JP2016037414A - Scribing tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scribing tool capable of forming cracks having a sufficient depth in a substrate when forming scribe lines at positions right above and under a seal material.SOLUTION: Scribing tools 30 and 40 comprise: holders 303 and 403; grooves 303a and 403a formed in the bottom surfaces of the holders 304 and 404; a pair of grooves 303b and 403b formed in the bottom surfaces of the holders 304 and 404 so as to sandwich the grooves 303a and 403a; scribing wheels 301 and 401 rotatably mounted on the grooves 303a and 403a; and a pair of rollers 302 and 402 rotatably mounted on the pair of grooves 303b and 403b, respectively. The shafts 301a and 401a of the scribing wheels 301 and 401 are separated from the shafts 302a and 402a of the rollers 302 and 402 to each other by a predetermined distance in a scribe direction.SELECTED DRAWING: Figure 8

Description

  The present invention relates to a scribing tool used when forming a scribe line on a substrate.

  Conventionally, a brittle material substrate such as a glass substrate is divided by a scribe process for forming a scribe line on the substrate surface and a break process for applying a predetermined force to the substrate surface along the formed scribe line. In the scribing step, the cutting edge of the scribing wheel is moved along a predetermined line while being pressed against the substrate surface. A scribe device equipped with a scribe head is used to form the scribe line.

  Patent Document 1 below describes a method for cutting out a liquid crystal panel from a mother substrate. In this method, a mother substrate is formed by bonding a substrate on which a thin film transistor (TFT) is formed and a substrate on which a color filter (CF) is formed through a sealing material. Individual liquid crystal panels are obtained by dividing the mother substrate. The sealing material is arranged so that a space serving as a liquid crystal injection region remains in a state where the two substrates are bonded to each other.

  When the mother substrate having the above configuration is divided, a method of simultaneously forming scribe lines on both surfaces of the mother substrate using two scribe heads can be used (for example, see Patent Document 2). In this case, the two scribe heads are arranged so as to sandwich the mother substrate. The two scribing wheels are positioned at the same position when the mother board is viewed in plan. In this state, the two scribing wheels are simultaneously moved in the same direction, and a scribe line is formed on each surface of the mother substrate.

JP 2006-137441 A JP 2012-240902 A

  As shown in the above-mentioned Patent Document 1, a conventional mother substrate has a region where no sealing material is interposed between adjacent liquid crystal injection regions. Therefore, when the scribe lines are simultaneously formed on both surfaces of the mother substrate by the two scribe heads as described above, the scribe lines can be formed in the region where the sealing material is not interposed. When the scribe line is formed in this way and the mother substrate is divided, a frame region having a predetermined width remains around the liquid crystal injection region in the liquid crystal panel.

  However, in recent years, particularly in mobile liquid crystal panels, it has become mainstream to narrow the frame area to the limit. In order to meet this requirement, it is necessary to omit the region where the sealing material is not interposed in the mother substrate, and to configure the adjacent liquid crystal injection regions to be separated only by the sealing material. In this case, the scribe line is formed immediately above and directly below the sealing material.

  However, the inventors of the present application have confirmed that when the scribe lines are formed immediately above and below the sealing material in this way, cracks do not sufficiently enter the two glass substrates. When the break process is performed in such a state where cracks are insufficient, fine cracks and breakage may occur at the edge of the substrate after the break, and the strength of the glass substrate may be reduced.

  In view of such problems, an object of the present invention is to provide a scribing tool capable of forming a sufficiently deep crack in a substrate when forming a scribe line directly above and below a sealing material. To do.

  The inventors of the present application have made trial and error to shift the scribe positions on the upper surface and the lower surface of the mother substrate by a predetermined distance in the scribe direction when forming the scribe lines immediately above and below the seal material. It was discovered that deep cracks occurred in the substrate. The present invention relates to a scribing tool capable of pressing a surface opposite to a scribing wheel with a roller while shifting each scribe position on an upper surface and a lower surface of a mother substrate by a predetermined distance in the scribe direction.

  A main aspect of the present invention relates to a scribing tool used when a scribe line is formed on a mother substrate formed by bonding a first substrate and a second substrate with a sealing material. The scribing tool according to this aspect includes a holder, a first groove formed on the lower surface of the holder, and a pair of second grooves formed on the lower surface of the holder so as to sandwich the first groove, A scribing wheel rotatably mounted in the first groove; and a pair of rollers rotatably mounted in the pair of second grooves. The rotating shaft of the scribing wheel and the rotating shaft of the roller are separated from each other by a predetermined distance in the scribe direction.

