JP2016011877A5 - - Google Patents

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Publication number
JP2016011877A5
JP2016011877A5 JP2014133268A JP2014133268A JP2016011877A5 JP 2016011877 A5 JP2016011877 A5 JP 2016011877A5 JP 2014133268 A JP2014133268 A JP 2014133268A JP 2014133268 A JP2014133268 A JP 2014133268A JP 2016011877 A5 JP2016011877 A5 JP 2016011877A5
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JP
Japan
Prior art keywords
current
voltage drop
current value
resistor
electric resistor
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JP2014133268A
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English (en)
Japanese (ja)
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JP6261463B2 (ja
JP2016011877A (ja
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Priority to JP2014133268A priority Critical patent/JP6261463B2/ja
Priority claimed from JP2014133268A external-priority patent/JP6261463B2/ja
Priority to US14/733,327 priority patent/US9970838B2/en
Publication of JP2016011877A publication Critical patent/JP2016011877A/ja
Publication of JP2016011877A5 publication Critical patent/JP2016011877A5/ja
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Publication of JP6261463B2 publication Critical patent/JP6261463B2/ja
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JP2014133268A 2014-06-27 2014-06-27 圧力測定装置および圧力測定方法 Active JP6261463B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014133268A JP6261463B2 (ja) 2014-06-27 2014-06-27 圧力測定装置および圧力測定方法
US14/733,327 US9970838B2 (en) 2014-06-27 2015-06-08 Pressure measuring device and pressure measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014133268A JP6261463B2 (ja) 2014-06-27 2014-06-27 圧力測定装置および圧力測定方法

Publications (3)

Publication Number Publication Date
JP2016011877A JP2016011877A (ja) 2016-01-21
JP2016011877A5 true JP2016011877A5 (cg-RX-API-DMAC7.html) 2017-04-13
JP6261463B2 JP6261463B2 (ja) 2018-01-17

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ID=54930172

Family Applications (1)

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JP2014133268A Active JP6261463B2 (ja) 2014-06-27 2014-06-27 圧力測定装置および圧力測定方法

Country Status (2)

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US (1) US9970838B2 (cg-RX-API-DMAC7.html)
JP (1) JP6261463B2 (cg-RX-API-DMAC7.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6819163B2 (ja) * 2016-09-12 2021-01-27 株式会社デンソーウェーブ 絶縁型信号伝達装置、電子機器
US10845263B2 (en) 2018-04-17 2020-11-24 Mks Instruments, Inc. Thermal conductivity gauge
JP6609728B1 (ja) * 2018-12-12 2019-11-20 株式会社アルバック 圧力測定システム
CN111721469A (zh) * 2020-06-17 2020-09-29 中国计量大学 一种高灵敏度微型皮拉尼计
EP4244590A1 (en) 2020-11-16 2023-09-20 MKS Instruments, Inc. Thermal conductivity gauge
US12123794B2 (en) 2022-10-11 2024-10-22 Mks Instruments, Inc. Pirani gauge with model of power dissipation
CN116007831B (zh) * 2022-12-24 2024-04-16 兰州空间技术物理研究所 一种复合式mems真空规及其制作方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61240135A (ja) * 1985-04-17 1986-10-25 Yamatake Honeywell Co Ltd 真空計
US4866640A (en) * 1987-08-20 1989-09-12 Granville-Phillips Company Temperature compensation for pressure gauge
JPH08285582A (ja) * 1995-04-11 1996-11-01 Yupiteru Ind Co Ltd 高度計及びそれを用いた高度補正方法
JP2006153782A (ja) * 2004-11-30 2006-06-15 Mitsuteru Kimura 多孔蓋を有した気体センシングデバイス
EP1772717B1 (en) * 2005-10-04 2011-05-11 Sensirion Holding AG Pressure or gas sensor and sensing method using nano-cavities
JP4994058B2 (ja) * 2007-02-27 2012-08-08 株式会社アルバック 圧力測定装置および圧力測定方法
EP2237009A4 (en) * 2008-01-31 2013-01-16 Ritsumeikan Trust MICRO VACUUM GAUGE
JP5463361B2 (ja) * 2009-09-15 2014-04-09 キヤノンアネルバ株式会社 平均自由行程を測定する装置および真空容器
US8504313B2 (en) * 2010-03-22 2013-08-06 Dennis Cardinale Electronic vacuum gauge and systems and methods of calibration and operation of same
WO2014057536A1 (ja) * 2012-10-10 2014-04-17 株式会社岡野製作所 圧力センサおよび該センサを用いた真空加工装置

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