stackoverflow) | 2017-09-21 |
Family
ID=55528974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014160129A Pending JP2016037622A (ja) | 2014-08-06 | 2014-08-06 | アルミニウム部材の電解研磨方法及びアルミニウム部材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2016037622A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190042231A (ko) | 2017-10-16 | 2019-04-24 | 한국생산기술연구원 | 광택 및 치수 안정성이 가능한 플라즈마 전해연마 방법 |
| KR20190098113A (ko) | 2019-08-09 | 2019-08-21 | 한국생산기술연구원 | 광택 및 치수 안정성이 가능한 플라즈마 전해연마 방법 |
-
2014
- 2014-08-06 JP JP2014160129A patent/JP2016037622A/ja active Pending
Non-Patent Citations (1)
| Title |
|---|
| 中野 信男ほか: "純アルミニウムＡ１０５０のリン酸−硫酸系電解研磨における電解条件が表面構造と光沢度に及ぼす影響", 表面技術, vol. 65, no. 7, JPN6018016574, 1 July 2014 (2014-07-01), JP, pages 318 - 324 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190042231A (ko) | 2017-10-16 | 2019-04-24 | 한국생산기술연구원 | 광택 및 치수 안정성이 가능한 플라즈마 전해연마 방법 |
| KR20190098113A (ko) | 2019-08-09 | 2019-08-21 | 한국생산기술연구원 | 광택 및 치수 안정성이 가능한 플라즈마 전해연마 방법 |
| KR102104263B1 (ko) | 2019-08-09 | 2020-04-27 | 한국생산기술연구원 | 광택 및 치수 안정성이 가능한 플라즈마 전해연마 방법 |
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