  By using the scribing tool according to this aspect, it is possible to press the surface opposite to the scribing wheel with a roller while shifting each scribe position on the upper surface and lower surface of the mother substrate by a predetermined distance in the scribe direction. Thereby, the crack formation state can be stabilized while increasing the depth of the crack.

  The scribing tool according to this aspect may be configured such that the scribing wheel and the pair of rollers are arranged such that a part of the pair of rollers sandwiches a part of the scribing wheel. According to this configuration, the distance between the scribing wheel and the roller can be reduced in the scribe direction.

  In the scribing tool according to this aspect, the holder may be made of a magnetic material, and may have a shape in which an inclined surface is formed by obliquely cutting a side surface of a cylinder. If it carries out like this, a scribing tool can be smoothly attached to a scribe head by installing a magnet in a hole where a holder of a scribe head is attached. Moreover, the scribing tool can be positioned at a proper position by arranging a pin with which the inclined surface abuts in this hole.

  In this case, the first groove and the second groove are formed so as to communicate with two side surfaces of the holder, and the inclined surface includes two of the two grooves where the first groove and the second groove communicate with each other. The scribing wheel and the pair of rollers are provided on one of the side surfaces, and the scribing wheel and the pair of rollers are formed such that the scribing wheel is closer to the side surface on which the inclined surface is formed than the pair of rollers.

  Alternatively, the first groove and the second groove are formed in communication with two side surfaces of the holder, and the inclined surface is formed by the two side surfaces in which the first groove and the second groove communicate with each other. The scribing wheel and the pair of rollers are formed such that the pair of rollers is closer to the side surface on which the inclined surface is formed than the scribing wheel.

  Thus, by preparing in advance two types of scribing tools in which the order of arrangement of the scribing wheel and the pair of rollers is different from each other on the basis of the inclined surface, different types of scribing are performed on the pair of scribing heads that sandwich the mother substrate up and down. It is possible to make the upper scribing wheel and the lower roller face each other only by mounting each tool, and to make the lower scribing wheel and the upper roller face each other.

  In the scribing tool according to this aspect, it is desirable that the predetermined distance is set to 0.5 mm or more. If it carries out like this, the depth of a crack can be deepened effectively.

  In the scribing tool according to this aspect, the scribing wheel may be formed with a V-shaped cutting edge formed on the outer periphery of the disc and with grooves at predetermined intervals on the edge line of the cutting edge. In the embodiment described below, an experiment was performed using this type of scribing wheel, and it was confirmed that cracks deeply entered.

  As described above, according to the present invention, it is possible to provide a scribing tool capable of forming a crack with a sufficient depth in a substrate when forming a scribe line at a position immediately above and immediately below a sealing material. .

  The effects and significance of the present invention will become more apparent from the following description of embodiments. However, the embodiment described below is merely an example when the present invention is implemented, and the present invention is not limited to what is described in the following embodiment.

It is a figure which shows typically the structure of the scribing apparatus which concerns on embodiment. It is a disassembled perspective view which shows the structure of the scribe head which concerns on embodiment. It is a perspective view which shows the structure of the scribe head which concerns on embodiment. It is a figure explaining the scribe method. It is a figure which shows the experimental result by the scribe method 1. It is a figure explaining the scribe method 2 which concerns on embodiment. It is a figure which shows the experimental result by the other scribe method 2 which concerns on embodiment. It is a perspective view which shows the structure of the scribing tool which concerns on embodiment. It is a perspective view which shows the structure of the scribing tool which concerns on embodiment. It is a perspective view which shows the structure of the scribing tool which concerns on embodiment. It is a figure which shows typically the mounting method of the scribing tool which concerns on embodiment. It is a figure which shows typically the structure of the scribing tool which concerns on the example of a change.

  Embodiments of the present invention will be described below with reference to the drawings. In each figure, an X axis, a Y axis, and a Z axis that are orthogonal to each other are added for convenience. The XY plane is parallel to the horizontal plane, and the Z-axis direction is the vertical direction.

<Scribe device>
FIGS. 1A and 1B are diagrams schematically showing a configuration of the scribe device 1. FIG. 1A is a view of the scribe device 1 viewed from the Y axis positive side, and FIG. 1B is a view of the scribe device 1 viewed from the X axis positive side.

  Referring to FIG. 1A, a scribing device 1 includes a conveyor 11, struts 12a and 12b, guides 13a and 13b, guides 14a and 14b, sliding units 15 and 16, and two scribing heads 2. Is provided.

  As shown in FIG.1 (b), the conveyor 11 is provided so that it may extend in a Y-axis direction except the location where the scribe head 2 is arrange | positioned. On the conveyor 11, a mother substrate G is placed. The mother substrate G has a substrate structure in which a pair of glass substrates are bonded to each other. The mother board G is sent in the Y-axis direction by the conveyor 11.

  The support columns 12 a and 12 b are provided vertically with the conveyor 11 interposed between the base of the scribe device 1. The guides 13a and 13b and the guides 14a and 14b are respectively installed between the columns 12a and 12b so as to be parallel to the X-axis direction. The sliding units 15 and 16 are slidably provided on the guides 13a and 13b and the guides 14a and 14b, respectively. Each of the guides 13a and 13b and the guides 14a and 14 is provided with a predetermined driving mechanism, and the sliding units 15 and 16 are moved in the X-axis direction by the driving mechanism.

  A scribe head 2 is attached to each of the sliding units 15 and 16. The scribing tools 30 and 40 are attached to the Z-axis positive scribe head 2 and the Z-axis negative scribe head 2 so as to face the mother substrate G, respectively. The scribing head 2 moves in the X-axis direction in a state where the scribing wheel held by the scribing tools 30 and 40 is pressed against the surface of the mother substrate G. Thereby, a scribe line is formed on the surface of the mother substrate G.

<Scribe head>
FIG. 2 is a partially exploded perspective view showing the configuration of the scribe head 2, and FIG. 3 is a perspective view showing the configuration of the scribe head 2.

  Referring to FIG. 2, the scribe head 2 includes an elevating mechanism 21, a scribe line forming mechanism 22, a base plate 23, a top plate 24, a bottom plate 25, a rubber frame 26, a cover 27, and a servo motor 28. With.

  The elevating mechanism 21 includes a cylindrical cam 21a connected to the drive shaft of the servo motor 28, and a cam follower 21c formed on the upper surface of the elevating part 21b. The elevating part 21b is supported by the base plate 23 so as to be movable in the vertical direction via a slider (not shown), and is urged in the positive direction of the Z axis by a spring 21d. The cam follower 21c is pressed against the lower surface of the cylindrical cam 21a by the bias of the spring 21d. The elevating part 21 b is connected to the scribe line forming mechanism 22. When the cylindrical cam 21a is rotated by the servo motor 28, the elevating part 21b is raised and lowered by the cam action of the cylindrical cam 21a, and accordingly, the scribe line forming mechanism 22 is raised and lowered. The scribing tools 30 and 40 are attached to the lower end of the scribe line forming mechanism 22.

  The rubber frame 26 is an elastic member that does not allow air to pass therethrough. The rubber frame 26 has a shape that fits into the groove 23 a of the base plate 23, the groove 24 a of the top plate 24, and the groove 25 a of the bottom plate 25. In a state where the rubber frame 26 is mounted in the grooves 23 a, 24 a, and 25 a, the surface of the rubber frame 26 protrudes slightly outward from the side surfaces of the base plate 23, the top plate 24, and the bottom plate 25.

  The cover 27 has a shape in which three plate portions of the front surface portion 27a, the right side surface portion 27b, and the left side surface portion 27c are bent. Two holes 27f are formed in the upper and lower edges of the front surface portion 27a.

  In a state where the rubber frame 26 is fitted in the grooves 23 a, 24 a, 25 a, the right side surface portion 27 b and the left side surface portion 27 c of the cover 27 are deformed so as to bend outward, and the cover 27 is transformed into the base plate 23, the top plate 24 and the bottom plate 25. It is attached. In this state, screws are screwed to the top plate 24 and the bottom plate 25 through two holes 27f formed at the upper and lower end edges of the front surface portion 27a. Further, screws are screwed into screw holes formed slightly outside the grooves 23a, 24a, and 25a of the base plate 23, the top plate 24, and the bottom plate 25. Thus, the cover 27 is sandwiched between the base plate 23, the top plate 24, the bottom plate 25, and the screw heads, and the peripheral portions of the right side surface portion 27b and the left side surface portion 27c are pressed against the rubber frame 26. In this way, the scribe head 2 is assembled as shown in FIG.

  As shown in FIG. 1A, two scribe heads 2 are arranged above and below the mother substrate G, respectively. The two scribe heads 2 have the same configuration. The scribing tools 30 and 40 attached to the two scribe heads 2 are changed according to the scribe method. Of the following two scribing methods, scribing method 1 uses scribing tools 30 and 40 that hold only scribing wheels 301 and 401. In scribing method 2, scribing tools 30 and 40 that hold scribing wheels 301 and 401 and rollers 302 and 402 are used.

  Hereinafter, these two scribing methods will be described. Of these two scribing methods, scribing method 2 relates to the embodiment.

<Scribe method 1>
4A to 4C are diagrams for explaining the scribing method according to the present embodiment. 4A is a schematic diagram when the vicinity of the scribe position is viewed from the Y-axis negative side, FIG. 4B is a schematic diagram when the vicinity of the scribe position is viewed from the X-axis positive side, and FIG. It is a schematic diagram when the scribe position vicinity is seen from the Z-axis positive side.

  As shown in FIG. 4A, in this scribing method, the scribing wheel 301 of the upper (Z-axis positive side) scribing head 2 is more than the scribing wheel 401 of the lower (Z-axis negative side) scribing head 2. The two scribing wheels 301 and 401 are moved so as to advance by a distance W1 in the scribe direction (X-axis positive direction). The scribing tools 30 and 40 are attached to the two scribing wheels 301 and 401 so as to be rotatable about the axes 301a and 401a, respectively.

  Referring to FIG. 4B, the mother substrate G is configured by bonding two glass substrates G1 and G2 through a sealing material SL. A color filter (CF) is formed on the glass substrate G1, and a thin film transistor (TFT) is formed on the glass substrate G2. A liquid crystal injection region R is formed by the sealing material SL and the two glass substrates G1 and G2, and liquid crystal is injected into the liquid crystal injection region R. The two scribing wheels 301 and 401 are positioned without being shifted from each other in the Y-axis direction. The scribing wheel 301 is pressed against the surface of the glass substrate G1 at a position directly above the sealing material SL, and the scribing wheel 401 is pressed against the surface of the glass substrate G2 at a position directly below the sealing material SL.

  As shown in FIG.4 (c), the sealing material SL is arrange | positioned at the grid | lattice form. The two scribing wheels 301 and 401 are moved in the positive direction of the X axis along the seal material SL. Thereby, as shown in FIGS. 4B and 4C, scribe lines L1 and L2 are formed on the surfaces of the glass substrates G1 and G2, respectively.

  In the scribing method shown in FIGS. 4A to 4C, there is no roller for pressing the surface of the mother substrate G on the opposite side (Z-axis negative side) from the scribing wheel 301, and it is opposite to the scribing wheel 401. There is also no roller for pressing the surface of the mother substrate G on the side (Z-axis positive side).

<Experiment 1>
The inventors of the present application conducted an experiment to form a scribe line on the mother substrate G in accordance with the scribe method shown in FIGS. Hereinafter, the experiment and the experimental result will be described.

  In the experiment, a substrate (mother substrate) in which glass substrates G1 and G2 each having a thickness of 0.2 mm were bonded together with a sealing material SL was used. The size of the bonded substrate (mother substrate) is 118 mm × 500 mm. For the scribing wheels 301 and 401, a micro penet (registered trademark of Samsung Diamond Industrial Co., Ltd.) manufactured by Samsung Diamond Industrial Co., Ltd. was used. Each of the scribing wheels 301 and 401 has a structure in which a V-shaped cutting edge is formed on the outer periphery of the disk and grooves are formed at predetermined intervals on the ridge line of the cutting edge. The scribing wheels 301 and 401 have a diameter of 3 mm, a cutting edge angle of 110 °, a groove number of 550, and a groove depth of 3 μm.

  The scribing wheels 301 and 401 having this configuration were moved while being pressed against the glass substrates G1 and G2, respectively, as shown in FIGS. The load applied to the scribing wheels 301 and 401 during the scribing operation was controlled to 6.5N. The moving speed of the scribing wheels 301 and 401 was constant (200 mm / sec).

  Under the above conditions, the amount of crack penetration in the glass substrates G1 and G2 was measured while changing the distance W1 between the two scribing wheels 301 and 401. As a comparative example, the amount of crack penetration when the distance W1 between the scribing wheels 301 and 401 was 0 was also measured. In each measurement, in addition to the amount of crack penetration, the amount of rib marks was also measured.

  5A to 5E show the experimental results. FIG. 5A is a diagram showing the amount of crack penetration and the amount of rib marks, and FIGS. 5B to 5E are cross-sectional photographs of the mother substrate G on the scribe line, each having a distance W1 of 0. .4 mm, 0.6 mm, 0.8 mm, and 1.0 mm. 5B to 5E, D1 and D3 indicate rib mark amounts, and D2 and D4 indicate crack penetration amounts.

  Referring to FIG. 5A, when the distance W1 exceeds 0.6 mm, the amount of crack penetration of the glass substrate G1 is larger than when the distance W1 is 0 mm. If any one of the glass substrates G1 and G2 is cracked with a large amount of penetration, the mother substrate G can be appropriately divided in the breaking step.

  For example, as in the comparative example (W1 = 0 mm), if the amount of cracks in the glass substrates G1, G2 is about half the thickness (0.2 mm) of the glass substrates G1, G2, It is necessary to break the glass substrates G1 and G2 from both sides. When the operation of breaking the glass substrates G1 and G2 from both sides of the mother substrate G is performed in this way, fine cracks and breakage occur at the edges of the glass substrates G1 and G2, and the strength of the glass substrates G1 and G2 decreases. There is a fear.

  On the other hand, when the distance W1 is 0.6 mm to 1.4 mm, although the crack penetration amount in the glass substrate G2 is small, the crack penetration amount in the glass substrate G1 is large. As described above, when the amount of crack penetration in the glass substrate G1 is large, in the breaking process, it is only necessary to perform an operation of breaking the glass substrate G2 having a small crack penetration amount from only one side of the mother substrate G. At this time, the glass substrate G1 having a deep crack is also cut along the crack. Thus, when the glass substrates G1 and G2 are broken only from one side of the mother substrate G, the edges of the glass substrates G1 and G2 are not cracked or broken, and the strength of the glass substrates G1 and G2 is kept high. It is.

  For the above reasons, in dividing the mother substrate G, it is desirable that either one of the glass substrates G1 and G2 is cracked with a large amount of penetration. In this experiment, as shown in FIG. 5A, when the distance W1 between the two scribing wheels 301 and 401 exceeds 0.6 mm, the crack of the glass substrate G1 is larger than that in the comparative example (W1 = 0 mm). The amount of penetration has increased. From this, it can be said that the distance W1 between the two scribing wheels 301 and 401 is desirably 0.6 mm or more. By setting the distance W1 between the two scribing wheels 301 and 401 in this way, the mother substrate G can be properly broken.

<Scribe method 2>
In the scribing method (scribing method 1) shown in FIGS. 4A to 4C, the surface of the mother substrate G opposite to the scribing wheel 301 (Z-axis negative side) is not pressed by a roller, and scribing is performed. The surface of the mother substrate G opposite to the wheel 401 (Z-axis positive side) is not pressed by the roller. On the other hand, in this scribing method, the surface of the mother substrate G opposite to the scribe wheel 301 (Z-axis negative side) and the surface of the mother substrate G opposite to the scribe wheel 401 (Z-axis positive side) are respectively It is pressed by the roller.

  6A and 6B are diagrams for explaining the scribing method 2. FIG. 6A is a schematic diagram when the vicinity of the scribe position is viewed from the Y axis negative side, and FIG. 6B is a schematic diagram when the vicinity of the scribe position is viewed from the X axis positive side.

  As shown in FIG. 6A, in this scribing method, the surface of the mother substrate G on the opposite side (Z-axis negative side) to the scribing wheel 301 is pressed by two rollers 402, and on the opposite side to the scribing wheel 401. The surface of the mother substrate G on the (Z axis positive side) is also pressed by the two rollers 302. The two rollers 302 are arranged so as to sandwich the scribe wheel 301, and are rotatable about a shaft 302a as a rotation axis. Further, the two rollers 402 are arranged so as to sandwich the scribe wheel 401, and are rotatable about the shaft 402a.

  Similar to the scribing method 1, the two scribing wheels 301 and 401 are shifted by a distance W1 in the scribing direction (X-axis direction). The two scribing wheels 301 and 401 move along the sealing material SL while being pressed against the glass substrates G1 and G2, respectively. There is a gap in the Y-axis direction between the scribing wheel 301 and the two rollers 302, and there is also a gap in the Y-axis direction between the scribing wheel 401 and the two rollers 402. Therefore, the rollers 302 and 402 move in the positive direction of the X axis so as to straddle the scribe lines L1 and L2 formed by the scribing wheels 301 and 401.

<Experiment 2>
The inventors of the present application conducted an experiment to form a scribe line on the mother substrate G according to the scribe method shown in FIGS. Hereinafter, the experiment and the experimental result will be described.

  The mother substrate G and scribing wheels 301 and 401 used in this experiment were the same as in Experiment 1 above. In this experiment, the distance W1 between the scribing wheels 301 and 401 was set to 2.2 mm. The moving speed of the scribing wheels 301 and 401 was constant (200 mm / sec). The eccentric amount of the scribing wheel 301 with respect to the load center of the upper scribe head 2 was 1.0 mm, and the eccentric amount of the scribing wheel 401 with respect to the load center of the lower scribe head 2 was 3.2 mm.

  The center positions of the axes 301a and 401a of the scribing wheels 301 and 401 coincide with the center positions of the axes 302a and 402a of the rollers 302 and 402, respectively, in the Z-axis direction. The diameters of the rollers 302 and 402 are the scribing wheels, respectively. The same diameter as 301 and 401 was set to 3 mm.

  Under the above conditions, the amount of crack penetration in the glass substrates G1 and G2 was measured while changing the load applied to the scribing tools 30 and 40.

  An experimental result is shown to Fig.7 (a)-(e). FIG. 7A is a diagram showing numerical values of the amount of crack penetration and the amount of rib marks, and FIGS. 7B to 7E are cross-sectional photographs of the mother substrate G on the scribe line, each having a load of 6N, In the case of 7N, 8N, 9N. 5B to 5E, D1 and D3 indicate rib mark amounts, and D2 and D4 indicate crack penetration amounts.

  Referring to FIG. 7A, it can be seen that when the load changes from 5N to 6N, the amount of crack penetration in the glass substrate G1 increases rapidly. When the load exceeds 6 N, the amount of crack penetration of the glass substrate G1 exceeds 80% of the thickness (0.2 mm) of the glass substrate G1, and cracks enter the glass substrate G1 with a large amount of penetration. As described above, if any one of the glass substrates G1 and G2 is cracked with a large amount of penetration, the mother substrate G can be appropriately divided in the breaking step. Therefore, in the scribing method 2, it can be said that it is desirable to set the load applied to the scribing tools 30 and 40 to 6 N or more.

  In this experiment, the amount of crack penetration into the glass substrate G1 is larger than that in Experiment 1. Therefore, to stably form a crack while increasing the amount of crack penetration, the surface opposite to the scribing wheels 301 and 401 of the mother substrate G is pressed by rollers 402 and 302 as in the scribing method 2. It can be said that it is desirable.

<Scribing tool>
FIGS. 8A and 8B are perspective views showing the structures of the scribing tools 30 and 40, respectively. 9A to 9C are a left side view, a front view, and a right side view showing the configuration of the scribing tool 30. FIG. FIGS. 10A to 10C are a left side view, a front view, and a right side view showing the configuration of the scribing tool 30.

  The scribing tools 30 and 40 have the same configuration except for the arrangement order of the scribing wheels 301 and 401 and the rollers 302 and 402. The scribing tools 30 and 40 include scribing wheels 301 and 401 and holders 303 and 403 for holding the rollers 302 and 402, respectively. The holders 303 and 403 are made of a ferromagnetic material.

  The holders 303 and 403 include grooves 303a and 403a in which the scribing wheels 301 and 401 are mounted, grooves 303b and 403b in which the rollers 302 and 402 are mounted, and inclined surfaces 303c and 403c. The grooves 303a and 403a and the grooves 303b and 403b communicate with the front and rear side surfaces of the holders 303 and 403. The inclined surfaces 303c and 403c are formed by cutting the cylindrical side surfaces of the holders 303 and 403 obliquely from the front side. The scribing wheels 301 and 401 are mounted by fitting the shafts 301 a and 401 a into the holes of the holders 303 and 403. The rollers 302 and 402 are mounted by fitting the shafts 302a and 402a into the holes of the holders 303 and 403.

  FIGS. 11A and 11B are diagrams schematically illustrating a method of attaching the scribing tool 30 to the scribe line forming mechanism 22. 11A and 11B show a state where the inside of the scribe line forming mechanism 22 is seen through.

  A holding portion 221 that holds the scribing tool 30 is provided at the lower end of the scribe line forming mechanism 22, and a hole 222 into which the scribing tool 30 can be inserted is formed in the holding portion 221. A magnet 224 is installed at the bottom of the hole 224, and a pin 223 is provided at an intermediate position of the hole 224. As described above, the holder 303 of the scribing tool 30 is made of a ferromagnetic material.

  When attaching the scribing tool 30 to the scribe line forming mechanism 22, the holder 303 of the scribing tool 30 is inserted into the hole 222 of the holding portion 221. When the upper end of the holder 303 approaches the magnet 224, the holder 303 is attracted to the magnet 224. At this time, the inclined surface 303c of the holder 303 comes into contact with the pin 223, and the holder 303 is positioned at a proper position. In this way, the scribing tool 30 is attached to the lower end of the scribe line forming mechanism 22 as shown in FIG.

  The scribing tool 40 is similarly attached to the lower end of the scribe line forming mechanism 22. Thus, when the scribing tools 30 and 40 are respectively attached to the scribe line forming mechanisms 22 of the corresponding scribe heads 2, as shown in FIGS. 6 (a) and 6 (b), the scribing tools 30 and 40 are positioned at positions corresponding to the scribe wheel 301. The roller 402 is positioned, and the roller 302 is positioned at a position corresponding to the scribing wheel 401. If the scribing tools 30 and 40 having the configuration shown in FIGS. 8A and 8B are used, the scribing wheel 301 can be simply mounted on the scribing line forming mechanism 22 of the corresponding scribing head 2. The scribing wheels 301 and 401 and the rollers 402 and 302 can face each other while maintaining the distance W1 between the scribing wheel 401 and the scribing wheel 401 at a predetermined distance.

  The experiment 2 was performed using the scribing tools 30 and 40 having the configuration shown in FIGS. In Experiment 1, the grooves 303b and 403b are omitted from the holders 303 and 403, and the scribing tools 30 and 40 with the scribing wheels 301 and 401 attached to the holders 303 and 403 having only the grooves 303a and 403a, respectively. Used.

<Effect of embodiment>
According to the present embodiment, the following effects are exhibited.

  By using the scribing tools 30 and 40 shown in FIG. 8 to FIG. 10, it is possible to press the surface opposite to the scribing wheel with a roller while shifting each scribe position on the upper surface and lower surface of the mother substrate by a predetermined distance in the scribe direction. It becomes possible. Thereby, as shown in Experiment 2, the scribe line L1 can be formed with a deep crack at a position directly above the seal material SL. By providing the rollers 302 and 402 on the scribing tools 30 and 40, it is possible to stably form a crack while further increasing the amount of crack penetration.

  In the scribing tools 30 and 40 shown in FIGS. 8 to 10, the scribing wheels 301 and 401 and the pair of rollers 302 and 402 are arranged such that a part of the pair of rollers 302 and 402 sandwiches a part of the scribing wheels 301 and 401. Has been placed. According to this configuration, the distance between the scribing wheels 301 and 401 and the rollers 302 and 402 can be reduced in the scribe direction.

  The scribing tools 30 and 40 shown in FIGS. 8 to 10 have a shape in which the holders 303 and 403 are made of a magnetic material, and the inclined surfaces 303c and 403c are formed by obliquely cutting the side surfaces of the cylinder. For this reason, the scribing tools 30 and 40 can be smoothly mounted on the scribe head 2 by installing the magnet 224 in the hole 222 in which the holders 303 and 403 of the scribe head 2 are mounted. Further, by arranging the pin 223 with which the inclined surfaces 303c and 403c abut in the hole 222, the scribing tools 30 and 40 can be positioned at regular positions using the attractive force of the magnet 224.

  Further, by using the two types of scribing tools 30 and 40 shown in FIGS. 8A and 8B, the scribing tools 30 and 40 can be simply mounted on the scribe line forming mechanism 22 of the corresponding scribe head 2, respectively. The scribing wheels 301 and 401 and the rollers 402 and 302 can face each other while maintaining the distance W1 between the scribing wheel 301 and the scribing wheel 401 at a predetermined distance.

<Example of change>
Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications can be made to the embodiments of the present invention other than the above.

  For example, in the above embodiment, a scribing hole in which grooves are formed at regular intervals on the edge line of the blade edge is used, but the same effect can be obtained even if a scribing wheel in which grooves are not formed on the edge line is used. Can be assumed. The size and shape of the scribing wheel (blade edge) are not limited to those described in the above embodiment, and other sizes, shapes, and types of blade edges can be used as appropriate.

  In the above embodiment, the upper scribing wheel 301 of the mother board G is preceded in the scribing direction with respect to the lower scribing wheel 401. However, the lower scribing wheel 301 of the mother board G is used as the upper scribing wheel. 401 may be preceded in the scribe direction. In this case, the same effect as described above can be obtained.

  Further, in the configurations of FIGS. 6A and 6B and FIGS. 8A and 8B, the center positions of the shafts 301a and 401a of the scribing wheels 301 and 401 are the shafts 302a and 302a of the rollers 302 and 402, respectively. The center position of 402a coincides with the Z-axis direction, and the diameters of the scribing wheels 301 and 401 are the same as the diameters of the rollers 302 and 402, respectively. However, the relationship between the scribing wheels 301 and 401 and the rollers 302 and 402 is not limited to this, and various other changes are possible.

  For example, as shown in FIG. 12 (a), the diameter of the scribe wheel 301 may be larger by Δd1 than the diameter of the roller 302. Alternatively, as shown in FIG. May be smaller than the diameter of the roller 302 by Δd2. Also, as shown in FIG. 12C, the center position of the shaft 301a of the scribe wheel 301 may be shifted in the negative direction of the Z axis by Δd3 from the center position of the shaft 302a of the roller 302. As shown in (d), the center position of the shaft 301a of the scribe wheel 301 may be shifted in the positive direction of the Z axis by Δd4 from the center position of the shaft 302a of the roller 302. The scribing wheel 401 and the roller 402 can be similarly changed.

  12B and 12D, since the lower end of the roller 302 is below the lower end of the scribe wheel 301, the roller 302a is more strongly pressed against the glass substrate G1 during the scribe operation. . When the roller 302a is strongly pressed in this way, the glass substrate G1 is bent in the negative Z-axis direction, and thereby a tensile force is applied in the direction of opening a crack on the back surface of the glass substrate G1. For this reason, when the cutting edge of the other scribing wheel 401 is pressed against the back surface of the portion of the glass substrate G1 to which the roller 302 is pressed, cracks are likely to deeply enter due to this pulling force. Therefore, in the configuration examples of FIGS. 12B and 12D, it can be assumed that a crack is formed deeper by the back side scribing wheel 401 corresponding to the roller 302a.

  In addition, the configuration, thickness, material, and the like of the mother substrate G are not limited to those shown in the above embodiment, and the scribe tools 30 and 40 are used for cutting the mother substrate G of other configurations. Can do.

  The embodiments of the present invention can be appropriately modified in various ways within the scope of the technical idea shown in the claims.

30, 40 ... scribing tool 301, 401 ... scribing wheel 302, 402 ... roller 303, 403 ... holder 303a, 403a ... groove (first groove)
303b, 403b ... groove (second groove)
303c, 403c ... inclined surface

Claims (7)

A scribing tool used to form a scribe line on a mother substrate formed by bonding a first substrate and a second substrate with a sealing material,
A holder,
A first groove formed on the lower surface of the holder;
A pair of second grooves formed on the lower surface of the holder so as to sandwich the first groove;
A scribing wheel rotatably mounted in the first groove;
A pair of rollers rotatably mounted in the pair of second grooves, respectively.
The rotating shaft of the scribing wheel and the rotating shaft of the roller are separated from each other by a predetermined distance in the scribe direction,
A scribing tool characterized by that. The scribing tool according to claim 1,
The scribing wheel and the pair of rollers are arranged such that a part of the pair of rollers sandwiches a part of the scribing wheel.
A scribing tool characterized by that. The scribing tool according to claim 1 or 2,
The holder is made of a magnetic material, and an inclined surface is formed by obliquely notching a side surface of a cylinder.
A scribing tool characterized by that. The scribing tool according to claim 3,
The first groove and the second groove are formed in communication with two side surfaces of the holder;
The inclined surface is provided on one side surface of the two side surfaces where the first groove and the second groove communicate with each other;
The scribing wheel and the pair of rollers are formed such that the scribing wheel is closer to the side surface on which the inclined surface is formed than the pair of rollers.
A scribing tool characterized by that. The scribing tool according to claim 3,
The first groove and the second groove are formed in communication with two side surfaces of the holder;
The inclined surface is provided on one side surface of the two side surfaces where the first groove and the second groove communicate with each other;
The scribing wheel and the pair of rollers are formed such that the pair of rollers is closer to the side surface on which the inclined surface is formed than the scribing wheel.
A scribing tool characterized by that. The scribing tool according to any one of claims 1 to 5,
The predetermined distance is set to 0.5 mm or more.
A scribing tool characterized by that. The scribing tool according to any one of claims 1 to 6,
The scribing wheel has a V-shaped cutting edge formed on the outer periphery of the disc and is formed with grooves at predetermined intervals on the ridge line of the cutting edge.
A scribing tool characterized by that.